EP1482276A3 - Elément vibreur - Google Patents

Elément vibreur Download PDF

Info

Publication number
EP1482276A3
EP1482276A3 EP04012702A EP04012702A EP1482276A3 EP 1482276 A3 EP1482276 A3 EP 1482276A3 EP 04012702 A EP04012702 A EP 04012702A EP 04012702 A EP04012702 A EP 04012702A EP 1482276 A3 EP1482276 A3 EP 1482276A3
Authority
EP
European Patent Office
Prior art keywords
section
supporting
vibrator
arm
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04012702A
Other languages
German (de)
English (en)
Other versions
EP1482276A2 (fr
Inventor
Yusuke Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP1482276A2 publication Critical patent/EP1482276A2/fr
Publication of EP1482276A3 publication Critical patent/EP1482276A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
EP04012702A 2003-05-28 2004-05-28 Elément vibreur Withdrawn EP1482276A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003151295 2003-05-28
JP2003151295A JP4389480B2 (ja) 2003-05-28 2003-05-28 振動子の支持機構及び振動子ユニット

Publications (2)

Publication Number Publication Date
EP1482276A2 EP1482276A2 (fr) 2004-12-01
EP1482276A3 true EP1482276A3 (fr) 2005-06-29

Family

ID=33128256

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04012702A Withdrawn EP1482276A3 (fr) 2003-05-28 2004-05-28 Elément vibreur

Country Status (5)

Country Link
US (1) US7000472B2 (fr)
EP (1) EP1482276A3 (fr)
JP (1) JP4389480B2 (fr)
KR (1) KR100618720B1 (fr)
CN (1) CN100356138C (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005047820A1 (fr) * 2003-11-12 2005-05-26 Ngk Insulators, Ltd. Organe de support de vibrateur
JP3864952B2 (ja) * 2003-12-01 2007-01-10 セイコーエプソン株式会社 振動子デバイス及びそれを備えた電子機器並びに振動子デバイスの製造方法
KR100618342B1 (ko) * 2004-07-29 2006-09-04 삼성전자주식회사 소형 구조물 및 그 제작방법
JP4428309B2 (ja) * 2004-09-10 2010-03-10 セイコーエプソン株式会社 振動型ジャイロスコープ
JP4381354B2 (ja) * 2004-09-10 2009-12-09 セイコーエプソン株式会社 振動子の支持構造および物理量測定装置
JP4415382B2 (ja) * 2005-01-20 2010-02-17 セイコーエプソン株式会社 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ
JP4682671B2 (ja) * 2005-03-31 2011-05-11 セイコーエプソン株式会社 圧電デバイス
JP4442526B2 (ja) * 2005-07-20 2010-03-31 セイコーエプソン株式会社 圧電振動ジャイロセンサ及び圧電振動ジャイロセンサを備えた電子機器
JP4968741B2 (ja) * 2006-01-13 2012-07-04 シチズンホールディングス株式会社 角速度センサー用振動体
JP2007285977A (ja) * 2006-04-19 2007-11-01 Fujitsu Media Device Kk 角速度センサ
JP4850572B2 (ja) * 2006-04-19 2012-01-11 富士通株式会社 角速度センサ
JP5622347B2 (ja) 2006-08-09 2014-11-12 セイコーエプソン株式会社 慣性センサ装置
JP2010002427A (ja) * 2006-08-09 2010-01-07 Epson Toyocom Corp 慣性センサ、慣性センサ装置及びその製造方法
CN102143906A (zh) * 2008-09-10 2011-08-03 松下电器产业株式会社 微机电***器件及其制造方法
JP2010169457A (ja) * 2009-01-21 2010-08-05 Epson Toyocom Corp 圧電振動片および物理量検出装置
JP2010190706A (ja) * 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
JP2011145278A (ja) * 2009-12-16 2011-07-28 Seiko Epson Corp 振動片、振動子、物理量センサー、および電子機器
JP5257440B2 (ja) * 2010-12-08 2013-08-07 セイコーエプソン株式会社 圧電デバイス
JP5765993B2 (ja) * 2011-03-31 2015-08-19 キヤノン株式会社 振動型駆動装置
JP7183902B2 (ja) * 2019-03-25 2022-12-06 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0930482A2 (fr) * 1997-10-06 1999-07-21 Ngk Insulators, Ltd. Gyroscope à vibration
US6205857B1 (en) * 1998-02-25 2001-03-27 Citizen Watch Co., Ltd. Angular velocity sensing device
US20010020388A1 (en) * 2000-03-07 2001-09-13 Takeshi Inoue Piezoelectric vibration gyroscope and method for adjusting resonance frequencies of same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03198003A (ja) 1989-12-27 1991-08-29 Ricoh Co Ltd マイクロレンズアレイの製造方法
EP1367431B1 (fr) 1996-09-19 2005-12-28 Seiko Epson Corporation Procédé de fabrication d'un ecran matriciel
US6288478B1 (en) * 1997-05-28 2001-09-11 Murata Manufacturing Co. Ltd. Vibrating gyroscope
JP3999377B2 (ja) 1997-11-04 2007-10-31 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
JP4364385B2 (ja) * 1999-02-17 2009-11-18 日本碍子株式会社 振動型ジャイロスコープおよびその製造方法
JP3999452B2 (ja) * 1999-09-30 2007-10-31 日本碍子株式会社 振動型ジャイロスコープ
JP2002181550A (ja) * 2000-10-02 2002-06-26 Ngk Insulators Ltd 角速度測定装置
JP4852216B2 (ja) * 2002-01-30 2012-01-11 セイコーエプソン株式会社 振動型ジャイロスコープ
JP4305623B2 (ja) * 2002-03-13 2009-07-29 セイコーエプソン株式会社 振動子および振動型ジャイロスコープ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0930482A2 (fr) * 1997-10-06 1999-07-21 Ngk Insulators, Ltd. Gyroscope à vibration
US6205857B1 (en) * 1998-02-25 2001-03-27 Citizen Watch Co., Ltd. Angular velocity sensing device
US20010020388A1 (en) * 2000-03-07 2001-09-13 Takeshi Inoue Piezoelectric vibration gyroscope and method for adjusting resonance frequencies of same

Also Published As

Publication number Publication date
JP2004354169A (ja) 2004-12-16
CN1573289A (zh) 2005-02-02
KR20040103378A (ko) 2004-12-08
EP1482276A2 (fr) 2004-12-01
KR100618720B1 (ko) 2006-08-31
US20050262940A1 (en) 2005-12-01
CN100356138C (zh) 2007-12-19
US7000472B2 (en) 2006-02-21
JP4389480B2 (ja) 2009-12-24

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