EP2644900A3 - Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern sowie Verfahren zur Steuerung des Pumpensystems - Google Patents

Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern sowie Verfahren zur Steuerung des Pumpensystems Download PDF

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Publication number
EP2644900A3
EP2644900A3 EP13156718.2A EP13156718A EP2644900A3 EP 2644900 A3 EP2644900 A3 EP 2644900A3 EP 13156718 A EP13156718 A EP 13156718A EP 2644900 A3 EP2644900 A3 EP 2644900A3
Authority
EP
European Patent Office
Prior art keywords
pump system
controlling
chambers
gas
evacuating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13156718.2A
Other languages
English (en)
French (fr)
Other versions
EP2644900A2 (de
EP2644900B1 (de
Inventor
Thorsten Burggraf
Tobias Stoll
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2644900A2 publication Critical patent/EP2644900A2/de
Publication of EP2644900A3 publication Critical patent/EP2644900A3/de
Application granted granted Critical
Publication of EP2644900B1 publication Critical patent/EP2644900B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/08—Combinations of two or more pumps the pumps being of different types
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/009—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by bleeding, by passing or recycling fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0253—Surge control by throttling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0269—Surge control by changing flow path between different stages or between a plurality of compressors; load distribution between compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft ein Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern mit wenigstens drei Vakuumpumpen, wobei wenigstens zwei Vorpumpen und wenigstens eine Turbomolekularpumpe vorgesehen sind, wobei in wenigstens einer Verbindungsleitung zwischen den wenigstens zwei Vorpumpen wenigstens eine Querschnittsverengung zur Regelung des Gasstromes vorgesehen ist. Darüber hinaus betrifft die Erfindung ein Verfahren zur Steuerung des Pumpensystems. (Fig. 2).
EP13156718.2A 2012-03-30 2013-02-26 Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern sowie Verfahren zur Steuerung des Pumpensystems Active EP2644900B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012102761 2012-03-30
DE201210105951 DE102012105951A1 (de) 2012-03-30 2012-07-04 Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern sowie Verfahren zur Steuerung des Pumpensystems

Publications (3)

Publication Number Publication Date
EP2644900A2 EP2644900A2 (de) 2013-10-02
EP2644900A3 true EP2644900A3 (de) 2015-08-19
EP2644900B1 EP2644900B1 (de) 2017-12-27

Family

ID=47757425

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13156718.2A Active EP2644900B1 (de) 2012-03-30 2013-02-26 Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern sowie Verfahren zur Steuerung des Pumpensystems

Country Status (4)

Country Link
US (1) US20130259711A1 (de)
EP (1) EP2644900B1 (de)
JP (1) JP5695690B2 (de)
DE (1) DE102012105951A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10269537B2 (en) * 2013-12-16 2019-04-23 Varian Semiconductor Equipment Associates, Inc. Vacuum assembly for an ion implanter system
WO2015105832A1 (en) 2014-01-07 2015-07-16 Fluid Handling Llc Variable speed multi-pump application for providing energy saving by calculating and compensating for friction loss using speed reference
PL3040286T3 (pl) 2014-12-30 2017-06-30 Multivac Sepp Haggenmüller Se & Co. Kg Maszyna pakująca z zespołem pompy płynowej
US9368335B1 (en) * 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
DE202015004596U1 (de) * 2015-06-26 2015-09-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem
DE102017101202B4 (de) 2017-01-23 2021-11-18 VON ARDENNE Asset GmbH & Co. KG Verfahren und Vakuumanordnung
GB2572958C (en) 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
JP7037440B2 (ja) * 2018-06-01 2022-03-16 川崎重工業株式会社 機器ユニット
TWI684707B (zh) * 2019-02-27 2020-02-11 亞台富士精機股份有限公司 尾氣真空節能幫浦系統
GB2591814A (en) * 2020-02-10 2021-08-11 Edwards Vacuum Llc Housing for a vacuum pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
JPH0727089A (ja) * 1993-07-07 1995-01-27 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ装置
US20080063541A1 (en) * 2004-05-21 2008-03-13 Stones Ian D Pumping Arrangement
JP2008095504A (ja) * 2006-10-05 2008-04-24 Agilent Technol Inc 分析装置
JP2010167338A (ja) * 2009-01-20 2010-08-05 Renesas Electronics Corp 真空処理装置及び真空処理方法
US20100206407A1 (en) * 2003-10-15 2010-08-19 Von Ardenne Anlagentechnik Gmbh Sluice system for a vacuum facility

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823514B2 (ja) * 1978-11-24 1983-05-16 スズキ株式会社 真空熱処理炉における真空ポンプ装置
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
JP2003083248A (ja) * 2001-09-06 2003-03-19 Ebara Corp 真空排気システム
GB201005459D0 (en) 2010-03-31 2010-05-19 Edwards Ltd Vacuum pumping system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
JPH0727089A (ja) * 1993-07-07 1995-01-27 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ装置
US20100206407A1 (en) * 2003-10-15 2010-08-19 Von Ardenne Anlagentechnik Gmbh Sluice system for a vacuum facility
US20080063541A1 (en) * 2004-05-21 2008-03-13 Stones Ian D Pumping Arrangement
JP2008095504A (ja) * 2006-10-05 2008-04-24 Agilent Technol Inc 分析装置
JP2010167338A (ja) * 2009-01-20 2010-08-05 Renesas Electronics Corp 真空処理装置及び真空処理方法

Also Published As

Publication number Publication date
EP2644900A2 (de) 2013-10-02
US20130259711A1 (en) 2013-10-03
JP2013213498A (ja) 2013-10-17
JP5695690B2 (ja) 2015-04-08
DE102012105951A1 (de) 2013-10-02
EP2644900B1 (de) 2017-12-27

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