EP2748834A1 - Röntgenröhre mit beheizbarem feldemissions-elektronenemitter und betriebsverfahren dafür - Google Patents

Röntgenröhre mit beheizbarem feldemissions-elektronenemitter und betriebsverfahren dafür

Info

Publication number
EP2748834A1
EP2748834A1 EP12812366.8A EP12812366A EP2748834A1 EP 2748834 A1 EP2748834 A1 EP 2748834A1 EP 12812366 A EP12812366 A EP 12812366A EP 2748834 A1 EP2748834 A1 EP 2748834A1
Authority
EP
European Patent Office
Prior art keywords
electron emission
emission surface
ray tube
electron
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12812366.8A
Other languages
English (en)
French (fr)
Inventor
Anand Kumar DOKANIA
Gereon Vogtmeier
Peter Klaus Bachmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips GmbH
Koninklijke Philips NV
Original Assignee
Philips Deutschland GmbH
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Deutschland GmbH, Koninklijke Philips Electronics NV filed Critical Philips Deutschland GmbH
Publication of EP2748834A1 publication Critical patent/EP2748834A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06Cathodes
    • H01J35/065Field emission, photo emission or secondary emission cathodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30469Carbon nanotubes (CNTs)
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/902Specified use of nanostructure
    • Y10S977/932Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/939Electron emitter, e.g. spindt emitter tip coated with nanoparticles

Definitions

  • the present invention relates to an X-ray tube, to a medical X-ray device comprising such X-ray tube and to a method of operating such X-ray tube.
  • X-ray radiography equipment may be used for various medical, analytical or other applications.
  • an X-ray tube may be used to emit X-rays for transmission through an object to be analyzed, wherein the transmitted X-rays are subsequently detected and characteristics of the analyzed object may be derived from the detected X-ray absorption.
  • a high current combined with a small focal spot of an electron beam may be desired for high spatial resolution.
  • high temporal resolution may be desired which, inter alia, may depend on a switching time of an X-ray source used for acquiring the images.
  • electrons are emitted from a cathode serving as an electron emitter and are accelerated by an electrical field towards an anode.
  • hot cathodes are used for thermionic electron emission, wherein the cathode is heated up to very elevated temperatures such that the energy of electrons in the cathode may exceed the work function of the material used for the cathode such that electrons may escape from the surface of the hot cathode and the freed electrons may then be accelerated towards an anode.
  • Electron emitters using the field emission effect seem to meet the above spatial and temporal resolution requirements and have the potential to be an ideal electron source for next generation X-ray tubes.
  • WO 2010/131209 Al describes an X-ray source with a plurality of electron emitters using field emission.
  • field emission of electrons may depend on a variety of parameters which may result in non-stable electron emission.
  • an X-ray tube which comprises an electron emitter, a field generator and a heater arrangement.
  • the electron emitter comprises a substrate with an electron emission surface. This surface has a roughness which is adapted for field emission of electrons from this surface upon application of an electrical field.
  • the field generator is adapted for generating an electrical field adjacent to the electron emission surface of the electron emitter for inducing field emission of electrons from the electron emission surface.
  • the heater arrangement is adapted for heating the electron emission surface contemporaneous with the field emission of electrons.
  • a method of operating an X-ray tube as defined above with respect to the first aspect comprises generating an electrical field adjacent to the electron emission surface for inducing field emission therefrom and, preferably simultaneously therewith, supplying energy to the heater arrangement for heating the electron emission surface.
  • the energy may be supplied to the heater arrangement prior to the generation of the electrical field for preconditioning the electron emission surface.
  • the electron emission surface of the electron emitter may comprise carbon nano-tubes (CNT).
  • CNT carbon nano-tubes
  • Such carbon nano-tubes may be coated onto a surface of the electron emitter substrate and may provide for an electron emission surface having a high roughness as the carbon nano-tubes may have a diameter of only a few nanometers but a length which is much longer such that a plurality of nano-tubes may protrude from the electron emission surface like needles thereby supporting electron emission due to a field effect.
  • the carbon nano-tubes may be coated directly onto a surface of the electron emitter substrate. No intermediate layer and/or binder may be used for attaching the carbon nano-tubes to the electron emitter substrate's surface.
  • the electron emission surface may be heated to an elevated temperature of more than 100°C but less than an upper temperature limit at which the thermionic electron emission becomes greater than 10 % of the total electron emission or greater than 10 % of the field induced electron emission.
  • the heater arrangement may be adapted for heating the electron emission surface to a temperature of between 100 and 1000 degree Celsius (°C), preferably between 200 and 900°C. Heating the electron emission surface to such elevated temperatures of well above ambient temperature but preferable well below a temperature where substantial thermionic electron emission occurs has been observed to provide for stable electron emission characteristics when the field effect is used for electron emission.
  • the heating of the electron emission surface should be significantly below a temperature at which substantial thermal electron emission occurs as the heating only further optimizes the field emission.
  • the elevated temperature to which the electron emission surface is heated should remain below a temperature where the thermionic emission from the electron emission surface or the CNTs is significant. Preferably, such thermionic emission remains below 10% of the total emission.
  • the heater arrangement may be any arrangement adapted for directly or indirectly heating the electron emission surface of the electron emitter substrate. Any type of heating mechanism may be applied. For example, radiation heating using e.g. an infrared light source or a laser may be used for heating the electron emission surface. Alternatively, heat transport through a medium such as e.g. a channel or medium carrying heated liquid may be applied.
  • the heater arrangement may use Joule heating, sometimes also referred to as resistive heating.
  • the heater arrangement may comprise a resistive element arranged at the electron emitter substrate for heating the electron emission surface upon application of an electrical current to the resistive element.
  • a heater arrangement using Joule heating by arranging e. g. an electrically resistive element in thermal contact with the electron emission surface may allow for a simple option for heating this surface to elevated temperatures.
  • the X-ray tube may comprise a heater arrangement control which may be adapted for controlling an energy supply to the heater arrangement of the electron emitter for heating the electron emission surface to a predefined temperature.
  • the heater arrangement may comprise a sensor for measuring the actual temperature of the electron emission surface such that based on such information the heater arrangement may be controlled to heat and hold the electron emission surface within a predetermined temperature range of e. g. in an average temperature +/- an acceptable temperature deviation of e. g. 50°C. Keeping the temperature of the electron emission surface in such predefined temperature range may help stabilizing electron emission characteristics.
  • the heater arrangement control may be adapted for controlling an electrical current supplied to a resistive element provided at the electron emitter substrate for heating the electron emission surface. Such supplying of an electrical current may be easily controlled thereby obtaining a stabilized elevated temperature of the electron emission surface.
  • the field generator of the proposed X-ray tube may comprise an electrically conductive grid. This grid may be arranged adjacent to the electron emission surface.
  • the field generator may comprise electrical connections to the electron emission surface and to the grid such that a voltage generated in the field generator may be applied to these components thereby generating an electrical field between the electron emission surface and the grid. Due to such electrical field, electrons may be released from sharp tips comprised in the rough electron emission surface due to the field effect.
  • the grid may furthermore be adapted such that these released electrons emitted from the electron emission surface may be transmitted through the grid towards an anode of the X-ray tube .
  • a medical X-ray device comprising an embodiment of the proposed X-ray tube may be any type of X-ray radiography equipment, for example a computer tomography (CT) device.
  • CT computer tomography
  • Fig 1 shows an X-ray tube according to an embodiment of the present invention.
  • Figure 1 shows an embodiment of an X-ray tube 1 according to an embodiment of the present invention.
  • an electron emitter 3 and a rotating anode 29 are arranged.
  • the electron emitter 3 comprises an electron emitter substrate 4.
  • an electron emission surface 5 is provided by coating this surface with a multiplicity of carbon nano-tubes 19.
  • Carbon nano-tubes are allotropes of carbon, typically with a cylindrical nano-structure.
  • the length of the nano-tubes may be significantly larger than their diameters.
  • the nano-tubes 19 are arranged on the electron emission surface 5 such as to produce a very rough surface in which at least some of the nano-tubes 19 protrude towards the anode 29 like thin needles. Tips of the nano-tubes 19 may serve as a source for emitting electrons due to field emission as at such tips an electrical field generated adjacent to the electron emission surface may be locally concentrated and may have locally elevated field strength. Due to such elevated field strength, electrons comprised in the nano-tubes may be released at such tips. Therein, the nano-tubes may have metallic or semi-conducting characteristics, depending on their specific properties like rolling angle and radius of the nano- tubes.
  • the electrical field may be generated using an electrically conducting grid 9 arranged adjacent to the electron emission surface 5.
  • a field generator control 23 comprised in a control 11 of the X-ray tube 1 may be electrically connected to both the electron emission surface 5 and the grid 11 such that a voltage of e.g. 2kV may be applied between these components.
  • the resulting electric field may have sufficient strength for releasing electrons from the nano-tube's tips due to field emission.
  • Electrons released from the electron emission surface 5 and forming an electron beam 35 may then be focused by an electron optics arrangement 21 controlled by an electron optics arrangement control 23 and may impinge onto the rotating anode 29 at a focal point 39.
  • an X-ray beam 37 is generated as Bremsstrahlung. This X-ray beam 37 can exit the housing 31 through an X-ray transparent window 33.
  • contaminations or adsorbents to the carbon nano-tubes may alter their electrical and/or geometrical properties thereby also altering electron emission characteristics.
  • an organic binder has frequently been used for binding the carbon nano-tubes to a surface of a substrate.
  • organic binder may outgas in the vacuum conditions within the X-ray tube 1 which outgasing may be detrimental to the vacuum and/or the electron emission characteristics.
  • heating the carbon nano-tubes of the electron emission surface 5 to elevated temperatures well above the temperatures typically occurring in field emission emitters of conventional X-ray tubes may stabilize the electron emission characteristics of the electron emitter. Such heating procedure may be performed
  • the heating procedure may precede the normal electron emission operation of the electron emitter 3 and may serve for preconditioning the X-ray tube 1.
  • the heating of the electron emission surface 5 may be performed such that temperatures of between 200 and 900°C, preferably between 400°C and 900°C, are attained at the electron emission surface 5. Such temperatures are well above the ambient temperature or the temperature at which the electron emitter 3 would be without any additional heating. On the other side, the upper limit of the temperature range is well below typical temperatures used in thermionic emitters. In other words, while additional kinetic energy may be provided to electrons comprised in the carbon nano-tubes of the electron emission surface due to the elevated temperature, an upper limit for the temperature may be chosen such that this additional energy is still well below the work function energy of the material of the electron emission surface, i. e. for example of the carbon nano-tubes, such that no substantial flow of released electrons occurs due to thermionic emission.
  • the electron emitter 3 operates as a field effect electron emitter such that a flow of released electrons may be controlled by controlling the electrical field generated between the grid 9 and the electron emission surface 5.
  • an electron beam emitted towards the anode 29 may be varied and may for example be switched ON and OFF, thereby also enabling varying of the X- ray beam 37.
  • a heater arrangement 15 is provided for the X-ray tube 1. While, in general, any heater arrangement enabling heating the electron emission surface 5 to the required elevated temperatures may be used, a specific type of heater arrangement 15 shall be described in the following in more detail. However, it shall be noted that other types of direct or indirect heater arrangements relying for example on resistive heating, radiation heating, conduction heating, induction heating or similar may be used.
  • a resistive element 17 is comprised in the substrate 4 of the electron emitter 3. Such resistive element 17 may form a part of the substrate 4 or may form the entire substrate 4.
  • the resistive element may have an electrical resistance such that upon applying an electrical voltage and thereby inducing an electrical current, Joule heat is generated within the resistive element 17 and is transferred to the electron emission surface 5.
  • the resistive element 17 may be electrically connected via lines with an energy source of the heater arrangement control 23 for controUably supplying electrical energy to the resistive element 17.
  • the heater arrangement control 23 may be adapted for controlling an electrical current supplied to the resistive element 17 such that the electron emission surface 5 is heated to a temperature within a predefined temperature range, for example to a temperature of 850°C +/- 50°C. Keeping the temperature of the electron emission surface 5 in such a temperature range may for example prevent contamination of the carbon nano-tubes of the electron emission surface 5 and may furthermore lower the work function necessary for releasing electrons from the carbon nano-tubes due to the field effect. As a result, the emission of electrons from the electron emission surface 5 may be stabilized.
  • the heater arrangement control 23 may be part of a general control 11 of the X-ray tube 1 comprised externally or internally within the X-ray tube 1 and further comprising a field generator control 25 for controlling the electrical voltage applied to the electrodes of the field generator 7 and further comprising an electron optics control 27 for controlling the electron optics 21.

Landscapes

  • X-Ray Techniques (AREA)
EP12812366.8A 2011-11-28 2012-11-14 Röntgenröhre mit beheizbarem feldemissions-elektronenemitter und betriebsverfahren dafür Withdrawn EP2748834A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161563870P 2011-11-28 2011-11-28
PCT/IB2012/056417 WO2013080074A1 (en) 2011-11-28 2012-11-14 X-ray tube with heatable field emission electron emitter and method for operating same

Publications (1)

Publication Number Publication Date
EP2748834A1 true EP2748834A1 (de) 2014-07-02

Family

ID=47520185

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12812366.8A Withdrawn EP2748834A1 (de) 2011-11-28 2012-11-14 Röntgenröhre mit beheizbarem feldemissions-elektronenemitter und betriebsverfahren dafür

Country Status (8)

Country Link
US (1) US20140321619A1 (de)
EP (1) EP2748834A1 (de)
JP (1) JP2015504583A (de)
CN (1) CN103959422A (de)
BR (1) BR112014012484A2 (de)
IN (1) IN2014CN03833A (de)
RU (1) RU2014126428A (de)
WO (1) WO2013080074A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2939138C (en) * 2014-02-10 2022-05-03 Luxbright Ab An x-ray device configured to operate in schottky emission mode, and electron emitter
JP6980740B2 (ja) * 2015-02-10 2021-12-15 ルクスブライト・アーベー X線デバイス
CN106298409B (zh) * 2016-09-14 2019-05-03 中山大学 采用温度敏感的纳米线冷阴极的平板x射线源及制备方法
CN107195517A (zh) * 2017-06-02 2017-09-22 重庆涌阳光电有限公司 具有高真空的场发射x射线管
EP3518266A1 (de) 2018-01-30 2019-07-31 Siemens Healthcare GmbH Thermionische emissionsvorrichtung
WO2019191801A1 (en) * 2018-04-06 2019-10-10 Micro-X Limited Large scale stable field emitter for high current applications
RU2761107C1 (ru) * 2021-04-01 2021-12-06 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") Электронная пушка свч прибора

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050200261A1 (en) * 2000-12-08 2005-09-15 Nano-Proprietary, Inc. Low work function cathode

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1196892A (ja) * 1997-09-17 1999-04-09 Nec Corp フィールドエミッタ
EP0905737B1 (de) * 1997-09-30 2004-04-28 Noritake Co., Ltd. Elektronen emittierende Quelle
JP2001250496A (ja) * 2000-03-06 2001-09-14 Rigaku Corp X線発生装置
US7085351B2 (en) * 2000-10-06 2006-08-01 University Of North Carolina At Chapel Hill Method and apparatus for controlling electron beam current
JP3810656B2 (ja) * 2001-07-23 2006-08-16 株式会社神戸製鋼所 微小x線源
JP2007087676A (ja) * 2005-09-21 2007-04-05 Hitachi High-Technologies Corp 電界放出型電子銃およびそれを用いた電子ビーム装置
CN1949449B (zh) * 2005-10-14 2010-09-29 北京富纳特创新科技有限公司 电子发射器件
US7825591B2 (en) * 2006-02-15 2010-11-02 Panasonic Corporation Mesh structure and field-emission electron source apparatus using the same
JP2008047309A (ja) * 2006-08-11 2008-02-28 Hitachi High-Technologies Corp 電界放出型電子銃、およびその運転方法
JP5580288B2 (ja) * 2008-04-17 2014-08-27 コーニンクレッカ フィリップス エヌ ヴェ パッシブイオン集電極を持つx線管
CN101419887A (zh) * 2008-09-08 2009-04-29 中山大学 一种快速响应的场发射冷阴极电子源结构
WO2010131209A1 (en) * 2009-05-12 2010-11-18 Koninklijke Philips Electronics N.V. X-ray source with a plurality of electron emitters

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050200261A1 (en) * 2000-12-08 2005-09-15 Nano-Proprietary, Inc. Low work function cathode

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2013080074A1 *

Also Published As

Publication number Publication date
CN103959422A (zh) 2014-07-30
BR112014012484A2 (pt) 2017-06-06
WO2013080074A1 (en) 2013-06-06
JP2015504583A (ja) 2015-02-12
US20140321619A1 (en) 2014-10-30
RU2014126428A (ru) 2016-01-27
IN2014CN03833A (de) 2015-07-03

Similar Documents

Publication Publication Date Title
US20140321619A1 (en) X-ray tube with heatable field emission electron emitter and method for operating same
Parmee et al. X-ray generation using carbon nanotubes
KR102313234B1 (ko) X-선 장치
Calderón-Colón et al. A carbon nanotube field emission cathode with high current density and long-term stability
Heo et al. A vacuum-sealed miniature X-ray tube based on carbon nanotube field emitters
Jeong et al. A vacuum-sealed compact x-ray tube based on focused carbon nanotube field-emission electrons
JP5719162B2 (ja) X線管陰極アセンブリシステム及び、x線管システム
JP5294653B2 (ja) マルチx線発生装置及びx線撮影装置
KR101101300B1 (ko) 음극부 교체가 용이한 치과 진단 및 구강암 치료용 엑스선관 시스템 및 그 방법
US7388944B2 (en) Device for generation of x-ray radiation with a cold electron source
US20140140486A1 (en) Radiation generating apparatus and radiation imaging apparatus
US7778391B2 (en) Field emission cathode and x-ray tube embodying same
JP5099756B2 (ja) 電子線発生装置およびその制御方法
KR20030074605A (ko) 전자 필드 방출 캐소드를 이용한 엑스-선 발생 메카니즘
Kim et al. Small-sized flat-tip CNT emitters for miniaturized X-ray tubes
US9202663B2 (en) Flat filament for an X-ray tube, and an X-ray tube
JP2019519900A (ja) X線の生成に使用するためのカソードアセンブリ
JP5787556B2 (ja) X線発生装置及びx線撮影装置
JP5036376B2 (ja) 電子線照射装置
Choi et al. Development of new X-ray source based on carbon nanotube field emission and application to the non destructive imaging technology
JP5661368B2 (ja) X線発生装置
JP6980740B2 (ja) X線デバイス
JP2005166565A (ja) 陰極、x線発生装置及びx線発生方法
JP2004095311A (ja) 電子線発生装置
JP2015011871A (ja) フィラメントの調整方法およびx線管装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20140325

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20150814

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20160917