EP1570921A1 - Procédé pour le nettoyage par plasma d'une pièce - Google Patents

Procédé pour le nettoyage par plasma d'une pièce Download PDF

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Publication number
EP1570921A1
EP1570921A1 EP04004892A EP04004892A EP1570921A1 EP 1570921 A1 EP1570921 A1 EP 1570921A1 EP 04004892 A EP04004892 A EP 04004892A EP 04004892 A EP04004892 A EP 04004892A EP 1570921 A1 EP1570921 A1 EP 1570921A1
Authority
EP
European Patent Office
Prior art keywords
component
crack
plasma
distance
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04004892A
Other languages
German (de)
English (en)
Inventor
Ursus Dr. Krüger
Ralph Reiche
Jan Dr. Steinbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to EP04004892A priority Critical patent/EP1570921A1/fr
Priority to CN200580006606A priority patent/CN100586586C/zh
Priority to PCT/EP2005/001301 priority patent/WO2005084830A1/fr
Priority to EP05701389A priority patent/EP1722901B1/fr
Priority to US10/591,512 priority patent/US7513955B2/en
Priority to DE502005007139T priority patent/DE502005007139D1/de
Publication of EP1570921A1 publication Critical patent/EP1570921A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Definitions

  • the invention relates to a method for plasma cleaning a component according to claim 1.
  • the contaminants can be dust grains, Oil or grease films or even corrosion products on the Be surface of the component.
  • Plasma-assisted vacuum etching processes of components within known PVD or CVD coating processes immediately prior to vapor deposition are known.
  • the basic principle of this surface treatment is the sputtering or sputtering of adhering impurities and the upper atomic layers of the material to be removed into particles of atomic size by bombardment with inert gas ions.
  • the very finely atomized impurity has virtually passed into the gas phase and can be sucked off.
  • Such plasmas can be achieved by coupling suitable electrode arrangements to high voltage high frequency generators. However, these methods are only used for cleaning flat surfaces.
  • the distance d of the electrode 10 to the surface 22 is varied so that the plasma 7 migrates from the crack tip to the surface 22 or from the surface 22 of the component 1 to the crack tip 37 of the crack 4.
  • the distance d in particular continuously, can be lowered so that the plasma 7 migrates from the surface 22 into the crack 4.
  • a reactive gas 31 is present be, for example, with a corrosion product in the Crack 4 reacts and thus promotes a cleaning of the crack 4.
  • the component 1 may be metallic or ceramic.
  • the component 1 is an iron, cobalt or nickel-based superalloy, for example, for manufacturing a turbine blade 12, 130 (Fig. 3, 5) or Combustion chamber liner 155 (FIG. 4) of a turbine 100 (FIG. 5) is used.
  • Other components of a gas or steam turbine can be cleaned with this method. Cracks 4 in the Component 1 can already exist directly after manufacture be or have become after the operational use of the Component 1 formed.
  • Such worn components 1, 120, 130, 155 are often refurbished. In this case 22 corrosion products are removed from the surface. Corrosion products in the crack 4 are more difficult to remove. After the crack 4 has been cleaned by the method according to the invention, the crack 4 can be welded or soldered, since the solder can adhere very well to a cleaned surface.
  • FIG. 2 shows a further device 25 'with which the method according to the invention can be carried out.
  • the device 25 ' has a control unit 19 which regulates the pressure p in the chamber 13. Since for the maintenance of a plasma 7 the condition "distance times pressure equal to constant" applies, the pressure p can also be varied in order to initiate and maintain a plasma 7 in the crack 4 at a fixed distance d between electrode 10 and surface 22 , By, for example, a constant decrease in the pressure p, the plasma 7 moves ever deeper to the crack tip 34 of the crack 4.
  • a reactive gas 31 is present be, for example, with a corrosion product in the Crack 4 reacts and thus promotes a cleaning of the crack 4.
  • Another possibility is to simultaneously vary the pressure and distance so that the plasma 7 is maintained, but the condition for the maintenance of a plasma 7 (distance times equal pressure constant) is maintained.
  • the distance d and the pressure p can be varied simultaneously or alternately.
  • an inert gas may be present (Ar, H 2 , N 2 ).
  • FIG. 3 is a perspective view of a blade 120, 130, which extends along a longitudinal axis 121.
  • the blade 120 may be a blade for plasma generation 120 or guide vane 130 of a turbomachine.
  • the Turbomachine can be a gas turbine of an airplane or a power plant for electricity generation, a Be a steam turbine or a compressor.
  • the blade 120, 130 has along the longitudinal axis 121 consecutively a fastening region 400, a blade platform 403 adjoining thereto and an airfoil 406.
  • the blade at its blade tip 415 may have another platform (not shown).
  • a blade root 183 is formed, which serves for attachment of the blades 120, 130 to a shaft or a disc (not shown).
  • the blade root 183 is designed, for example, as a hammer head. Other designs as Christmas tree or Schwalbenschwanzfuß are possible.
  • the blade 120, 130 has a leading edge 409 and a trailing edge 412 for a medium flowing past the airfoil 406.
  • the blade 120, 130 can be made by a casting process, also by directional solidification, by a forging process, by a milling process or combinations thereof.
  • directionally rigid structures so This means both single crystals that do not have grain boundaries or at most small angle grain boundaries, as well Stem crystal structures, probably in the longitudinal direction grain boundaries running, but no transverse grain boundaries exhibit.
  • second-mentioned crystalline Structures are also known as directionally rigidified structures (directionally solidified structures).
  • Refurbishment means that components 120, 130 after their use, if necessary from Protective layers must be freed (for example by Sandblasting). Thereafter, a removal of the corrosion and / or oxidation layers or products. Possibly Cracks in the component 120, 130 are also repaired. After that a re-coating of the component 120, 130 and a renewed use of the component 120, 130.
  • the blade 120, 130 may be hollow or solid. If the blade 120, 130 is to be cooled, it is hollow and possibly still has film cooling holes (not shown). As protection against corrosion, the blade 120, 130 bspw. corresponding mostly metallic coatings on and as Protection against heat mostly still a ceramic Coating.
  • FIG. 4 shows a combustion chamber 110 of a gas turbine.
  • the combustion chamber 110 is configured, for example, as a so-called annular combustion chamber, in which a plurality of burners 102 arranged around the turbine shaft 103 in the circumferential direction open into a common combustion chamber space.
  • the combustion chamber 110 is configured in its entirety as an annular structure, which is positioned around the turbine shaft 103 around.
  • the working medium M of about 1000 ° C to 1600 ° C designed.
  • the combustion chamber wall 153 on its the working medium M facing side with one of heat shield elements 155 formed inner lining provided.
  • Each heat shield element 155 is working medium side with a particularly heat-resistant Protective layer equipped or made of high temperature resistant Material made. Because of the high Temperatures inside the combustion chamber 110 is also for the Heat shield elements 155 or for their holding elements Cooling system provided.
  • the materials of the combustion chamber wall and their coatings can be similar to the turbine blades.
  • the combustion chamber 110 is in particular for a detection of Losses of the heat shield elements 155 designed. These are between the combustion chamber wall 153 and the heat shield elements 155, a number of temperature sensors 158 are positioned.
  • FIG. 5 shows by way of example a gas turbine 100 in a longitudinal partial section.
  • the gas turbine 100 has inside a rotatably mounted about a rotation axis 102 rotor 103, which is also referred to as a turbine runner.
  • a suction housing 104 Along the rotor 103 follow one another a suction housing 104, a compressor 105, for example, a toroidal combustion chamber 110, in particular annular combustion chamber 106, with a plurality of coaxially arranged burners 107, a turbine 108 and the exhaust housing 109th
  • the annular combustion chamber 106 communicates with an annular annular hot gas channel 111, for example.
  • Each turbine stage 112 is formed, for example, from two blade rings. As seen in the direction of flow of a working medium 113, in the hot gas channel 111 of a row of guide vanes 115, a series 125 formed of rotor blades 120 follows.
  • the guide vanes 130 are fastened to an inner housing 138 of a stator 143, whereas the moving blades 120 of a row 125 are attached to the rotor 103 by means of a turbine disk 133, for example. Coupled to the rotor 103 is a generator or work machine (not shown).
  • the gas turbine 100 During operation of the gas turbine 100 is from the compressor 105 sucked through the intake housing 104 air 135 and compacted. The at the turbine end of the compressor 105th provided compressed air is the burners 107th guided and mixed there with a fuel. The mixture is then to form the working medium 113 in the Combustion chamber 110 burned. From there it flows Working fluid 113 along the hot gas passage 111 past the Vanes 130 and the blades 120. To the Blades 120 relaxes the working fluid 113th momentum transferring, so that the blades 120 the rotor 103 drive and this the coupled to him Working machine.
  • the components exposed to the hot working medium 113 are subject to thermal loads during operation of the gas turbine 100.
  • the guide vanes 130 and rotor blades 120 of the first turbine stage 112, viewed in the direction of flow of the working medium 113, are subjected to the greatest thermal stress in addition to the heat shield bricks lining the annular combustion chamber 106. To withstand the prevailing temperatures, they can be cooled by means of a coolant.
  • substrates of the components can have a directional structure, ie they are monocrystalline (SX structure) or have only longitudinal grains (DS structure).
  • As the material for the components, in particular for the turbine blade 120, 130 and components of the combustion chamber 110 for example, iron-, nickel- or cobalt-based superalloys are used. Such superalloys are known, for example, from EP 1204776, EP 1306454, EP 1319729, WO 99/67435 or WO 00/44949; these writings are part of the revelation.
  • the blades 120, 130 may be anti-corrosion coatings (MCrAlX; M is at least one element of the group iron (Fe), cobalt (Co), nickel (Ni), X is an active element and is yttrium (Y) and / or silicon and / or at least one element of the rare earths) and heat through a thermal barrier coating.
  • the thermal barrier coating consists for example of ZrO 2 , Y 2 O 4 -ZrO 2 , ie it is not, partially or completely stabilized by yttrium oxide and / or calcium oxide and / or magnesium oxide.
  • suitable coating processes such as electron beam evaporation (EB-PVD), stalk-shaped grains are produced in the thermal barrier coating.
  • the vane 130 has an inner housing 138 of the Turbine 108 facing Leitschaufelfuß (not here shown) and a Leitschaufelfuß opposite Guide vane head on.
  • the vane head is the rotor 103 facing and on a mounting ring 140 of the stator 143rd established.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
EP04004892A 2004-03-02 2004-03-02 Procédé pour le nettoyage par plasma d'une pièce Withdrawn EP1570921A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP04004892A EP1570921A1 (fr) 2004-03-02 2004-03-02 Procédé pour le nettoyage par plasma d'une pièce
CN200580006606A CN100586586C (zh) 2004-03-02 2005-02-09 用于部件的等离子体清理的方法
PCT/EP2005/001301 WO2005084830A1 (fr) 2004-03-02 2005-02-09 Procede de nettoyage au plasma d'un composant
EP05701389A EP1722901B1 (fr) 2004-03-02 2005-02-09 Procede de nettoyage au plasma d'un composant
US10/591,512 US7513955B2 (en) 2004-03-02 2005-02-09 Process for the plasma cleaning of a component
DE502005007139T DE502005007139D1 (de) 2004-03-02 2005-02-09 Verfahren zur plasmareinigung eines bauteils

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04004892A EP1570921A1 (fr) 2004-03-02 2004-03-02 Procédé pour le nettoyage par plasma d'une pièce

Publications (1)

Publication Number Publication Date
EP1570921A1 true EP1570921A1 (fr) 2005-09-07

Family

ID=34745985

Family Applications (2)

Application Number Title Priority Date Filing Date
EP04004892A Withdrawn EP1570921A1 (fr) 2004-03-02 2004-03-02 Procédé pour le nettoyage par plasma d'une pièce
EP05701389A Not-in-force EP1722901B1 (fr) 2004-03-02 2005-02-09 Procede de nettoyage au plasma d'un composant

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP05701389A Not-in-force EP1722901B1 (fr) 2004-03-02 2005-02-09 Procede de nettoyage au plasma d'un composant

Country Status (5)

Country Link
US (1) US7513955B2 (fr)
EP (2) EP1570921A1 (fr)
CN (1) CN100586586C (fr)
DE (1) DE502005007139D1 (fr)
WO (1) WO2005084830A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008019892A1 (de) * 2008-04-21 2009-10-29 Mtu Aero Engines Gmbh Verfahren zum Reinigen eines Flugtriebwerks
EP2189627A1 (fr) * 2008-11-25 2010-05-26 Rolls-Royce Deutschland Ltd & Co KG Procédé de fabrication des composantes hybrides pour moteurs de turbine à gaz
WO2014027157A1 (fr) * 2012-08-14 2014-02-20 Snecma Outillage pour le dessablage d'une turbomachine

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7544254B2 (en) * 2006-12-14 2009-06-09 Varian Semiconductor Equipment Associates, Inc. System and method for cleaning an ion implanter
DE102013107400B4 (de) * 2013-07-12 2017-08-10 Ks Huayu Alutech Gmbh Verfahren zur Entfernung des Oversprays eines thermischen Spritzbrenners
US11668198B2 (en) 2018-08-03 2023-06-06 Raytheon Technologies Corporation Fiber-reinforced self-healing environmental barrier coating
US10934220B2 (en) * 2018-08-16 2021-03-02 Raytheon Technologies Corporation Chemical and topological surface modification to enhance coating adhesion and compatibility
US11505506B2 (en) 2018-08-16 2022-11-22 Raytheon Technologies Corporation Self-healing environmental barrier coating
US11535571B2 (en) 2018-08-16 2022-12-27 Raytheon Technologies Corporation Environmental barrier coating for enhanced resistance to attack by molten silicate deposits

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4098450A (en) * 1977-03-17 1978-07-04 General Electric Company Superalloy article cleaning and repair method
EP0313855A2 (fr) * 1987-10-30 1989-05-03 International Business Machines Corporation Procédé pour enlever des impuretés
EP0740989A2 (fr) * 1995-05-01 1996-11-06 Bridgestone Corporation Procédé de nettoyage d'un moule à vulcanisation
FR2836157A1 (fr) * 2002-02-19 2003-08-22 Usinor Procede de nettoyage de la surface d'un materiau enduit d'une susbstance organique, generateur et dispositif de mise en oeuvre

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4028787A (en) * 1975-09-15 1977-06-14 Cretella Salvatore Refurbished turbine vanes and method of refurbishment thereof
EP1135540B1 (fr) * 1998-10-21 2002-03-13 Siemens Aktiengesellschaft Procede et dispositif pour le nettoyage d'un produit
US7451774B2 (en) * 2000-06-26 2008-11-18 Applied Materials, Inc. Method and apparatus for wafer cleaning
US20050035085A1 (en) * 2003-08-13 2005-02-17 Stowell William Randolph Apparatus and method for reducing metal oxides on superalloy articles

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4098450A (en) * 1977-03-17 1978-07-04 General Electric Company Superalloy article cleaning and repair method
EP0313855A2 (fr) * 1987-10-30 1989-05-03 International Business Machines Corporation Procédé pour enlever des impuretés
EP0740989A2 (fr) * 1995-05-01 1996-11-06 Bridgestone Corporation Procédé de nettoyage d'un moule à vulcanisation
FR2836157A1 (fr) * 2002-02-19 2003-08-22 Usinor Procede de nettoyage de la surface d'un materiau enduit d'une susbstance organique, generateur et dispositif de mise en oeuvre

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008019892A1 (de) * 2008-04-21 2009-10-29 Mtu Aero Engines Gmbh Verfahren zum Reinigen eines Flugtriebwerks
EP2189627A1 (fr) * 2008-11-25 2010-05-26 Rolls-Royce Deutschland Ltd & Co KG Procédé de fabrication des composantes hybrides pour moteurs de turbine à gaz
US9126361B2 (en) 2008-11-25 2015-09-08 Rolls-Royce Deutschland Ltd & Co Kg Method for the manufacture of hybrid components for aircraft gas turbines
WO2014027157A1 (fr) * 2012-08-14 2014-02-20 Snecma Outillage pour le dessablage d'une turbomachine
FR2994538A1 (fr) * 2012-08-14 2014-02-21 Snecma Outillage pour le dessablage d'une turbomachine
RU2637598C2 (ru) * 2012-08-14 2017-12-05 Снекма Оборудование для удаления песка из турбомашины
US10006305B2 (en) 2012-08-14 2018-06-26 Snecma Tooling for removing sand from a turbine engine

Also Published As

Publication number Publication date
CN1946489A (zh) 2007-04-11
EP1722901B1 (fr) 2009-04-22
WO2005084830A1 (fr) 2005-09-15
EP1722901A1 (fr) 2006-11-22
DE502005007139D1 (de) 2009-06-04
CN100586586C (zh) 2010-02-03
US7513955B2 (en) 2009-04-07
US20070215174A1 (en) 2007-09-20

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