EP2226689A1 - Bridge or plate for a timepiece movement - Google Patents

Bridge or plate for a timepiece movement Download PDF

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Publication number
EP2226689A1
EP2226689A1 EP09154100A EP09154100A EP2226689A1 EP 2226689 A1 EP2226689 A1 EP 2226689A1 EP 09154100 A EP09154100 A EP 09154100A EP 09154100 A EP09154100 A EP 09154100A EP 2226689 A1 EP2226689 A1 EP 2226689A1
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EP
European Patent Office
Prior art keywords
etching
micro
plate
bridge
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09154100A
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German (de)
French (fr)
Inventor
Nakis Karapatis
Fabien Henriet
Lucien Germond
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Montres Breguet SA
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Montres Breguet SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Montres Breguet SA filed Critical Montres Breguet SA
Priority to EP09154100A priority Critical patent/EP2226689A1/en
Priority to TW099103649A priority patent/TW201106122A/en
Priority to US12/714,956 priority patent/US20100220557A1/en
Priority to CN201010124877A priority patent/CN101825863A/en
Priority to JP2010045274A priority patent/JP2010204103A/en
Publication of EP2226689A1 publication Critical patent/EP2226689A1/en
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B29/00—Frameworks
    • G04B29/02—Plates; Bridges; Cocks
    • G04B29/027—Materials and manufacturing

Definitions

  • the invention relates to a bridge or platen made of micro-machinable material comprising a one-piece bearing intended for the manufacture of a watch movement.
  • the object of the present invention is to overcome all or part of the disadvantages mentioned above by providing a bridge or a plate comprising a monobloc bearing for a watch movement whose flatness and accuracy are improved despite its small thickness.
  • the invention relates to a watch movement comprising at least one bridge mounted on a plate with the aid of at least one fixing device, characterized in that the said at least one bridge or the plate is made from a plate of a micro-machinable material and that said at least one bridge or plate comprises at least one bearing formed in one piece with said at least one bridge to support at least one member of said movement.
  • the invention also relates to a timepiece characterized in that it comprises a watch movement according to one of the preceding variants.
  • the invention relates to a method of manufacturing a bearing in a micro-machinable element, characterized in that it comprises step a): etching to form the bearing hole of said bearing.
  • the element chosen for the explanation of the invention is a watch movement bridge generally annotated 1 and intended for a timepiece.
  • the invention is also applicable to the platen of a watch movement or platinum of said movement comprising the bridge cited above.
  • the bridge 1 comprises three bases 3, 5, 7 above which extends the board 9 of said bridge.
  • the three bases 3, 5, 7 and the plate 9 are monoblock.
  • the board 9 has a general crescent shape.
  • the bridge 1 is made from a plate of a micro-machinable material to provide flatness and improved accuracy.
  • a micro-machinable material may be based on silicon, crystalline silica or crystallized alumina.
  • the micromachining of a plate whose faces are already flat, such as for example a silicon wafer makes it possible to guarantee very good ratings.
  • the working precision of the micro-machinable material is achieved by a process using a dry or wet etching which avoids the application of local force for the removal of material.
  • These processes are widely used in particular for engraving computers and processors in microelectronics and guarantee a precision of etching below a micrometer.
  • an attack of the deep reactive ion etching type also known under the terms "Deep Reactive Ion Etching” (DRIE)
  • DRIE Deep Reactive Ion Etching
  • One of the known processes consists, first of all, in coating a protective mask on the surface of the micro-machinable plate by for example, using a photolithography process of a photosensitive resin.
  • the mask-plate assembly is subjected to an attack of the DRIE type, only the parts of the unprotected plate being etched.
  • the protective mask is removed. It is therefore understood that the protective mask directly determines the final shape of the elements etched on the plate. It is thus possible to carry out any form precisely.
  • the blank of the bridge 1 and / or the same plate very thin allows through the use of a micro-machinable material to obtain very accurate dimensions with a very good mechanical strength.
  • the blank can be obtained, at first, by the global engraving of the crescent moon shape, then, in a second step, by the selective removal of a part of the thickness in order to distinguish a thickness for the bases 3, 5, 7 and a smaller thickness for the board 9.
  • the manufactured element is a bridge 1 which comprises three fasteners 2, 4, 6 for securing the bridge 1 to a plate (not shown) by screwing.
  • each fixing device 2, 4, 6 has a hole 11 in the bridge 1 and, in a known manner, a screw (not shown) intended to cooperate in rotation with a threaded recess (not shown) in the plate.
  • the hole 11 in the bridge 1 comprises two distinct sections forming a shoulder 13 intended to serve as a stop for the screw head allowing, after screwing, the holding of the bridge 1 against the platinum.
  • the shoulder 13 comprises a coating 15 for receiving the clamping force of the head of said screw.
  • a coating 15 for receiving the clamping force of the head of said screw.
  • silicon has almost no plastic deformation domain.
  • the silicon breaks rapidly if an induced stress exceeds its yield strength.
  • the coating 15 which comprises a ductile material for each fixing device 2, 4, 6 so as not to damage the bridge 1 is used.
  • the coating 15 may comprise, without limitation, gold, copper, nickel or alloys NiP, TiW, AuCr. It may be formed on the shoulder 13, for example, by vapor deposition such as a cathode sputtering in a thickness, for example, at least equal to 5 microns.
  • Each fixing device 2, 4, 6 may also comprise a foot-recess assembly between said at least one bridge and said plate in order to correctly position these two before fixing them.
  • the fixing device 4 comprises a blind recess 12 intended to cooperate with a foot of the plate.
  • the bridge 1 which also comprises two bearings 8, 10 for supporting two distinct pivots of at least one member of said watch movement. It is understood that these bearings 8, 10 are also applicable to the plate of a watch movement or to the plate of said movement comprising the bridge 1 cited above.
  • each bearing 8, 10 is made in one piece with the bridge 1, that is to say without the use of stones.
  • Each bearing 8, 10 thus comprises a hole 17 forming a pad, that is to say that its wall 19 is used as a sliding surface for the rotation of said organ pivots.
  • the wall 19 of the hole 17 comprises a coating intended to reduce the coefficient of friction and thus reduce the friction with its associated pivot.
  • a coating may comprise silicon dioxide, a nickel-phosphorus-based alloy or a diamond-like carbon (DLC which is an abbreviation of the English term "diamond like carbon").
  • the hole 17 comprises an olivage and / or an oiler 21, at least at its upper part, which is intended to reduce the friction surface with said organ pivot while facilitating its lubrication.
  • the oiler 21 of substantially conical shape increases progressively section from that of the hole 17. It is therefore clear that the pivot of the member rotates against a smaller surface area which allows the reduction of friction. It is also understood that the oiler 21 allows easy lubrication of said pivot capable of further reducing said friction.
  • the manufacturing method 31 of an element such as a bridge 1 and / or a platinum will now be explained in connection with the figure 5 .
  • the method 31 mainly comprises a hole forming step 33, a step of forming the olives and / or oil mills and a step of forming the coatings.
  • the first step 33 is intended to form the holes 11 of each fixing device 2, 4, 6 and / or the holes 17 of each bearing 8, 10.
  • a blank is provided as explained herein. above the bridge 1.
  • the holes 11 and / or 17 are etched using a process comprising photolithography and anisotropic DRIE etching methods.
  • phase 34 is interrupted to remove the second mask.
  • the etching phase 34 is then resumed in order to continue etching the small section and to start the large one at the same time to the desired depth, that is to say to make the small section of the hole 11 open.
  • Step 35 is intended to form olives and / or oilers 21 at at least one end of each bearing hole 8, 10.
  • the invention comprises three embodiments represented respectively by double, single and triple lines.
  • step 35 comprises a phase 36 in which the oilers 21 are etched using a process comprising photolithography and isotropic DRIE etching methods.
  • an isotropic etching makes it possible to etch substantially in the form of a half-sphere, which allows the taper to be made of said oiler.
  • step 35 comprises a phase 38, in which the oilers 21 are etched using a process comprising photolithography and anisotropic DRIE attacking methods, the attacking section of which is successively reduced by modification of the non-anisotropic sections. protected masks of protection.
  • This embodiment forms a substantially stair-shaped oiler 21 and is, for this reason, preferably followed by oxidation in order to smooth said steps.
  • step 35 comprises a phase 40 in which the oilers 21 are etched using an electroerosion process.
  • the electroerosion is carried out with a conical electrode in order to form said conical impression of the oiler 21.
  • the element comprises a material with heavily doped silicon base to increase its electrical conductivity.
  • the method 31 may further comprise step 37 for forming low friction coatings on the wall 19 of the bearing holes 17, 10.
  • a first variant in simple line of step 37 may comprise a phase 42 intended to achieve a physical or chemical vapor or liquid deposition of a material of better tribological quality with respect to said micro-machinable material.
  • This material may be, for example, an alloy based on nickel and phosphorus or a diamond-like carbon (DLC).
  • a second double line variant of step 37 may include a phase 44 for oxidizing said silicon-based material to form a tribological-quality silicon dioxide coating.
  • the method 31 may further comprise the step 37 intended to form the ductile coatings 15 of the shoulders 13 of the fixing devices 2, 4, 6.
  • the step 37 may then comprise a phase 42 intended to achieve a physical or chemical deposit vapor or liquid phase of a ductile material.
  • This material may be, for example, gold, copper, nickel or alloys NiP, TiW, AuCr.
  • a final oxidation step may be performed to form a silicon dioxide layer for mechanically reinforcing the bridge 1 and / or the platinum of silicon-based material.
  • the attachment devices 2, 4, 6 presented use screwing means, however, they can not be limited thereto. They may be replaced by means of driving, gluing or clamping.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Sliding-Contact Bearings (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

The method involves performing anisotropic deep reactive ion etching (DRIE) to form the jewel-holes for the bearings (8,10). An isotropic deep reactive ion etching is performed to form an olive-cut or oil-sink coaxially with respect to the holes of bearings. An independent claim is included for timepiece movement.

Description

Domaine de l'inventionField of the invention

L'invention se rapporte à un pont ou une platine en matériau micro-usinable comportant un palier monobloc destiné à la fabrication d'un mouvement horloger.The invention relates to a bridge or platen made of micro-machinable material comprising a one-piece bearing intended for the manufacture of a watch movement.

Arrière plan de l'inventionBackground of the invention

Il est connu de réaliser des ponts en métal comme du laiton pour supporter les rotations d'au moins un pivot d'un mobile de mouvement horloger, l'autre pivot dudit mobile étant supporté par la platine. Les pivots sont généralement supportés dans des paliers rapportés dans les ponts et la platine. Les paliers habituellement utilisés comportent au moins un coussinet en rubis, également appelé pierre, qui est utilisé pour ses très bonnes caractéristiques tribologiques.It is known to make metal bridges such as brass to support rotations of at least one pivot of a watch movement mobile, the other pivot of said mobile being supported by the plate. The pivots are generally supported in bearings reported in the bridges and the plate. The bearings usually used include at least one ruby pad, also called stone, which is used for its very good tribological characteristics.

Dans certains mouvements horlogers, la finesse du boîtier oblige à réaliser des ponts et/ou une platine de très faibles épaisseurs. La planche des ponts et/ou de la platine, c'est-à-dire la partie la moins épaisse, devient dès lors très difficile à usiner et à travailler. En effet, lors de l'application de l'outil d'usinage ou de l'outil de chassage de la pierre, un phénomène de voilage peut apparaître et causer des pertes de planéité de précision de positionnement desdits éléments.In some watch movements, the fineness of the case makes it necessary to make bridges and / or a plate of very small thicknesses. The board of bridges and / or platinum, that is to say the thinnest part, becomes very difficult to machine and work. In fact, during the application of the machining tool or the tool for driving the stone, a phenomenon of voilage can appear and cause flatness losses of precision positioning of said elements.

Résumé de l'inventionSummary of the invention

Le but de la présente invention est de pallier tout ou partie les inconvénients cités précédemment en proposant un pont ou une platine comportant un palier monobloc pour un mouvement horloger dont la planéité et la précision sont améliorées malgré sa faible épaisseur.The object of the present invention is to overcome all or part of the disadvantages mentioned above by providing a bridge or a plate comprising a monobloc bearing for a watch movement whose flatness and accuracy are improved despite its small thickness.

A cet effet, l'invention se rapporte à un mouvement horloger comportant au moins un pont monté sur une platine à l'aide d'au moins un dispositif de fixation caractérisé en ce que ledit au moins un pont ou la platine est réalisé à partir d'une plaque d'un matériau micro-usinable et ce que ledit au moins un pont ou la platine comporte au moins un palier formé en une seule pièce avec ledit au moins un pont afin de supporter au moins un organe dudit mouvement. Cela permet avantageusement d'obtenir un organe monobloc de grande précision et dont les inconvénients induits par des étapes de montage sont évités.For this purpose, the invention relates to a watch movement comprising at least one bridge mounted on a plate with the aid of at least one fixing device, characterized in that the said at least one bridge or the plate is made from a plate of a micro-machinable material and that said at least one bridge or plate comprises at least one bearing formed in one piece with said at least one bridge to support at least one member of said movement. This advantageously makes it possible to obtain a monobloc member of high precision and the disadvantages of which are induced by mounting steps are avoided.

Conformément à d'autres caractéristiques avantageuses de l'invention :

  • ledit au moins un palier comporte un trou formant coussinet réalisé par gravage permettant de se dispenser d'un empierrage dédié ;
  • la paroi dudit trou formant coussinet comporte un revêtement destiné à améliorer les qualités tribologiques par rapport audit matériau micro-usinable ;
  • ledit trou formant coussinet comporte au moins un olivage ou au moins un huilier permettant de diminuer les frottements ;
  • le matériau micro-usinable est à base de silicium.
According to other advantageous features of the invention:
  • said at least one bearing comprises a hole forming a pad made by etching to dispense with a dedicated staking;
  • the wall of said bearing hole comprises a coating for improving the tribological qualities with respect to said micro-machinable material;
  • said bearing hole comprises at least one olivage or at least one oiler for reducing friction;
  • the micro-machinable material is based on silicon.

L'invention se rapporte également à une pièce d'horlogerie
caractérisée en ce qu'elle comporte un mouvement horloger selon l'une des variantes précédentes.The invention also relates to a timepiece
characterized in that it comprises a watch movement according to one of the preceding variants.

Enfin, l'invention se rapporte à un procédé de fabrication d'un palier dans un élément micro-usinable caractérisé en ce qu'il comprend l'étape a) : réaliser une gravure afin de former le trou du coussinet dudit palier.Finally, the invention relates to a method of manufacturing a bearing in a micro-machinable element, characterized in that it comprises step a): etching to form the bearing hole of said bearing.

Conformément à d'autres caractéristiques avantageuses de l'invention :

  • la gravure est réalisée par un gravage ionique réactif profond du type anisotrope ;
  • le procédé comprend, en outre après l'étape a), l'étape b) : réaliser une deuxième gravure afin de former un olivage coaxialement audit trou ;
  • le procédé comprend, en outre après l'étape a), l'étape b') : réaliser une deuxième gravure afin de former un huilier coaxialement audit trou ;
  • la deuxième gravure est réalisée par gravage ionique réactif profond du type isotrope ;
  • la deuxième gravure est réalisée par une succession de gravages ionique réactif du type anisotrope dont la section d'attaque est successivement diminuée ;
  • la deuxième gravure est réalisée par électroérosion ;
  • le procédé comprend, en outre, l'étape finale c) : former un revêtement sur la paroi dudit trou du coussinet d'un meilleur coefficient de frottement que ledit élément micro-usinable ;
  • l'étape c) comporte la phase d) : réaliser un dépôt physique en phase vapeur d'un matériau d'une meilleure qualité tribologique par rapport audit matériau micro-usinable ;
  • le matériau micro-usinable est à base de silicium ;
  • l'étape c) comporte la phase e) : oxyder ledit matériau à base de silicium afin de former ledit revêtement d'une meilleure qualité tribologique.
According to other advantageous features of the invention:
  • the etching is performed by a deep reactive ion etching of the anisotropic type;
  • the method further comprises, after step a), step b): performing a second etching to form an olivage coaxially with said hole;
  • the method further comprises, after step a), step b '): performing a second etching to form an oiler coaxially with said hole;
  • the second etching is performed by deep reactive ion etching of the isotropic type;
  • the second etching is carried out by a succession of reactive ion etching of the anisotropic type, the leading section of which is successively reduced;
  • the second etching is performed by electroerosion;
  • the method further comprises the final step c): forming a coating on the wall of said bearing hole with a better coefficient of friction than said micro-machinable element;
  • step c) comprises phase d): performing a physical vapor deposition of a material of better tribological quality with respect to said micro-machinable material;
  • the micro-machinable material is based on silicon;
  • step c) comprises the step e): oxidizing said silicon-based material to form said coating of better tribological quality.

Description sommaire des dessinsBrief description of the drawings

D'autres particularités et avantages ressortiront clairement de la description qui en est faite ci-après, à titre indicatif et nullement limitatif, en référence aux dessins annexés, dans lesquels :

  • la figure 1 est une représentation vue en perspective par le dessus d'un pont selon l'invention ;
  • la figure 2 est une représentation vue en perspective par le dessous d'un pont selon l'invention ;
  • la figure 3 est une représentation vue de dessus d'un pont selon l'invention ;
  • la figure 4 est une représentation selon la coupe A-A de la figure 3 ;
  • la figure 5 est schéma fonctionnel du procédé de l'invention.
Other particularities and advantages will emerge clearly from the description which is given hereinafter, by way of indication and in no way limiting, with reference to the appended drawings, in which:
  • the figure 1 is a perspective view from above of a bridge according to the invention;
  • the figure 2 is a perspective view from below of a bridge according to the invention;
  • the figure 3 is a top view of a bridge according to the invention;
  • the figure 4 is a representation according to the AA section of the figure 3 ;
  • the figure 5 is a block diagram of the method of the invention.

Description détaillée des modes de réalisation préférésDetailed Description of the Preferred Embodiments

Comme illustré aux figures 1 à 4, l'élément choisi pour l'explication de l'invention est un pont de mouvement horloger généralement annoté 1 et destiné à une pièce d'horlogerie. Cependant, on comprend que l'invention est également applicable à la platine d'un mouvement horloger ou à la platine dudit mouvement comprenant le pont cité ci-dessus.As illustrated in Figures 1 to 4 , the element chosen for the explanation of the invention is a watch movement bridge generally annotated 1 and intended for a timepiece. However, it is understood that the invention is also applicable to the platen of a watch movement or platinum of said movement comprising the bridge cited above.

Le pont 1 comporte trois bases 3, 5, 7 au-dessus desquelles s'étend la planche 9 dudit pont. Préférentiellement, les trois bases 3, 5, 7 et la planche 9 sont monoblocs. Dans l'exemple illustré à la figure 3, on peut voire que la planche 9 comporte une forme générale en croissant de lune.The bridge 1 comprises three bases 3, 5, 7 above which extends the board 9 of said bridge. Preferably, the three bases 3, 5, 7 and the plate 9 are monoblock. In the example shown in figure 3 it can be seen that the board 9 has a general crescent shape.

Avantageusement, le pont 1 est réalisé à partir d'une plaque d'un matériau micro-usinable permettant d'offrir une planéité et une précision améliorée. Un tel matériau micro-usinable peut être à base de silicium, de silice cristallisée ou d'alumine cristallisée En effet, le micro-usinage d'une plaque dont les faces sont déjà planes, comme par exemple un wafer de silicium, permet de garantir une très bonne tenue des cotes.Advantageously, the bridge 1 is made from a plate of a micro-machinable material to provide flatness and improved accuracy. Such a micro-machinable material may be based on silicon, crystalline silica or crystallized alumina. Indeed, the micromachining of a plate whose faces are already flat, such as for example a silicon wafer, makes it possible to guarantee very good ratings.

De plus, la précision de travail du matériau micro-usinable est obtenue grâce à un processus utilisant une attaque sèche ou humide qui évite l'application de force locale pour l'enlèvement de matière. Ces processus sont très utilisés notamment pour le gravage des calculateurs et des processeurs en microélectronique et garantissent une précision de gravure inférieure au micromètre. Préférentiellement, on utilise une attaque du type gravage ionique réactif profond, connue également sous les termes anglais « Deep Reactive Ion Etching » (DRIE).In addition, the working precision of the micro-machinable material is achieved by a process using a dry or wet etching which avoids the application of local force for the removal of material. These processes are widely used in particular for engraving computers and processors in microelectronics and guarantee a precision of etching below a micrometer. Preferably, an attack of the deep reactive ion etching type, also known under the terms "Deep Reactive Ion Etching" (DRIE), is used.

Un des processus connus consiste, dans un premier temps, à revêtir un masque de protection sur la surface de la plaque micro-usinable, par exemple, à l'aide d'un procédé de photolithographie d'une résine photosensible. Dans un deuxième temps, l'ensemble masque - plaque est soumis à une attaque du type DRIE, seules les parties de la plaque non protégées étant gravées. Finalement, dans un troisième temps, le masque de protection est retiré. On comprend donc que le masque de protection détermine directement la forme finale des éléments gravés sur la plaque. Il est ainsi possible de réaliser n'importe quelle forme de manière précise.One of the known processes consists, first of all, in coating a protective mask on the surface of the micro-machinable plate by for example, using a photolithography process of a photosensitive resin. In a second step, the mask-plate assembly is subjected to an attack of the DRIE type, only the parts of the unprotected plate being etched. Finally, in a third step, the protective mask is removed. It is therefore understood that the protective mask directly determines the final shape of the elements etched on the plate. It is thus possible to carry out any form precisely.

Par conséquent, l'ébauche du pont 1 et/ou de la platine même de très faible épaisseur, i.e. d'environ 0,4 mm, permet grâce à l'utilisation d'un matériau micro-usinable d'obtenir des cotes très précises avec une très bonne tenue mécanique. On comprend donc, dans l'exemple illustré aux figures 1 à 4, que l'ébauche peut être obtenue, dans un premier temps, par le gravage global de la forme en croissant de lune, puis, dans un deuxième temps, par l'enlèvement sélectif d'une partie de l'épaisseur afin de distinguer une épaisseur pour les bases 3, 5, 7 et une plus petite épaisseur pour la planche 9.Therefore, the blank of the bridge 1 and / or the same plate very thin, ie about 0.4 mm, allows through the use of a micro-machinable material to obtain very accurate dimensions with a very good mechanical strength. We therefore understand, in the example illustrated in Figures 1 to 4 , that the blank can be obtained, at first, by the global engraving of the crescent moon shape, then, in a second step, by the selective removal of a part of the thickness in order to distinguish a thickness for the bases 3, 5, 7 and a smaller thickness for the board 9.

Avantageusement, il est également possible lors de l'ébauche de réaliser des évidements sur la partie supérieure de la planche 9 afin d'améliorer l'effet esthétique dudit mouvement. En effet, par exemple, une numérotation, une marque et/ou des décors peuvent également être gravés dans tout ou partie de l'épaisseur de l'élément avec précision.Advantageously, it is also possible during the roughing to make recesses on the upper part of the board 9 to improve the aesthetic effect of said movement. Indeed, for example, a numbering, a mark and / or decorations can also be engraved in all or part of the thickness of the element with precision.

Préférentiellement, dans l'exemple illustré aux figures 1 à 4, l'élément fabriqué est un pont 1 qui comporte trois dispositifs de fixation 2, 4, 6 destinés à solidariser le pont 1 à une platine (non représentée) par vissage. Ainsi, chaque dispositif de fixation 2, 4, 6 comporte un trou 11 dans le pont 1 et, de manière connue, une vis (non représentée) destinée à coopérer à rotation avec un évidement taraudé (non représenté) dans la platine. Obtenu à l'aide d'un processus de photolithographie et d'attaque DRIE, le trou 11 dans le pont 1 comporte deux sections distinctes formant un épaulement 13 destiné à servir de butée à la tête de vis autorisant après vissage le maintien du pont 1 contre la platine.Preferably, in the example illustrated in Figures 1 to 4 , the manufactured element is a bridge 1 which comprises three fasteners 2, 4, 6 for securing the bridge 1 to a plate (not shown) by screwing. Thus, each fixing device 2, 4, 6 has a hole 11 in the bridge 1 and, in a known manner, a screw (not shown) intended to cooperate in rotation with a threaded recess (not shown) in the plate. Obtained by means of a photolithography and DRIE attack process, the hole 11 in the bridge 1 comprises two distinct sections forming a shoulder 13 intended to serve as a stop for the screw head allowing, after screwing, the holding of the bridge 1 against the platinum.

Préférentiellement, l'épaulement 13 comporte un revêtement 15 destiné à recevoir la force de serrage de la tête de ladite vis. En effet, par exemple, le silicium ne comporte quasiment pas de domaine de déformation plastique. Ainsi, le silicium se brise rapidement si une contrainte induite dépasse sa limite d'élasticité. De manière préférée, on utilise donc le revêtement 15 qui comprend un matériau ductile pour chaque dispositif de fixation 2, 4, 6 de manière à ne pas détériorer le pont 1.Preferably, the shoulder 13 comprises a coating 15 for receiving the clamping force of the head of said screw. Indeed, for example, silicon has almost no plastic deformation domain. Thus, the silicon breaks rapidly if an induced stress exceeds its yield strength. Preferably, therefore, the coating 15 which comprises a ductile material for each fixing device 2, 4, 6 so as not to damage the bridge 1 is used.

Préférentiellement, le revêtement 15 peut comporter de manière non limitative de l'or, du cuivre, du nickel ou des alliages NiP, TiW, AuCr. Il peut être formé sur l'épaulement 13, par exemple, par dépôt sous phase vapeur comme une pulvérisation cathodique selon une épaisseur, par exemple, au moins égale à 5 micromètres.Preferably, the coating 15 may comprise, without limitation, gold, copper, nickel or alloys NiP, TiW, AuCr. It may be formed on the shoulder 13, for example, by vapor deposition such as a cathode sputtering in a thickness, for example, at least equal to 5 microns.

Chaque dispositif de fixation 2, 4, 6 peut également comprendre un ensemble pied - évidement entre ledit au moins un pont et ladite platine afin de correctement positionner ces deux derniers avant de les fixer. Dans l'exemple illustré à la figure 2, on peut voir que le dispositif de fixation 4 comporte un évidement borgne 12 destiné à coopérer avec un pied de la platine.Each fixing device 2, 4, 6 may also comprise a foot-recess assembly between said at least one bridge and said plate in order to correctly position these two before fixing them. In the example shown in figure 2 it can be seen that the fixing device 4 comprises a blind recess 12 intended to cooperate with a foot of the plate.

Préférentiellement, dans l'exemple illustré aux figures 1 à 4, le pont 1 qui comporte également deux paliers 8, 10 destinés à supporter deux pivots distincts d'au moins un organe dudit mouvement horloger. On comprend que ces paliers 8, 10 sont également applicables à la platine d'un mouvement horloger ou à la platine dudit mouvement comprenant le pont 1 cité ci-dessus.Preferably, in the example illustrated in Figures 1 to 4 , the bridge 1 which also comprises two bearings 8, 10 for supporting two distinct pivots of at least one member of said watch movement. It is understood that these bearings 8, 10 are also applicable to the plate of a watch movement or to the plate of said movement comprising the bridge 1 cited above.

Avantageusement selon l'invention, chaque palier 8, 10 est réalisé en une seule pièce avec le pont 1, c'est-à-dire sans utilisation d'empierrage. Chaque palier 8, 10 comporte ainsi un trou 17 formant coussinet, c'est-à-dire que sa paroi 19 est utilisée comme surface de glissement pour la rotation desdits pivots d'organe.Advantageously according to the invention, each bearing 8, 10 is made in one piece with the bridge 1, that is to say without the use of stones. Each bearing 8, 10 thus comprises a hole 17 forming a pad, that is to say that its wall 19 is used as a sliding surface for the rotation of said organ pivots.

Préférentiellement, si les qualités tribologiques du matériau utilisé ne sont pas très bonnes, la paroi 19 du trou 17 comporte un revêtement destiné à diminuer le coefficient de frottement et ainsi diminuer la friction avec son pivot associé. Comme expliqué ci-dessous, un tel revêtement peut comporter du dioxyde de silicium, un alliage à base de nickel et de phosphore ou un carbone diamanté (DLC qui est une abréviation des termes anglais « diamond like carbon »).Preferably, if the tribological qualities of the material used are not very good, the wall 19 of the hole 17 comprises a coating intended to reduce the coefficient of friction and thus reduce the friction with its associated pivot. As explained below, such a coating may comprise silicon dioxide, a nickel-phosphorus-based alloy or a diamond-like carbon (DLC which is an abbreviation of the English term "diamond like carbon").

De plus, de manière préférée, le trou 17 comporte un olivage et/ou un huilier 21, au moins au niveau sa partie supérieure, qui est destiné à diminuer la surface de frottement avec ledit pivot d'organe tout en facilitant sa lubrification. En effet, comme visible aux figures 1, 3 et 4, l'huilier 21 de forme sensiblement conique augmente progressivement de section à partir de celle du trou 17. On comprend donc que le pivot de l'organe tourne à glissement contre une surface moins importante ce qui permet la diminution de la friction. On comprend également que l'huilier 21 autorise une lubrification aisée dudit pivot apte à encore diminuer ladite friction.In addition, preferably, the hole 17 comprises an olivage and / or an oiler 21, at least at its upper part, which is intended to reduce the friction surface with said organ pivot while facilitating its lubrication. Indeed, as visible to Figures 1, 3 and 4 , the oiler 21 of substantially conical shape increases progressively section from that of the hole 17. It is therefore clear that the pivot of the member rotates against a smaller surface area which allows the reduction of friction. It is also understood that the oiler 21 allows easy lubrication of said pivot capable of further reducing said friction.

Le procédé de fabrication 31 d'un élément comme un pont 1 et/ou une platine va maintenant être expliqué en relation avec la figure 5. Le procédé 31 comporte principalement une étape de formation 33 des trous, une étape de formation 35 des olivages et/ou huiliers et une étape de formation 37 des revêtements.The manufacturing method 31 of an element such as a bridge 1 and / or a platinum will now be explained in connection with the figure 5 . The method 31 mainly comprises a hole forming step 33, a step of forming the olives and / or oil mills and a step of forming the coatings.

La première étape 33 est destinée à former les trous 11 de chaque dispositif de fixation 2, 4, 6 et/ou les trous 17 de chaque palier 8, 10. Dans une première phase 32, on se munit d'une ébauche comme expliqué ci-dessus du pont 1. Puis lors de la phase 34, les trous 11 et/ou 17 sont gravés à l'aide d'un processus comprenant des procédés de photolithographie et d'attaque DRIE anisotrope.The first step 33 is intended to form the holes 11 of each fixing device 2, 4, 6 and / or the holes 17 of each bearing 8, 10. In a first phase 32, a blank is provided as explained herein. above the bridge 1. Then during phase 34, the holes 11 and / or 17 are etched using a process comprising photolithography and anisotropic DRIE etching methods.

Préférentiellement, dans le cas des trous 11, un processus à double masque de protection est utilisé afin de former les épaulements 13. Ainsi, on structure deux masques l'un en recouvrement de l'autre, la section non protégée du deuxième masque étant plus petite que celle du premier masque. Cela permet en effet de commencer la phase 34 en gravant uniquement selon la section la plus petite. A partir d'une profondeur prédéterminée de gravure, la phase 34 est interrompue afin de retirer le second masque. La phase 34 de gravage est alors reprise afin de continuer le gravage de la petite section et commencer celui de la grande en même temps jusqu'à la profondeur souhaitée, c'est-à-dire rendre la petite section du trou 11 débouchante.Preferably, in the case of the holes 11, a process with a double protective mask is used in order to form the shoulders 13. Thus, two masks are structured, one overlapping the other, the unprotected section of the second mask being more small than that of the first mask. This makes it possible to start phase 34 by engraving only according to the smallest section. From a predetermined depth of etching, phase 34 is interrupted to remove the second mask. The etching phase 34 is then resumed in order to continue etching the small section and to start the large one at the same time to the desired depth, that is to say to make the small section of the hole 11 open.

L'étape 35 est destinée à former les olivages et/ou les huiliers 21 à au moins une extrémité de chaque trou 17 de palier 8, 10. Comme visible à la figure 5, l'invention comporte trois modes de réalisation représentés respectivement par des traits double, simple et triple.Step 35 is intended to form olives and / or oilers 21 at at least one end of each bearing hole 8, 10. As visible in FIG. figure 5 the invention comprises three embodiments represented respectively by double, single and triple lines.

Dans un premier mode de réalisation visible en trait double à la figure 5, l'étape 35 comporte une phase 36 dans laquelle les huiliers 21 sont gravés à l'aide d'un processus comprenant des procédés de photolithographie et d'attaque DRIE isotrope. En effet, une attaque isotrope permet de graver sensiblement sous forme d'une demi-sphère ce qui permet la réalisation conique dudit huilier.In a first embodiment visible in double line at the figure 5 , step 35 comprises a phase 36 in which the oilers 21 are etched using a process comprising photolithography and isotropic DRIE etching methods. Indeed, an isotropic etching makes it possible to etch substantially in the form of a half-sphere, which allows the taper to be made of said oiler.

Dans un deuxième mode de réalisation visible en trait simple à la figure 5, l'étape 35 comporte une phase 38, dans laquelle les huiliers 21 sont gravés à l'aide d'un processus comprenant des procédés de photolithographie et d'attaque DRIE anisotrope dont la section d'attaque est successivement diminuée par modification des sections non protégées des masques de protection. Ce mode de réalisation forme un huilier 21 sensiblement en forme de marches et est, pour cette raison, préférentiellement suivi d'une oxydation afin d'aplanir lesdites marches.In a second embodiment visible in single line at the figure 5 , step 35 comprises a phase 38, in which the oilers 21 are etched using a process comprising photolithography and anisotropic DRIE attacking methods, the attacking section of which is successively reduced by modification of the non-anisotropic sections. protected masks of protection. This embodiment forms a substantially stair-shaped oiler 21 and is, for this reason, preferably followed by oxidation in order to smooth said steps.

Dans un troisième mode de réalisation visible en trait triple à la figure 5, l'étape 35 comporte une phase 40 dans laquelle les huiliers 21 sont gravés à l'aide d'un processus d'électroérosion. Préférentiellement, l'électroérosion est réalisée avec une électrode conique afin de former ladite empreinte conique de l'huilier 21. Préférentiellement, dans le but d'améliorer la qualité de la phase 40, l'élément comporte un matériau à base de silicium fortement dopé permettant d'augmenter sa conductivité électrique.In a third embodiment visible in triple line at the figure 5 , step 35 comprises a phase 40 in which the oilers 21 are etched using an electroerosion process. Preferably, the electroerosion is carried out with a conical electrode in order to form said conical impression of the oiler 21. Preferably, in order to improve the quality of the phase 40, the element comprises a material with heavily doped silicon base to increase its electrical conductivity.

A la suite de l'étape 35 ou à la suite de l'étape 33 comme représenté en traits discontinus à la figure 5, le procédé 31 peut en outre comporter l'étape 37 destinée à former les revêtements à faible coefficient de frottement sur la paroi 19 des trous 17 de palier 8, 10.Following step 35 or following step 33 as shown in broken lines at the figure 5 the method 31 may further comprise step 37 for forming low friction coatings on the wall 19 of the bearing holes 17, 10.

Une première variante en trait simple de l'étape 37 peut comporter une phase 42 destinée à réaliser un dépôt physique ou chimique en phase vapeur ou liquide d'un matériau d'une meilleure qualité tribologique par rapport audit matériau micro-usinable. Ce matériau peut être, par exemple, un alliage à base de nickel et de phosphore ou un carbone diamanté (DLC).A first variant in simple line of step 37 may comprise a phase 42 intended to achieve a physical or chemical vapor or liquid deposition of a material of better tribological quality with respect to said micro-machinable material. This material may be, for example, an alloy based on nickel and phosphorus or a diamond-like carbon (DLC).

Une deuxième variante en trait double de l'étape 37 peut comporter une phase 44 destinée à oxyder ledit matériau à base de silicium afin de former un revêtement de dioxyde de silicium de meilleure qualité tribologique.A second double line variant of step 37 may include a phase 44 for oxidizing said silicon-based material to form a tribological-quality silicon dioxide coating.

Dans une alternative à l'étape 37, à la suite de l'étape 33 comme représenté en traits discontinus à la figure 5, le procédé 31 peut en outre comporter l'étape 37 destinée à former les revêtements ductiles 15 des épaulements 13 des dispositifs de fixation 2, 4, 6. L'étape 37 peut alors comporter une phase 42 destinée à réaliser un dépôt physique ou chimique en phase vapeur ou liquide d'un matériau ductile. Ce matériau peut être, par exemple, de l'or, du cuivre, du nickel ou des alliages NiP, TiW, AuCr.In an alternative to step 37, following step 33 as shown in dashed lines at the figure 5 , the method 31 may further comprise the step 37 intended to form the ductile coatings 15 of the shoulders 13 of the fixing devices 2, 4, 6. The step 37 may then comprise a phase 42 intended to achieve a physical or chemical deposit vapor or liquid phase of a ductile material. This material may be, for example, gold, copper, nickel or alloys NiP, TiW, AuCr.

Bien entendu, la présente invention ne se limite pas à l'exemple illustré mais est susceptible de diverses variantes et modifications qui apparaîtront à l'homme de l'art. En particulier, une étape finale d'oxydation peut être effectuée afin de former une couche de dioxyde de silicium destinée à renforcer mécaniquement le pont 1 et/ou la platine en matériau à base de silicium. De plus, les dispositifs de fixation 2, 4, 6 présenté utilisent des moyens de vissage, cependant, ils ne sauraient s'y limiter. Ils peuvent être remplacés par des moyens de chassage, de collage ou de serrage.Of course, the present invention is not limited to the illustrated example but is susceptible of various variations and modifications that will occur to those skilled in the art. In particular, a final oxidation step may be performed to form a silicon dioxide layer for mechanically reinforcing the bridge 1 and / or the platinum of silicon-based material. In addition, the attachment devices 2, 4, 6 presented use screwing means, however, they can not be limited thereto. They may be replaced by means of driving, gluing or clamping.

Claims (19)

Mouvement horloger comportant au moins un pont (1) monté sur une platine à l'aide d'au moins un dispositif de fixation (2, 4, 6) caractérisé en ce que ledit au moins un pont est réalisé à partir d'une plaque d'un matériau micro-usinable et ce que ledit au moins un pont comporte au moins un palier (8, 10) formé en une seule pièce avec ledit au moins un pont afin de supporter au moins un organe dudit mouvement.Watch movement comprising at least one bridge (1) mounted on a plate by means of at least one fixing device (2, 4, 6), characterized in that said at least one bridge is made from a plate a micro-machinable material and that said at least one bridge comprises at least one bearing (8, 10) formed in one piece with said at least one bridge to support at least one member of said movement. Mouvement horloger comportant au moins un pont (1) monté sur une platine à l'aide d'au moins un dispositif de fixation (2, 4, 6) caractérisé en ce que la platine est réalisée à partir d'une plaque d'un matériau micro-usinable et ce que ladite platine comporte au moins un palier (8, 10) formé en une seule pièce avec la platine afin de supporter au moins un organe dudit mouvement.Watch movement comprising at least one bridge (1) mounted on a plate with at least one fixing device (2, 4, 6), characterized in that the plate is made from a plate of a micro-machinable material and that said plate comprises at least one bearing (8, 10) formed in one piece with the plate to support at least one member of said movement. Mouvement selon la revendication 1 ou 2, caractérisé en ce que ledit au moins un palier comporte un trou (17) formant coussinet réalisé par gravage permettant de se dispenser d'un empierrage dédié.Movement according to claim 1 or 2, characterized in that said at least one bearing comprises a hole (17) forming a pad made by etching to dispense with a dedicated staking. Mouvement selon la revendication 3, caractérisé en ce que la paroi (19) dudit trou formant coussinet comporte un revêtement destiné à améliorer les qualités tribologiques par rapport audit matériau micro-usinable.Movement according to claim 3, characterized in that the wall (19) of said bearing hole comprises a coating for improving the tribological qualities with respect to said micro-machinable material. Mouvement selon la revendication 3 ou 4, caractérisé en ce que ledit trou formant coussinet comporte au moins un olivage permettant de diminuer les frottements.Movement according to claim 3 or 4, characterized in that said bearing hole comprises at least one olivage to reduce friction. Mouvement selon l'une des revendications 3 à 5, caractérisé en ce que ledit trou formant coussinet comporte au moins un huilier (21) permettant de diminuer les frottements tout en facilitant une lubrification.Movement according to one of claims 3 to 5, characterized in that said bearing hole comprises at least one oiler (21) for reducing friction while facilitating lubrication. Mouvement selon l'une des revendications précédentes, caractérisé en ce que le matériau micro-usinable est à base de silicium.Movement according to one of the preceding claims, characterized in that the micro-machinable material is based on silicon. Pièce d'horlogerie caractérisée en ce qu'elle comporte un mouvement horloger conforme à l'une des revendications précédentes.Timepiece characterized in that it comprises a watch movement according to one of the preceding claims. Procédé de fabrication (31) d'un palier (8, 10) dans un élément (1) micro-usinable caractérisé en ce qu'il comprend l'étape suivante : a) réaliser (33) une gravure afin de former le trou (17) du coussinet dudit palier. Method of manufacturing (31) a bearing (8, 10) in a micro-machinable element (1) characterized in that it comprises the following step: a) performing (33) etching to form the hole (17) of the pad of said bearing. Procédé (31) selon la revendication 9, caractérisé en ce que la gravure est réalisée par un gravage ionique réactif profond du type anisotrope.Process (31) according to claim 9, characterized in that the etching is carried out by a deep reactive ion etching of the anisotropic type. Procédé (31) selon la revendication 9 ou 10, caractérisé en ce qu'il comprend, en outre après l'étape a), l'étape suivante : b) réaliser (35) une deuxième gravure afin de former un olivage coaxialement audit trou. Method (31) according to claim 9 or 10, characterized in that it comprises, further after step a), the following step: b) performing (35) a second etching to form an olivage coaxially with said hole. Procédé (31) selon l'une des revendications 9 à 11, caractérisé en ce qu'il comprend, en outre après l'étape a), l'étape suivante : b') réaliser (35) une deuxième gravure afin de former un huilier (21) coaxialement audit trou. Process (31) according to one of Claims 9 to 11, characterized in that it comprises, in addition after step a), the following step: b ') making (35) a second etching to form an oiler (21) coaxially with said hole. Procédé (31) selon la revendication 11 ou 12, caractérisé en ce que la deuxième gravure est réalisée par gravage ionique réactif profond du type isotrope (36).Process (31) according to claim 11 or 12, characterized in that the second etching is performed by deep-reactive ion etching of the isotropic type (36). Procédé (31) selon la revendication 11 ou 12, caractérisé en ce que la deuxième gravure est réalisée par une succession (38) de gravages ionique réactif du type anisotrope dont la section d'attaque est successivement diminuée.Process (31) according to claim 11 or 12, characterized in that the second etching is performed by a succession (38) of reactive ion etching of the anisotropic type, the driving section of which is successively reduced. Procédé (31) selon la revendication 11 ou 12, caractérisé en ce que la deuxième gravure est réalisée par électroérosion (40).Method (31) according to claim 11 or 12, characterized in that the second etching is performed by electroerosion (40). Procédé (31) selon l'une des revendications 9 à 15, caractérisé en ce qu'il comprend, en outre, l'étape finale suivante : c) former (37) un revêtement sur la paroi (19) dudit trou du coussinet d'un meilleur coefficient de frottement que ledit élément micro-usinable. Method (31) according to one of claims 9 to 15, characterized in that it further comprises the following final step: c) forming (37) a coating on the wall (19) of said bearing hole with a better coefficient of friction than said micro-machinable element. Procédé (31) selon la revendication 16, caractérisé en ce que l'étape c) comporte la phase suivante : d) réaliser (42) un dépôt physique en phase vapeur d'un matériau d'une meilleure qualité tribologique par rapport audit matériau micro-usinable. Method (31) according to claim 16, characterized in that step c) comprises the following phase: d) performing (42) a physical vapor deposition of a material of better tribological quality with respect to said micro-machinable material. Procédé (31) selon l'une des revendications 9 à 17, caractérisé en ce que le matériau micro-usinable est à base de siliciumProcess (31) according to one of Claims 9 to 17, characterized in that the micro-machinable material is based on silicon Procédé (31) selon la revendication 16, caractérisé en ce que le matériau micro-usinable est à base de silicium et en ce que l'étape c) comporte la phase suivante : e) oxyder (44) ledit matériau à base de silicium afin de former ledit revêtement d'une meilleure qualité tribologique. Process (31) according to Claim 16, characterized in that the micro-machinable material is based on silicon and in that step c) comprises the following phase: e) oxidizing (44) said silicon-based material to form said coating of better tribological quality.
EP09154100A 2009-03-02 2009-03-02 Bridge or plate for a timepiece movement Withdrawn EP2226689A1 (en)

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EP09154100A EP2226689A1 (en) 2009-03-02 2009-03-02 Bridge or plate for a timepiece movement
TW099103649A TW201106122A (en) 2009-03-02 2010-02-06 Bridge or bottom plate for a timepiece movement
US12/714,956 US20100220557A1 (en) 2009-03-02 2010-03-01 Bridge or bottom plate for a timepiece movement
CN201010124877A CN101825863A (en) 2009-03-02 2010-03-01 The clamping plate or the machine plate that are used for Timepiece movement
JP2010045274A JP2010204103A (en) 2009-03-02 2010-03-02 Bridge or bottom plate for timepiece movement

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US20080084793A1 (en) * 2006-10-06 2008-04-10 Robert Alain Greubel Tourbillion-type timepiece movement
WO2008052378A2 (en) * 2006-11-02 2008-05-08 Rolex S.A. Timepiece
EP1978421A2 (en) * 2007-04-04 2008-10-08 Manufacture et fabrique de montres et chronomètres Ulysse Nardin Le Locle SA Frame element for a watch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2727880B1 (en) 2012-11-05 2016-06-08 GFD Gesellschaft für Diamantprodukte mbH Three-dimensional, micromechanical component of movement having chamfer and method for its production

Also Published As

Publication number Publication date
TW201106122A (en) 2011-02-16
CN101825863A (en) 2010-09-08
US20100220557A1 (en) 2010-09-02
JP2010204103A (en) 2010-09-16

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