EP2330299A4 - DEVICE FOR VACUUM EMPTYING - Google Patents
DEVICE FOR VACUUM EMPTYINGInfo
- Publication number
- EP2330299A4 EP2330299A4 EP09812899.4A EP09812899A EP2330299A4 EP 2330299 A4 EP2330299 A4 EP 2330299A4 EP 09812899 A EP09812899 A EP 09812899A EP 2330299 A4 EP2330299 A4 EP 2330299A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- evacuation device
- vacuum evacuation
- vacuum
- evacuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008232324 | 2008-09-10 | ||
PCT/JP2009/004496 WO2010029750A1 (ja) | 2008-09-10 | 2009-09-10 | 真空排気装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2330299A1 EP2330299A1 (en) | 2011-06-08 |
EP2330299A4 true EP2330299A4 (en) | 2016-06-15 |
Family
ID=42005014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09812899.4A Withdrawn EP2330299A4 (en) | 2008-09-10 | 2009-09-10 | DEVICE FOR VACUUM EMPTYING |
Country Status (7)
Country | Link |
---|---|
US (1) | US20110164992A1 (zh) |
EP (1) | EP2330299A4 (zh) |
JP (1) | JPWO2010029750A1 (zh) |
KR (1) | KR101193479B1 (zh) |
CN (1) | CN102124225A (zh) |
TW (1) | TWI467092B (zh) |
WO (1) | WO2010029750A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104302922B (zh) * | 2012-06-28 | 2017-08-08 | 斯特林工业咨询有限公司 | 用于排空腔室的泵装置和方法 |
GB2508396B (en) | 2012-11-30 | 2015-10-07 | Edwards Ltd | Improvements in and relating to vacuum conduits |
GB2510829B (en) * | 2013-02-13 | 2015-09-02 | Edwards Ltd | Pumping system |
DE102013108090A1 (de) * | 2013-07-29 | 2015-01-29 | Hella Kgaa Hueck & Co. | Pumpenanordnung |
DE202014005279U1 (de) * | 2014-06-26 | 2015-10-05 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpen-System |
CA2953455C (fr) | 2014-06-27 | 2022-03-29 | Ateliers Busch Sa | Methode de pompage dans un systeme de pompes a vide et systeme de pompes a vide |
JP2017531125A (ja) * | 2014-09-26 | 2017-10-19 | アテリエ ビスク ソシエテ アノニムAtelier Busch SA | 真空を生成するための圧送システムおよびこの圧送システムによる圧送方法 |
JP6512674B2 (ja) * | 2014-10-02 | 2019-05-15 | アテリエ ビスク ソシエテ アノニムAtelier Busch SA | 真空を生成するための圧送システムおよびこの圧送システムによる圧送方法 |
JP2018178846A (ja) * | 2017-04-12 | 2018-11-15 | 株式会社荏原製作所 | 真空ポンプ装置の運転制御装置、及び運転制御方法 |
CN108533494B (zh) * | 2018-06-19 | 2024-02-20 | 浙江维朋制冷设备有限公司 | 一种真空泵 |
GB2626561A (en) * | 2023-01-26 | 2024-07-31 | Edwards Ltd | Connector for use in a vacuum pumping system |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3642384A (en) * | 1969-11-19 | 1972-02-15 | Henry Huse | Multistage vacuum pumping system |
US20040173312A1 (en) * | 2001-09-06 | 2004-09-09 | Kouji Shibayama | Vacuum exhaust apparatus and drive method of vacuum apparatus |
WO2006082366A1 (en) * | 2005-02-02 | 2006-08-10 | Edwards Limited | Method of operating a pumping system |
JP2007231935A (ja) * | 2006-01-31 | 2007-09-13 | Ebara Densan Ltd | 真空ポンプユニット |
EP1906022A1 (en) * | 2006-09-29 | 2008-04-02 | Anest Iwata Corporation | Evacuation apparatus |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3922110A (en) * | 1974-01-28 | 1975-11-25 | Henry Huse | Multi-stage vacuum pump |
FR2652390B1 (fr) * | 1989-09-27 | 1991-11-29 | Cit Alcatel | Groupe de pompage a vide. |
US5431545A (en) * | 1993-12-02 | 1995-07-11 | Praxair Technology, Inc. | Pumper system for in-situ pigging applications |
JP3763193B2 (ja) * | 1997-09-22 | 2006-04-05 | アイシン精機株式会社 | 多段式真空ポンプ |
JP2000329084A (ja) * | 1999-05-18 | 2000-11-28 | Ebara Corp | 容積式圧縮機 |
JP2001207984A (ja) * | 1999-11-17 | 2001-08-03 | Teijin Seiki Co Ltd | 真空排気装置 |
JP2002174175A (ja) | 2000-12-05 | 2002-06-21 | Teijin Seiki Co Ltd | 真空排気装置 |
FR2822200B1 (fr) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | Systeme de pompage pour gaz a faible conductivite thermique |
JP3992176B2 (ja) * | 2001-10-26 | 2007-10-17 | 株式会社アルバック | 真空排気方法および真空排気装置 |
JP3906973B2 (ja) * | 2001-10-30 | 2007-04-18 | 株式会社アルバック | 真空排気装置 |
JP3982673B2 (ja) * | 2001-10-31 | 2007-09-26 | 株式会社アルバック | 真空排気装置の運転方法 |
JP4443080B2 (ja) | 2001-09-21 | 2010-03-31 | 新明和工業株式会社 | 真空排気システムおよびその運転方法 |
JP2006322405A (ja) | 2005-05-19 | 2006-11-30 | Denso Corp | 真空排気システム |
JP4718302B2 (ja) * | 2005-11-04 | 2011-07-06 | 株式会社アルバック | 真空排気装置 |
EP1979619B1 (en) * | 2006-01-31 | 2016-12-14 | Ebara Corporation | Vacuum pump unit |
JP2008232324A (ja) | 2007-03-22 | 2008-10-02 | Ntn Corp | 自動調心ころ軸受 |
-
2009
- 2009-09-09 TW TW98130464A patent/TWI467092B/zh active
- 2009-09-10 US US13/063,040 patent/US20110164992A1/en not_active Abandoned
- 2009-09-10 EP EP09812899.4A patent/EP2330299A4/en not_active Withdrawn
- 2009-09-10 JP JP2010528647A patent/JPWO2010029750A1/ja active Pending
- 2009-09-10 CN CN2009801321755A patent/CN102124225A/zh active Pending
- 2009-09-10 KR KR1020117005262A patent/KR101193479B1/ko active IP Right Grant
- 2009-09-10 WO PCT/JP2009/004496 patent/WO2010029750A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3642384A (en) * | 1969-11-19 | 1972-02-15 | Henry Huse | Multistage vacuum pumping system |
US20040173312A1 (en) * | 2001-09-06 | 2004-09-09 | Kouji Shibayama | Vacuum exhaust apparatus and drive method of vacuum apparatus |
WO2006082366A1 (en) * | 2005-02-02 | 2006-08-10 | Edwards Limited | Method of operating a pumping system |
JP2007231935A (ja) * | 2006-01-31 | 2007-09-13 | Ebara Densan Ltd | 真空ポンプユニット |
EP1906022A1 (en) * | 2006-09-29 | 2008-04-02 | Anest Iwata Corporation | Evacuation apparatus |
Non-Patent Citations (1)
Title |
---|
See also references of WO2010029750A1 * |
Also Published As
Publication number | Publication date |
---|---|
CN102124225A (zh) | 2011-07-13 |
KR101193479B1 (ko) | 2012-10-22 |
TWI467092B (zh) | 2015-01-01 |
EP2330299A1 (en) | 2011-06-08 |
WO2010029750A1 (ja) | 2010-03-18 |
TW201018790A (en) | 2010-05-16 |
US20110164992A1 (en) | 2011-07-07 |
KR20110040980A (ko) | 2011-04-20 |
JPWO2010029750A1 (ja) | 2012-02-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20110411 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA RS |
|
DAX | Request for extension of the european patent (deleted) | ||
RA4 | Supplementary search report drawn up and despatched (corrected) |
Effective date: 20160513 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: F04B 41/06 20060101ALI20160509BHEP Ipc: F04C 23/00 20060101ALI20160509BHEP Ipc: F04C 25/02 20060101ALI20160509BHEP Ipc: F04B 37/14 20060101AFI20160509BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20161213 |