EP2232520A1 - Radiogenic source comprising at least one electron source combined with a photoelectric control device - Google Patents
Radiogenic source comprising at least one electron source combined with a photoelectric control deviceInfo
- Publication number
- EP2232520A1 EP2232520A1 EP09703777A EP09703777A EP2232520A1 EP 2232520 A1 EP2232520 A1 EP 2232520A1 EP 09703777 A EP09703777 A EP 09703777A EP 09703777 A EP09703777 A EP 09703777A EP 2232520 A1 EP2232520 A1 EP 2232520A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ray source
- source according
- ray
- target
- photocathodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/06—Cathode assembly
- H01J2235/062—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/06—Cathode assembly
- H01J2235/068—Multi-cathode assembly
Definitions
- X-ray source comprising at least one electron source associated with a photoelectric control device.
- the field of the invention is that of the X-ray sources, generally used in industrial, scientific and medical applications in order to provide the flow of photons that makes it possible, in particular, to produce the images according to different reconstruction techniques in two or three spatial dimensions.
- These X-ray sources are also interesting in the field of safety, including inspection of luggage and parcels by X-rays.
- X transmission is another usable technique. It gives access to a combination of the density of the material p and its effective atomic number Z ⁇ , but not to each of these two quantities separately, and moreover, the contributions of several elements constituting the package are superimposed according to the thickness crossed. 3D imaging by transmission to a power allows a mapping of the attenuation coefficient ⁇ at any point of an object. This technique therefore makes it possible to overcome the thickness traversed.
- the attenuation coefficient ⁇ is a function of the density of the material p, of its Z e ff and depends on the energy.
- the multi-energy X-ray transmission in 3D finally makes it possible to determine p, and Z e tf.
- FIG. 1a showing a filament filament facing an anode A
- a first limitation comes from inertia thermal of this type of cathode prohibiting a fast modulation of the current therefore the dose rate RX (given energy, the dose rate is often controlled by the current delivered by the cathode, if the rising or stopping fronts are not steep, this will result in transient phases of X-ray emission that can affect the quality of the image received on the detector).
- a second limitation is related to the need to have a complex filament supply, if it is referenced to the high voltage.
- the various insulating passages for polarizing grid, filament and cathode are also more complex and bulky because they have to withstand the high voltages (20 to 60OkV) generally encountered in the X-ray tubes.
- each X-ray source generally consists of at least one cathode, a filament, a current control gate (if it is modulated), brought to different high voltages through a high voltage insulator as shown in FIG. 2c. .
- the final size of the X-ray source is strongly influenced by the size of this insulation. Given these constraints of connection and electrical isolation, it is very difficult to consider two (or more) X sources in the same vacuum envelope. Thus existing systems comprising several sources X consist of several separate X-ray tubes.
- the gate cathode capacity limits the maximum modulation frequency
- the current emitted by the cathode varies exponentially with the voltage applied to the gate degrading the quality of the servocontrol of the current emitted by the cathode
- the gate is not completely transparent to the electronic flux, it intercepts from 30 to 50% of the current emitted by the cathode, favoring the dimensional variations of this grid resulting from warming and consequently generating instability of the current emitted by the cathode due to the exponential variation described above. Thermal inertia and embrittlement are aggravating factors. • The fraction of current intercepted by the grid and heating thereof resulting therefrom are also limitations for use of this type of cathode at high currents (a few tens of mA). For example, for a cathode of an X-ray tube whose voltage would be 15kV for a current of 2 mA, a gate intercepting 40% of the current should dissipate 120W.
- 3D imaging devices are of two types. In the first type, they comprise an X-ray generator and a detector facing each other, making it possible to measure the radiation that has passed through the object or the patient. In order to multiply the angles of view, these systems require the rotation of the source and the detector or the object or the patient. These systems are generally heavy and complex and require a significant analysis time incompatible with the new needs.
- the second type allows 3D imaging techniques without any movement of the system or the object. They require several X-ray generators and several detectors allowing the observation under different incidences and imposing a recombination of the images obtained to extract the 3D information. These so-called tomosynthesis systems are simpler than the previous ones and can greatly reduce the analysis time and the complexity of the system.
- some X-ray tubes include, in addition to the continuous high voltage, a linear accelerator (linac, abbreviated Anglo-Saxon) to carry the electrons at very high energy in order to produce X-rays themselves of very high energy.
- the injection of electrons into an accelerator structure of a linear accelerator is carried out in its conventional configuration using a cathode-based thermononic effect electron gun with grid or without grid.
- the electronic emission is controlled by the heating of the cathode filament and / or the polarization of the control gate.
- the present invention proposes in response an X-ray source comprising a cold source of electrons subjected to an electric field and operating by field emission, and a photoconductive element placed in series with the electron emitter so that the photogenerated current by illumination in the photoconductive device is equal to that of the transmitter.
- the emitted current is controlled by illumination, directly, and not via a voltage control of an extraction electrode.
- This arrangement guarantees a linear dependence of the emission current with the illumination and a very sensitive servocontrol of very good quality of the emitted current.
- the subject of the invention is an X-ray source comprising at least one vacuum chamber, means for introducing an optical wave, at least one cold source capable of emitting electrons in a vacuum by the phenomenon of the emission of field when subjected to a field, at least one supply providing a high electrical voltage, at least one anode comprising a material capable of emitting X-rays under the effect of electronic bombardment and at least one window allowing the exit of X-rays, at least one source of light providing said optical wave, characterized in that the cold source comprises at least one substrate provided with at least one conductive surface, and is subjected to an electric field resulting from the application of the high voltage between at least one conductive surface and the anode; said cold source further comprising at least one photoconductive element in which the current is controlled by illumination and at least one electron emitting element, said photoconductive element being electrically connected in series between at least one emitter element and a conductive surface, so that the photogenerated current in the photoconductive device is equal to that of the emitter or group of
- the cold source can operate without extraction grid.
- the cold source can thus be set at the high negative voltage, and the target anode at the electrical ground, simplifying the cooling of the target anode.
- such a system simplifies the galvanic decoupling of the current control devices, by the galvanic isolation provided by the optical control.
- control circuits can be at low voltage.
- the conductive surface (s), the photoconductor (s) and the emitting element (s) are integrated on the substrate in a monolithic manner and thus constitute a photocathode.
- the source comprises at least one cold source of electrons with emitting points.
- the source comprises an emitting tip for forming a point source for high resolution X-ray imaging.
- a single emitting tip whose sharp image produced by an electronic optics on the target X is necessarily smaller (substantially punctual) than that of a network of emitting points.
- An image of the object studied with such a source X will necessarily be higher resolution than an image obtained with an X source associated with an extended network of points.
- the source comprises at least one cold source of electron emitting tip carbon nanotube or metal nanowires.
- the target material of the electron bombardment is tungsten or composite comprising tungsten or other high Z refractory material.
- photoconductive device device whose conduction state is controlled by illumination.
- the photoconductive device is of the semiconductor photodiode type with a PIN structure where P denotes a P doped zone, I designates an intrinsic or unintentionally doped or slightly doped zone, and N denotes an N doped zone.
- the photoconductive device is a MIN diode or M denotes a metal zone,
- the photoconductive element comprises a metal layer with at least one of its contact faces.
- the cold source comprises at least one conductive substrate comprising at least one electron emitter and a photoconductive device so as to form at least one photocathode.
- the cold source comprises at least one conducting substrate at least one point whose apex is at a height h with respect to the conductive substrate and at least one photoconductive element disposed between the tip and the conductive substrate such that the tip is remote from its possible neighbors by a distance d substantially equal to or greater than twice the height h, and such that the lateral dimensions phi of the photoconductive elements are approximately equal to or less than the height h.
- the emitters or groups of emitters are arranged in regular networks.
- the substrate comprises a so-called front face supporting the emitter element, the light source illuminating said front face.
- the substrate is transparent to said light source, said light source illuminating said substrate opposite to the front face.
- the substrate has a thinned zone intended to be illuminated, so as to minimize the phenomena of absorption, said source of light illuminating said substrate opposite to the front face.
- the X-ray source further comprises means for adjusting the optical power of the light source to adjust the power of X-rays generated. It can also advantageously include means for adjusting the focus of the light source on the electron source.
- the source comprises a monotube X of cylindrical symmetry comprising an enclosure, enclosing a photocathode, a target, a mirror for illuminating the photocathode with a light beam perpendicular to the axis of the mono-tube from of the illumination source, and an optical window for collecting the emission X.
- the X-ray source comprises several single-tubes X, a circular support supporting said radially arranged mono-tubes X, a high-voltage power supply, distribution means of said high-voltage power supply on the different single-tubes. in order to produce X-ray beams, and individual independent optical control means dedicated to each of the single-tubes.
- said optical control beams and the X-ray beams are all parallel to each other and perpendicular to said circular support.
- the X-ray source further comprises means for converging said X-ray beams.
- the X-ray source comprises an enclosure, several assemblies each consisting of a pair consisting of a photocathode associated with a target and power distribution means of said photocathodes.
- the enclosure has a concave shape so as to generate convergent X-ray beams.
- the X-ray source comprises:
- an extended photocathode or a set of photocathodes a so-called extended target or set of targets respectively facing said extended photocathode or the set of photocathodes;
- the source comprises a spatial and / or temporal modulator making it possible to deflect a beam originating from the illumination source, to different areas of the extended photocathode or different photocathodes among a set of photocathodes.
- the addressing device is a spatial light modulator illuminated by an extended beam for transferring different illumination laws to an area of the extended photocathode or a photocathode in the set of photocathodes, and obtaining the corresponding X-ray emission laws from an extended target area or target of the set of targets.
- the source comprises a set of illumination sources and is characterized in that the addressing device is an opto-mechanical or opto-electric deflector and activates illumination sources associated in a one-to-one manner. to different areas of the extended photocathode or to different photocathodes in the set of photocathodes, said zones or photocathodes being associated one-to-one with different areas of the extended target or with different targets in the set of targets.
- the light power distribution is carried out at least partly by guided propagation (optical fibers) instead of spatial propagation.
- the vacuum chamber comprises passages for the optical fibers
- the spatial modulators are of guided propagation type.
- the spatial modulators are of guided propagation type.
- the X-ray source comprises a vacuum chamber, and at least one compound triplet coaxially and consecutively: a photon-transparent window of a photocathode polarized at the negative high voltage of a target and the power supply means of these elements.
- the X-ray source provides an arrangement of the triplets so that they generate spatially convergent X-beams.
- the X-ray source provides an arrangement of the triplets so that they generate parallel X-beams organized in a matrix manner. According to a variant of the invention, the X-ray source provides an arrangement of the triplets so that they generate parallel X-beams and organized circularly.
- the X-ray source provides an arrangement of the triplets so that they generate parallel groups of X-beams, these groups being perpendicular to each other.
- the X-ray source further comprises at least one linear accelerator for accelerating the electrons emitted by the electron source.
- the applied illumination allows a unit control of the current of each emitter avoiding the risks of destruction of these emitters related to differences in the height of the nanotubes and which are encountered in the case of control by an electrode or conductive plane whose voltage is varied.
- No emitter array has to be defined structurally, as in the case of control by an electrode or conductive plane whose voltage is varied, thus allowing any possible definitions of the emitting zones engaging at least one photocathode .
- FIGS. 1a, 1b illustrate examples of thermionic cathodes of the known art
- FIGS. 2a, 2b and 2c illustrate examples of thermionic cathodes of the known art further comprising an intermediate gate
- FIGS. 3a and 3b illustrate examples of cold cathodes according to the known art
- FIG. 4 illustrates a principle of X-ray source according to the invention
- FIG. 5 schematizes an X-ray source according to the invention relating to a monotube X of cylindrical symmetry
- FIGS. 6a and 6b illustrate another example of an X-ray source according to the invention relating to several radially arranged monotubes X
- FIGS. 7a, 7b, 7c and 7d illustrate another example of an X-ray source according to the invention, relating to an enclosure enclosing a plurality of sources arranged differently;
- FIG. 8 shows an example of modulation of the electronic spot on the target only related to the zone of illumination (no grid or "emitter array” mechanically determining the emission zones);
- FIGS. 9a and 9b illustrate the difference in current response of the transmitter (exponential in the presence of a control gate, linear in the presence of a photocathode according to the invention).
- FIGS. 10a and 10b illustrate the ability to activate local emissive zones radiating an extended target
- FIG. 11 a presents a schematic diagram of the invention
- FIGS. 11b, 11c, 11d specify alternative configurations of integrated photocathodes.
- the invention proposes the implementation in the same X-ray source, one or more cold cathodes whose remission is controlled by a photoconductive device, this type of device can typically be of type such as that described in the patent No.
- the X-ray source of the invention comprises at least one photoconductive control device 10, an electron source 11 that irradiates a target 12 so that the latter emits an X-ray beam , 13.
- This type of optical decoupling makes it possible to envisage multiple source configurations in the same vacuum chamber, localized or spatially distributed and producing a continuous X-ray or modulated temporally according to the illumination of the photo cathode.
- the X-ray source is a single-beam source and comprises a vacuum enclosure 20, high-voltage supply means 21 and means electrical insulation 22, an illumination source 23 directing a light beam 24 towards an optically reflective device 25 for the wavelengths used to excite the light-sensitive layers of a cathode 26 enabling generating a stream of electrons 27, towards a target 28.
- the bombardment of said target then generates the X-ray flux, 30 through a window 29 transparent to said X-rays which the enclosure is equipped with.
- the enclosure may also be equipped with cooling means 31 for the target subjected to intense heating during the bombardment operations by the electron flows.
- the X-ray source has a multiplicity of ray fluxes
- X, 40i thanks to the presence of a series of enclosures (X-ray tubes) 41 i distributed in a circular support 42, said circular support further comprises means for distributing a high-voltage power supply 43 as illustrated in FIG. Figure 6a and 6b.
- the X-ray source may also be multi-beam and include a single enclosure as shown in Figure 7a, 7b, 7c, 7d.
- said enclosure 50 may advantageously be in several forms integrating electron sources arranged differently.
- the non-exhaustive examples show a planar convergent organization (FIG. 7a), parallel organized circularly (FIG. 7b), parallel organized perpendicularly (FIG. 7c), parallel organized in a matrix manner (FIG. 7d).
- FIG. 8 illustrates an example of means for modulating the electronic spot on the target only linked to the illumination zone (no grid or "emitter array” mechanically determining the emission zones).
- the present invention proposes in response an X-ray source comprising an electrically-field-fed cold-field source operating by field emission, and a photoconductive element placed in series with the electron-emitter so that the photogenerated current by illumination in the photoconductive device is equal to that of the transmitter.
- the emitted current is controlled by illumination, directly, and not via a voltage control of an extraction electrode.
- This arrangement guarantees a linear dependence of the emission current with the illumination and a very sensitive servocontrol of very good quality of the emitted current.
- Figures 9a and 9b illustrate the difference in current response of the transmitter.
- this response is exponential in the presence of a control gate, and linear in the presence of a photocathode according to the invention.
- multi-beam X-ray sources comprising a set of elementary electron sources associated with elementary targets.
- the multi-beam X-ray source may also comprise an extended electron source, comprising electron emission zones, capable of irradiating an extended target to generate X-ray beams (as illustrated in FIGS. 10a and 10b).
- This type of source associated with scanning means can typically be used for an imaging configuration such as fluoroscopy for example.
- the X-ray source is a micro-focus or nano-focus source comprising optical means providing a focus such that a single nanotube is addressed to generate an electron beam.
- the target irradiated with a single nanotube consequently also provides a very small focal spot x-ray beam.
- the diameter of the spot of the micro or nano source X can be adjusted according to the surface of the illuminated area and thus allow to enslave the spot diameter according to the power density on the target.
- a focusing system, magnetic or electrostatic may be used to focus on the target all the electrons emitted by the end of the nanotube in a thermal spot of size comparable to that of the emitting surface, being of the order of 10 to 100 nm in diameter.
- This type of X-ray source can advantageously provide access to non-destructive control of integrated circuit transistor gate, for example.
- the X-ray source may also comprise an accelerator structure called "linac". associated with the cold source, a photoelectric device for controlling the emission of electrons by the cold source, and a light source for controlling by illumination said photoelectric device.
- linac an accelerator structure associated with the cold source
- a photoelectric device for controlling the emission of electrons by the cold source
- a light source for controlling by illumination said photoelectric device.
- the combination allows a simplification of the accelerator, a reduction in its volume and an improvement in the quality of the electron beam and the X-radiation it produces.
- the first cavities of the accelerator conventionally dedicated to the temporal shaping of the beam can be simplified;
- the beam is easily focused at the output of the accelerator, allowing very specific sources of radiation on the conversion target;
- Figures 11a, 11b, 11c and 11d illustrate in detail an example of an X-ray source of the invention.
- this X-ray source comprises a vacuum chamber 50, means 56h for introducing an optical wave 56i, a cold source 52 capable of emitting electrons 52i in a vacuum by the phenomenon of field emission when it is subjected to a field, a power supply 55 providing a high electrical voltage, an anode 53 comprising a material 53j capable of emitting X-rays, 53i under the effect of electronic bombardment and at least one window 54 enabling the X-ray output, at least one light source 56 providing said optical wave.
- the cold source also comprises at least one substrate 57 provided with at least one conductive surface 55, and is subjected to an electric field resulting from the application of the high voltage between at least one conductive surface 55 and the anode 53; said cold source further comprising at least one photoconductive element 58 in which the current is controlled substantially linearly by the illumination and at least one electron emitting element 59, said photoconductive element 58 being electrically connected in series between at least one transmitting element 59 and a conductive surface 55, so that the photogenerated current in the photoconductive device is equal to that emitted by the emitter or group of emitters with which it is associated, and so that the emitted X-ray flux is substantially linearly depending on the illumination.
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- X-Ray Techniques (AREA)
Abstract
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0800397A FR2926924B1 (en) | 2008-01-25 | 2008-01-25 | RADIOGENIC SOURCE COMPRISING AT LEAST ONE ELECTRON SOURCE ASSOCIATED WITH A PHOTOELECTRIC CONTROL DEVICE |
PCT/EP2009/050809 WO2009092813A1 (en) | 2008-01-25 | 2009-01-23 | Radiogenic source comprising at least one electron source combined with a photoelectric control device |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2232520A1 true EP2232520A1 (en) | 2010-09-29 |
EP2232520B1 EP2232520B1 (en) | 2014-04-30 |
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ID=39672807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09703777.4A Active EP2232520B1 (en) | 2008-01-25 | 2009-01-23 | Radiogenic source comprising at least one electron source combined with a photoelectric control device |
Country Status (6)
Country | Link |
---|---|
US (1) | US8503614B2 (en) |
EP (1) | EP2232520B1 (en) |
JP (2) | JP2011512004A (en) |
CA (1) | CA2713060C (en) |
FR (1) | FR2926924B1 (en) |
WO (1) | WO2009092813A1 (en) |
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CA2713060C (en) | 2017-08-29 |
JP2016033922A (en) | 2016-03-10 |
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