EP1441128A3 - Vakuumpumpsystem - Google Patents

Vakuumpumpsystem Download PDF

Info

Publication number
EP1441128A3
EP1441128A3 EP03028333A EP03028333A EP1441128A3 EP 1441128 A3 EP1441128 A3 EP 1441128A3 EP 03028333 A EP03028333 A EP 03028333A EP 03028333 A EP03028333 A EP 03028333A EP 1441128 A3 EP1441128 A3 EP 1441128A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump system
high vacuum
pump
series
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03028333A
Other languages
English (en)
French (fr)
Other versions
EP1441128B1 (de
EP1441128A2 (de
Inventor
Armin Conrad
Peter Fahrenbach
Matthias Mädler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32520090&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1441128(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1441128A2 publication Critical patent/EP1441128A2/de
Publication of EP1441128A3 publication Critical patent/EP1441128A3/de
Application granted granted Critical
Publication of EP1441128B1 publication Critical patent/EP1441128B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)

Abstract

Vakuumpumpsystem zur Förderung leichter Gase mit wenigstens einer Hochvakuumpumpe, bei der an einer Ausstoßseite der wenigstens einen Hochvakuumpumpe wenigstens eine Zwischenpumpe direkt und mit geringem Leitwertverlust angeschlossen ist.
EP03028333A 2003-01-24 2003-12-10 Vakuumpumpsystem Expired - Lifetime EP1441128B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10302764A DE10302764A1 (de) 2003-01-24 2003-01-24 Vakuumpumpsystem
DE10302764 2003-01-24

Publications (3)

Publication Number Publication Date
EP1441128A2 EP1441128A2 (de) 2004-07-28
EP1441128A3 true EP1441128A3 (de) 2004-09-01
EP1441128B1 EP1441128B1 (de) 2008-03-26

Family

ID=32520090

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03028333A Expired - Lifetime EP1441128B1 (de) 2003-01-24 2003-12-10 Vakuumpumpsystem

Country Status (4)

Country Link
US (1) US7033142B2 (de)
EP (1) EP1441128B1 (de)
AT (1) ATE390561T1 (de)
DE (2) DE10302764A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
US20050186099A1 (en) * 2004-02-19 2005-08-25 Graeme Huntley Active vibration reduction
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
GB0505500D0 (en) * 2005-03-17 2005-04-27 Boc Group Plc Vacuum pumping arrangement
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
SG11201707468QA (en) * 2015-05-26 2017-10-30 Rasco Gmbh A boat, assembly & method for handling electronic components
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
US12044313B2 (en) * 2021-02-12 2024-07-23 Kla Corporation Dual vacuum seal
EP4224015A1 (de) * 2022-02-07 2023-08-09 Siemens Energy Global GmbH & Co. KG Wasserstoff-verdichter

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
EP0833059A2 (de) * 1996-09-27 1998-04-01 Linde Aktiengesellschaft Verfahren zum Verdichten eines Gases

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
DD96304A1 (de) * 1972-02-29 1973-03-12
CH625598A5 (de) * 1977-12-01 1981-09-30 Balzers Hochvakuum
DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
JP3763193B2 (ja) * 1997-09-22 2006-04-05 アイシン精機株式会社 多段式真空ポンプ
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
EP0833059A2 (de) * 1996-09-27 1998-04-01 Linde Aktiengesellschaft Verfahren zum Verdichten eines Gases

Also Published As

Publication number Publication date
DE50309460D1 (de) 2008-05-08
ATE390561T1 (de) 2008-04-15
DE10302764A1 (de) 2004-07-29
EP1441128B1 (de) 2008-03-26
EP1441128A2 (de) 2004-07-28
US7033142B2 (en) 2006-04-25
US20040146410A1 (en) 2004-07-29

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