EP1926967A1 - Procede et dispositif servant a la mesure des structures d'un objet - Google Patents

Procede et dispositif servant a la mesure des structures d'un objet

Info

Publication number
EP1926967A1
EP1926967A1 EP06792130A EP06792130A EP1926967A1 EP 1926967 A1 EP1926967 A1 EP 1926967A1 EP 06792130 A EP06792130 A EP 06792130A EP 06792130 A EP06792130 A EP 06792130A EP 1926967 A1 EP1926967 A1 EP 1926967A1
Authority
EP
European Patent Office
Prior art keywords
probe
arrangement according
sensors
optical
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06792130A
Other languages
German (de)
English (en)
Inventor
Matthias ANDRÄS
Ralf Christoph
Ulrich NEUSCHÄFER-RUBE
Wolfgang Rauh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Werth Messtechnik GmbH
Original Assignee
Werth Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik GmbH filed Critical Werth Messtechnik GmbH
Publication of EP1926967A1 publication Critical patent/EP1926967A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Definitions

  • the invention relates to a method for measuring structures of an object by means of a coordinate measuring device associated probe element, which is brought into contact with the object and then its position is determined indirectly.
  • the invention relates to a method for determining structures of an object by means of a coordinate measuring machine associated with a probe extension of a probe outgoing Antastformelements, which brought into contact with the object and then determines the spatial position of the Antastformelements or directly associated with this target with optical sensors becomes.
  • the invention relates to an arrangement for measuring structures of an object by means of a coordinate measuring machine associated with a Antastformelement and preferably a probe extension comprehensive push button.
  • the subject matter of the invention is an arrangement for measuring structures of an object by means of a coordinate measuring machine associated with a probe extension or a probe shaft of a probe outgoing Antastformelements, which if necessary.
  • Immediately associated with the button or the probe extension target mark is assigned, wherein the Antastfo ⁇ nelement can be brought into contact with the object and then its position with at least one optical sensor can be determined.
  • a method and an arrangement of the aforementioned type is known from WO-A-98/57121. In the known method, a photogrammetric method based on the triangulations is used for a 3-dimensional determination of the probe element position.
  • a coordinate measuring machine with mechanically scanning sensors can be found in DE-A-43 27 250.
  • a visual inspection of the mechanical probing process can be done with the aid of a monitor in order to avoid destruction of the probe.
  • a structure of an object is measured by means of a coordinate measuring device associated with a probe form element whose position is detected by means of an optical sensor.
  • sensor and probe are designed as a jointly adjustable unit. This can emanate from the WO-A-02/025206 of a rotary swivel joint.
  • the present invention is based on the object, a method and an arrangement of the type mentioned in such a way that any structures can be determined with a high accuracy, with a precise determination of the position of the object to be brought into contact Antastformelements to take place.
  • the object is essentially achieved by determining the 2-dimensional position of the probe element and / or the target mark by means of positionally associated 2D optical 2D sensors and calculating the spatial (3-dimensional) position of the probe shape element from the 2-dimensional position values becomes.
  • the position of the probe element is determined based on an associated target with two orthogonal or approximately orthogonal to the stylus 2D optical 2D sensors, from the 2-dimensional position values of the two sensors a valid for the probe element 3-dimensional position value is calculated ,
  • two coordinates are measured with two two-dimensional sensors, in order then to determine the space coordinate (X, Y, Z coordinates) of the probe element from the total of four coordinates.
  • a calibration is performed beforehand such that for each of the four coordinates of the two-dimensional sensors, the change in the coordinate in deflection of the probe element in the X, Y and Z directions is determined. From this, a matrix can be created, which allows the determination of the deflection of the probe element from the change in the coordinates of the two-dimensional sensors. From the deflection of the probe element and the coordinates of the axes of the coordinate measuring machine results in the spatial coordinate of the probe element.
  • the probing element and, associated with this associated target mark extend the same along the length of a probe extending along a straight line.
  • the Antastformelement or the target mark by means of the optical 2D sensors in planes with a cutting line 2-dimensional are determined, which coincides with the straight line or almost with the straight line or extends in the Z direction.
  • the planes themselves should be perpendicular or nearly perpendicular to each other.
  • the target has a self-luminous behavior. It is provided that the target mark is made visible in transmitted light by a light device opposite the 2-dimensional sensor.
  • the target mark can be a bottleneck of the probe shaft - also called button extension - can be used.
  • a spherical or ellipsoidal structure can be integrated into the stylus shaft as a target.
  • a cylindrical or spherical structure may be applied to the probe shaft or a thickening on the probe shaft may be used as a target.
  • the two optical sensors are connected by suitable optical deflection means such as mirrors or image guide with an optoelectronic camera, such as CCD camera or CMOS camera and evaluated together on this.
  • suitable optical deflection means such as mirrors or image guide with an optoelectronic camera, such as CCD camera or CMOS camera and evaluated together on this.
  • the two 2-dimensional optical sensors can be equipped by optical deflection means such as mirrors in conjunction with a uniform imaging lens for both sensors and a uniform matrix camera such as CCD camera.
  • At least two endoscopes are used as imaging beam paths for the realization of the sensors and two further endoscopes as illumination beam paths for the representation of the transmitted light illumination.
  • the endoscopes used for imaging can in one Semiconductor chip for image evaluation open. It is also possible that all optical components for the realization of the two sensors mentioned are integrated in one unit.
  • a particularly preferred procedure is characterized.
  • the overall behavior of the 3-dimensional sensor is recorded by recording the characteristic curves of the respective 1-dimensional components of the 2-dimensional sensors and is mathematically corrected by depositing corresponding correction values.
  • the overall behavior of the 3-dimensional sensor by recording the 2-dimensional characteristics of the individual sensors z. B. is detected by measurement on suitable standards and corrected by depositing appropriate correction values and their consideration during measurement.
  • the physical location of the target and probe element may coincide.
  • the optical beam path is mechanically designed so that it is possible to replace the target with the Antastformelement without changing the Justageschreib the optical beam path.
  • the total sensor system is mounted on a rotary pivot unit of a coordinate measuring device, wherein the above-described contact element within the coordinate measuring machine can be used together with other sensors.
  • the detection of the deflection components can be carried out by distance sensors, in particular laser distance sensors.
  • the target can be replaced by the evaluation of the changes in the shaft diameter of the probe.
  • Another preferred method is characterized in that the bending line of the probe shaft is evaluated in the observed range and from this it is concluded that the position of the probe-forming element is present.
  • the position of the probing element and / or the at least one target can be determined by means of reflecting and / or shading and / or radiation emitting from the probing element or the target.
  • An arrangement of the type mentioned above for measuring structures of an object is characterized by two-dimensional positional values of the probe element and / or the target mark can be determined by two optical 2D sensors and that from the 2-dimensional position values 3-dimensional position value of the probe form element is calculable.
  • two optical 2-dimensional sensors for determining the position of the probe element are arranged orthogonally or approximately orthogonal to the probe shaft, wherein from the 2-dimensional position values of the two sensors a valid for the probe element 3-dimensional position value can be calculated.
  • the Antastformelement or the target of the extending along a straight line stylus extension should go out and 2-dimensional position of the Antastformelements or at least one of these associated target by means of the optical 2-D sensors in planes with a cut line be determined with the Straight line or almost coincident with the straight line. It should be in two mutually perpendicular planes z. B. xz and yz levels are measured.
  • the measuring beam of the respective 2D sensor which detects the detection element or the target should be perpendicular or orthogonal to the straight line which is predetermined by the probe shaft in the region of the detection element or the target.
  • the measuring beams or the measuring beam areas should also run in or approximately in a common plane (xy plane).
  • the target has self-luminous behavior.
  • a lighting device is arranged opposite the 2-dimensional sensor.
  • the target mark is integrated as bottleneck of the probe shaft and / or as a spherical or ellipsoidal structure in the probe shaft and / or applied as a cylindrical or spherical structure on the probe shaft and / or formed as a thickening on the probe shaft.
  • the Antastformelement and / or the target are designed as a reflector.
  • the probe extension may be at least partially bending elastic and / or formed as a light guide or include such.
  • the probe extension has an L-shaped geometry, wherein the free leg section has the probing form element and in particular at least one target mark.
  • Probe element and target can be exchangeably connected to the probe extension.
  • a connection can also be made by gluing or welding.
  • the touch-sensitive element and / or the target mark a self-luminous electronic element such as LED on or represents such.
  • the Antastformelement is provided with a reflective and / or fluorescent layer and / or with a reflective or fluorescent material layer such that reflected by tastelement.00er surface of the layer radiation inside the Tastelement generates an optically detectable mark as bright spot as the target. It is also possible to create a bright Le ⁇ chtfleck by lighting from the outside.
  • the position of the Antastformiatas can be determined by means of the mark.
  • the mark can be a darkened area in the illuminated probe form element.
  • optical deflection means such as mirrors or image guide with an optoelectronic camera such as CCD camera or CMOS camera.
  • the two 2-dimensional optical sensors are equipped by optical deflection means such as mirrors in conjunction with a uniform imaging lens for the two sensors and a uniform matrix camera such as CCD camera.
  • the two optical sensors are realized by two or more endoscopes, wherein at least two endoscopes are provided as imaging beam paths for the realization of the sensors and two further endoscopes as illumination beam paths for the representation of the transmitted light illumination. The latter are only required if the targets have no intrinsic lighting.
  • 1 is a schematic diagram of a coordinate measuring machine
  • Fig. 3 shows a second embodiment of an arrangement for measuring structures of an object.
  • FIG. 4 shows views of a target mark in the image field of a camera.
  • Fig. 6 is a plan view of a Flalterung the probe element.
  • FIG. 1 is purely in principle a coordinate measuring machine 10 with a z. B. granite existing base frame 12 with measuring table 14, on which an unillustrated object can be arranged to measure this.
  • Flierzu are columns or stands 18, 20 slidably supported on the base frame 12. From the columns 18, 20 is a traverse 22, along which - that is in the X direction - a carriage 24 is adjustable, which in turn receives a quill or column 26 which is adjustable in the Z direction.
  • a measuring sensor which consists in the embodiment of an L-shaped curved probe 28 and an optical sensor 30 such as CCD camera.
  • the button 28 has at its end a probe element 32.
  • the push-button 28 is formed elastically bending and therefore has a construction, as can be found in WO-A-98/57121.
  • the button 28 may be partially surrounded by a rigid element in order to set probing forces or vibration amplitudes targeted.
  • the adjacent to the probe element 32 portion of the probe 28 is flexurally elastic.
  • a probe material itself is in particular a multimode optical fiber in question.
  • FIG. 2 shows an embodiment of an arrangement for measuring structures of an object.
  • the button 28 has at least one flexurally elastic probe extension 34 or stylus or probe shaft on which the probe element 32 is arranged, the is brought into contact with objects to be measured. From the flexurally elastic probe extension 34 goes from a target 36.
  • the first embodiment shown in FIG. 2 describes the technical structure of the solution according to the invention on the basis of the use of endoscopes as 2D optical sensors.
  • the probe element or Antastformelement 32 are the target 36, which are attached to the entire probe system in a holder with lighting 38 for generating the self-illumination of the target.
  • the imaging endoscopes 40, 42 can thus image the image of the target 36 on the camera 44 in the case of self-congestion.
  • a transmitted light illumination 46 can additionally be attached via two further endoscopes 48, 50.
  • the imaging endoscopes 40, 42 measure in planes that are preferably perpendicular to each other, such as in the xz plane and in the yz plane.
  • the imaging beams 37, 39 preferably intersect at a right angle and preferably extend in a common plane (xy-plane) which intersects vertically the vertically extending portion of the probe extension 34 and the Z-axis, respectively.
  • optical sensors which are the imaging endoscopes 40, 42 in the exemplary embodiment
  • 2-dimensional images of the target mark 36 are determined, from which then the 3-dimensional, ie spatial position of the sensing element 36 is determined.
  • the probing element 32 and the target mark 36 start from a portion of the probe extension 34, which runs along a straight line. Orthogonal to this section, the 2D optical sensors in the form of imaging endoscopes 40, 42 are then arranged to determine the 2-dimensional position values of the target 36. Alternatively, it is also possible to directly determine the position of the Antastformimplantations 32 by means of the sensors.
  • the position of the aiming mark 36 or of the probing element 32 is detected by means of the imaging endoscopes 40, 42 in planes with a cutting line 2-dimensional. true, which coincides with the course of the portion of the probe extension 34 from which the target 36 and the Antastformelement 32 go out.
  • FIG. 3 shows an analogous solution of the invention according to a second embodiment, in which instead of the endoscopes 40, 42 a mirror arrangement 56, 58 is used.
  • the position of the probing element 32 is ensured by determining the position of the target mark 36 by sighting with the objective 52 and the camera 54 via the imaging mirrors 56, 58.
  • the self-illumination of the target mark 36 can be realized via an integrated illumination 60.
  • An additional transmitted light can be achieved by arranging additional mirrors 62, 64 via the integrated brightfield illumination of the image processing sensor system 66.
  • FIG. 4 shows an example of how the image of the target mark 36 represents two views in the image field of the camera. It becomes visible how the position of the target mark in X- / Z-direction and in the other part-picture in Y- / Z-direction becomes visible in one field. From both positions, the position of the target mark 36 in the space and derived therefrom can calculate the Antastformelements 32.
  • Figs. 5a) to 5e) show various shapes of targets.
  • Fig. 5a) shows a spherical target 36
  • Fig. 5b shows a target 68 with a constriction
  • Fig. 5c shows a target 70 with a thickening
  • Fig. 4a) shows a cylindrical target 72
  • Fig. 4b) shows an ellipsoidal target 74th
  • Fig. 5 shows an arrangement in which it is ensured that through an opening 76 on the side of a mirror mount 80, the fiber probe element 28 itself can be removed laterally from the arrangement, without causing a risk of destruction.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un procédé et un dispositif servant à la détermination des structures d'un objet au moyen d'un élément palpeur profilé, partant d'un prolongement d'un palpeur associé à un appareil de mesure de coordonnées, lequel est amené en contact avec l'objet, après quoi la position dans l'espace de l'élément palpeur profilé ou d'un repère de visée directement associé à celui-ci est déterminée au moyen de détecteurs optiques. L'invention a pour but de déterminer des structures quelconques avec une haute précision de mesure, ce qui nécessite d'effectuer une détermination précise de position de l'élément palpeur profilé à amener en contact avec l'objet. A cet effet, l'invention est caractérisée en ce que la position à 2 dimensions de l'élément palpeur et/ou du repère de visée est déterminée au moyen de détecteurs 2D optiques associés l'un à l'autre au point de vue position, et en ce qu'à partir des valeurs de position à 2 dimensions, la position dans l'espace (3 dimensions) de l'élément palpeur profilé est calculée.
EP06792130A 2005-09-20 2006-09-19 Procede et dispositif servant a la mesure des structures d'un objet Withdrawn EP1926967A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005044961 2005-09-20
DE102006001531A DE102006001531A1 (de) 2005-09-20 2006-01-12 Verfahren und Anordnung zur Messung von Strukturen eines Objekts
PCT/EP2006/009078 WO2007033811A1 (fr) 2005-09-20 2006-09-19 Procede et dispositif servant a la mesure des structures d'un objet

Publications (1)

Publication Number Publication Date
EP1926967A1 true EP1926967A1 (fr) 2008-06-04

Family

ID=37441842

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06792130A Withdrawn EP1926967A1 (fr) 2005-09-20 2006-09-19 Procede et dispositif servant a la mesure des structures d'un objet

Country Status (3)

Country Link
EP (1) EP1926967A1 (fr)
DE (1) DE102006001531A1 (fr)
WO (1) WO2007033811A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010060833A1 (de) 2009-11-26 2011-06-01 Werth Messtechnik Gmbh Verfahren und Anordnung zur taktil-optischen Bestimmung der Geometrie eines Messobjektes
US11159784B2 (en) 2014-10-23 2021-10-26 Cognex Corporation System and method for calibrating a vision system with respect to a touch probe
DE102015103373A1 (de) * 2015-03-09 2015-12-31 Hochschule Aalen Messelement für ein Koordinatenmessgerät
JP6797638B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
US10323928B2 (en) * 2017-06-16 2019-06-18 Mitutoyo Corporation Optical configuration for measurement device using emitter material configuration
US10006757B1 (en) * 2017-06-16 2018-06-26 Mitutoyo Corporation Optical configuration for measurement device using emitter material configuration with quadrant photodetectors

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0789045B2 (ja) 1988-12-15 1995-09-27 富山県 三次元変位量測定器
DE4327250C5 (de) 1992-09-25 2008-11-20 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Koordinatenmessung an Werkstücken
WO1998057121A1 (fr) 1997-06-12 1998-12-17 Werth Messtechnik Gmbh Appareil de mesure de coordonnees comportant un palpeur et detecteur optique mesurant la position de ce dernier
DE29808683U1 (de) 1998-05-13 1998-08-20 Kunzmann, Horst, 38116 Braunschweig Anordnung zur Sensierung der dritten Raumrichtung bei einem mikromechanischen Tastsystem
EP1082581B1 (fr) 1998-05-29 2004-07-28 Werth Messtechnik GmbH Dispositif pour la mesure de structures d'un objet
WO2002025206A1 (fr) 2000-09-20 2002-03-28 Werth Messtechnik Gmbh Dispositif et procede de mesure opto-tactile de structures
DE10258579B4 (de) 2002-12-16 2007-12-13 Carl Mahr Holding Gmbh Messeinrichtung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2007033811A1 *

Also Published As

Publication number Publication date
WO2007033811A1 (fr) 2007-03-29
DE102006001531A1 (de) 2007-03-22

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