EP2565463A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2565463A3
EP2565463A3 EP12180536.0A EP12180536A EP2565463A3 EP 2565463 A3 EP2565463 A3 EP 2565463A3 EP 12180536 A EP12180536 A EP 12180536A EP 2565463 A3 EP2565463 A3 EP 2565463A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
section
fiber
aligned
composite material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12180536.0A
Other languages
German (de)
English (en)
Other versions
EP2565463B1 (fr
EP2565463A2 (fr
Inventor
Armin Conrad
Jörg Stanzel
Aleksandr Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012193204A priority Critical patent/JP5468117B2/ja
Publication of EP2565463A2 publication Critical patent/EP2565463A2/fr
Publication of EP2565463A3 publication Critical patent/EP2565463A3/fr
Application granted granted Critical
Publication of EP2565463B1 publication Critical patent/EP2565463B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044Holweck-type pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/02Selection of particular materials
    • F04D29/023Selection of particular materials especially adapted for elastic fluid pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00Other material characteristics; Treatment of material
    • F05C2253/04Composite, e.g. fibre-reinforced
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/60Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603Composites; e.g. fibre-reinforced
    • F05D2300/6034Orientation of fibres, weaving, ply angle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP12180536.0A 2011-09-05 2012-08-15 Pompe à vide Active EP2565463B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012193204A JP5468117B2 (ja) 2011-09-05 2012-09-03 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011112691A DE102011112691A1 (de) 2011-09-05 2011-09-05 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2565463A2 EP2565463A2 (fr) 2013-03-06
EP2565463A3 true EP2565463A3 (fr) 2015-10-14
EP2565463B1 EP2565463B1 (fr) 2019-01-23

Family

ID=46963388

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12180536.0A Active EP2565463B1 (fr) 2011-09-05 2012-08-15 Pompe à vide

Country Status (3)

Country Link
EP (1) EP2565463B1 (fr)
JP (1) JP5468117B2 (fr)
DE (1) DE102011112691A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI586893B (zh) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
DE202013009660U1 (de) * 2013-10-31 2015-02-03 Oerlikon Leybold Vacuum Gmbh Lager-Halteelement für ein Lagerelement einer Rotorwelle einer Vakuumpumpe sowie Vakuumpumpe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2016166594A (ja) * 2015-03-10 2016-09-15 株式会社島津製作所 真空ポンプ
CN106015034A (zh) * 2016-07-11 2016-10-12 中国工程物理研究院机械制造工艺研究所 一种高压比复合分子泵

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419444B1 (en) * 1999-05-24 2002-07-16 Seiko Instruments Inc. Screw groove type vacuum pump, complex vacuum pump and vacuum pump system
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
WO2006090103A1 (fr) * 2005-02-25 2006-08-31 Edwards Limited Pompe a vide
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
DE60319585T2 (de) * 2002-12-17 2009-03-26 Edwards Ltd., Crawley Vakuumpumpe
JP2009108752A (ja) * 2007-10-30 2009-05-21 Edwards Kk 真空ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (de) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2845737B1 (fr) 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419444B1 (en) * 1999-05-24 2002-07-16 Seiko Instruments Inc. Screw groove type vacuum pump, complex vacuum pump and vacuum pump system
DE60319585T2 (de) * 2002-12-17 2009-03-26 Edwards Ltd., Crawley Vakuumpumpe
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
WO2006090103A1 (fr) * 2005-02-25 2006-08-31 Edwards Limited Pompe a vide
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
JP2009108752A (ja) * 2007-10-30 2009-05-21 Edwards Kk 真空ポンプ

Also Published As

Publication number Publication date
EP2565463B1 (fr) 2019-01-23
JP2013053627A (ja) 2013-03-21
DE102011112691A1 (de) 2013-03-07
JP5468117B2 (ja) 2014-04-09
EP2565463A2 (fr) 2013-03-06

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