EP2737288A1 - Spectromètre à foyer commun et procédé d'imagerie dans un spectromètre à foyer commun - Google Patents

Spectromètre à foyer commun et procédé d'imagerie dans un spectromètre à foyer commun

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Publication number
EP2737288A1
EP2737288A1 EP12769615.1A EP12769615A EP2737288A1 EP 2737288 A1 EP2737288 A1 EP 2737288A1 EP 12769615 A EP12769615 A EP 12769615A EP 2737288 A1 EP2737288 A1 EP 2737288A1
Authority
EP
European Patent Office
Prior art keywords
light
light source
spectrometer
gap
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12769615.1A
Other languages
German (de)
English (en)
Inventor
Anton Schick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2737288A1 publication Critical patent/EP2737288A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/425—Reflectance

Definitions

  • the present invention relates to a confocal Spektrome ⁇ ter and a method for imaging in a confocal spectrometer.
  • Confocal spectrometers work on the basis of optical systems, which have a common focus. As a result, a spatially pointwise measurement of scattered light can be made on an object to be imaged.
  • Previous single-channel spectrometers generally use a line scan camera to record the spectrum for a channel. Therefore, it is only possible by rasterization of the object surface, that is, to capture a spatially resolved image of the object over a temporal scan.
  • Multi-channel spectrometers use a camera chip for the cell-like scanning of a surface, with a spectral resolution on the camera chip in a direction perpendicular to the spatial resolution.
  • Such systems are also known as so-called hyperspectral imaging systems ("hyperspectral imaging").
  • hyperspectral imaging Even with these systems, a rasterization of the object surface for imaging the object is necessary.
  • Document EP 1 984 770 B1 discloses a confocal spectroscopy system wherein a coding of a profile of an object takes place via the spectral profile of a polychromatic light source.
  • an imaging optical system is used with chronic matic aberration to witness a wavelength dependent position of the mapping focus along the optical axis to he ⁇ .
  • Document DE 697 300 30 T2 discloses a confocal spectroscopic imaging system in which modulator means are used for imaging an illumination pattern onto an object to be imaged so that a spatial resolution of the object is possible via the illumination pattern sequence.
  • Spectrum of the reflected or scattered light to produce an image contrast provides.
  • One aspect of the present invention to a confocal spectrometer with a broadband light source, arranged in front of the light source first mask device with a first gap grid of a main splitting direction which is adapted to a gap-shaped Mus ⁇ ter the light source to generate a first Ab Struktursop- tik, which is designed to focus the slit-shaped pattern of the light source on an object to be imaged, and a detector system, which has a detector device which is adapted to the reflected from the object
  • a second imaging optical system which is designed to focus the reflected light onto the detector device , and a dispersion element which is arranged in front of the second imaging optical system, and which is designed to spectrally disperse the light reflected by the object along a dispersion axis perpendicular to the optical axis of the second imaging optics.
  • An essential idea of the invention is to provide a complete spatial resolution simultaneously with a complete spectral resolution of the image of an object in one
  • the confocal technique is used with an imaging diaphragm device, wherein the Aperture device has a gap pattern, which projects a split screen on the entire object. If the reflected by the projected slit raster of the object kon ⁇ focal is imaged onto a detector device, a spectral resolution in the interstices of the slit grid can be done. This allows a spectrally dispersive element that reflected light can be spectrally resolved in the map depending ⁇ twisted gap spaces.
  • the detector system may further comprise a second aperture device having a second gap grid of the main gap direction of the first gap grid, which is arranged between the dispersion element and the Detektorein ⁇ direction, and which is adapted to a spectral selection of the incident on the detector means reflected light to meet.
  • the second diaphragm device can be displaceable along the dispersion axis direction. This advantageously allows the mecha ⁇ African selecting a wavelength of reflected light to be imaged.
  • the second gap may scanning a plurality of first columns, which are offset in relation to the columns of the first gap grid to a first relieve ⁇ agreed distance perpendicular to the main cleavage direction, and a plurality of second columns comprise what to in relation the columns of the first gap grid are offset by a different distance from the first second predetermined Dis ⁇ dance perpendicular to the main cleavage direction.
  • the first diaphragm device may comprise a multiplicity of cylindrical lenses which are designed to image light from the light source onto the gaps of the first slotted screen. This offers the advantage that the light intensity of the light source can be maximally exploited, since almost all the light of the light source can be collimated onto the gap grid.
  • the spectrometer may further comprise a beam splitter element, which in the
  • Beam path of the first imaging optics is arranged, and which is adapted to direct the reflected light of the object from the ⁇ beam path of the first imaging optics in the detector system.
  • the dispersion element may comprise a prism, a diffraction grating, an interference filter or an acousto-optic modulator.
  • the detector device may comprise a CCD sensor array, a CMOS sensor array or an avalanche photodiode array.
  • the detec tor driving ⁇ be designed to spectrally resolve reflected pixels of the object along an array axis. This is particularly advantageous because individual image pixels of the Ob ⁇ jekts can be mapped to a respective sub-array of pixels of the array of the detector device.
  • the light source may be a white light source.
  • each spectral component is equally available for detection in the reflected light spectrum at any time during imaging. In particular, can thereby be construed simultaneously ER- different Wel ⁇ lendorfn of the reflected light spectrum.
  • the present invention provides in another aspect a method for imaging in a confocal spectrometer ter, comprising the steps of mapping a broadband light source to a first diaphragm device with a ers ⁇ th gap grid of a main gap direction for generating a gap pattern of focusing the gap pattern on a ERS-forming property, the spectral dispersion of the light reflected by the object light along a dispersion axis that is perpendicular to the main cleavage direction, the focus ⁇ Sierens of the spectrally dispersed reflected light onto a detector means, and detecting the reflected light in the detector means for Generating a spectrally resolved image of the object.
  • the method may further comprise the step of focusing the spectrally dispersed reflected light onto a second aperture device having a second cleavage pattern of the main cleavage direction of the first cleavage frame disposed in front of the detector device.
  • the method may include the step of shifting the second aperture device along the dispersion axis direction to select the wavelength of the detected light. As a result, different wavelengths of the reflected light spectrum can be selectively selected during the spectroscopic recording for detection. Further modifications and variations will be apparent from the features of the dependent claims.
  • FIG. 1 is a schematic representation of a confocal
  • a spectrometer according to one aspect of the invention.
  • FIG. 2 shows a schematic illustration of a diaphragm device of a confocal spectrometer according to a further aspect of the invention
  • Fig. 3 is a schematic representation of an image of a
  • Figure 4 is a schematic representation of a shutter device of a confocal spectrometer according to a white ⁇ more advanced aspect of the invention.
  • Fig. 5 is a schematic representation of an image of a
  • Figure 6 is a schematic representation of a shutter device of a confocal spectrometer according to a white ⁇ more advanced aspect of the invention.
  • Fig. 7 is a schematic representation of a method for
  • FIG. 8 is a schematic representation of a confocal
  • FIG. 9 shows a schematic illustration of a diaphragm device of a confocal spectrometer
  • Fig. 10 is a schematic representation of a confocal
  • FIG. 11 is a schematic representation of a method for
  • Imaging in a confocal spectrometer shows.
  • the spectrometer 100 comprises an image training system 1, which is adapted to focus on a Sieren to spectroscopy rendes object 16 light from a light source ⁇ . 11
  • the spectrometer 100 further comprises a detector system 2, which is designed to detect light scattered and / or reflected by the object 16 and to generate therefrom an image of the object 16.
  • the imaging system 1 comprises a light source 11.
  • Light source 11 may be a broadband or polychromatic see light source 11, that is, a light source 11 emits the light over a wide frequency or wavelength range.
  • the light source 11 may be a white ⁇ light source, a globar, a Nernst lamp, a nickel-chromium Wendel, a halogen gas discharge lamp, a xenon gas discharge lamp, a superluminescent diode, an LED or a similar polychromatic light source.
  • the spectral wavelength range which the emission spectrum of the light source 11 comprises can be in the UV range, in the range of visible light and / or in the infrared range.
  • the light emitted by the light source 11 can be collimated via a lens 12 to a parallel beam and directed to a first aperture device 14.
  • the first diaphragm device 14 may have a slit-shaped or slot-shaped grid. An example of such a gap-shaped grid is schematically Darge provides ⁇ in Fig. 2.
  • the first diaphragm device 14 in FIG. 2 has a structure of passage slots 14 k .
  • the passage slots may be arranged in a slit pattern such that two adjacent passage gaps 14k and 14k + i are spaced by a lateral predetermined distance.
  • the number of passage gaps 14 k can be arbitrarily large.
  • the width of the passage gaps 14 k can be arbitrarily large.
  • the passage gaps 14k can have a County ⁇ ge, which may correspond to the length of the region on the object to be dissolved sixteenth It can be provided in the imaging system 1 that the collimated light is focused on cylindrical lenses 13a in a cylindrical lens arrangement 13 on the column of the slit raster 14 k of the first diaphragm device 14. It can be assigned to each one of the cylindrical lenses 13a each passage gap 14 k.
  • the cylindrical lens assembly 13 may be integrally connected to the first aperture device 14. Through the cylindrical lenses 13, a higher proportion of the light of the light source 11 for the projection of the
  • Spattrasters 14 k of the first aperture device 14 are used on the object 16.
  • the light passing through the first diaphragm device 14 can be focused onto the object 16 via a first imaging optical system 15.
  • the object 16 is illuminated on its surface on a focal point 16a by the light of the light source 11.
  • the illumination takes place in the pattern of the gap ⁇ structure of the first aperture device 14.
  • a tube optics 15a and 15j Obj ektivlinsenvor- direction can be used.
  • a beam splitter element may be disposed 15c, which may be at ⁇ game as a polarizing beam splitter, an interference filter or the like, an incident light beam dividing optical element.
  • the scattered or reflected light is directed into the detector system 2 via a beam path with an optical axis.
  • the detector system 2 has a spectrally dispersive element 21, which effects a spectral splitting of the broadband-reflected light of the object along a dispersion direction.
  • the dispersion direction axis D can be perpendicular to the optical axis A, so that the spectral ⁇ rale information of the scattered or reflected light along the dispersion direction axis D is resolved.
  • the Dispersion element 21 may comprise, for example, a prism, a diffraction grating, a holographic grating, a blaze grating, an acousto-optic modulator, an interference filter or the like.
  • the spectrally dispersed light can be focused on a second diaphragm device 23 via a focusing lens 22.
  • the second diaphragm device 23 can in particular have a slot grid similar to the first diaphragm device 14.
  • the spectrally dispersed light is imaged through the second aperture device 23 onto a detector device 24.
  • detector device 24 It may be possible to use a one-dimensional sensor array, for example a CCD, as detector device 24.
  • a one-dimensional sensor array for example a CCD, as detector device 24.
  • CMOS sensor array a CMOS sensor array, an avalanche photodiode array or a similar line array of photosensitive sensor elements
  • Can be the detecting means 24 can be moved in this case to the second diaphragm device 23 together along the dispersion direction of axis D, so that selected by the second diaphragm device 23 are each a portion of the spectrally dispersed light of the Dispersionsele ⁇ ments 21 and obtain ⁇ formed on the detector means 24 ,
  • a second aperture device 23 it may also be possible not to use a second aperture device 23.
  • a two-dimensional sensor array for example a CCD sensor array, a CMOS sensor array, an avalanche photodiode array or a similar planar matrix of photosensitive sensor elements can then be used as detector device 24.
  • each wavelength portion of the spectrally dispersed light along the array axis parallel to the dispersion direction axis D can be detected.
  • the spectrally dispersed light can be focused directly on the detector device 24 via the focusing lens 22.
  • An exemplary embodiment of such a detector device Fig. 24 is schematically illustrated in Fig. 3 for illustrative purposes.
  • FIG. 3 shows a detector device 24, which has an array 24a of detector pixels.
  • the detector pixels can grasp as to ⁇ for example, individual sensor elements of the array 24a ⁇ .
  • the beam grid 14 k of the first diaphragm device 14 is thereby confocal imaged onto the detector array 24 a. Since ⁇ at arises, for example, a beam pattern of Spaltabbil- fertilize 25 k -
  • the gap 25 shown pictures k respectively correspond to a specific wavelength of the reflected and spectrally dispersed light.
  • a pixel of the object 16 is in a subarray 26 k , n of the detector array 24 a to ⁇ forms.
  • a spatial resolution of the object 16 takes place in the vertical direction, while along an array axis S a spectral resolution can take place.
  • the neighboring pixel 26 k + i, n forms a pixel of the object 16 following the pixel 26 k , n in a lateral spatial direction, while the Neighboring pixels 26k, n + i, a pixel of the object 16 following the pixel 26k, n in the vertical spatial direction.
  • a spectral resolution of the respective image point of the object 16 can be done within each under Ar ⁇ rays because the spectrally dispersive element 21 causes a spectral splitting of the object image along the Dis ⁇ persions therapiessachse D, which can coincide for instance with the array axis S.
  • the selection of the range to be determined spectral of the reflected light k may, for example, via the electronic control of the lying respectively along the array axis S spectrally zugeord ⁇ Neten pixels within the sub-arrays 26, take place n.
  • a second diaphragm device 23 only one spectral portion of the spectrally dispersing ⁇ th light is respectively directed to the detector means 24 which the lateral offset of the second diaphragm device 23 along the dispersion direction axis D with respect to the position of the first diaphragm device 13 corresponds.
  • a lateral offset of the slit grid of the second diaphragm device 23 a spectral selection of the reflected light can be made so that only part of a two-dimensional detector device 24 is illuminated.
  • the second diaphragm device 23 may have a gap raster 23k, which may correspond to the gap raster of the first diaphragm device 14.
  • the second diaphragm device 23 can select a specific spectrally split part of the reflected light.
  • the displacement of the second diaphragm device 23 to different predetermined distances d the entire spectrum of GE ⁇ scattered or reflected light can along the array axis S of sub-arrays 26k, n of the detector array 24a shown ⁇ the.
  • Fig. 5 shows a schematic representation of a beispielhaf ⁇ th illustration of a spectral component of the image of the object 16.
  • a by a predetermined distance d with respect to the first mask device 14 laterally displaced diaphragm device 23 reflect a gap pattern 23k on the Detek- torarray 24a.
  • This gap pattern 23k is displaced with respect to the gap pattern 25k along the array axis S and at the same time forms another spectral range of the scattered or reflected light of the object on the detector array 24a.
  • n the Detektorein ⁇ direction 24 at the same time a spatial resolution of the object, that is, imaging, and carried out a spectral resolution of the object.
  • the spectral image acquisition can take place, for example, via a scanning lateral offset movement of the diaphragm device 23.
  • FIG. 6 shows a schematic illustration of a second diaphragm device 23 which, in addition to a first fissure grid 23 k, has a second gap grid 27 k , which is offset from the first fissure grid 23 k by a predetermined distance.
  • the number of gap height is, in Fig 6 only exemplary ones shown, two -. It can, in principle, any number of gap ⁇ rasterize be used to select a plurality of resolved wavelengths.
  • one-dimensional detector array 24a can be high Lichtempfind ⁇ friendliness, sets as Tan-, for example, avalanche photodiode arrays, since in any case only a predetermined gap area of the detector device 24 can be used for detecting the light from the object sixteenth
  • a conceivable application is the achievement of spectral contrast between benign tissue and tumor tissue in imaging tissue diagnostics.
  • FIG. 7 shows a schematic representation of a method 200 for imaging in a confocal spectrometer, in particular in a confocal spectrometer 100, as shown in FIG.
  • the method 200 includes, as a first step 201, mapping a broadband light source to a first aperture device having a first cleavage pattern of a main cleavage direction to produce a cleavage pattern.
  • the light source may be, for example, a white light source or a poly be a chromatic light source.
  • the imaging of the light source can take place in such a way that the light source is imaged onto the column of the first slit grid by means of a plurality of cylinder lenses assigned to the columns.
  • a spectral dispersion of the light reflected by the object takes place along a dispersion axis which is perpendicular to the main-gap direction.
  • the prospectus ⁇ rale dispersion can for example be performed using a prism, a diffraction grating, an interference filter, or an acousto-optic modulator.
  • the spectrally dispersed reflected light can be focused on a detector device.
  • a fifth step 205 the reflected light is detected to generate a spectrally resolved image of the object.
  • the detection of the reflected light can be carried out, for example, with a two-dimensional CCD sensor array, a CMOS sensor array or an avalanche photodiode array.
  • the re ⁇ inflected image points of the object can be resolved along an array axis spectrally.
  • a second diaphragm device to select the wavelength of the detected light, it may be possible to shift the second diaphragm device along the dispersion axis direction for selecting the wavelength of the detected light.
  • a one-dimensional sensor array for example a sensitive one-dimensional sensor array, can also be used as detector device.
  • Avalanche photodiode array can be used, which can be moved together with the second aperture device along the dispersion axis direction.
  • Fig. 8 shows a schematic representation of a confocal spectrometer 300.
  • the spectrometer 300 comprises a Abbil ⁇ training system 1, which is adapted to light of a
  • the spectrometer 300 further comprises a detector system 2, which is designed to detect light which is scattered and / or reflected by the object 16 and to generate therefrom an image of the object 16.
  • the imaging system 1 comprises a light source 11.
  • Light source 11 may be a broadband or polychromatic ⁇ cal light source 11, that is, a light source 11 emits the light over a wide frequency or wavelength range.
  • the light source 11 may be a white ⁇ light source, a globar, a Nernst lamp, a nickel-chromium Wendel, a halogen gas discharge lamp, a xenon gas discharge lamp, a superluminescent diode, an LED or a similar polychromatic light source.
  • the spectral wavelength range which the emission spectrum of the light source 11 comprises can be in the UV range, in the range of visible light and / or in the infrared range.
  • the light emitted by the light source 11 can be collimated via a lens 12 to a parallel beam and directed to a first aperture device 34.
  • the first diaphragm device 34 may have a structured arrangement of a multiplicity of through-holes, so-called pinholes. Is shown an example of such a struc tured ⁇ arrangement may be a Nipkow disc, such as by way of example in Fig. 9.
  • the first diaphragm device 34 in FIG. 9 is circular and has a structure of through-holes 35 k .
  • the Through holes 35k may be disposed along circular concentric paths 36k of different diameters so that two adjacent through holes 35k and 35k + i are spaced along the circumference of the first aperture 34 by a predetermined distance.
  • the number of through holes 35 k can be arbitrarily large.
  • each through hole 34 k may each be associated with one of the lenses 33 a.
  • the lens assembly 33 may be integrally connected to the first aperture device 34.
  • the light passing through the first diaphragm device 14 can be focused onto the object 16 via a first imaging optical system 15.
  • the object 16 is illuminated on its surface on a focal point 16a by the light of the light source 11.
  • the illumination takes place via a rotation of the first diaphragm device 34 over the entire field of view of the object 16.
  • a tube optic 15a and an objective lens device 15b can be used.
  • a beam splitter element may be disposed 15c, which may be at ⁇ game as a polarizing beam splitter, an interference filter or the like, an incident light beam dividing optical element.
  • the scattered or reflected light is directed via a beam path with an op ⁇ tables axis A in the detector system. 2
  • the detector system 2 has a spectrally dispersive element 41, which causes a spectral splitting of the broadband reflected light of the object along a dispersion ⁇ direction.
  • the dispersion direction axis D can be perpendicular to the optical axis A, so that the spectral ⁇ rale information of the scattered or reflected light along the dispersion direction axis D is resolved.
  • the dispersion element 41 may comprise, for example, a prism, a diffraction grating, a holographic grating, a blaze grating, an acousto-optic modulator, an interference filter or the like.
  • the spectrally dispersed light can se a sierlin- 22 to a second diaphragm device 43 focuses the ⁇ .
  • the second shutter device 43 can thereby insbesonde ⁇ re comprise a first shutter device 34 similar transit hole pattern 35 k.
  • the detector device 24 may for example comprise a two-dimensional CCD array, a CMOS sensor array, an avalanche photodiode array or a matrix similar to lichtempfind ⁇ union sensor elements.
  • the second diaphragm device 43 can rotate about an axis B, so that the rotation of the through-holes coincides with those of the through-holes 35 k of the first diaphragm device 34.
  • confocal reflected by the object 16 or confused with the first diaphragm device 43 can be imaged. This means that a Selection can be made, since only pixels on the object 16, which lie within the depth of focus of the focus point 16 gene ⁇ , can be imaged through the second aperture device 43 therethrough.
  • a lateral offset of the second diaphragm device 43 along this dispersion direction axis D to a spectral selection of the confocal detected light of the object 16 can take place.
  • a full lateral resolution of the object 16 at the same time a spectral resolution of the object 16 is possible by a lateral offset between the first diaphragm device 34 and the second diaphragm device 43 is adjusted with respect to the optical axis A.
  • a prism 41 can be rotated, or an acousto-optic modulator 41 can be driven accordingly.
  • FIG. 10 shows a schematic representation of another confocal spectrometer 400.
  • the spectrometer 400 in FIG. 10 essentially differs from the spectrometer 300 in FIG. 8 in that the first diaphragm device 34 is used as a common illumination and imaging device.
  • the first mask device 34 is an imaging optical system 45 is provided, 45e in the lerimplantation by Strahltei- 45a, 45b, 45c, 45d and 45f mirror elements and different beam paths of the incident and re ⁇ inflected light can be realized.
  • a polarizer 41 can be provided behind the lens 12, which linearly polarizes the light emitted by the light source 11. The incident light passes through
  • Beam splitters 45a and 45b rectilinear when these polarization-dependent beam splitters, for example s-polarizing Have beam splitter. Via the p-polarizing beam splitters 45c and 45d and the mirror elements 45e and 45f, the incident light is guided along the beam path W to the object. With the aid of a lambda / 4 plate 46, a phase rotation of the polarization can take place by 90 °.
  • the optical path lengths over the beam paths W and X can be identical.
  • a spectrally dispersive element 43 such as a prism, which causes a spectral splitting of the reflected or scattered light of the object.
  • a spectral selection of the reflected or scattered light can be made, which is guided via the diaphragm device 34 onto a beam splitter 42 and from there through a focusing lens 22 is directed onto the detector device 24.
  • FIG. 11 shows a schematic representation of a method 500 for imaging in a confocal spectrometer, in particular in a confocal spectrometer 300 or 400, as explained in connection with FIGS. 8 to 10.
  • a wide-band light source is imaged by a rotatable diaphragm device with a structured arrangement of a multiplicity of through-holes.
  • the light source may comprise a white light source or a polychromatic light source.
  • the rotatable diaphragm device may comprise, for example, a Nipkow disc.
  • the imaging of the light source may include imaging the light source onto the structured arrangement of the plurality of through holes by means of a multiplicity of lenses assigned to the through holes.
  • a spectral dispersants carried yawing of the object by the reflected light by using egg ⁇ nes dispersion element such as a prism, a diffraction grating, an interference filter or an acousto-optical modulator.
  • the spectrally dispersed reflected light is focused on a rotatable diaphragm device having a structured arrangement of a multiplicity of through holes.
  • the rotatable diaphragm device can be displaced perpendicular to the optical axis of the spectrometer for selecting the wavelength of the detected light.
  • the dispersion element may be displaced perpendicular to the optical axis of the spectrometer for selecting the wavelength of the detected light.
  • a fifth step 505 the reflected light passing through the rotatable diaphragm device is detected to produce a spectrally resolved image of the object.
  • Detecting the reflected light can be carried out with a CCD sensor array, a CMOS sensor array or an AVA lanche photodiode array so that the re ⁇ inflected image points of the object can be resolved along an array axis spectrally.
  • the invention relates to a confocal spectrometer with a broadband light source, one in front of the light source angeord ⁇ Neten first mask device with a first gap grid of a main splitting direction which is adapted to produce a slit-shaped pattern of the light source, a ers ⁇ th imaging optics, which adapted is to focus the cleavage pattern of the light source on an object to be imaged, and a detector system, which comprises a detector device which is adapted to detect the light reflected from the object for generating a spectrally resolved image of the object, a second imaging optics, which is adapted to focus the reflected light on the second aperture device, and a dispersion element, which is arranged in front of the second imaging optics, and

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un spectromètre à foyer commun doté d'une source de lumière à large bande, d'un premier dispositif à diaphragme disposé devant la source de lumière et comprenant un premier réseau de fentes d'une direction principale de fente, laquelle est configurée pour produire un motif en forme de fente de la source de lumière. Ledit spectromètre à foyer commun est également doté : d'une première optique d'imagerie, laquelle est configurée pour focaliser le motif en forme de fente de la source de lumière sur un objet à reproduire ; d'un système de détecteurs comprenant un dispositif détecteur, qui est configuré pour capter la lumière réfléchie par l'objet en vue de produire une image à résolution spectrale de l'objet ; d'une deuxième optique d'imagerie, laquelle est configurée pour focaliser la lumière réfléchie sur le dispositif détecteur ; et d'un élément de dispersion, lequel est disposé devant la deuxième optique d'imagerie et qui est configuré pour disperser spectralement la lumière réfléchie par l'objet le long d'un axe de dispersion, perpendiculairement à l'axe optique de la deuxième optique d'imagerie.
EP12769615.1A 2011-09-29 2012-09-06 Spectromètre à foyer commun et procédé d'imagerie dans un spectromètre à foyer commun Withdrawn EP2737288A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011083718A DE102011083718A1 (de) 2011-09-29 2011-09-29 Konfokales Spektrometer und Verfahren zur Bildgebung in einem konfokalen Spektrometer
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JP6084620B2 (ja) 2017-02-22
JP2014532173A (ja) 2014-12-04
US20140218731A1 (en) 2014-08-07
WO2013045250A1 (fr) 2013-04-04

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