EP1866625A4 - Glass inspection systems and methods for using same - Google Patents

Glass inspection systems and methods for using same

Info

Publication number
EP1866625A4
EP1866625A4 EP06749504A EP06749504A EP1866625A4 EP 1866625 A4 EP1866625 A4 EP 1866625A4 EP 06749504 A EP06749504 A EP 06749504A EP 06749504 A EP06749504 A EP 06749504A EP 1866625 A4 EP1866625 A4 EP 1866625A4
Authority
EP
European Patent Office
Prior art keywords
methods
same
inspection systems
glass inspection
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06749504A
Other languages
German (de)
French (fr)
Other versions
EP1866625A2 (en
Inventor
Leon R Zoeller Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP1866625A2 publication Critical patent/EP1866625A2/en
Publication of EP1866625A4 publication Critical patent/EP1866625A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP06749504A 2005-04-06 2006-04-06 Glass inspection systems and methods for using same Withdrawn EP1866625A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66917105P 2005-04-06 2005-04-06
PCT/US2006/013012 WO2006108137A2 (en) 2005-04-06 2006-04-06 Glass inspection systems and methods for using same

Publications (2)

Publication Number Publication Date
EP1866625A2 EP1866625A2 (en) 2007-12-19
EP1866625A4 true EP1866625A4 (en) 2010-12-29

Family

ID=37074107

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06749504A Withdrawn EP1866625A4 (en) 2005-04-06 2006-04-06 Glass inspection systems and methods for using same

Country Status (6)

Country Link
EP (1) EP1866625A4 (en)
JP (1) JP2008536127A (en)
KR (1) KR20070121820A (en)
CN (1) CN101175986B (en)
TW (1) TWI360652B (en)
WO (1) WO2006108137A2 (en)

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JP5581563B2 (en) * 2007-03-08 2014-09-03 株式会社日立製作所 Illumination apparatus, defect inspection apparatus and method using the same, height measurement apparatus and method
JP2010048745A (en) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd Defect inspection system and defect inspection method
KR101292570B1 (en) 2008-12-31 2013-08-12 엘지디스플레이 주식회사 System for testing distortion of liquid crystal display device
EP2253949A1 (en) * 2009-05-22 2010-11-24 Dr. Schenk GmbH Industriemesstechnik Device and method for detecting an optically diverting and/or polarisation-rotating error
EP2261633A1 (en) * 2009-06-10 2010-12-15 Becton Dickinson France Supporting device for a transparent article and method for putting said article under compression
CN101650307B (en) * 2009-07-17 2011-02-09 富美科技有限公司 Scraper blade surface detection system
CN102081047B (en) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 Method and system for distinguishing defects of substrate
CN101988908A (en) * 2009-07-31 2011-03-23 法国圣-戈班玻璃公司 Method and system for distinguishing fault of substrate
BE1019378A3 (en) * 2010-06-17 2012-06-05 Agc Glass Europe ANALYSIS OF DRYING BRANDS.
CN103261104A (en) * 2010-12-15 2013-08-21 旭硝子株式会社 Glass plate, method for inspecting glass plate, and method for manufacturing glass plate
DE102012002174B4 (en) 2012-02-07 2014-05-15 Schott Ag Apparatus and method for detecting defects within the volume of a transparent pane and using the apparatus
CN102621149B (en) * 2012-03-21 2015-07-22 深圳市华星光电技术有限公司 Substrate detection device and method
CN102608132B (en) * 2012-04-09 2014-06-11 昆山胜泽光电科技有限公司 Multi-type glass flaw detection device and detection method
CN102645435A (en) * 2012-04-19 2012-08-22 深圳市华星光电技术有限公司 Method and device for detecting substrate
CN102721692B (en) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 The pick-up unit of glass substrate board box
CN102778460A (en) * 2012-07-31 2012-11-14 法国圣戈班玻璃公司 Method for detecting internal flaw of substrate
IN2015KN00605A (en) * 2012-08-13 2015-07-17 Kawasaki Heavy Ind Ltd
EP2725348A1 (en) * 2012-10-29 2014-04-30 Scientific Visual SARL Optical quality control device
CN103886573B (en) * 2012-12-20 2018-10-12 联想(北京)有限公司 Object detecting method and article detection device
DE102013105693A1 (en) 2013-06-03 2013-10-31 Viprotron Gmbh Method for optical error inspection of object, involves projecting light beams from illumination surface on projection surface arranged behind object, and detecting shadow impact generated on projection surface with optical detection unit
CN104237137B (en) * 2013-06-07 2016-12-28 昆山胜泽光电科技有限公司 Measure glass different angles color, brightness and the device of reflectance spectrum
DE102013107215B3 (en) 2013-07-09 2014-10-09 Heraeus Quarzglas Gmbh & Co. Kg Method for producing a mirror substrate blank made of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank
JP2017502295A (en) * 2013-12-23 2017-01-19 コーニング インコーポレイテッド Non-imaging coherent line scanner system and optical inspection method
CN103791835A (en) * 2014-01-26 2014-05-14 扬州苏庆非标装备研发有限公司 Profile and size detecting method of section of strip-shaped optical glass
CN103868478A (en) * 2014-04-01 2014-06-18 四川虹视显示技术有限公司 Rapid detection method and device for flatness of transparent flat plate
CN103913466A (en) * 2014-04-08 2014-07-09 上海华力微电子有限公司 Detection device and detection method for wafer defect
KR101952617B1 (en) * 2014-07-03 2019-02-28 (주)엘지하우시스 Method of detecting corrosion of glass substrate
KR101942260B1 (en) 2014-07-03 2019-01-28 (주)엘지하우시스 Method of detecting corrosion of glass substrate
CN104297264A (en) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 Glass surface blemish on-line detecting system
EP3234591B1 (en) 2014-12-19 2019-06-19 Merck Patent GmbH Method and device for optically sensing a chromatographic specimen
EP3311145A1 (en) * 2015-06-19 2018-04-25 Corning Incorporated Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions using optical techniques
CN105372253A (en) * 2015-12-14 2016-03-02 陈艳 Light tube defect detection system
CN107132244B (en) * 2016-02-29 2020-01-07 鞍钢股份有限公司 Quantitative evaluation method for inclusions in steel
CN105675617B (en) * 2016-04-06 2020-05-01 东旭科技集团有限公司 Method and apparatus for measuring surface granularity of plate glass
US10677739B2 (en) 2016-11-02 2020-06-09 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate
CN110050184B (en) 2016-11-02 2023-06-13 康宁股份有限公司 Method and apparatus for inspecting defect on transparent substrate and method of emitting incident light
CN106556573B (en) * 2016-11-17 2018-01-12 仝宁瑶 A kind of experimental provision for being used to determine glass refraction
TWI622764B (en) * 2017-01-11 2018-05-01 由田新技股份有限公司 An automatic optical inspecting system for particle inspection from the surface
CN110431406B (en) * 2017-02-28 2022-04-01 东洋玻璃株式会社 Container inspection device and container inspection method
JP6285597B1 (en) * 2017-06-05 2018-02-28 大塚電子株式会社 Optical measuring apparatus and optical measuring method
CN107345918B (en) * 2017-08-16 2023-05-23 广西大学 Plate material quality detection device and method
CN107515222A (en) * 2017-09-20 2017-12-26 哈尔滨工程大学 A kind of microstructure observation device of ice
WO2020029237A1 (en) * 2018-08-10 2020-02-13 合刃科技（深圳）有限公司 Detection method and system
CN109187550A (en) * 2018-08-15 2019-01-11 苏州富鑫林光电科技有限公司 A kind of defects detection imaging method based on grating image
CN109827974B (en) * 2018-08-30 2022-03-08 东莞市微科光电科技有限公司 Resin optical filter film crack detection device and detection method
CN110044931B (en) * 2019-04-23 2021-03-26 华中科技大学 Detection apparatus for curved surface glass surface and internal defect
CN110095590A (en) * 2019-04-23 2019-08-06 深圳市华星光电半导体显示技术有限公司 Glass substrate residual material method for detecting and device
CN110031481B (en) * 2019-05-05 2021-11-12 苏州天准科技股份有限公司 Square wave structured light illumination implementation method based on polarization
CN112147710B (en) * 2019-06-26 2022-02-18 上海微电子装备（集团）股份有限公司 Detection method and detection device of wet-process optical cement device
CN114796730B (en) * 2022-03-29 2024-02-27 深圳市好克医疗仪器股份有限公司 Bubble detection apparatus, bubble detection method, bubble detection device, and bubble detection program
CN115338168A (en) * 2022-07-28 2022-11-15 宜昌中威清洗机有限公司 Crankshaft cleaning system
CN116934752B (en) * 2023-09-18 2023-12-08 山东国泰民安玻璃科技有限公司 Glass detection method and system based on artificial intelligence

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JPS57120804A (en) * 1981-01-20 1982-07-28 Hitachi Metals Ltd Inspecting method of surface defect
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Publication number Priority date Publication date Assignee Title
US4340304A (en) * 1978-08-11 1982-07-20 Rockwell International Corporation Interferometric method and system
JPS57120804A (en) * 1981-01-20 1982-07-28 Hitachi Metals Ltd Inspecting method of surface defect
SU1260773A1 (en) * 1984-11-29 1986-09-30 Специальное Конструкторско-Технологическое Бюро Института Радиофизики И Электроники Ан Усср Device for detecting defects in transparent thin-film articles
JPH04178545A (en) * 1990-11-14 1992-06-25 Fuji Photo Film Co Ltd Method and apparatus for inspecting transparent band-like body
JPH0579994A (en) * 1991-09-21 1993-03-30 Kowa Co Transparent body defect inspecting device
US6040900A (en) * 1996-07-01 2000-03-21 Cybernet Systems Corporation Compact fiber-optic electronic laser speckle pattern shearography
JP2001041719A (en) * 1999-07-27 2001-02-16 Canon Inc Inspection device and method of transparent material and storage medium
US20030210402A1 (en) * 2002-05-07 2003-11-13 Applied Materials Israel Ltd. Apparatus and method for dual spot inspection of repetitive patterns
WO2004017099A2 (en) * 2002-08-19 2004-02-26 Green Vision Systems Ltd. Electro-optically inspecting a longitudinally moving rod of material

Also Published As

Publication number Publication date
TW200706859A (en) 2007-02-16
TWI360652B (en) 2012-03-21
WO2006108137A3 (en) 2006-11-16
WO2006108137A2 (en) 2006-10-12
CN101175986B (en) 2010-10-13
EP1866625A2 (en) 2007-12-19
KR20070121820A (en) 2007-12-27
JP2008536127A (en) 2008-09-04
CN101175986A (en) 2008-05-07

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