EP1888812A1 - Verfahren zur verbesserung der barriereeigenschaften keramischer sperrschichten - Google Patents
Verfahren zur verbesserung der barriereeigenschaften keramischer sperrschichtenInfo
- Publication number
- EP1888812A1 EP1888812A1 EP06723683A EP06723683A EP1888812A1 EP 1888812 A1 EP1888812 A1 EP 1888812A1 EP 06723683 A EP06723683 A EP 06723683A EP 06723683 A EP06723683 A EP 06723683A EP 1888812 A1 EP1888812 A1 EP 1888812A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ceramic
- barrier
- layer
- phps
- improving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1229—Composition of the substrate
- C23C18/1245—Inorganic substrates other than metallic
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/122—Inorganic polymers, e.g. silanes, polysilazanes, polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
- C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
- B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
- B05D3/065—After-treatment
- B05D3/067—Curing or cross-linking the coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
- B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/50—Multilayers
- B05D7/52—Two layers
Definitions
- the invention relates to a method for improving the fürtr ⁇ ttssperrwir- effect for water vapor and gases in a flexible carrier material having at least one barrier layer of ceramic material.
- Barrier layers of metals or of inorganic or ceramic materials are known and are deposited on plastic films, in particular for packaging applications, using methods of the vacuum thin-film technique.
- Lacquers known for this purpose are the or- cocer or, for example, also the coating systems described in OS-A-5 645 923, which lead to an improvement of the barrier effect up to a factor of 10. Due to their organic components, these lacquers can not completely prevent the permeability through a pore, but only reduce it, since they themselves are permeable to most gases, in particular to water vapor.
- multi-layer structures which have been produced by alternating coating by means of PVD or plasma CVD technology with an inorganic barrier layer and a subsequently to be cured liquid lacquer layer have been investigated for some years.
- the liquid coating layers have the task to cover each of the defects of the vacuum coating and so again to provide a perfect surface as possible for the following vacuum coating available.
- the lacquer layer should be applied as thin as possible and even have the lowest possible permeability, so that by the lacquer layer and the above-described sealing effect as well as possible.
- a disadvantage of the prior art is that in order to achieve so-called flexible Ultrabarriere Jardin with a required permeability to water vapor of ⁇ 10 "4 g / (m 2 24 h), as for example for flexible OLED displays or for organic photovoltaic structures be required, the required barriers achieved only by very many (for example 5-10) layer pairs of lacquer layer and ceramic layer and the many coating processes lead to high costs and high reject rates in production.
- the invention is based on the object of providing a method of the type called to provide a way in which in ceramic barrier layers, the residual permeability to water vapor can be further reduced compared to the methods of the prior art.
- the ceramic barrier layers are coated with a solution of perhydropolysilazane (PHPS) and subsequently cured to form a silicon oxide layer.
- PHPS perhydropolysilazane
- PHPS can be applied to the barrier layers dissolved in an organic solvent.
- Suitable solvents are for example XyIoI or DBE (dibasic ester) dissolved.
- DBE is a substance made from a mixture of methyl esters of glutaric, adipic and succinic acids.
- a solution of max. 10% by volume, preferably max. 3 vol.% PHPS used in organic solvent a solution of max. 10% by volume, preferably max. 3 vol.% PHPS used in organic solvent.
- the curing of the coating applied to the ceramic layer can be carried out at a suitable temperature of max. 100 0 C are performed.
- the curing of the coating applied to the ceramic layer can also be effected by irradiation with high-energy UV light.
- a PHPS solution is applied to each barrier layer prior to deposition of the subsequent barrier layer and cured.
- the liquid coating according to the invention with a PHPS solution gives an ideal "smoothing layer" for the subsequent ceramic barrier layer.
- the need for cross-linking of the inorganic Si-O-Si network relatively high temperatures of> 250 ° C, already mild temperatures is formed with the use of perhydropolysilazane of ⁇ 100 0 C, or by UV curing with high-energy UV light, a dense SiO 2 layer.
- To convert PHPS to SiO 2 water in the form of atmospheric moisture is required, with H 2 and NH 3 subsequently escaping from the layer.
- the SiO 2 layer thicknesses are in the range of about 500 nm.
- the flexible carrier material is, for example, a plastic film in the form of a tape, a plastic film or a laminate with a plastic film onto which the deposition of the ceramic barrier layer takes place.
- the PHPS solution may, for example, be applied by means of smooth or anilox rollers to a tape-shaped plastic film with a ceramic barrier layer deposited thereon.
- a suitable barrier layer of ceramic material is, for example, a 10 nm to 200 nm thick ceramic layer of Al 2 O 3 or of SiO x produced in a vacuum.
- the preferred thickness of the ceramic layer of Al 2 O 3 or SiO x is between about 40 and 150 nm.
- x of the ceramic layer of SiO x is a number between 0.9 and 1.2, in a second preferred variant a number between 1.3 and 2, in particular between 1.5 and 1.8.
- the ceramic barrier layer (s) is coated with a solution of perhydropolysilazane (PHPS) and subsequently cured to form a silicon oxide layer (SiO x ).
- PHPS perhydropolysilazane
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH6472005 | 2005-04-11 | ||
PCT/EP2006/002700 WO2006108503A1 (de) | 2005-04-11 | 2006-03-24 | Verfahren zur verbesserung der barriereeigenschaften keramischer sperrschichten |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1888812A1 true EP1888812A1 (de) | 2008-02-20 |
Family
ID=36577366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06723683A Withdrawn EP1888812A1 (de) | 2005-04-11 | 2006-03-24 | Verfahren zur verbesserung der barriereeigenschaften keramischer sperrschichten |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090029056A1 (de) |
EP (1) | EP1888812A1 (de) |
JP (1) | JP2008536711A (de) |
AU (1) | AU2006233551A1 (de) |
CA (1) | CA2603736A1 (de) |
MX (1) | MX2007011281A (de) |
WO (1) | WO2006108503A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MX2007014114A (es) | 2005-05-10 | 2008-03-14 | Intermune Inc | Derivados de piridona para modular el sistema de proteina cinasa activada por estres. |
EP2174780B8 (de) | 2008-10-10 | 2012-05-16 | Kertala Lizenz AG | Aufwickelbarer Fliesenaufbau, Verfahren zur Herstellung sowie die Verwendung |
FR2980394B1 (fr) * | 2011-09-26 | 2013-10-18 | Commissariat Energie Atomique | Structure multicouche offrant une etancheite aux gaz amelioree |
CN103998230B (zh) * | 2011-12-16 | 2015-11-25 | 柯尼卡美能达株式会社 | 气体阻隔膜 |
US20150099126A1 (en) * | 2012-04-25 | 2015-04-09 | Konica Minolta, Inc. | Gas barrier film, substrate for electronic device and electronic device |
JP6507523B2 (ja) * | 2014-08-22 | 2019-05-08 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子 |
CN110950668A (zh) * | 2019-12-19 | 2020-04-03 | 江西省萍乡市南坑高压电瓷厂 | 一种高疏水性电瓷的制造方法 |
US11557499B2 (en) | 2020-10-16 | 2023-01-17 | Applied Materials, Inc. | Methods and apparatus for prevention of component cracking using stress relief layer |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0646611B1 (de) * | 1993-09-30 | 1999-01-27 | Toppan Printing Co., Ltd. | Gasundurchläsiges Laminat |
JP3696939B2 (ja) * | 1995-08-11 | 2005-09-21 | 東京応化工業株式会社 | シリカ系被膜の形成方法 |
US20010038894A1 (en) * | 2000-03-14 | 2001-11-08 | Minoru Komada | Gas barrier film |
AU2001275172A1 (en) * | 2000-06-06 | 2001-12-17 | The Dow Chemical Company | Transmission barrier layer for polymers and containers |
JP5291275B2 (ja) * | 2000-07-27 | 2013-09-18 | 有限会社コンタミネーション・コントロール・サービス | コーティング膜が施された部材及びコーティング膜の製造方法 |
-
2006
- 2006-03-24 JP JP2008504645A patent/JP2008536711A/ja not_active Withdrawn
- 2006-03-24 WO PCT/EP2006/002700 patent/WO2006108503A1/de active Application Filing
- 2006-03-24 MX MX2007011281A patent/MX2007011281A/es unknown
- 2006-03-24 AU AU2006233551A patent/AU2006233551A1/en not_active Abandoned
- 2006-03-24 EP EP06723683A patent/EP1888812A1/de not_active Withdrawn
- 2006-03-24 CA CA002603736A patent/CA2603736A1/en not_active Abandoned
- 2006-03-24 US US11/918,038 patent/US20090029056A1/en not_active Abandoned
Non-Patent Citations (1)
Title |
---|
See references of WO2006108503A1 * |
Also Published As
Publication number | Publication date |
---|---|
US20090029056A1 (en) | 2009-01-29 |
MX2007011281A (es) | 2007-11-12 |
CA2603736A1 (en) | 2006-10-19 |
AU2006233551A1 (en) | 2006-10-19 |
JP2008536711A (ja) | 2008-09-11 |
WO2006108503A1 (de) | 2006-10-19 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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17P | Request for examination filed |
Effective date: 20071112 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
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RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: HOFFMANN, MANFRED Inventor name: LOHWASSER, WOLFGANG |
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DAX | Request for extension of the european patent (deleted) | ||
17Q | First examination report despatched |
Effective date: 20100226 |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: 3A TECHNOLOGY & MANAGEMENT AG |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20100709 |