EP2715139A4 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
EP2715139A4
EP2715139A4 EP12793624.3A EP12793624A EP2715139A4 EP 2715139 A4 EP2715139 A4 EP 2715139A4 EP 12793624 A EP12793624 A EP 12793624A EP 2715139 A4 EP2715139 A4 EP 2715139A4
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12793624.3A
Other languages
German (de)
French (fr)
Other versions
EP2715139B1 (en
EP2715139A1 (en
Inventor
Soichi Kudara
Yasuhiro Niimura
Masami Nagayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP2715139A1 publication Critical patent/EP2715139A1/en
Publication of EP2715139A4 publication Critical patent/EP2715139A4/en
Application granted granted Critical
Publication of EP2715139B1 publication Critical patent/EP2715139B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F04C13/007—Venting; Gas and vapour separation during pumping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/40—Pumps with means for venting areas other than the working chamber, e.g. bearings, gear chambers, shaft seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP12793624.3A 2011-06-02 2012-05-29 Vacuum pump Active EP2715139B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011123980A JP5677202B2 (en) 2011-06-02 2011-06-02 Vacuum pump
PCT/JP2012/064346 WO2012165645A1 (en) 2011-06-02 2012-05-29 Vacuum pump

Publications (3)

Publication Number Publication Date
EP2715139A1 EP2715139A1 (en) 2014-04-09
EP2715139A4 true EP2715139A4 (en) 2014-12-17
EP2715139B1 EP2715139B1 (en) 2018-01-10

Family

ID=47259490

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12793624.3A Active EP2715139B1 (en) 2011-06-02 2012-05-29 Vacuum pump

Country Status (7)

Country Link
US (1) US20140112815A1 (en)
EP (1) EP2715139B1 (en)
JP (1) JP5677202B2 (en)
KR (1) KR101760550B1 (en)
CN (1) CN103477080A (en)
TW (1) TWI554684B (en)
WO (1) WO2012165645A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9752571B2 (en) * 2012-07-03 2017-09-05 Brian J. O'Connor Multiple segment lobe pump
JP6608394B2 (en) * 2014-06-27 2019-11-20 アテリエ ビスク ソシエテ アノニム Vacuum pumping method and vacuum pump system
WO2017031807A1 (en) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Non-coaxial vacuum pump with multiple driving chambers
FR3065040B1 (en) * 2017-04-07 2019-06-21 Pfeiffer Vacuum PUMPING GROUP AND USE
DE202017003212U1 (en) * 2017-06-17 2018-09-18 Leybold Gmbh Multi-stage Roots pump
CN107084135A (en) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 A kind of dry-type spiral vacuum pump
KR102610994B1 (en) * 2019-06-19 2023-12-06 가시야마고교가부시끼가이샤 vacuum pump
FR3119209B1 (en) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Dry type vacuum pump and pump unit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010134427A1 (en) * 2009-05-20 2010-11-25 三菱重工業株式会社 Dry vacuum pump
WO2011019048A1 (en) * 2009-08-14 2011-02-17 株式会社アルバック Dry pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0733834B2 (en) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 Inner partial-flow reverse-flow cooling multistage three-leaf vacuum pump in which the outer peripheral temperature of the housing with built-in rotor is stabilized
JPH05296171A (en) * 1992-04-13 1993-11-09 Ulvac Japan Ltd Shaft seal mechanism for positive displacement vacuum pump without using sealing fluid
GB9708397D0 (en) * 1997-04-25 1997-06-18 Boc Group Plc Improvements in vacuum pumps
JP4007130B2 (en) 2002-09-10 2007-11-14 株式会社豊田自動織機 Vacuum pump
JP4232505B2 (en) * 2003-03-27 2009-03-04 アイシン精機株式会社 Vacuum pump
JP3991918B2 (en) * 2003-05-19 2007-10-17 株式会社豊田自動織機 Roots pump
JP2005105829A (en) 2003-09-26 2005-04-21 Aisin Seiki Co Ltd Dry pump
JP4767625B2 (en) * 2005-08-24 2011-09-07 樫山工業株式会社 Multi-stage Roots type pump
US8573956B2 (en) * 2008-10-10 2013-11-05 Ulvac, Inc. Multiple stage dry pump
CN201396281Y (en) * 2009-03-19 2010-02-03 孙成忠 Multistage three-blade Roots vacuum pump
JP5330896B2 (en) * 2009-05-20 2013-10-30 三菱重工業株式会社 Dry vacuum pump
JP5473400B2 (en) * 2009-05-20 2014-04-16 三菱重工業株式会社 Dry vacuum pump and sealing method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010134427A1 (en) * 2009-05-20 2010-11-25 三菱重工業株式会社 Dry vacuum pump
WO2011019048A1 (en) * 2009-08-14 2011-02-17 株式会社アルバック Dry pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2012165645A1 *

Also Published As

Publication number Publication date
WO2012165645A1 (en) 2012-12-06
EP2715139B1 (en) 2018-01-10
JP5677202B2 (en) 2015-02-25
EP2715139A1 (en) 2014-04-09
TW201307685A (en) 2013-02-16
US20140112815A1 (en) 2014-04-24
TWI554684B (en) 2016-10-21
CN103477080A (en) 2013-12-25
KR20140023958A (en) 2014-02-27
KR101760550B1 (en) 2017-07-21
JP2012251471A (en) 2012-12-20

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