EP1475188A2 - Dispositif pour la finition de surfaces planes - Google Patents

Dispositif pour la finition de surfaces planes Download PDF

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Publication number
EP1475188A2
EP1475188A2 EP04010040A EP04010040A EP1475188A2 EP 1475188 A2 EP1475188 A2 EP 1475188A2 EP 04010040 A EP04010040 A EP 04010040A EP 04010040 A EP04010040 A EP 04010040A EP 1475188 A2 EP1475188 A2 EP 1475188A2
Authority
EP
European Patent Office
Prior art keywords
tool
spindle
workpiece
axial
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04010040A
Other languages
German (de)
English (en)
Other versions
EP1475188A3 (fr
Inventor
Peter Nagel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kadia Produktion GmbH and Co
Original Assignee
Kadia Produktion GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kadia Produktion GmbH and Co filed Critical Kadia Produktion GmbH and Co
Publication of EP1475188A2 publication Critical patent/EP1475188A2/fr
Publication of EP1475188A3 publication Critical patent/EP1475188A3/fr
Withdrawn legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings

Definitions

  • the invention relates to a device for finishing planes Surfaces on workpieces, especially for finishing planes.
  • Flat surfaces are made by dry or wet grinding with fast rotating Machined grinding wheels. Finishing with larger ones Flatness and flat lay requirements due to continuous honing sleeves (cup wheels) possible due to their higher degree of coverage enable the desired shape accuracy.
  • the applicant's DE 202 08 944.4 U describes a machine for Finishing by honing, which also includes a tool with a tapered Grinding head for machining valve seats is shown.
  • the object of the invention is to provide a device for fine machining to improve flat surfaces to such an extent that they can be used more universally is and enables processing up to high surface quality.
  • the device is a tool with at least two working surfaces covered with cutting agent on the face, which are axially movable independently of one another, but together around a tool axis are rotatable.
  • These work surfaces which are preferably arranged concentrically to each other are in the manner of interlocking pot disks be formed and have different cutting agent coverings.
  • the outer work surface can be used for pre-processing coarser and the inner work surface for finishing a finer one Have cutting agent grit.
  • the tool can be connected to a tool spindle and from be axially movable an axial spindle drive. This can be done by an electric linear motor can be formed which is so finely adjustable that this axial movement adjusts the outer working surface, i.e. the outer cup wheel.
  • the inner cup wheel can be from a running through the drive spindle of the tool Delivery rod can be employed.
  • a device of the type mentioned at the outset is particularly preferred, as a honing machine with a tool spindle that can be rotated around a spindle axis is formed on which a tool of the previously described Kind is attachable, so that the device for a rotary drive the tool, an axial spindle drive for the tool spindle, e.g. for feeding the outer cup wheel and one into the tool spindle has embedded axial feed drive, for example can deliver the inner cup wheel.
  • a rotary drive for the workpiece is provided, the one has eccentric workpiece axis of rotation to the spindle axis.
  • This can be a separate device on the workpiece table of the honing machine is built up and integrated into it.
  • the device preferably works with annular work surfaces with a relatively small ring width compared to the ring diameter.
  • the cutting speed which results from a superposition of the peripheral speeds the respective work surface and the workpiece results, is preferably between 1 - 20 m / s.
  • the cutting speed for grinding is 30 m / s.
  • Low contact pressures are used, for example 10-100 N / cm 2 , although it is possible that the axial drives that cause the infeed are controlled away, which ensures good dimensional accuracy.
  • the cutting agent coverings usually contain high-quality cutting grains, such as diamond or boron nitrite, with a grain size of less than 15 ⁇ m, preferably at 10 ⁇ m, which varies, however, whether you want to finish or finish. But also ceramic-bonded cup wheels with corundum or Silicon cutting grains with grain size 300 - 1000 mesh / inch sieve length (mesh) are used. They are particularly porous and self-sharpening.
  • the intended material removal is usually for the pre-finishing 20 ⁇ m to 30 ⁇ m, while only 1 ⁇ m to 3 ⁇ m is removed during finish finishing become.
  • Fig. 1 shows a device 11, which consists of a honing machine 12 and a built like a special machine, a tool 13 and a workpiece rotary drive 14.
  • the honing machine has a base 15, a machine column 16 and a workpiece clamping table 17 on the base.
  • a vertical guide 18 for a spindle slide is located on the column 16 19, the headstock 20 of a vertical work spindle 21st wearing.
  • the spindle slide 19 and the associated spindle guide 18 included the primary and secondary parts of an electric linear motor, so accordingly Stator and rotor of a normal electric motor.
  • This one in the Drawing not shown in detail linear motor 22, the guide 18 and the spindle slide 19 are detailed in DE 202 08 944.4 U. described and illustrated, whereupon for the purpose of description Reference is made.
  • the headstock supports the axis of rotation about the vertical tool 23 rotatable spindle 21 and contains an electric drive motor (in Fig. 1 indicated by dashed lines) of the rotary drive 24 for the workpiece forms about the axis 23.
  • This rotary drive and possibly also the linear motor can be frequency-controlled synchronous motors whose Regulation via frequency conversion takes place.
  • a feed drive 25 is flanged an electric stepper motor 26 and a rotary / linear converter 27 which has the rotary drive of the stepping motor 26 in an axial movement an delivery rod 28 (see FIGS. 2 and 3).
  • a feed drive 25 is flanged an electric stepper motor 26 and a rotary / linear converter 27 which has the rotary drive of the stepping motor 26 in an axial movement an delivery rod 28 (see FIGS. 2 and 3).
  • a tool coupling of the spindle is e.g. like a bayonet lock, the tool 13 coupled.
  • the embodiment shown in Fig. 2 has a base body 30, at one end a connecting ring 31 is arranged for the coupling to the spindle.
  • an outer one Tool part 32 attached by means of screws 33. It has the shape of a Cup wheel with a disk-shaped base 34 and a relative narrow outer jacket 35 which towards the free end of the tool protrudes.
  • the lower end face of the jacket 35 forms the outer working surface 36 of the tool. It is provided with a cutting agent coating 37.
  • This can be made of diamond or boron nitride particles in metallic or other Bond, but also consist of corundum or other abrasives, which as a layer or as a separate annular stone or in Segment shape are applied.
  • a pot-shaped inner tool part 40 is also arranged, which also has a base 41 and a jacket 42. His External dimensions are such that it slides precisely into the outer tool part, i.e. leads on the inner surface of the jacket 35. to more precise guidance can also special storage areas, not shown be provided, which can also be designed to be adjustable.
  • the axial length of the inner tool part is less than the axial depth of the space 38, so that the inner tool part 40 completely in the Space can be withdrawn.
  • the outer, i.e. lower end face of the shell 42 of the inner tool part 40 forms the inner working surface 44 of the tool.
  • she is also provided with a cutting agent covering 45, which in principle is constructed the same as the covering 37, but usually a much smaller one Grain than this.
  • the inner tool part 40 is with a central feed rod 46, which is in a bore 47th of the base body 30 and the outer tool part 32 leads.
  • the delivery bar 46 is on the feed rod 28, which is inside the tool spindle 21 runs, firmly connected, for example by screwing, so that they precisely control the movement of the delivery rod 28 transmits inner tool part 40 and thus this relative to the outer Tool part 32 can move.
  • the two tool parts 32, 40 are movable axially to each other, but in the direction of rotation with each other connected, namely by an engaging in both base parts 34, 41 Guide pin 49.
  • a tongue and groove guide or the like be provided.
  • the tool shown in FIG. 3 is identical to that of FIG. 2, with the exception of the features described below, to the description of which reference is therefore made.
  • the base 34 of the outer tool part 32 is designed as a disk, to which a flange 34 ′ provided on the jacket 35 is screwed from the front side by means of screws 33 ′.
  • the jacket 35 in FIG. 3 has a substantially smaller ring diameter d, but a larger ring width a than that in FIG. 2. Accordingly, the working surface 36 is also wider, but takes up a smaller ring area in diameter.
  • the inner tool part 40 which is secured against rotation by a radially extending guide pin 49, which is guided in an elongated hole or slot 51 of the inner tool part.
  • Fig. 1 also shows that the workpiece rotation drive on the clamping table 14 is arranged.
  • a base which may be a cross table for workpiece positioning
  • an electric motor 54 is arranged, the, possibly via an intermediate gear and a belt drive 55, a chuck rotatable about a workpiece axis of rotation 56 57 drives 58 for a workpiece to be machined.
  • the workpiece has an upper plane surface 60 to be machined. It is also possible the workpiece, e.g. through an additional oscillation drive, one oscillating, superimposing or replacing the rotary movement Issue oscillation.
  • a coolant / lubricant supply 61 integrated in the machine is included their mouth directed to the surface 60 to be machined.
  • the tool 13 is provided to first finish and then finish the workpiece surface 60 to be machined.
  • the tool is delivered to the workpiece in a position corresponding approximately to FIG. 2, ie with the outer working surface 36 projecting downward, by means of the axial spindle drive 62, which comprises the linear motor 22, first in rapid traverse and then in fine infeed. This is possible directly, but extremely sensitively, using the linear motor, with appropriate sensors being able to limit the infeed.
  • the delivery of the outer work surface is done via the spindle unit. Then the tool and the workpiece are each driven in opposite directions, so that the resulting working speed is in the order of magnitude between 10 m / min and 50 m / min.
  • the infeed takes place depending on the path via the linear motor, but could can also be controlled depending on the force. This is done continuously but preferably step by step until the desired level is reached. Processing is wet, i.e. with the addition of coolant-lubricant, e.g. Honing oil or corresponding emulsions from the feed 61st
  • the outer workpiece part 32 together with the whole Spindle unit retracted slightly in rapid traverse to the front work surface 36 out of engagement with the tool surface and then the inner tool part 40 is advanced by actuation the stepper motor 26 in rapid traverse until the inner work surface 44, the finish work surface, is in engagement with the workpiece surface 60.
  • the delivery takes place in much smaller steps, the from a servo motor via the rotary / linear converter 27 to the feed rods 28, 46 transferred and thus mechanically directly to the work surface 44 is transmitted.
  • the finish-finishing takes place to the desired size and surface quality. It is also possible to have a minimal compliance of the linear motor for infeed and / or axial blocking for equalizing the cutting pressure to use. If necessary, between the pre-finishing and the finishing finishing also the turning speed of tool and workpiece can be adjusted.
  • the feed drive is blocked. This can be done electrically via the linear motor and / or done mechanically.
  • a tool is created with which be pre-finished and finished in a single setup can. But it is also possible to do different operations one after the other to carry out or, for example, instead of withdrawing the one work surface each, both in one part of the work process To let work surfaces work at the same time.
  • the tool is simple and robustly constructed and can be used on different machines deploy.
  • a particular advantage is that a normal honing machine, preferably one with a linear drive, but also with others Drive types for which plan finishing can be used. If, for example used a honing machine with hydraulic axial spindle drive pre-finishing could be delivered by this Drive. Then, to achieve the finish finish, the axial spindle drive hydraulically, but preferably mechanically blocked become. It will expand the uses a honing machine created using a simple built tool allows flexible use of the machine park.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP04010040A 2003-05-09 2004-04-28 Dispositif pour la finition de surfaces planes Withdrawn EP1475188A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10322360A DE10322360A1 (de) 2003-05-09 2003-05-09 Vorrichtung zum Feinbearbeiten von ebenen Flächen
DE10322360 2003-05-09

Publications (2)

Publication Number Publication Date
EP1475188A2 true EP1475188A2 (fr) 2004-11-10
EP1475188A3 EP1475188A3 (fr) 2005-12-21

Family

ID=32981333

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04010040A Withdrawn EP1475188A3 (fr) 2003-05-09 2004-04-28 Dispositif pour la finition de surfaces planes

Country Status (3)

Country Link
US (1) US7014540B2 (fr)
EP (1) EP1475188A3 (fr)
DE (1) DE10322360A1 (fr)

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GB0504228D0 (en) * 2005-03-01 2005-04-06 Westwind Air Bearings Ltd Machining spindles
US7785173B2 (en) * 2005-07-05 2010-08-31 Supfina Machine Co. Superfinishing machine and method
IT1391211B1 (it) * 2008-08-05 2011-11-18 Zanetti Testa di taglio e sbordatura da montare su banchi da taglio di lastre in vetro
US8133093B2 (en) * 2008-10-10 2012-03-13 Strasbaugh, Inc. Grinding apparatus having an extendable wheel mount
WO2011042057A1 (fr) * 2009-10-08 2011-04-14 Komax Holding Ag Dispositif et procédé d'enlèvement de couche des modules solaires
TWM421860U (en) * 2011-02-18 2012-02-01 Green Energy Technology Inc Position adjusting mechanism for grinding wheel
US9120194B2 (en) 2011-07-21 2015-09-01 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus for wafer grinding
TW201323149A (zh) * 2011-10-21 2013-06-16 Strasbaugh 晶圓研磨之系統與方法
US9393669B2 (en) 2011-10-21 2016-07-19 Strasbaugh Systems and methods of processing substrates
US9570311B2 (en) * 2012-02-10 2017-02-14 Taiwan Semiconductor Manufacturing Company, Ltd. Modular grinding apparatuses and methods for wafer thinning
US9610669B2 (en) * 2012-10-01 2017-04-04 Strasbaugh Methods and systems for use in grind spindle alignment
US9457446B2 (en) 2012-10-01 2016-10-04 Strasbaugh Methods and systems for use in grind shape control adaptation
JP6210935B2 (ja) 2013-11-13 2017-10-11 東京エレクトロン株式会社 研磨洗浄機構、基板処理装置及び基板処理方法
US10183374B2 (en) * 2014-08-26 2019-01-22 Ebara Corporation Buffing apparatus, and substrate processing apparatus
JP2016087748A (ja) * 2014-11-06 2016-05-23 株式会社ディスコ 研削装置
JP6309466B2 (ja) * 2015-01-22 2018-04-11 光洋機械工業株式会社 両頭平面研削装置
JP2018001290A (ja) * 2016-06-28 2018-01-11 株式会社ディスコ 加工装置
CN108247476A (zh) * 2018-01-31 2018-07-06 广东豪特曼智能机器有限公司 手机3d陶瓷后盖专用立式磨床及其磨削方法
CN113400164B (zh) * 2021-06-21 2022-01-18 泰州市博世特精密铸造有限公司 一种铸造容器内部自动化打磨装备
DE102021132468B3 (de) 2021-12-09 2023-02-23 Erwin Junker Maschinenfabrik Gmbh Verfahren und vorrichtung zum schleifen von planseiten eines schwer zerspanbare beschichtungen aufweisenden rotationssymmetrischen werkstückes
CN114851021B (zh) * 2022-04-14 2024-01-12 宝应县嘉永电器有限公司 一种塑料接线盒表面精加工处理设备

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DE4208615C1 (en) * 1992-03-18 1993-08-12 Gmn Georg Mueller Nuernberg Ag, 8500 Nuernberg, De Grinding spindle with concentric pot-shaped sliding discs - has inner disc protrusions extending radially between axial protrusions on outer disc
WO2003022518A2 (fr) 2001-09-10 2003-03-20 Oriol, Inc. Outil de polissage chimico-mecanique, appareil et procede correspondants

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DE20208944U1 (de) * 2002-06-10 2002-08-29 Kadia Produktion Gmbh & Co Maschine zur Feinstbearbeitung durch Honen

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4208615C1 (en) * 1992-03-18 1993-08-12 Gmn Georg Mueller Nuernberg Ag, 8500 Nuernberg, De Grinding spindle with concentric pot-shaped sliding discs - has inner disc protrusions extending radially between axial protrusions on outer disc
WO2003022518A2 (fr) 2001-09-10 2003-03-20 Oriol, Inc. Outil de polissage chimico-mecanique, appareil et procede correspondants

Also Published As

Publication number Publication date
US20050020198A1 (en) 2005-01-27
EP1475188A3 (fr) 2005-12-21
US7014540B2 (en) 2006-03-21
DE10322360A1 (de) 2004-11-25

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