EP1731766B1 - Stator disc for turbomolecular pump - Google Patents

Stator disc for turbomolecular pump Download PDF

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Publication number
EP1731766B1
EP1731766B1 EP06009899A EP06009899A EP1731766B1 EP 1731766 B1 EP1731766 B1 EP 1731766B1 EP 06009899 A EP06009899 A EP 06009899A EP 06009899 A EP06009899 A EP 06009899A EP 1731766 B1 EP1731766 B1 EP 1731766B1
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EP
European Patent Office
Prior art keywords
web
stator
blade
disc
depth
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EP06009899A
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German (de)
French (fr)
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EP1731766A3 (en
EP1731766A2 (en
Inventor
Tobias Stoll
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP1731766A3 publication Critical patent/EP1731766A3/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2230/00—Manufacture
    • F05B2230/10—Manufacture by removing material

Definitions

  • the invention relates to a stator disk for use with a turbomolecular pump according to the preamble of the first claim.
  • rotor and stator disks are alternately arranged, with the rotor disks sitting on a high-speed shaft.
  • the stator discs are mounted stationary in a housing. Both types of discs have blades, which in combination with the fast rotation, the pumping action is generated. It is known to make the blades of both types of discs by milling from a solid disc. This is time consuming and expensive, which is why we used stamped discs for the stator disks.
  • Such discs are for example from the German patent application DE-OS 37 22 164 known. Here, first full discs are punched from a sheet.
  • the JP 59 090796 A shows a stator for a turbomolecular pump having radial and tangential slots between the blades with each other and between blades and support rings. It is proposed to cover the outer tangential slots by a specially designed spacer ring.
  • the object of the invention is to avoid these disadvantages of the prior art, in particular to allow nosticgttnstigere production tools and to achieve a higher accuracy of the stator. High degrees of deformation should be avoided.
  • stator which is designed according to the features of the first claim. Furthermore, it is achieved by a manufacturing method having the features of claim four
  • the stator disc according to the invention has an inner ring, an outer ring and blades arranged therebetween. Between the blades and the rings in each case webs are formed in the radial direction, whose depth in the circumferential direction is smaller than the blade depth.
  • a stator disk has less material regions which are to be reshaped and, moreover, have a lower degree of deformation. Therefore, the stresses in the component are significantly reduced and eliminates the Richtaufwand. This results in a higher achievable accuracy of the component dimensions. Because lower forces For forming and fewer steps are needed cheaper tools can be used. The proportion of tool costs to the component costs decreases, the adaptation of the stator to the vacuum technical requirements is thus more economical.
  • stator disk according to the invention in a turbomolecular pump leads to a reduction in the gap within the pump and thus to an improvement in the pumping action.
  • semicircular disks having substantially radial slots are first produced by punching or laser cutting. Subsequently, the material is bent between the radial slots so that it is rotated out of the plane of the disc, so that blades are formed.
  • the method is characterized in that in one of the steps before bending at the ends of the radial slots further slots are generated in the circumferential direction.
  • stator disk according to the characterizing features of subclaims 2 and 3 and adapting the method according to the characterizing features of subclaims 5.
  • the depth of the web in the circumferential direction is limited in the maximum in that the deformation and material tension increases with increasing depth. At a minimum, it is limited by the strength and heat transport. The strength must allow mechanical loads on the web, for example, by a strong pressure gradient across the disc. In addition, the web must have a sufficient cross section, which allows a sufficient heat transfer. It is advantageous to choose the web width in relation to the blade width in the range of one to ten to one to two.
  • Advantages in the manufacturing process can be achieved by turning the blades together out of the window plane in one step. This saves valuable processing time.
  • FIG. 1 shows a turbomolecular pump 10 with a housing 11. This has a flange 12 for connection to a recipient to be evacuated. In the flange is the suction region 13. Further, the turbomolecular pump 10 has a gas outlet 14 from which the compressed gas is discharged.
  • a rotor shaft 15 is rotatably supported by bearings 17 and set by a drive 18 in rapid rotation.
  • the rotor shaft carries a plurality of discs 16, which are each provided with blades. Between the rotor disks fixed stator disks 1 are arranged, which also have blades.
  • the stator discs are held by spacers 19 at an axial distance. Due to the fast rotation and the interaction of the rotor and the stator discs results in the pumping action.
  • the FIG. 2 shows a stator according to the invention, used in the turbomolecular pump 10 1 in a plan view.
  • the stator consists of two half-discs 6 and 7, which are placed in each case from one side around the shaft of the rotor during assembly in the turbomolecular pump.
  • the stator disk has an outer ring 4, on which it is held in the housing of the turbomolecular pump, and an inner ring 3.
  • Between the rings a plurality of blades 2 is arranged.
  • the blades are formed by substantially radial slots 8 and slots in the circumferential direction 9 are generated in the solid material. This can be done by punching or by cutting. By creating the slots 8, 9 webs 5 are formed at the connection points between the rings and the blades.
  • the depth of cut in the circumferential direction is indicated by S, the blade depth by T. In this case, the blade depth T is greater than the depth of cut S.
  • FIG. 3 is a perspective view of a section of the stator 1 is shown, which illustrates the deformation by the exhibition of the blades from the disk plane.
  • the web is the fifth arranged.
  • the depth in the circumferential direction S is smaller than the blade depth T, the amount of material to be deformed is reduced.
  • the web also has a radial extent R on.
  • the deformation area along the circumference is as large as the depth T. Especially with a strong inclination of the blade against the disk plane, there is a very high deformation of the material with the disadvantages described above.
  • the sizes S and R can not be chosen arbitrarily small.
  • the geometrical dimension of the web determines the mechanical load capacity and the maximum possible heat transfer.
  • heat is generated in particular on the rotor due to the compression and friction of the gas to be compressed.
  • Another source of heat is the non-loss drive. This heat is released by the rotor largely by radiation on the stator and must be able to be dissipated via the webs.
  • a ratio S to T of one to ten to one to two proves to be favorable and meaningful. Advantages can be achieved if the web 5 is arranged halfway between the blade edge 20 and 21.
  • firstly semicircular disks are produced with substantially radial slots 8 by punching or laser cutting.
  • the machining takes place in such a way that further slots are produced in the circumferential direction 9 at the ends of the radial slots, so that a web 5 is formed between the blade 2 and at least inner ring 3 or outer ring 4.
  • the material between the radial slots is bent so that it is rotated out of the plane of the disc, so that blades 2 arise.
  • the disc is placed for example between an upper and a lower mold part and pressed both moldings against each other.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The disc has a set of vanes (2) exposed in a stator disc plane, an inner ring and an outer ring, where the stator disc is divided into two identical disk sections. A connecting position is provided between the vanes and rings. The vane has a radial rod at the connecting position, where the width of the radial rod along the circumference is smaller than the vane width. The radial rod is arranged between the vane edges. An independent claim is also included for a method for manufacturing a stator disc.

Description

Die Erfindung betrifft eine Statorscheibe zur Verwendung mit einer Turbomolekularpumpe nach dem Obergriff des ersten Anspruchs.The invention relates to a stator disk for use with a turbomolecular pump according to the preamble of the first claim.

In Turbomolekularpumpen sind Rotor- und Statorscheiben abwechselnd angeordnet, wobei die Rotorscheiben auf einer schnelldrehenden Welle sitzen. Die Statorscheiben sind ortsfest in einem Gehäuse montiert. Beide Sorten von Scheiben weisen Schaufeln auf, wodurch im Zusammenspiel mit der schnellen Drehung die Pumpwirkung erzeugt wird. Es ist bekannt, die Schaufeln von beiden Sorten von Scheiben durch Fräsen aus einer Vollscheibe herzustellen. Dies ist zeitaufwändig und teuer, weshalb man für die Statorscheiben gestanzte Scheiben verwendet. Solche Scheiben sind beispielsweise aus der deutschen Offenlegungsschrift DE-OS 37 22 164 bekannt. Hier werden zunächst Vollscheiben aus einem Blech gestanzt. Anschließend werden radiale Schlitze in diese Scheibe eingestanzt und im letzten Arbeitsgang der Bereich zwischen den Schlitzen geschränkt, so dass Scheibenmaterial aus der Scheibenebene herausgestellt wird und Schaufeln entstehen. Die nicht geschränkten Bereiche im Inneren und Äußeren verbleiben als Ringe.
Nachteilig an diesem Stand der Technik ist, dass an den Verbindungsstellen zwischen Innenring und Schaufel, bzw. Schaufel und Außenring, ein hoher Grad von Umformung auftritt. Außerdem sind die Kräfte sehr groß, mit denen der notwendige Umformungsgrad erreicht werden kann. Diese Umformproblematik führt zu hohen Spannungen im Material, welche den Verzug der Scheiben und dadurch den notwendigen Arbeitsgang des Richtens nach sich zieht. Dies wirkt sich insgesamt ungünstig auf die erreichbaren Genauigkeiten der Statorscheibenform aus. Diese Genauigkeit ist aber wichtig, wenn kleine Spaltmaße zwischen Rotor-, Stator- und Gehäusekomponenten erreicht werden sollen. Von den Spaltmaßen hängt die Güte der Pumpleistung der Turbomolekularpumpe ab.In turbomolecular pumps, rotor and stator disks are alternately arranged, with the rotor disks sitting on a high-speed shaft. The stator discs are mounted stationary in a housing. Both types of discs have blades, which in combination with the fast rotation, the pumping action is generated. It is known to make the blades of both types of discs by milling from a solid disc. This is time consuming and expensive, which is why we used stamped discs for the stator disks. Such discs are for example from the German patent application DE-OS 37 22 164 known. Here, first full discs are punched from a sheet. Subsequently, radial slots are punched into this disc and in the last operation, the area between the slots is limited, so that disc material is exposed from the disc plane and blades are formed. The unrestricted areas inside and outside remain as rings.
A disadvantage of this prior art is that at the junctions between inner ring and blade, or blade and outer ring, a high degree of deformation occurs. In addition, the forces are very large, with which the necessary degree of deformation can be achieved. This deformation problem leads to high stresses in the material, which causes the distortion of the discs and thus the necessary operation of straightening. This has an unfavorable effect on the achievable accuracies of the stator disk shape. However, this accuracy is important if small gaps between rotor, stator and housing components are to be achieved. The quality of the pump power of the turbomolecular pump depends on the gap dimensions.

Ein weiterer Nachteil ist, dass für dieses Fertigungsverfahren aufwändige und damit auch sehr teuere Werkzeuge notwendig sind. Damit sind solche Scheiben nur bei großen Stückzahlen kostengünstig herstellbar. Eine flexible Dimensionierung der Scheiben, die optimal auf den Einsatzbereich einer Pumpe angepasst sind, d.h. auf die vakuumtechnischen Erfordernisse, ist so bei geringeren Stückzahlen nicht mit einem vertretbaren Kostenaufwand zu realisiern.Another disadvantage is that expensive and thus very expensive tools are necessary for this manufacturing process. Thus, such discs are inexpensive to produce only in large quantities. A flexible dimensioning of the discs, which are optimally adapted to the application area of a pump, i. on the vacuum technical requirements, so can not be realized at a reasonable cost in smaller quantities.

Die JP 59 090796 A zeigt eine Statorscheibe für eine Turbomolekularpumpe, die radiale und tangentiale Schlitze zwischen den Schaufeln untereinander und zwischen Schaufeln und Tragringen besitzt. Es wird eine Abdeckung der äußeren tangentialen Schlitze durch einen speziell gestalteten Distanzring vorgeschlagen.The JP 59 090796 A shows a stator for a turbomolecular pump having radial and tangential slots between the blades with each other and between blades and support rings. It is proposed to cover the outer tangential slots by a specially designed spacer ring.

Aufgabe der Erfindung ist es, diese Nachteile des Standes der Technik zu vermeiden, insbesondere, kostengttnstigere Fertigungswerkzeuge zu erlauben und eine höhere Genauigkeit der Statorscheibe zu erzielen. Hohe Umformungsgrade sollen vermieden werden.The object of the invention is to avoid these disadvantages of the prior art, in particular to allow kostengttnstigere production tools and to achieve a higher accuracy of the stator. High degrees of deformation should be avoided.

Gelöst wird diese Aufgabe durch eine Statorscheibe, die gemäß den Merkmalen des ersten Anspruches gestaltet ist. Weiterhin wird sie gelöst durch ein Herstellungsverfahren mit den Merkmalen des Anspruches vierThis object is achieved by a stator, which is designed according to the features of the first claim. Furthermore, it is achieved by a manufacturing method having the features of claim four

Die erfindungsgemäße Statorscheibe weist einen Innenring, einen Außenring und dazwischen angeordnete Schaufeln auf. Zwischen den Schaufeln und den Ringen sind jeweils Stege in radialer Richtung ausgebildet, dessen Tiefe in Umfangsrichtung kleiner als die Schaufeltiefe ist. Eine solche Statorscheibe besitzt im Vergleich zum Stand der Technik weniger umzuformende Materialbereiche, die überdies einen geringeren Umformungsgrad aufweisen. Daher werden die Spannungen im Bauteil deutlich reduziert und der Richtaufwand entfall. Hieraus resultiert eine höhere erreichbare Genauigkeit der Bauteilmaße. Da geringere Kräfte zum Umformen und weniger Arbeitsschritte nötig sind, können preiswertere Werkzeuge eingesetzt werden. Der Anteil des Werkzeugkosten an den Bauteilkosten sinkt, die Anpassung der Statorscheibe an die vakuumtechnischen Erfordernisse wird somit wirtschaftlicher.The stator disc according to the invention has an inner ring, an outer ring and blades arranged therebetween. Between the blades and the rings in each case webs are formed in the radial direction, whose depth in the circumferential direction is smaller than the blade depth. In comparison to the prior art, such a stator disk has less material regions which are to be reshaped and, moreover, have a lower degree of deformation. Therefore, the stresses in the component are significantly reduced and eliminates the Richtaufwand. This results in a higher achievable accuracy of the component dimensions. Because lower forces For forming and fewer steps are needed cheaper tools can be used. The proportion of tool costs to the component costs decreases, the adaptation of the stator to the vacuum technical requirements is thus more economical.

Da die Bauteilmaße besser als im Stand der Technik eingehalten werden können, führt die Verwendung der erfindungsgemäßen Statorscheibe in einer Turbomolekularpumpe zu einer Verringerung der Spalte innerhalb der Pumpe und damit zu einer Verbesserung der Pumpwirkung.Since the component dimensions can be maintained better than in the prior art, the use of the stator disk according to the invention in a turbomolecular pump leads to a reduction in the gap within the pump and thus to an improvement in the pumping action.

Im Herstellungsverfahren für eine Statorscheibe werden zunächst halbkreisftimige Scheiben mit im wesentlichen radialen Schlitzen durch Stanzen oder Laserschneiden erzeugt. Anschließend wird das Material zwischen den radialen Schlitzen so gebogen, dass es aus der Ebene der Scheibe herausgedreht wird, so dass Schaufeln entstehen. Gekennzeichnet ist das Verfahren dadurch, dass in einem der Schritte vor dem Biegen an den Enden der radialen Schlitze weitere Schlitze in Umfangsrichtung erzeugt werden. Durch diese Maßnahme werden die oben beschriebenen Vorteile in Bezug auf Umformungsaufwand und Materialspannungen erreicht.In the manufacturing process for a stator disk, semicircular disks having substantially radial slots are first produced by punching or laser cutting. Subsequently, the material is bent between the radial slots so that it is rotated out of the plane of the disc, so that blades are formed. The method is characterized in that in one of the steps before bending at the ends of the radial slots further slots are generated in the circumferential direction. By this measure, the advantages described above in terms of conversion costs and material stresses are achieved.

Weitere Vorteile können erreicht werden, indem die Statorscheibe nach den kennzeichnenden Merkmalen der Unteransprüche 2 und 3 gestaltet werden und das Verfahren nach den kennzeichnenden Merkmalen der Unteransprüche 5 angepasst wird.Further advantages can be achieved by designing the stator disk according to the characterizing features of subclaims 2 and 3 and adapting the method according to the characterizing features of subclaims 5.

Die Anordnung des Steges auf halber Strecke zwischen den Schaufelkanten führt zu einer gleichmäßigen Belastung des Steges. Diese Belastung rührt von dem Druckunterschied des Gases vor und hinter der Statorscheibe her. Durch die symmetrische Anordnung treten am Steg nur Drehmomente gleicher Stärke aber mit entgegengesetztem Vorzeichen auf, so dass in der Addition kein resultierendes Drehmoment um die radiale Achse der Schaufel und des Steges auftritt. Daher wird die Materialbelastung verringert.The arrangement of the web halfway between the blade edges leads to a uniform load on the web. This load stems from the pressure difference of the gas in front of and behind the stator disk. Due to the symmetrical arrangement, only torques of the same magnitude but of opposite sign occur at the web, so that in the addition no resulting torque occurs around the radial axis of the blade and of the web. Therefore, the material load is reduced.

Die Tiefe des Steges in Umfangrichtung wird im Maximum dadurch begrenzt, dass die Umformung und Materialspannung mit zunehmender Tiefe steigt. Im Minimum wird sie begrenzt durch die Festigkeit und den Wärmetransport. Die Festigkeit muss mechanische Belastungen des Steges zulassen, beispielsweise durch ein starkes Druckgefälle über der Scheibe. Außerdem muss der Steg einen ausreichenden Querschnitt aufweisen, der einen hinreichenden Wärmetransport zulässt. Vorteilhaft ist es, die Stegbreite im Verhältnis zur Schaufelbreite im Bereich von eins zu zehn bis eins zu zwei zu wählen.The depth of the web in the circumferential direction is limited in the maximum in that the deformation and material tension increases with increasing depth. At a minimum, it is limited by the strength and heat transport. The strength must allow mechanical loads on the web, for example, by a strong pressure gradient across the disc. In addition, the web must have a sufficient cross section, which allows a sufficient heat transfer. It is advantageous to choose the web width in relation to the blade width in the range of one to ten to one to two.

Weitere Vorteile lassen sich im Hinblick auf die Fertigung dadurch gewinnen, dass die Statorscheibe aus einer Mehrzahl identischer Scheiben zusammengesetzt werden. Damit wird nur eine einzige Bauform des Scheibenabschnittes benötigt. Dies vereinfacht die Montage, da die Scheibenabschnitte nicht verwechselt und/oder falsch kombiniert werden können.Further advantages can be gained in terms of manufacturing by assembling the stator disk from a plurality of identical disks. Thus, only a single design of the disc section is needed. This simplifies the assembly, since the disc sections can not be confused and / or combined incorrectly.

Vorteile im Herstellungsverfahren lassen sich dadurch erzielen, dass die Schaufeln in einem Schritt gemeinsam aus der Scheibenebene herausgedreht werden. Hierdurch wird wertvolle Bearbeitungszeit gespart.Advantages in the manufacturing process can be achieved by turning the blades together out of the window plane in one step. This saves valuable processing time.

Im folgenden soll die Erfindung anhand eines Ausführungsbeispiels näher erläutert werden. Dazu zeigen die Figuren:

Fig. 1:
Schnitt durch eine Turbomolekularpumpe mit erfindungsgemäßen Statorscheiben.
Fig, 2:
Draufsicht auf eine erfindungsgemäß gestaltete Statorscheibe
Fig. 3:
Perspektivische Darstellung einer erfindungsgemäß gestalteten Statorscheibe. Als Ausschnitt ist der Steg zwischen Schaufel und Außenring gezeigt.
In the following the invention will be explained in more detail with reference to an embodiment. The figures show:
Fig. 1:
Section through a turbomolecular pump with stator disks according to the invention.
Fig. 2:
Top view of an inventively designed stator
3:
Perspective representation of an inventively designed stator. As a section of the bridge between the blade and outer ring is shown.

Figur 1 zeigt eine Turbomolekularpumpe 10 mit einem Gehäuse 11. Dieses besitzt einen Flansch 12 zur Verbindung mit einem auszupumpenden Rezipienten. In dem Flansch befindet sich der Ansaugbereich 13. Weiterhin besitzt die Turbomolekularpumpe 10 einen Gasauslass 14, aus dem das verdichtete Gas ausgestoßen wird. Eine Rotorwelle 15 wird drehbar von Lagern 17 gestützt und von einem Antrieb 18 in schnelle Rotation versetzt. Die Rotorwelle trägt eine Mehrzahl von Scheiben 16, welche jeweils mit Schaufeln versehen sind. Zwischen den Rotorscheiben sind feststehende Statorscheiben 1 angeordnet, welche ebenfalls Schaufeln besitzen. Die Statorscheiben werden durch Distanzringe 19 auf axialem Abstand gehalten. Durch die schnelle Rotation und der Zusammenwirkung der Rotor- mit den Statorscheiben ergibt sich die Pumpwirkung. FIG. 1 shows a turbomolecular pump 10 with a housing 11. This has a flange 12 for connection to a recipient to be evacuated. In the flange is the suction region 13. Further, the turbomolecular pump 10 has a gas outlet 14 from which the compressed gas is discharged. A rotor shaft 15 is rotatably supported by bearings 17 and set by a drive 18 in rapid rotation. The rotor shaft carries a plurality of discs 16, which are each provided with blades. Between the rotor disks fixed stator disks 1 are arranged, which also have blades. The stator discs are held by spacers 19 at an axial distance. Due to the fast rotation and the interaction of the rotor and the stator discs results in the pumping action.

Die Figur 2 zeigt eine erfindungsgemäße, in der Turbomolekularpumpe 10 verwendeten Statorscheibe 1 in einer Draufsicht. Die Statorscheibe besteht aus zwei Halbscheiben 6 und 7, die bei der Montage in der Turbomolekularpumpe jeweils von einer Seite um die Welle des Rotors gelegt werden. Die Statorscheibe weist einen Außenring 4, an dem sie im Gehäuse der Turbomolekularpumpe gehalten wird, und einen Innenring 3 auf. Zwischen den Ringen ist eine Mehrzahl von Schaufeln 2 angeordnet. Die Schaufeln entstehen, indem im Vollmaterial im wesentlichen radiale Schlitze 8 und Schlitze in Umfangsrichtung 9 erzeugt werden. Dies kann durch Stanzen oder auch durch Schneiden geschehen. Durch Erzeugung der Schlitze 8, 9 entstehen an den Verbindungsstellen zwischen den Ringen und den Schaufeln Stege 5. Die Stegtiefe in Umfangsrichtung ist mit S gekennzeichnet, die Schaufeltiefe mit T. Dabei ist die Schaufeltiefe T größer als die Stegtiefe S.The FIG. 2 shows a stator according to the invention, used in the turbomolecular pump 10 1 in a plan view. The stator consists of two half-discs 6 and 7, which are placed in each case from one side around the shaft of the rotor during assembly in the turbomolecular pump. The stator disk has an outer ring 4, on which it is held in the housing of the turbomolecular pump, and an inner ring 3. Between the rings a plurality of blades 2 is arranged. The blades are formed by substantially radial slots 8 and slots in the circumferential direction 9 are generated in the solid material. This can be done by punching or by cutting. By creating the slots 8, 9 webs 5 are formed at the connection points between the rings and the blades. The depth of cut in the circumferential direction is indicated by S, the blade depth by T. In this case, the blade depth T is greater than the depth of cut S.

In der Figur 3 ist in einer perspektivischen Ansicht ein Ausschnitt aus der Statorscheibe 1 gezeigt, der die Verformung durch das Ausstellen der Schaufeln aus der Scheibenebene verdeutlicht. An der Verbindungsstelle zwischen Außenring 4 und Schaufel 2, deren Ebene gegen die Schaufelebene geneigt ist, ist der Steg 5 angeordnet. Durch diesen Steg, dessen Tiefe in Umfangsrichtung S kleiner ist als die Schaufeltiefe T, wird die Menge des zu verformenden Materials reduziert. Der Steg weist zudem eine radiale Ausdehnung R auf. Im Stand der Technik ist das Verformungsgebiet entlang des Umfangs so groß wie die Tiefe T. Gerade bei einer starken Neigung der Schaufel gegen die Scheibenebene kommt es zu einer sehr hohen Verformung des Materials mit den oben beschriebenen Nachteilen. Durch den Steg 5 ist dies nicht mehr nötig, die Verformung wird auf den wesentlich kürzeren Bereich S reduziert, wodurch oben beschriebene Vorteile erreicht werden. Die Größen S und R können nicht beliebig klein gewählt werden. Die geometrische Abmessung des Steges bedingen die mechanische Belastbarkeit und der maximal mögliche Wärmetransport. Innerhalb der Pumpe entsteht insbesondere auf dem Rotor Wärme durch die Verdichtung und Reibung des zu verdichtenden Gases. Eine weitere Wärmequelle ist der nicht verlustfrei arbeitende Antrieb. Diese Wärme wird von dem Rotor weitgehend per Strahlung auf die Statorscheiben abgegeben und muss über die Stege abgeführt werden können. Ein Verhältnis S zu T von eins zu zehn bis eins zu zwei erweist sich als günstig und sinnvoll. Vorteile lassen sich erzielen, wenn der Steg 5 auf halber Strecke zwischen den Schaufelkante 20 und 21 angeordnet ist.In the FIG. 3 is a perspective view of a section of the stator 1 is shown, which illustrates the deformation by the exhibition of the blades from the disk plane. At the junction between outer ring 4 and blade 2, whose plane is inclined to the blade plane, the web is the fifth arranged. By this web, the depth in the circumferential direction S is smaller than the blade depth T, the amount of material to be deformed is reduced. The web also has a radial extent R on. In the prior art, the deformation area along the circumference is as large as the depth T. Especially with a strong inclination of the blade against the disk plane, there is a very high deformation of the material with the disadvantages described above. By the web 5, this is no longer necessary, the deformation is reduced to the much shorter area S, whereby the advantages described above can be achieved. The sizes S and R can not be chosen arbitrarily small. The geometrical dimension of the web determines the mechanical load capacity and the maximum possible heat transfer. Within the pump, heat is generated in particular on the rotor due to the compression and friction of the gas to be compressed. Another source of heat is the non-loss drive. This heat is released by the rotor largely by radiation on the stator and must be able to be dissipated via the webs. A ratio S to T of one to ten to one to two proves to be favorable and meaningful. Advantages can be achieved if the web 5 is arranged halfway between the blade edge 20 and 21.

Im ersten Schritt des Verfahren zur Herstellung der Statorscheibe 1 werden zunächst halbkreisfömige Scheiben mit im wesentlichen radialen Schlitzen 8 durch Stanzen oder Laserschneiden erzeugt. Die Bearbeitung erfolgt so, dass an den Enden der radialen Schlitze weitere Schlitze in Umfangsrichtung 9 erzeugt werden, so dass ein Steg 5 zwischen der Schaufel 2 und mindestens Innenring 3 oder Außenring 4 entsteht. Anschließend wird das Material zwischen den radialen Schlitzen so gebogen, dass es aus der Ebene der Scheibe herausgedreht wird, so dass Schaufeln 2 entstehen. Für dieses Herausdrehen wird die Scheibe beispielsweise zwischen ein oberes und ein unteres Formteil gelegt und beide Formteile gegeneinander gepresst.In the first step of the method for producing the stator disk 1, firstly semicircular disks are produced with substantially radial slots 8 by punching or laser cutting. The machining takes place in such a way that further slots are produced in the circumferential direction 9 at the ends of the radial slots, so that a web 5 is formed between the blade 2 and at least inner ring 3 or outer ring 4. Subsequently, the material between the radial slots is bent so that it is rotated out of the plane of the disc, so that blades 2 arise. For this unscrewing the disc is placed for example between an upper and a lower mold part and pressed both moldings against each other.

Claims (5)

  1. Stator disc (1) for use in a turbomolecular pump (10), in which a plurality of blades (2) of the stator disc are projected out of the disc plane, the stator disc has an inner ring (3), an outer ring (4) and connection points between the blade and rings, wherein the blades (2) each have a radial web (5) at the connection points, the depth S of which web along the periphery is smaller than the blade depth T, and wherein it is divided into semicircular plates (6, 7), characterised in that the depth S of the web is smaller than half and larger than a tenth of the blade depth T.
  2. Stator disc according to claim 1, characterised in that the radial web (5) is disposed half way between the blade edges (20, 21).
  3. Tuburbomolecular pump (10) fitted with at least one stator disc (1) according to one of the preceding claims.
  4. Process for the manufacture of a stator disc (1) for a turbomolecular pump (10), in which semicircular plates with substantially radial slits (8) are firstly produced by punching or laser cutting and the material between the radial slits is then bent so that it is rotated out of the disc plane, so that blades (2) are formed, characterised in that in one of the steps before the bending operation further slits are generated in peripheral direction (9) at the ends of the radial slits, so that a web is formed between the blade and at least the inner or outer ring, wherein the depth S of the web is smaller than half and lager than a tenth of the blade depth T.
  5. Process according to claim 4, characterised in that all blades (2) are rotated out of the disc plane in one step.
EP06009899A 2005-06-11 2006-05-13 Stator disc for turbomolecular pump Active EP1731766B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005027097A DE102005027097A1 (en) 2005-06-11 2005-06-11 Stator disk for turbomolecular pump

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EP1731766A2 EP1731766A2 (en) 2006-12-13
EP1731766A3 EP1731766A3 (en) 2010-06-23
EP1731766B1 true EP1731766B1 (en) 2012-03-28

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EP (1) EP1731766B1 (en)
JP (1) JP2006348935A (en)
AT (1) ATE551533T1 (en)
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JP4935527B2 (en) * 2007-06-21 2012-05-23 株式会社島津製作所 MANUFACTURING METHOD FOR FIXED WING, AND TURBO MOLECULAR PUMP WITH THE FIXED WING
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB0917317D0 (en) * 2009-10-02 2009-11-18 Bladon Jets Ltd Rotary structures
US9879553B2 (en) * 2010-12-14 2018-01-30 Edwards Japan Limited Fixed blade assembly usable in exhaust pump, and exhaust pump provided with same
DE102012222230A1 (en) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh vacuum pump
JP6241222B2 (en) * 2013-01-22 2017-12-06 株式会社島津製作所 Vacuum pump
DE102013213256A1 (en) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh stator
EP3051140B1 (en) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Stator disc for a vacuum pump
JP7049052B2 (en) * 2016-09-27 2022-04-06 エドワーズ株式会社 Vacuum pumps and fixed disks for vacuum pumps
JP6834612B2 (en) * 2017-03-07 2021-02-24 株式会社島津製作所 How to make a vacuum pump

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JP3013083B2 (en) * 1998-06-23 2000-02-28 セイコー精機株式会社 Turbo molecular pump
JP2003269365A (en) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd Vacuum pump
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JP4935527B2 (en) * 2007-06-21 2012-05-23 株式会社島津製作所 MANUFACTURING METHOD FOR FIXED WING, AND TURBO MOLECULAR PUMP WITH THE FIXED WING

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Publication number Publication date
EP1731766A3 (en) 2010-06-23
DE102005027097A1 (en) 2006-12-14
ATE551533T1 (en) 2012-04-15
US20060280595A1 (en) 2006-12-14
JP2006348935A (en) 2006-12-28
EP1731766A2 (en) 2006-12-13

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