EP2435599A2 - Procédé pour produire une couche contenant des particules absorbant un rayonnement d'énergie - Google Patents

Procédé pour produire une couche contenant des particules absorbant un rayonnement d'énergie

Info

Publication number
EP2435599A2
EP2435599A2 EP10723956A EP10723956A EP2435599A2 EP 2435599 A2 EP2435599 A2 EP 2435599A2 EP 10723956 A EP10723956 A EP 10723956A EP 10723956 A EP10723956 A EP 10723956A EP 2435599 A2 EP2435599 A2 EP 2435599A2
Authority
EP
European Patent Office
Prior art keywords
layer
coating material
absorber particles
absorber
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10723956A
Other languages
German (de)
English (en)
Other versions
EP2435599B1 (fr
Inventor
Jens Dahl Jensen
Ursus KRÜGER
Gabriele Winkler
Christian Doye
Kathrin Kunert
Raymond Ullrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2435599A2 publication Critical patent/EP2435599A2/fr
Application granted granted Critical
Publication of EP2435599B1 publication Critical patent/EP2435599B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1225—Deposition of multilayers of inorganic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1262—Process of deposition of the inorganic material involving particles, e.g. carbon nanotubes [CNT], flakes
    • C23C18/127—Preformed particles

Definitions

  • the invention relates to a method for producing a layer on a substrate.
  • a coating material containing a solution or dispersion medium, chemical precursors of a ceramic and absorber particles for energy radiation is applied to the substrate.
  • the substrate provided with the coating material is subjected to a heat treatment in which the solvent or dispersant is evaporated and the chemical precursors are converted into the ceramic to form the layer, wherein the heat treatment comprises introducing an electromagnetic energy radiation from the absorber particles into heat is implemented.
  • the absorber particles are therefore made of a material which is able to absorb the energy radiation.
  • the energy radiation must provide an energy that can be absorbed by certain absorber materials and suitably selected to match the absorber particles used.
  • electromagnetic radiation is used as energy radiation, for the selection of the material of the absorber particles are a wealth of materials to choose from (more on this below), so that depending on the application, a suitable material to be produced layer system can be selected.
  • the process of producing ceramic layers from chemical precursors of the ceramic is known per se.
  • a method is described in WO 00/00660 A.
  • the chemical precursors of ceramics are materials which themselves do not belong to the substance group of ceramics. ken, but can dissolve in solvents or disperse in dispersants. In this way, a liquid or paste is obtained, which can be applied to the substrate to be coated.
  • a subsequent heat treatment serves to evaporate first the solvent or dispersion medium, whereby the layer can be solidified.
  • a subsequent sintering treatment leads to the crosslinking of the precursors to the desired ceramic (pyrolysis).
  • the heat input in the heat treatment is usually done in an oven in which the substrate is heated with the applied layer to the desired temperature.
  • a heat input can, however, also be carried out more selectively, for example by incorporating particles of a UV light absorber such as titanium oxide or zinc oxide into the layer.
  • the heat treatment can then take place by means of UV light irradiation or at least be supported.
  • the object of the invention is to provide a method for producing a layer on a substrate by means of heat treatment of chemical precursors of a ceramic, which opens up a comparatively large scope for the adaptation of the layers to the required application and is economically applicable.
  • the coating material with the absorber particles only for a part of the volume Layer is used as a first coating material and for the remainder of the volume of the layer at least one further coating material, containing a solvent or dispersion medium, and chemical precursors of a ceramic is used.
  • several coating materials are used for the method according to the invention, which differ from each other at least with regard to the choice of absorber particles.
  • the first coating material contains in each case a certain type of absorber particles, while the further coating material or the further coating materials either contain no absorber particles or other absorbent particles than the first coating material or contain.
  • relatively thick layers can be produced in the manner shown, wherein the deeper layers in the vicinity of the substrate can be provided with absorber particles. If these layers are then subjected to a conventional heat treatment in an oven, the layers near the surface of the layer will initially heat up, while the layers of the layers near the substrate would require a longer time for this. In this area, however, the heat input can be accelerated by introducing an appropriate energy radiation to the absorber particles used, so that homogeneous heating and conversion of the chemical precursors in the layer to the ceramic to be produced can be ensured. As a result, a thermal load of the substrate is advantageously reduced, the treatment time of the heat treatment is shortened and a formation of residual stresses in the layer is counteracted. In addition, an alternating application of Layer material and performing a heat treatment at higher film thicknesses are avoided. Thus, it is possible to produce layers of a higher quality as well as manufacturing costs and thus save costs.
  • absorber particles By introducing absorber particles only into a specific part of the volume of the layer, it is advantageously also possible to produce layers in which ceramics are used which require different temperatures during the heat treatment.
  • the ceramic in which the temperature is higher, can be provided with the absorber particles or alternatively be provided with a higher concentration of absorber particles, so that arise in the heat treatment in this area higher temperatures.
  • the parts of the layer volume which contain different coating materials are preferably individual layers of a multilayer layer.
  • the different partial volumes of the layer are formed by successively applying the different coating materials. In this way, dispersion layers can also be produced if, during the subsequent heat treatment of the layer, layer components diffuse and thus contribute to a concentration balance between the layers. This creates a concentration gradient that makes up the properties of the gradient layer.
  • the partial volumes of the layer to be produced can also be distributed differently than in a sheet-like manner.
  • layer areas with different tasks can be produced on the substrate.
  • absorber particles are also used in the further coating substance or at least one of the further coating materials, this use being with regard to the concentration of absorber particles in the coating material and / or the chemical composition of the absorber particles and / or the mixing ratio of absorber particles of different types.
  • the composition of the absorber particles can advantageously be used to be able to work with different types of energy radiation simultaneously or successively during the heat treatment.
  • Each energy radiation can then be used to specifically influence the temperature in certain layer volumes. It is also possible with the aid of the absorber particles of different composition to use energy beams which have different specific penetration depths into the layer (more on that below).
  • the concentration of absorber particles in the coating material determines the heat energy which can be converted by irradiation of the layer in the relevant layer. In this way, in particular, the speed of heating can be influenced.
  • By setting different mixing ratios of absorber particles of different types in a certain position it is also possible to use energy radiations of different types.
  • a layer of a coating material with absorber particles for microwaves and overlying a layer of a coating material with absorber particles for IR and / or UV light is applied.
  • the microwaves have a greater penetration depth into the layer as electromagnetic radiation than IR or UV light.
  • a layer constructed in the specified manner can thus be heated by simultaneous irradiation with IR light or UV light and with microwaves, with a suitable choice of the concentration of absorber particles in the layers uniform heating of the layer results and the formation of a temperature gradient within the layer can be avoided during the heat treatment.
  • the different energy radiations can also be used to heat the layers of the layer sequentially in a desired sequence.
  • the energy radiations are used successively in a sequence and it can be achieved, for example, that first the layer on the substrate is converted into a ceramic and only then the overlying layers. This has a positive effect on the adhesion of the layer or the formation of residual stresses in the layer.
  • the coating material is applied to the substrate with regions of different thicknesses and comparatively more absorber particles are used in the regions of greater thickness.
  • layers which have a different thickness locally on the substrate can also be cured in a heat treatment step.
  • the areas of greater layer thickness, which would promote a longer treatment time in conventional oven heating, are provided with the absorber particles such that they lead to an additional heat input into this area with the consequence of faster heating.
  • the concentration of absorber particles can be adjusted so that the treatment time for the layer region of greater thickness is adapted to the treatment time of the regions of lesser thickness.
  • absorber particles are also particularly advantageous in the case of large workpieces, since the introduction of heat during the heat treatment by the absorber particles can take place with greater homogeneity. This favors a uniform layer structure even if, for example, microwaves are introduced only locally into a specific region of the layer surface of the large-area workpiece and at the same time a support of the energy input by IR- or UV-sensitive absorber particles is supported.
  • the coating of the substrate can be carried out by conventional methods, for example by spraying, knife coating, brushing, rolling or dipping.
  • metal oxides or metal nitrides or even metal oxynitrides can preferably be prepared.
  • metal sulfides or oxysulfides can be prepared as layer materials (for example molybdenum disulfide or tungsten disulfide).
  • Common precursors are thiocarboxylic acids, alkanethiols and carboxylic acids, which are mixed with the corresponding metal salts. The following materials are suitable for the absorber particles.
  • IR ultraviolet
  • absorber particles of inorganic and / or organic nature are used.
  • inorganic absorbers are the metal oxides titanium dioxide; Zinc oxide, silicon dioxide, tin dioxide or copper oxide.
  • organic IR absorbers the various phthalo-, naphthalo- and carbocyanines, polyamines, and methylene chloride mentioned.
  • absorbers are selected whose molecules have dipole moments and react to alternating electromagnetic fields (for example TiN, CuCr, ZrO, SiO, BO, AgCr, AuCr, CrCu, iron ferrites Fe 2 O 3 or Fe 3 O 4 , the be magnetized by the addition of nickel, zinc or manganese compounds).
  • alternating electromagnetic fields for example TiN, CuCr, ZrO, SiO, BO, AgCr, AuCr, CrCu, iron ferrites Fe 2 O 3 or Fe 3 O 4 , the be magnetized by the addition of nickel, zinc or manganese compounds.
  • the absorber particles used have characteristically excitation frequencies, which must be taken into account when designing the excitation energy sources. Typical excitation frequencies of some absorbers for the microwave radiation are listed in the following table.
  • Absorbers whose atoms or molecules are excited by both photons and electromagnetic alternating fields, can also be used (for example, synthetic iron manganese mixed oxide (Fe, Mn) 2 O 3 available as Bayferrox ® 303 T from the company Lanxess Germany GmbH) ,
  • the basic components can be used both as a microwave absorber (for example acetic acid at 5 GHz or propionic acid at 2.5 GHz as a solvent or diluent) or as an IR absorber (additions of organometallic acid).
  • a microwave absorber for example acetic acid at 5 GHz or propionic acid at 2.5 GHz as a solvent or diluent
  • an IR absorber additionals of organometallic acid
  • a microwave absorber is available, which is formed by pyrolysis of zirconium 2-ethylhexanoate and propionic acid and then accelerates the overall reaction while forming part of the coating material: iron oxide, used as IR absorber and as Microwave absorber can act, can also be prepared from iron 2-ethylhexanoate and propionic acid in the pyrolytic decomposition during the heat treatment.
  • the absorbers can be used both as micro and as nanoparticles in the precursor solutions. A supporting addition in the form of solutions, suspensions and dispersions of suitable absorbers is also possible.
  • these light-absorbing particles are added in the entire layer or in individual layers.
  • antimony-doped tin dioxide is borrowed as IR absorbers marketed under product Minatec.RTM ® 230 A-IR from Merck commercially Avail-.
  • the sythethischen iron oxides are available under the product name Bayferrox ® 306 and Bayoxide ® E 8611, as well as the synthetic iron manganese oxide under the name Bayferrox ® 303 T at the company Lanxess Germany GmbH.
  • Coating materials in which a pyrolysis ⁇ 300 ° C can also be added to IR absorbers of organic nature.
  • organic absorbers may be various phthalo- and naphthalocyanines, Carbocyananine, polymethines, and methylene chloride.
  • phthalocyanines examples are:
  • Silicone (IV) phthalocyanines bis (trihexylsilyloxides) The compounds mentioned are commercially available from Aldrich. Other products that also belong to the group of
  • Phthalocyanines include PRO-JET TM 800NP, PRO-JET TM 830NP and PRO-JET TM 900NP from Fujifilm.
  • naphthalocyanines vanadyl 2, 11, 20, 29-tetra-tert-butyl-2,3-naphthalocyanines nickel (II) 2, 11, 20, 29-tetra-tert-butyl-2, 3-naphthalocyanines
  • Zinc 2, 11, 20, 29-tetra-tert-butyl-2,3-naphthalocyanines 2, 11, 20, 29-tetra-tert-butyl-2,3-naphthalocyanines are commercially available from Aldrich.
  • Carbocyanines Products of Aldrich are IR-780 iodides, IR-786 iodides, IR-780 perchlorates, IR-786 perchlorates, IR-792 perchlorates and IR-768 perchlorates.
  • the group of polymethines are included in the product PRO-JET TM 830LDI and commercially available from Fujifilm.
  • the absorbers can be used both as micro and as nanoparticles in the precursor solutions.
  • IR absorbers also small additions of organometallic compounds of o.g. Metals (alkoxides, carboxylates or mixtures of both) act, which then form in situ in the pyrolytic decomposition of the corresponding IR-absorbing metal oxides, which then accelerate the overall reaction.
  • organometallic compounds of o.g. Metals alkoxides, carboxylates or mixtures of both
  • the required temperature for the chemical conversion of the precursor can be set.
  • the coating materials are prepared for a multilayer coating consisting of three layers a, b, and c.
  • the partial precursor for the first layer a on the substrate contains particles which absorb microwave radiation.
  • the partial precursor for the second layer b is added with light-absorbing particles (absorber particles).
  • the simultaneous use of the light field (UV or IR radiator) and the microwave results in an energy input into the intermediate layers, since the precursor proceeds from the inner to the outer layer
  • the coating materials are prepared for a multilayer layer consisting of three layers a, b and c.
  • the partial precursor for the first layer a contains light-absorbing particles (absorber particles) on the substrate.
  • the energy is introduced into the intermediate layer b, since the precursor is heated starting from the inner to the outer layer.
  • a uniform heating of the precursor during the chemical conversion from the inside to the outside can take place.
  • a coating material (precursor) for a layer the light-absorbing particles (absorber particles) are admixed, but only in areas with increased thickness.
  • This precursor is used to coat the inside of a tube.
  • the areas of increased layer thickness are in pipe sections with increased pipe friction (for example, pipe bends).
  • it is irradiated by an infrared and heating probe.
  • FIG. 1 shows the section through a multilayer layer, produced according to an embodiment of the method according to the invention
  • Figure 2 shows the section through a layer with different layer thickness, prepared according to another embodiment of the method according to the invention
  • Figure 3 shows the spatial representation of a component with different layer zones, prepared according to a further embodiment of the method according to the invention.
  • a substrate 11 is shown, on which a coating material in the form of a layer 12 has been applied.
  • This layer has an (inner) layer 13 lying on the substrate, a middle layer 14 and an upper (outer) layer 15.
  • the layer 13 contains absorber particles 16, which can be excited by microwaves 17.
  • absorber particles 16 are provided, which can be excited by IR radiation 18.
  • the layer 15 has no absorber particles.
  • thermal radiation 19 is introduced into the layer 15, which gradually spreads from the surface of the layer in the entire layer.
  • the heat input is also supported by the IR radiation 18 and the microwave radiation 17, which contributes to a direct heating of the layers 14 and 13 by absorption in the absorber particles 16. It should be noted that the absorber particles 16 are within the maximum penetration depth for the radiation in question.
  • FIG. 2 shows a substrate 11 which has a depression 20. This is filled by the layer 12, wherein in the region of the recess 20 absorber particles 16 are added in the coating material in order to accelerate the heat input in this area by the subsequent heat treatment.
  • FIG. 3 shows a complex component which forms the substrate 11. This is designed substantially cylindrical and coated in the region of the lateral surface with two layers 13, 14.
  • the layer 13, which can be seen in the region of the opening of the layer 14, has a volume fraction 21, which is designed as a conductor track.
  • a coating material is selected in this volume fraction, which also contains metallic particles in addition to the precursors for the ceramic, which ensure the electrical conductivity of this volume fraction after carrying out the heat treatment.
  • the layer 14 has at the front end of the substrate 11 a region 22 which has a deviating from the rest of the layer 14 layer composition.
  • This area consists of ceramics, which have a higher wear resistance, so that this area can be used for example as a sliding bearing.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Nanotechnology (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemically Coating (AREA)

Abstract

L'invention concerne un procédé pour produire une couche de céramique (15) sur un substrat (11), selon lequel on utilise une matière de revêtement qui contient des précurseurs chimiques d'une céramique. Un traitement thermique permet de convertir ces précurseurs en céramique à obtenir. Selon l'invention, différents procédés d'apport de chaleur sont utilisés dans les couches individuelles, qui sont mis en oeuvre grâce à des particules absorbantes (16) qui peuvent être utilisées en différentes concentrations ou dans différentes compositions chimiques. L'apport de chaleur ciblé est possible, même dans des zones de couche plus profondes, par exemple par excitation hyperfréquence (16) ou par apport de lumière UV ou IR (18), en plus de l'apport de chaleur classique (19). Avantageusement, des couches relativement épaisses peuvent ainsi être produites, à l'aide d'une seule couche de traitement thermique.
EP10723956.8A 2009-05-27 2010-05-12 Procédé pour produire une couche contenant des particules absorbant un rayonnement d'énergie Not-in-force EP2435599B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009023628A DE102009023628A1 (de) 2009-05-27 2009-05-27 Verfahren zum Erzeugen einer Schicht mit Absorberpartikeln für eine Energiestrahlung
PCT/EP2010/056546 WO2010136338A2 (fr) 2009-05-27 2010-05-12 Procédé pour produire une couche contenant des particules absorbant un rayonnement d'énergie

Publications (2)

Publication Number Publication Date
EP2435599A2 true EP2435599A2 (fr) 2012-04-04
EP2435599B1 EP2435599B1 (fr) 2013-07-03

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EP10723956.8A Not-in-force EP2435599B1 (fr) 2009-05-27 2010-05-12 Procédé pour produire une couche contenant des particules absorbant un rayonnement d'énergie

Country Status (5)

Country Link
US (1) US9200370B2 (fr)
EP (1) EP2435599B1 (fr)
CN (1) CN102449191B (fr)
DE (1) DE102009023628A1 (fr)
WO (1) WO2010136338A2 (fr)

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IT201800002349A1 (it) * 2018-02-02 2019-08-02 Univ Degli Studi Di Milano Bicocca Metodo per la produzione di film sottili di dicalcogenuri di metalli di transizione
US11539053B2 (en) * 2018-11-12 2022-12-27 Utility Global, Inc. Method of making copper electrode
US11453618B2 (en) * 2018-11-06 2022-09-27 Utility Global, Inc. Ceramic sintering

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WO2010136338A3 (fr) 2011-01-27
EP2435599B1 (fr) 2013-07-03
US9200370B2 (en) 2015-12-01
US20120128872A1 (en) 2012-05-24
CN102449191A (zh) 2012-05-09
CN102449191B (zh) 2013-09-18
WO2010136338A2 (fr) 2010-12-02
DE102009023628A1 (de) 2010-12-02

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