EP2307151B1 - Process for removing particles from a surface by improved suction - Google Patents

Process for removing particles from a surface by improved suction Download PDF

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Publication number
EP2307151B1
EP2307151B1 EP09779880.5A EP09779880A EP2307151B1 EP 2307151 B1 EP2307151 B1 EP 2307151B1 EP 09779880 A EP09779880 A EP 09779880A EP 2307151 B1 EP2307151 B1 EP 2307151B1
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EP
European Patent Office
Prior art keywords
blowing
particulate
suction
oblique
particles
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EP09779880.5A
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German (de)
French (fr)
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EP2307151A1 (en
Inventor
Isabelle Tovena-Pecault
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action

Definitions

  • the invention relates to improving the particulate surface decontamination of an object.
  • the invention can be applied more particularly to decontamination in areas with a controlled environment.
  • a contaminant is designated in ISO 14644-4 as follows: "Any particulate, molecular, non-particulate or biological entity that may produce an adverse effect on the product or process".
  • a new international standard ISO 14644-9 for classifying particulate cleanliness of surfaces is being approved.
  • the surface particulate contaminants considered according to this new standard are those whose unit size is generally between 0.05 ⁇ m and 500 ⁇ m for the purposes of classification.
  • the new standard proposes to consider new specific ranges not included in this wide range. It is according to this new standard to determine the number per m 2 of these particulate surface contaminants.
  • contaminants of biological origin can be likened to surface particles when they are dead. Dead biological contaminants are therefore within the scope of the invention.
  • Vacuum cleaners are the best known and most used devices for the dry process. Pistols blowing air sometimes ionized and filtered are also used on polluted surfaces to make them clean.
  • the cleaning heads are based on flat soles with or without more or less abrasive materials (brush, dry cloth possibly coupled with a wet cloth afterwards).
  • the patent WO 02/097402 discloses meanwhile a device and a method for decontaminating by blowing free air jets orthogonal to the surface 2 to be decontaminated and central aspiration of a so-called Jet jet Wis 4.
  • the solution according to this patent contributes more to plating the particles against surface 2 rather than detaching them.
  • Licences WO 02/099391 and DE 102 52 377 disclose a device and method for decontaminating a surface by blowing clean air at a fixed oblique incidence on a surface to be decontaminated.
  • the object of the invention is then to propose a solution that makes it possible to perform a particulate surface decontamination of an effective object, according to the new ISO 14644-9 standard.
  • the invention relates to a method for the particulate surface decontamination of an object, according to claim 1.
  • the oblique blow is produced by making a grazing angle, less than 45 ° with respect to the surface of the object.
  • the value of the grazing angle can be chosen according to the surface nature of the object, the blowing rate, the suction flow rate.
  • the shaping angle may for example be between 0 and 45 °.
  • the particulate surface contaminants sucked up can be collected downstream. It is thus possible to perform subsequent physico-chemical analyzes of the collection. We can also confine the particles collected and collected and make them undergo a specific treatment depending on the inherent danger of the nature of the particles (chemical toxicity or chemical radio ).
  • the device may advantageously comprise a filtration membrane mounted in the suction means for collecting particulate contaminants sucked.
  • the counting device (s) according to the invention can be constituted by any type of apparatus using an aerosol metrology technology.
  • an optical counting device of the laser diode type, may preferably be envisaged in order to quantify particles smaller than 10 ⁇ m. It is also possible to envisage a condensation ring counter in order to quantify particles of nanometric size. Counters using an electric type count, such as ELPI ("Electrical Low Pressure Impactor") counters, can also be considered. It will be possible to associate in line, that is to say on the same suction line, an optical counting device with a condensation counter and / or meter ELPI
  • an optical counter of the laser diode type, whose lower counting limit is of the order of 0.1 ⁇ m and the upper limit is of the order of 10 ⁇ m.
  • condensation ring counter can be used whose lower counting limit is about 5 to 7 nm (nanometers).
  • clean air it should be understood here and in the context of the invention, that the blown air is filtered so as not to contain particles of size greater than a given value, preferably equal to the lower limit of counting of the counting device.
  • the inventor was able to demonstrate that the detection and counting devices using the combined blow / suction principle combined two limits: on the one hand, at the level of the actual extraction of the particles and, on the other hand, at the level of the detection or analysis proper of the particles.
  • the inventor has been able to observe that the probes according to the state of the art all have a non-optimized blowing aeraulic to effectively pick up the contaminants deposited on the surface, in particular if they are retained by surface defects.
  • the inventor considered that the probes according to the state of the art implementing the combined principle of air blowing and suction could not be used as such to serve as effective particulate surface decontamination device.
  • blowing for example by the probes disclosed in the patents cited in the preamble, is carried out orthogonally to the surface and in a limited area thereof. Also, such a localized orthogonal blowing contributes more to somehow flatten the particulate contaminants present in the area and not necessarily pick up those present on the surface outside this area directly impacted by blowing.
  • the oblique blowing according to the invention is carried out with a multiplicity of channels oriented differently according to the points of the surface.
  • the air comes to attack the tangential and thus effectively the particles on the surface.
  • a wall cross section which has a concave shape, with oblique channels distributed over the concavity of the wall. It is also possible to define a cross-section of a wall of planar shape, that is to say with the surface facing the surface to be decontaminated which is flat and whose surface is substantially equal to that to decontaminate.
  • the shape of the wall cross section is flat, the clean air is blown at an equal distance regardless of the oblique channel from which it exits, whereas when the shape is concave, the clean air is blown at different distances from the oblique air outlet.
  • the device may comprise a head intended to be in contact with the object and comprising a wall adapted to face the one of the object to be decontaminated, the means of blowing clean air to the oblique comprising steerable nozzles and arranged in the wall.
  • the head comprises a contact sole with the object, made of material (x) chemically neutral (s) vis-à-vis the object, and arranged at the periphery of the wall.
  • the device may further include means for generating a non-contaminating air cushion below the contact flange to move the device between two different determined surfaces.
  • the invention finally relates to the application of the method described above or the device referred to above to particulate surface decontamination in controlled environment areas.
  • certain industries space, micromechanics, optics, nanotechnology, but also pharmaceutical and food industry, hospitals .
  • it can be particularly interesting to ensure cleanliness of the surfaces of an object.
  • the device according to the invention 1 shown schematically makes it possible to carry out the particulate decontamination a surface S 'of an object whose control surface is sought to be controlled and / or decontaminated.
  • the device 1 comprises a whole head 2 adapted to come into contact with the surface S of the object via a sole 20 made of one or more chemically neutral materials (s) with respect to the object, such ( s) Teflon.
  • the sole 20 is arranged at the periphery of the head wall 2 from which oblique blow molding is performed.
  • Blowing means 3 are provided for respectively blowing clean air obliquely on the surface S '.
  • These blowing means 3 comprise a blowing duct 30 with which is connected a pump with filter 31 for blowing back while filtering the air to make it clean.
  • This blowing duct 30 opens out on channels made in a wall 21 of the head 2 ( Figures 1 to 3 ) or on steerable nozzles integrated in the head 2 (not shown here).
  • the wall 21 has a concave cross section, that is to say it defines a concavity between the surface S 'of the object to be decontaminated, when the head 2 is in contact therewith.
  • the concave general section of the wall 21 may be hemispherical or semicylindrical or hemi-ellipsoidal.
  • the longitudinal section of the wall 21 may be rectangular or square.
  • the blowing channels 200 are made to individually blow oblique air at a multiplicity of oblique angle: SOUFF1, SOUFF2, SOUFF3, SOUFF4 ... Asp suction is done in the central part of the concave wall 21 of the head.
  • the wall 21 constituted by a cylinder full of height small relative to its diameter
  • the suction is achieved by suitable means 4 comprising a suction duct 40 connected to a channel 22 made in the central part of the head wall 21.
  • the suction is substantially in an orthogonal direction ASP to the surface S 'to be decontaminated.
  • the oblique channels 200 are all drilled with an identical and grazing output with a grazing angle of between 0 and 45 °.
  • a suction flow rate of the order of 100 l / min and a suction speed of between 3 and 12.5 m / s gave complete satisfaction.
  • An additional peripheral suction could be envisaged which would preferentially collect the larger particles.
  • a double suction is realized with one carried out on the bottom of the wall (the closest one). of the object in decontamination position) and with the other carried on the top of the head wall.
  • the pump 31 is further connected to the suction pipe 40 so that it discharges any particulate contaminants sucked.
  • a filtration membrane 5 it is possible to collect the particles sucked downstream in the suction pipe 40 on a filtration membrane 5. At the location where the filtration membrane is located, it is also possible to provide a window 6 in order to visually check the state of cleanliness of the membrane. Recovery of the collection membrane allows physico-chemical analyzes thereafter.
  • the membrane may be confined and undergo chemical or physico-chemical treatment if the particles contaminating the surface S exhibit toxicity.
  • the head 2 of the device comprises a sole 20 of contact with the object, which is made of material (x) chemically neutral (s) vis-à-vis the surface S of the object.
  • This sole 60 may be advantageously Teflon.
  • the geometry of the sole 20 (for example square or circular) can be advantageously adapted to the geometry of surfaces S 'to be qualified according to ISO 14644-9.
  • the head 2 of the device 1 can optionally move autonomously on a non-contaminating air cushion for remote controlled control point by point of decontamination or automated large area.
  • the suction can be made simultaneously oblique blow at the beginning of it or after a certain period of latency.
  • the latter may be chosen according to the nature of the particles to be sucked, the surface of the object to be decontaminated, and the suction flow rate.

Description

DOMAINE TECHNIQUETECHNICAL AREA

L'invention concerne l'amélioration de la décontamination particulaire de surface d'un objet.The invention relates to improving the particulate surface decontamination of an object.

L'invention peut s'appliquer plus particulièrement à la décontamination dans des zones à environnement maîtrisé.The invention can be applied more particularly to decontamination in areas with a controlled environment.

ART ANTÉRIEURPRIOR ART

Un contaminant est désigné dans la norme ISO 14644-4 comme suit : «Tout entité particulaire, moléculaire, non particulaire ou biologique susceptible de produire un effet indésirable sur le produit ou le procédé ».A contaminant is designated in ISO 14644-4 as follows: "Any particulate, molecular, non-particulate or biological entity that may produce an adverse effect on the product or process".

Dans le cadre de l'invention, on s'intéresse exclusivement à la contamination particulaire de surface. A ce jour, un seul standard permet de classer l'état de propreté des surfaces sur lesquelles sont présents des contaminants particulaires déposés : il s'agit de la norme IEST 1246 D.In the context of the invention, the focus is exclusively on particulate surface contamination. To date, only one standard classifies the cleanliness of surfaces on which particulate contaminants are deposited: this is the IEST 1246 D standard.

Un nouveau standard international ISO 14644-9 pour classer l'état de propreté particulaire des surfaces est en cours d'approbation. Les contaminants particulaires surfaciques considérés selon ce nouveau standard sont ceux dont la taille unitaire est généralement comprise entre 0,05 µm et 500 µm pour les besoins de la classification. Outre cette large gamme de taille, le nouveau standard propose de considérer de nouvelles gammes spécifiques non comprises dans cette large gamme. Il s'agit selon ce nouveau standard de déterminer le nombre par m2 de ces contaminants particulaires surfaciques. En outre, des contaminants d'origine biologique peuvent être assimilés à des particules de surfaces quand ils sont morts. Des contaminants biologiques morts entrent donc dans le cadre de l'invention.A new international standard ISO 14644-9 for classifying particulate cleanliness of surfaces is being approved. The surface particulate contaminants considered according to this new standard are those whose unit size is generally between 0.05 μm and 500 μm for the purposes of classification. In addition to this wide range of sizes, the new standard proposes to consider new specific ranges not included in this wide range. It is according to this new standard to determine the number per m 2 of these particulate surface contaminants. In addition, contaminants of biological origin can be likened to surface particles when they are dead. Dead biological contaminants are therefore within the scope of the invention.

A ce jour, pour effectuer la décontamination particulaire de surface deux grandes techniques existent : une technique par voie sèche et une autre par voie humide.To date, to perform the surface particulate decontamination two major techniques exist: a dry technique and a wet technique.

Les aspirateurs sont les appareils les plus connus et les plus utilisés pour la voie sèche. Des pistolets soufflant de l'air parfois ionisé et filtré sont également utilisés sur des surfaces polluées afin de les rendre propres.Vacuum cleaners are the best known and most used devices for the dry process. Pistols blowing air sometimes ionized and filtered are also used on polluted surfaces to make them clean.

Quelle que soit la technique utilisée (sèche ou humide), les têtes nettoyantes reposent sur des semelles planes équipées ou non de matériaux plus ou moins abrasifs (brosse, chiffon sec éventuellement couplé à un chiffon humide passé après).Whatever the technique used (dry or wet), the cleaning heads are based on flat soles with or without more or less abrasive materials (brush, dry cloth possibly coupled with a wet cloth afterwards).

Dans les salles propres, il y a une contrainte évidente de non génération de particules supplémentaire pour toutes les opérations réalisées dans ces environnements, ce qui limite l'emploi de matériaux abrasifs au contact des surfaces.In clean rooms, there is an obvious additional non-generation constraint for all operations performed in these environments, which limits the use of abrasive materials in contact with surfaces.

Le soufflage d'air propre à la surface d'un objet est connu. Mais ce soufflage est utilisé dans des sondes dont la fonction recherchée est le contrôle particulaire de surfaces. Ces sondes selon l'état de l'art fonctionnent sur le principe combiné de soufflage d'air propre et d'aspiration afin de compter les particules de surface détachées par le soufflage et aspirées. Ainsi, un appareil largement répandu dans le domaine est celui commercialisé sous le nom Q-III

Figure imgb0001
par la société Dryden Engineering dont le principe de fonctionnement par comptage ultérieur à l'aspiration, à l'aide d'un laser à diode, est décrit dans le brevet US 5,253,538 . Les conditions opératoires de cet appareil telles qu'indiquées dans le brevet et dans la notice d'utilisation indiquent que la tête de détection défile sur l'objet à analyser à une vitesse de 10 LFPM (Linear Feet Per Minute) avec des durées d'échantillonnage de 1, 3 ou 6 secondes (voir colonne 4, lignes 49-51 du brevet). Cet appareil est conçu avec cinq canaux d'aspiration respectivement de 0,3 µm, 0,5 µm, 1.0 µm, 5.0 µm et 10 µm. Dans le mode de réalisation illustré de la figure 4 du brevet, il est prévu seulement quatre orifices de soufflage 56 répartis aux sommets d'un carré formé dans la face inférieure 53 de la sonde destinée à venir en contact avec la surface 12 à analyser. Le soufflage d'air filtré réalisé à travers ces orifices 56 est effectué orthogonalement à la surface 12. L'aspiration de l'air soufflé contenant les contaminants particulaires de surface éventuels est réalisée dans un premier temps parallèlement à la surface 12 dans des rainures pratiquées dans la face inférieure 53 de la sonde puis dans un deuxième temps orthogonalement à la surface 12 à travers un large orifice central 54.The blowing of clean air on the surface of an object is known. But this blowing is used in probes whose function is the control particulate surfaces. These probes according to the state of the art operate on the combined principle of blowing clean air and suction to count the surface particles detached by blowing and sucked. Thus, a device widely used in the field is that marketed under the name Q-III
Figure imgb0001
by the company Dryden Engineering whose principle of operation by counting after aspiration, using a diode laser, is described in the patent US5,253,538 . The operating conditions of this apparatus as indicated in the patent and in the instructions for use indicate that the detection head scrolls on the object to be analyzed at a rate of 10 LFPM (Linear Feet Per Minute) with durations of sampling of 1, 3 or 6 seconds (see column 4, lines 49-51 of the patent). This device is designed with five suction channels of 0.3 μm, 0.5 μm, 1.0 μm, 5.0 μm and 10 μm, respectively. In the illustrated embodiment of Figure 4 of the patent, there are provided only four blowing ports 56 distributed at the vertices of a square formed in the lower face 53 of the probe intended to come into contact with the surface 12 to be analyzed. The blowing of filtered air produced through these orifices 56 is carried out orthogonally to the surface 12. The suction of the blown air containing the possible surface particulate contaminants is carried out initially parallel to the surface 12 in grooves made in the lower face 53 of the probe and then in a second step orthogonally to the surface 12 through a large central orifice 54.

Un inconvénient identifié de cet appareil par la société Applied Materials concerne le non alignement potentiel de la tête de sonde avec un objet à analyser lorsque celui-ci n'est pas parfaitement plan. Aussi, Applied Materials a envisagé une solution, telle que décrite dans le brevet US 5,939,647 , qui consiste à rendre rotative la tête d'échantillonnage afin de permettre une flexibilité de positionnement. Dans le mode de réalisation illustré de la figure 4 du brevet, il est prévu un canal de soufflage 188 formé dans la partie centrale de la face inférieure 199 de la sonde. Le soufflage d'air filtré est effectué là encore orthogonalement à la surface à analyser. Des canaux périphériques 196 inclinés de diamètre inférieur à celui du canal de soufflage 188 sont prévus à la périphérie pour effectuer l'aspiration de l'air soufflé contenant les contaminants particulaires de surface éventuels.An identified disadvantage of this apparatus by Applied Materials relates to the potential misalignment of the probe head with an object to be analyzed when it is not perfectly flat. Also, Applied Materials has considered a solution, as described in US Patent 5,939,647 which consists of rotating the sampling head to allow positioning flexibility. In the illustrated embodiment of Figure 4 of the patent, there is provided a blowing channel 188 formed in the central portion of the lower face 199 of the probe. The blowing of filtered air is again carried out orthogonally to the surface to be analyzed. Inclined peripheral channels 196 of smaller diameter than that of the blast duct 188 are provided at the periphery for effecting the suction of the blown air containing the possible surface particulate contaminants.

Le brevet WO 02/097402 divulgue quant à lui un dispositif et une méthode de décontamination par soufflage de jets d'air libre orthogonalement à la surface 2 à décontaminer et aspiration centrale d'un jet dit jet de Wis 4. La solution selon ce brevet contribue davantage à plaquer les particules contre la surface 2 plutôt qu'à les détacher.The patent WO 02/097402 discloses meanwhile a device and a method for decontaminating by blowing free air jets orthogonal to the surface 2 to be decontaminated and central aspiration of a so-called Jet jet Wis 4. The solution according to this patent contributes more to plating the particles against surface 2 rather than detaching them.

Les études récentes de la demanderesse ont montré que, quel que soit l'appareil de décontamination actuellement commercialisé, la décontamination particulaire de surface n'était pas efficace, en particulier selon le nouveau standard ISO 14644-9.Recent studies by the applicant have shown that, whatever the decontamination device currently marketed, particulate surface decontamination was not effective, especially according to the new standard ISO 14644-9.

Les brevets WO 02/099391 et DE 102 52 377 divulguent un dispositif et une méthode de décontamination d'une surface par soufflage d'air propre selon une incidence oblique fixe sur une surface à décontaminer.Licences WO 02/099391 and DE 102 52 377 disclose a device and method for decontaminating a surface by blowing clean air at a fixed oblique incidence on a surface to be decontaminated.

Le but de l'invention est alors de proposer une solution qui permette d'effectuer une décontamination particulaire de surface d'un objet efficace, selon le nouveau standard ISO 14644-9.The object of the invention is then to propose a solution that makes it possible to perform a particulate surface decontamination of an effective object, according to the new ISO 14644-9 standard.

EXPOSÉ DE L'INVENTIONSTATEMENT OF THE INVENTION

A cet effet, l'invention concerne un procédé de décontamination particulaire de surface d'un objet, selon la revendication 1. Selon un mode de réalisation avantageux de l'invention, le soufflage oblique est réalisé en faisant un angle rasant, inférieur à 45° par rapport à la surface de l'objet.To this end, the invention relates to a method for the particulate surface decontamination of an object, according to claim 1. According to an advantageous embodiment of the invention, the oblique blow is produced by making a grazing angle, less than 45 ° with respect to the surface of the object.

En réalisant un soufflage rasant, on peut encore mieux décrocher les contaminants particulaires de surface susceptibles d'être déposés sur la surface, en particulier ceux pris dans les défauts de surface de l'objet. La valeur de l'angle rasant peut être choisie en fonction de la nature de surface de l'objet, du débit de soufflage, du débit d'aspiration.By performing a rasping blow, it is even better to pick up particulate surface contaminants that may be deposited on the surface, in particular those taken in the surface defects of the object. The value of the grazing angle can be chosen according to the surface nature of the object, the blowing rate, the suction flow rate.

L'angle rasant peut par exemple être compris entre 0 et 45°.The shaping angle may for example be between 0 and 45 °.

Avantageusement, on peut collecter en aval les contaminants particulaires de surface aspirés. On peut ainsi réaliser des analyses physico-chimiques ultérieures de la collecte. On peut également confiner les particules aspirées et collectées et leur faire subir un traitement spécifique en fonction du danger inhérent à la nature des particules (toxicité chimique ou radio chimique...). En tant que moyen de collecte, le dispositif peut comprendre avantageusement une membrane de filtration montée dans les moyens d'aspiration afin de collecter les contaminants particulaires aspirés.Advantageously, the particulate surface contaminants sucked up can be collected downstream. It is thus possible to perform subsequent physico-chemical analyzes of the collection. We can also confine the particles collected and collected and make them undergo a specific treatment depending on the inherent danger of the nature of the particles (chemical toxicity or chemical radio ...). As a means of collection, the device may advantageously comprise a filtration membrane mounted in the suction means for collecting particulate contaminants sucked.

On peut réaliser avantageusement une quantification d'au moins une partie des particules aspirées par au moins un dispositif de comptage adapté pour compter des particules de taille unitaire comprise dans une gamme de valeur donnée.It is possible to advantageously achieve a quantification of at least a portion of the particles sucked by at least one counting device adapted to count particles of unit size within a given range of value.

Le(s) dispositif(s) de comptage selon l'invention peu(ven)t être constitué(s) par tout type d'appareils mettant en oeuvre une technologie de métrologie des aérosols. Par exemple, on peut envisager de préférence un dispositif de comptage optique, de type diodes laser afin de quantifier des particules inférieures à 10 µm. On peut aussi envisager un compteur à noyaux de condensation afin de quantifier des particules de taille nanométrique. On peut en outre considérer des compteurs utilisant un comptage de type électrique, tel que les compteurs E.L.P.I (« Electrical Low Pressure Impactor » en anglais). On pourra associer en ligne, c'est-à-dire sur la même voie d'aspiration, un dispositif de comptage optique avec un compteur à noyaux de condensation et/ou avec un compteur E.L.P.I.The counting device (s) according to the invention can be constituted by any type of apparatus using an aerosol metrology technology. For example, an optical counting device, of the laser diode type, may preferably be envisaged in order to quantify particles smaller than 10 μm. It is also possible to envisage a condensation ring counter in order to quantify particles of nanometric size. Counters using an electric type count, such as ELPI ("Electrical Low Pressure Impactor") counters, can also be considered. It will be possible to associate in line, that is to say on the same suction line, an optical counting device with a condensation counter and / or meter ELPI

Typiquement, on peut utiliser un compteur optique, de type diode laser dont la limite inférieure de comptage est de l'ordre de 0,1 µm et la limite supérieure est de l'ordre de 10 µm.Typically, it is possible to use an optical counter, of the laser diode type, whose lower counting limit is of the order of 0.1 μm and the upper limit is of the order of 10 μm.

De même, on peut utiliser un compteur à noyaux de condensation dont la limite inférieure de comptage correspond à environ 5 à 7 nm (nanomètres).Similarly, a condensation ring counter can be used whose lower counting limit is about 5 to 7 nm (nanometers).

Par « air propre », il faut comprendre ici et dans le cadre de l'invention, que l'air soufflé est filtré de sorte à ne pas contenir de particules de taille supérieure à une valeur donnée, de préférence égale à la limite inférieure de comptage du dispositif de comptage.By "clean air", it should be understood here and in the context of the invention, that the blown air is filtered so as not to contain particles of size greater than a given value, preferably equal to the lower limit of counting of the counting device.

L'inventeur a su mettre en évidence que les appareils de détection et comptage utilisant le principe combiné de soufflage/aspiration cumulaient deux limites : d'une part au niveau de l'extraction proprement dite des particules et d'autre part au niveau de la détection ou analyse proprement dite des particules.The inventor was able to demonstrate that the detection and counting devices using the combined blow / suction principle combined two limits: on the one hand, at the level of the actual extraction of the particles and, on the other hand, at the level of the detection or analysis proper of the particles.

L'inventeur a donc décidé de repousser respectivement chacune de ces deux limites.The inventor therefore decided to push each of these two limits respectively.

En ce qui concerne l'extraction proprement dite, l'inventeur a pu constater que les sondes selon l'état de l'art présentaient toutes une aéraulique de soufflage non optimisée pour décrocher efficacement les contaminants déposés sur la surface, en particulier si ils sont retenus par les défauts de surface. En d'autres termes, l'inventeur a considéré que les sondes selon l'état de l'art mettant en oeuvre le principe combiné de soufflage d'air et d'aspiration ne pouvaient être utilisées telles quelles pour servir de dispositif de décontamination particulaire de surface efficace.As far as the extraction itself is concerned, the inventor has been able to observe that the probes according to the state of the art all have a non-optimized blowing aeraulic to effectively pick up the contaminants deposited on the surface, in particular if they are retained by surface defects. In other words, the inventor considered that the probes according to the state of the art implementing the combined principle of air blowing and suction could not be used as such to serve as effective particulate surface decontamination device.

En effet, le soufflage, par exemple par les sondes divulguées dans les brevets cités en préambule, est réalisé orthogonalement à la surface et dans une zone limitée de celle-ci. Aussi, un tel soufflage orthogonal localisé contribue plus à plaquer en quelque sorte les contaminants particulaires présents sur la zone et à ne pas forcément décrocher ceux présents sur la surface en dehors de cette zone directement impactée par le soufflage.Indeed, the blowing, for example by the probes disclosed in the patents cited in the preamble, is carried out orthogonally to the surface and in a limited area thereof. Also, such a localized orthogonal blowing contributes more to somehow flatten the particulate contaminants present in the area and not necessarily pick up those present on the surface outside this area directly impacted by blowing.

L'inventeur a ainsi conclu qu'un soufflage oblique de l'air sur la surface, aurait pour avantage de balayer efficacement celle-ci. Il a ainsi pu définir un soufflage oblique qui décroche ou détache efficacement les particules de surface, y compris les particules de taille submicronique selon la norme ISO 14644-9 avant de les aspirer, une fois en suspension dans l'air emprisonné entre la tête du dispositif de soufflage en contact avec la surface à décontaminer et cette dernière.The inventor thus concluded that an oblique blow of the air on the surface, would have the advantage of effectively sweeping it. It has thus been able to define an oblique blow which effectively picks up or detaches surface particles, including particles of submicron size according to ISO 14644-9 before sucking them, once suspended in the air trapped between the head of the body. blowing device in contact with the surface to be decontaminated and the latter.

De fait, le soufflage oblique selon l'invention est réalisé avec une multiplicité de canaux orientés différemment selon les points de la surface. Ainsi, avec une grande quantité de soufflages obliques différents, l'air vient attaquer à la tangentielle et donc efficacement les particules sur la surface.In fact, the oblique blowing according to the invention is carried out with a multiplicity of channels oriented differently according to the points of the surface. Thus, with a large amount of different oblique blows, the air comes to attack the tangential and thus effectively the particles on the surface.

En d'autres termes, le procédé selon l'invention permet de décontaminer efficacement une surface d'un objet et le cas échéant, confiner proprement un échantillon de surface d'un objet à qualifier en termes de propreté particulaire ou biologique de surface. Un dispositif de décontamination particulaire de surface d'un objet, comprenant :

  • des moyens de soufflage pour souffler de l'air propre à l'oblique sur une surface déterminée de l'objet,
  • des moyens d'aspiration pour aspirer l'air soufflé à l'oblique contenant des contaminants particulaires de surface éventuels,
les moyens de soufflage sont en outre adaptés pour souffler de l'air propre avec une oblicité du soufflage différente en différents points de la surface à analyser est aussi décrit ici. Selon une variante de réalisation, le dispositif peut comprendre une tête destinée à être en contact avec l'objet et comprenant une paroi adaptée pour venir en regard de celle de l'objet à décontaminer, les moyens de soufflage d'air propre à l'oblique comprenant des canaux percés à l'oblique dans la paroi.In other words, the method according to the invention makes it possible to effectively decontaminate a surface of an object and where appropriate, properly confining a surface sample of an object to be qualified in terms of particulate or biological surface cleanliness. A device for particulate surface decontamination of an object, comprising:
  • blowing means for blowing clean air obliquely on a given surface of the object,
  • suction means for sucking the oblique air blown off containing any potential surface contaminants,
the blowing means are further adapted to blow clean air with a different blow oblique at different points of the surface to be analyzed is also described here. According to an alternative embodiment, the device may comprise a head intended to be in contact with the object and comprising a wall adapted to come opposite that of the object to be decontaminated, the means of blowing clean air to the oblique with channels drilled obliquely in the wall.

On peut définir avantageusement une section transversale de paroi qui a une forme concave, avec des canaux obliques répartis sur la concavité de la paroi. On peut également définir une section transversale de paroi de forme plane, c'est-à-dire avec la surface en regard de la surface à décontaminer qui est plane et dont la surface est sensiblement égale à celle à décontaminer. Dans le cadre de l'invention, lorsque la forme de la section transversale de paroi est plane, l'air propre est soufflé à une distance égale quel que soit le canal oblique depuis lequel il sort, tandis que lorsque la forme est concave, l'air propre est soufflé à différentes distances depuis la sortie d'air oblique.It is advantageous to define a wall cross section which has a concave shape, with oblique channels distributed over the concavity of the wall. It is also possible to define a cross-section of a wall of planar shape, that is to say with the surface facing the surface to be decontaminated which is flat and whose surface is substantially equal to that to decontaminate. In the context of the invention, when the shape of the wall cross section is flat, the clean air is blown at an equal distance regardless of the oblique channel from which it exits, whereas when the shape is concave, the clean air is blown at different distances from the oblique air outlet.

Selon une autre variante de réalisation, le dispositif peut comprendre une tête destinée à être en contact avec de l'objet et comprenant une paroi adaptée pour venir en regard de celle de l'objet à décontaminer, les moyens de soufflage d'air propre à l'oblique comprenant des buses orientables et agencées dans la paroi.According to another variant embodiment, the device may comprise a head intended to be in contact with the object and comprising a wall adapted to face the one of the object to be decontaminated, the means of blowing clean air to the oblique comprising steerable nozzles and arranged in the wall.

Avantageusement, la tête comprend une semelle de contact avec l'objet, réalisée en matériau(x) chimiquement neutre(s) vis-à-vis de l'objet, et agencée à la périphérie de la paroi.Advantageously, the head comprises a contact sole with the object, made of material (x) chemically neutral (s) vis-à-vis the object, and arranged at the periphery of the wall.

Dans le cadre de l'invention, l'expression «chimiquement neutre(s) » signifie que la (les) partie(s) considérée(s) est (sont) réalisée(s) en un ou plusieurs matériaux présentant l'ensemble des caractéristiques suivantes :

  • un taux de dégazage défini, par exemple, tel que la perte de masse totale est inférieure à 1% selon le test ECSS Q70-2A et tel que la quantité volatile recondensée est inférieure à 0,1% selon le même test,
  • une inertie chimique définie, par exemple, telle que la perte ou le gain de masse suite à une potentielle réaction chimique soit inférieure à 1% en masse,
  • une aptitude à générer des particules définie, par exemple, telle que le niveau de contamination surfacique soit inférieur à un niveau 100 par exemple, selon la norme IEST 1246D.
In the context of the invention, the expression "chemically neutral (s)" means that the part (s) considered is (are) carried out in one or more materials presenting all the following characteristics:
  • a degassing rate defined, for example, such that the total weight loss is less than 1% according to the ECSS Q70-2A test and such that the recondensed volatile quantity is less than 0.1% according to the same test,
  • a chemical inertia defined, for example, such that the loss or mass gain following a potential chemical reaction is less than 1% by weight,
  • an ability to generate particles defined, for example, such that the level of surface contamination is less than a level 100 for example, according to the standard 1246D IEST.

Le dispositif peut en outre comprendre des moyens pour générer un coussin d'air non contaminant en dessous de la semelle de contact afin de déplacer le dispositif entre deux surfaces différentes déterminées.The device may further include means for generating a non-contaminating air cushion below the contact flange to move the device between two different determined surfaces.

L'invention concerne enfin l'application du procédé décrit ci-dessus ou du dispositif visé ci-dessus à la décontamination particulaire de surface dans des zones à environnement maîtrisé. Dans certaines industries (spatial, micromécanique, optique, nanotechnologies mais aussi industrie pharmaceutique et agroalimentaire, hôpitaux...), il peut s'avérer particulièrement intéressant de garantir une propreté des surfaces d'un objet.The invention finally relates to the application of the method described above or the device referred to above to particulate surface decontamination in controlled environment areas. In certain industries (space, micromechanics, optics, nanotechnology, but also pharmaceutical and food industry, hospitals ...), it can be particularly interesting to ensure cleanliness of the surfaces of an object.

BRÈVE DESCRIPTION DES DESSINSBRIEF DESCRIPTION OF THE DRAWINGS

D'autres avantages et caractéristiques de l'invention ressortiront mieux à la lecture de la description détaillée d'un exemple de réalisation faite en référence aux figures suivantes :

  • la figure 1 est une représentation schématique d'un dispositif de décontamination particulaire de surface selon l'invention,
  • les figures 2 et 3 montrent, en vue de coupe, deux modes de réalisation différents d'une tête implantée dans un dispositif selon l'invention.
Other advantages and features of the invention will emerge more clearly on reading the detailed description of an exemplary embodiment made with reference to the following figures:
  • the figure 1 is a schematic representation of a particulate surface decontamination device according to the invention,
  • the Figures 2 and 3 show, in sectional view, two different embodiments of a head implanted in a device according to the invention.

EXPOSÉ DÉTAILLÉ DE MODES DE RÉALISATION PARTICULIERSDETAILED PRESENTATION OF PARTICULAR EMBODIMENTS

Le dispositif selon l'invention 1 représenté schématiquement permet de réaliser la décontamination particulaire une surface S' d'un objet dont on cherche à contrôler et/ou décontaminer la surface totale S.The device according to the invention 1 shown schematically makes it possible to carry out the particulate decontamination a surface S 'of an object whose control surface is sought to be controlled and / or decontaminated.

Le dispositif 1 comprend tout une tête 2 adaptée pour venir en contact avec la surface S de l'objet par l'intermédiaire d'une semelle 20 réalisée en un ou plusieurs matériaux chimiquement neutre(s) par rapport à l'objet, tel(s) que du téflon. Dans les modes de réalisation illustrés, la semelle 20 est agencée à la périphérie de la paroi 21 de tête 2 depuis laquelle le soufflage oblique est réalisé.The device 1 comprises a whole head 2 adapted to come into contact with the surface S of the object via a sole 20 made of one or more chemically neutral materials (s) with respect to the object, such ( s) Teflon. In the illustrated embodiments, the sole 20 is arranged at the periphery of the head wall 2 from which oblique blow molding is performed.

Des moyens de soufflage 3 sont prévus pour respectivement souffler de l'air propre à l'oblique sur la surface S'. Ces moyens de soufflage 3 comprennent un conduit de soufflage 30 avec lequel est connecté une pompe avec filtre 31 permettant de souffler par refoulement tout en filtrant l'air afin de le rendre propre. Ce conduit de soufflage 30 débouche sur des canaux pratiqués dans une paroi 21 de la tête 2 (figures 1 à 3) ou sur des buses orientables intégrées dans la tête 2 (non représentés ici).Blowing means 3 are provided for respectively blowing clean air obliquely on the surface S '. These blowing means 3 comprise a blowing duct 30 with which is connected a pump with filter 31 for blowing back while filtering the air to make it clean. This blowing duct 30 opens out on channels made in a wall 21 of the head 2 ( Figures 1 to 3 ) or on steerable nozzles integrated in the head 2 (not shown here).

Dans le mode de réalisation illustré en figures 1 et 3, la paroi 21 présente une section transversale concave, c'est-à-dire qu'elle définit une concavité entre la surface S' de l'objet à décontaminer, lorsque la tête 2 est en contact avec celui-ci. La section générale concave de la paroi 21 peut être hémisphérique ou hémicylindrique ou hémi-ellipsoïdale. Par ailleurs, la section longitudinale de la paroi 21 peut être rectangulaire ou carrée.In the embodiment illustrated in figures 1 and 3 , the wall 21 has a concave cross section, that is to say it defines a concavity between the surface S 'of the object to be decontaminated, when the head 2 is in contact therewith. The concave general section of the wall 21 may be hemispherical or semicylindrical or hemi-ellipsoidal. Furthermore, the longitudinal section of the wall 21 may be rectangular or square.

Selon ce mode, les canaux de soufflage 200 sont pratiqués de manière à souffler individuellement de l'air oblique, selon une multiplicité d'angle oblique : SOUFF1, SOUFF2, SOUFF3, SOUFF4... L'aspiration ASP se fait dans la partie centrale de la paroi concave 21 de tête.According to this mode, the blowing channels 200 are made to individually blow oblique air at a multiplicity of oblique angle: SOUFF1, SOUFF2, SOUFF3, SOUFF4 ... Asp suction is done in the central part of the concave wall 21 of the head.

Selon le mode de réalisation de la figure 2, la paroi 21 constituée par un cylindre plein de hauteur faible par rapport à son diamètre Dans l'ensemble des modes de réalisation illustrés, l'aspiration est réalisé par des moyens adaptés 4 comprenant un conduit d'aspiration 40 connecté à un canal 22 réalisé dans la partie centrale de la paroi 21 de tête. Ainsi, l'aspiration se fait sensiblement selon une direction orthogonale ASP à la surface S' à décontaminer. Sur la figure 2, les canaux obliques 200 sont tous percés avec une sortie identique et rasante avec un angle rasant compris entre 0 et 45°. Un débit d'aspiration de l'ordre de 100 l/min et une vitesse d'aspiration comprise entre 3 et 12,5 m/s ont donné entière satisfaction.According to the embodiment of the figure 2 , the wall 21 constituted by a cylinder full of height small relative to its diameter In all the illustrated embodiments, the suction is achieved by suitable means 4 comprising a suction duct 40 connected to a channel 22 made in the central part of the head wall 21. Thus, the suction is substantially in an orthogonal direction ASP to the surface S 'to be decontaminated. On the figure 2 , the oblique channels 200 are all drilled with an identical and grazing output with a grazing angle of between 0 and 45 °. A suction flow rate of the order of 100 l / min and a suction speed of between 3 and 12.5 m / s gave complete satisfaction.

On pourrait envisager une aspiration périphérique supplémentaire qui collecterait préférentiellement les particules de plus grande taille. Dans la variante où l'on rajoute une aspiration supplémentaire dans une paroi de tête concave, on réalise en quelque sorte une double aspiration avec l'une réalisée sur le bas de la paroi (la plus proche de l'objet en position de décontamination) et avec l'autre réalisée sur le haut de la paroi de tête.An additional peripheral suction could be envisaged which would preferentially collect the larger particles. In the variant where an additional suction is added in a concave head wall, a double suction is realized with one carried out on the bottom of the wall (the closest one). of the object in decontamination position) and with the other carried on the top of the head wall.

Dans l'ensemble des modes de réalisation illustrés, il est prévu que la pompe 31 soit en outre connectée au conduit 40 d'aspiration afin que celle-ci évacue les éventuels contaminants particulaires aspirés.In all the illustrated embodiments, it is provided that the pump 31 is further connected to the suction pipe 40 so that it discharges any particulate contaminants sucked.

A titre de variante, on peut prévoir de collecter les particules aspirées en aval dans le conduit d'aspiration 40 sur une membrane de filtration 5. A l'endroit où est implantée la membrane de filtration, on peut également prévoir de réaliser une fenêtre 6 afin de contrôler visuellement l'état de propreté de la membrane. La récupération de la membrane de collecte permet des analyses physico-chimiques par la suite. La membrane peut être confinée et subir un traitement chimique ou physico-chimique si les particules contaminant la surface S présentent une toxicité.Alternatively, it is possible to collect the particles sucked downstream in the suction pipe 40 on a filtration membrane 5. At the location where the filtration membrane is located, it is also possible to provide a window 6 in order to visually check the state of cleanliness of the membrane. Recovery of the collection membrane allows physico-chemical analyzes thereafter. The membrane may be confined and undergo chemical or physico-chemical treatment if the particles contaminating the surface S exhibit toxicity.

On peut également envisager d'implanter un dispositif de comptage, par exemple optique implanté en aval. Celui-ci est de préférence adapté pour quantifier des particules de taille unitaire comprise entre une valeur inférieure de l'ordre de 0,1 µm et une valeur supérieure de l'ordre de 10 µm qui passent dans le conduit 40.One can also consider implementing a counting device, for example optics implanted downstream. This is preferably adapted to quantify particles of unit size between a lower value of the order of 0.1 μm and a higher value of the order of 10 μm which pass in the duct 40.

La tête 2 du dispositif comprend une semelle 20 de contact avec l'objet, qui est réalisée en matériau(x) chimiquement neutre(s) vis-à-vis de la surface S de l'objet. Cette semelle 60 peut être avantageusement en téflon. La géométrie de la semelle 20 (par exemple carrée ou circulaire) peut être avantageusement adaptée à la géométrie des surfaces S' à qualifier selon la norme ISO 14644-9.The head 2 of the device comprises a sole 20 of contact with the object, which is made of material (x) chemically neutral (s) vis-à-vis the surface S of the object. This sole 60 may be advantageously Teflon. The geometry of the sole 20 (for example square or circular) can be advantageously adapted to the geometry of surfaces S 'to be qualified according to ISO 14644-9.

La tête 2 du dispositif 1 peut éventuellement se déplacer de façon autonome sur coussin d'air non contaminant pour un contrôle téléguidé point par point de décontamination ou automatisé de grande surface.The head 2 of the device 1 can optionally move autonomously on a non-contaminating air cushion for remote controlled control point by point of decontamination or automated large area.

Le fonctionnement du dispositif 1 selon l'invention est le suivant :

  1. 1) positionnement de la partie tête 2 du dispositif 1 sur une surface à décontaminer S' avec mise en contact entre la semelle 20 et l'objet,
  2. 2) soufflage d'air oblique et rasant selon une incidence oblique donnée à une distance donnée (figure 2) ou selon une multiplicité d'incidence oblique (figures 1 et 3) à différentes distances de la surface S',
  3. 3) aspiration de l'air contenant les particules en suspension.
The operation of the device 1 according to the invention is as follows:
  1. 1) positioning of the head portion 2 of the device 1 on a surface to be decontaminated S 'with contact between the sole 20 and the object,
  2. 2) oblique and rasping air blow at a given oblique incidence at a given distance ( figure 2 ) or in a multiplicity of oblique incidence ( figures 1 and 3 ) at different distances from the surface S ',
  3. 3) suction of the air containing the particles in suspension.

L'invention permet d'obtenir les avantages suivants :

  • décontamination particulaire des surfaces sans utilisation de solvant ou de liquide,
  • contrôle de l'efficacité de la décontamination en temps réel,
  • garantie de la collecte et/ou du confinement des contaminants particulaires détachés de la surface pour un confinement/traitement éventuel ou une analyse physico-chimique ultérieure.
The invention makes it possible to obtain the following advantages:
  • particulate decontamination of surfaces without the use of solvent or liquid,
  • control of the efficiency of decontamination in real time,
  • guarantee of the collection and / or confinement of particulate contaminants detached from the surface for a possible containment / treatment or physico-chemical analysis.

D'autres améliorations peuvent être envisagées sans pour autant sortir du cadre de l'invention. Ainsi, l'aspiration peut être faite simultanément au soufflage oblique dès le début de celui-ci ou après une certaine durée de latence. Cette dernière pourra être choisie en fonction de la nature des particules à aspirer, de la surface de l'objet à décontaminer, et du débit d'aspiration.Other improvements may be envisaged without departing from the scope of the invention. Thus, the suction can be made simultaneously oblique blow at the beginning of it or after a certain period of latency. The latter may be chosen according to the nature of the particles to be sucked, the surface of the object to be decontaminated, and the suction flow rate.

Claims (6)

  1. Method for the particulate decontamination of a surface (S) of an object; whereon are present possible surface particulate contaminants of a size between 0.05 µm and 500 µm, by placing a head (2) in contact with the surface of the object, comprising the following steps:
    a) blowing of clean air over a determined surface (S') of the object,
    b) suction of the blown air containing any particulate contaminants,
    with said head comprising a wall (21) adapted to face that of the object to be decontaminated and also a contact sole (20) with a surface of the object, made of material(s) that are chemically neutral with respect to the object, and arranged at the periphery of the wall, characterised in that the step a) is carried out of blowing obliquely at a slant with a blowing oblicity that is different at different points of the determined surface.
  2. Method according to claim 1, according to which the oblique blowing is carried out by creating a razing angle, less than 45° with respect to the determined surface.
  3. Method according to claim 2, according to which the razing angle is between 0 and 45°.
  4. Method as claimed in any preceding claim, according to which the surface particulate contaminants by suction are collected downstream.
  5. Method as claimed in any preceding claim, according to which a quantification is carried out of at least a portion of the particles sucked by at least one counting device suited for counting particles of a unit size included within a given range of values.
  6. Application of the method according to any of claims 1 to 5, to the surface particulate decontamination in controlled environment areas.
EP09779880.5A 2008-06-26 2009-06-23 Process for removing particles from a surface by improved suction Not-in-force EP2307151B1 (en)

Applications Claiming Priority (2)

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FR0854263A FR2933012B1 (en) 2008-06-26 2008-06-26 METHOD AND DEVICE FOR PARTICULAR DECONTAMINATION OF SURFACE BY IMPROVED EXTRACTION
PCT/EP2009/057761 WO2010003812A1 (en) 2008-06-26 2009-06-23 Method and device for the improved particulate decontamination of a surface by extraction

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EP2307151B1 true EP2307151B1 (en) 2017-08-30

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FR2933012A1 (en) 2010-01-01
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