EP1441128A3 - Vakuumpumpsystem - Google Patents
Vakuumpumpsystem Download PDFInfo
- Publication number
- EP1441128A3 EP1441128A3 EP03028333A EP03028333A EP1441128A3 EP 1441128 A3 EP1441128 A3 EP 1441128A3 EP 03028333 A EP03028333 A EP 03028333A EP 03028333 A EP03028333 A EP 03028333A EP 1441128 A3 EP1441128 A3 EP 1441128A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- pump system
- high vacuum
- pump
- series
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10302764A DE10302764A1 (de) | 2003-01-24 | 2003-01-24 | Vakuumpumpsystem |
DE10302764 | 2003-01-24 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1441128A2 EP1441128A2 (de) | 2004-07-28 |
EP1441128A3 true EP1441128A3 (de) | 2004-09-01 |
EP1441128B1 EP1441128B1 (de) | 2008-03-26 |
Family
ID=32520090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03028333A Expired - Lifetime EP1441128B1 (de) | 2003-01-24 | 2003-12-10 | Vakuumpumpsystem |
Country Status (4)
Country | Link |
---|---|
US (1) | US7033142B2 (de) |
EP (1) | EP1441128B1 (de) |
AT (1) | ATE390561T1 (de) |
DE (2) | DE10302764A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0214273D0 (en) * | 2002-06-20 | 2002-07-31 | Boc Group Plc | Apparatus for controlling the pressure in a process chamber and method of operating same |
JP4633370B2 (ja) * | 2004-02-17 | 2011-02-16 | 財団法人国際科学振興財団 | 真空装置 |
US20050186099A1 (en) * | 2004-02-19 | 2005-08-25 | Graeme Huntley | Active vibration reduction |
GB0411426D0 (en) * | 2004-05-21 | 2004-06-23 | Boc Group Plc | Pumping arrangement |
GB0418771D0 (en) * | 2004-08-20 | 2004-09-22 | Boc Group Plc | Evacuation of a load lock enclosure |
GB0505500D0 (en) * | 2005-03-17 | 2005-04-27 | Boc Group Plc | Vacuum pumping arrangement |
US8147222B2 (en) * | 2007-05-15 | 2012-04-03 | Agilent Technologies, Inc. | Vacuum divider for differential pumping of a vacuum system |
DE102007057944A1 (de) * | 2007-12-01 | 2009-06-04 | Inficon Gmbh | Verfahren und Vorrichtung zur Dichtheitsprüfung |
GB2472638B (en) * | 2009-08-14 | 2014-03-19 | Edwards Ltd | Vacuum system |
DE202012012359U1 (de) * | 2012-12-22 | 2014-03-24 | Oerlikon Leybold Vacuum Gmbh | Pumpstand zum Pumpen leichter Gase |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
SG11201707468QA (en) * | 2015-05-26 | 2017-10-30 | Rasco Gmbh | A boat, assembly & method for handling electronic components |
FR3070489B1 (fr) * | 2017-08-29 | 2020-10-23 | Pfeiffer Vacuum | Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester |
FR3072774B1 (fr) * | 2017-10-19 | 2019-11-15 | Pfeiffer Vacuum | Detecteur de fuites pour le controle de l'etancheite d'un objet a tester |
US12044313B2 (en) * | 2021-02-12 | 2024-07-23 | Kla Corporation | Dual vacuum seal |
EP4224015A1 (de) * | 2022-02-07 | 2023-08-09 | Siemens Energy Global GmbH & Co. KG | Wasserstoff-verdichter |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3828608A1 (de) * | 1988-08-23 | 1990-03-08 | Alcatel Hochvakuumtechnik Gmbh | Vakuumpumpvorrichtung |
DE4410903A1 (de) * | 1994-03-29 | 1995-10-05 | Leybold Ag | System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen |
EP0833059A2 (de) * | 1996-09-27 | 1998-04-01 | Linde Aktiengesellschaft | Verfahren zum Verdichten eines Gases |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
DD96304A1 (de) * | 1972-02-29 | 1973-03-12 | ||
CH625598A5 (de) * | 1977-12-01 | 1981-09-30 | Balzers Hochvakuum | |
DE3639512A1 (de) * | 1986-11-20 | 1988-06-01 | Alcatel Hochvakuumtechnik Gmbh | Vakuumpumpsystem mit einer waelzkolbenpumpe |
FR2621141B1 (fr) * | 1987-09-25 | 1989-12-01 | Cit Alcatel | Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
DE4213763B4 (de) * | 1992-04-27 | 2004-11-25 | Unaxis Deutschland Holding Gmbh | Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE4442174A1 (de) * | 1994-11-26 | 1996-05-30 | Leybold Ag | Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu |
DE19704234B4 (de) * | 1997-02-05 | 2006-05-11 | Pfeiffer Vacuum Gmbh | Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen |
JP3763193B2 (ja) * | 1997-09-22 | 2006-04-05 | アイシン精機株式会社 | 多段式真空ポンプ |
DE19821634A1 (de) * | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
-
2003
- 2003-01-24 US US10/350,935 patent/US7033142B2/en not_active Expired - Fee Related
- 2003-01-24 DE DE10302764A patent/DE10302764A1/de not_active Withdrawn
- 2003-12-10 EP EP03028333A patent/EP1441128B1/de not_active Expired - Lifetime
- 2003-12-10 DE DE50309460T patent/DE50309460D1/de not_active Expired - Lifetime
- 2003-12-10 AT AT03028333T patent/ATE390561T1/de not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3828608A1 (de) * | 1988-08-23 | 1990-03-08 | Alcatel Hochvakuumtechnik Gmbh | Vakuumpumpvorrichtung |
DE4410903A1 (de) * | 1994-03-29 | 1995-10-05 | Leybold Ag | System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen |
EP0833059A2 (de) * | 1996-09-27 | 1998-04-01 | Linde Aktiengesellschaft | Verfahren zum Verdichten eines Gases |
Also Published As
Publication number | Publication date |
---|---|
DE50309460D1 (de) | 2008-05-08 |
ATE390561T1 (de) | 2008-04-15 |
DE10302764A1 (de) | 2004-07-29 |
EP1441128B1 (de) | 2008-03-26 |
EP1441128A2 (de) | 2004-07-28 |
US7033142B2 (en) | 2006-04-25 |
US20040146410A1 (en) | 2004-07-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1441128A3 (de) | Vakuumpumpsystem | |
SG158152A1 (en) | Suction pump with a safety valve | |
EP0974753A3 (de) | Axialkolbenpumpe | |
WO2006136819A3 (en) | Combined heater pump apparatus | |
DE502004000059D1 (de) | Vakuumsauger | |
EP1393824A3 (de) | Mobiles Hochdruckreinigungsgerät | |
EP2048364A3 (de) | Mehrere Kompressoren mit Regelung der Fördermenge | |
ATE412789T1 (de) | Schleusenanordnung für eine vakuumbehandlungsanlage und verfahren zum betreiben von dieser | |
WO2008151968A3 (de) | Massenspektrometer-anordnung | |
AP2005003360A0 (en) | Centrifugal pump with configured volute. | |
EP1475590A3 (de) | Kühlschrank | |
AU2002257665A1 (en) | Turbomolecular pump | |
ATE246315T1 (de) | Vakuumpumpe | |
EP1788248A3 (de) | Schlauchpumpe | |
GB0503946D0 (en) | Vacuum pump | |
AU2005271314A8 (en) | Fluid storage and delivery apparatus | |
WO2006099842A8 (de) | Spannvorrichtung | |
AU2003244230A1 (en) | Linear actuator, and pump and compressor devices using the actuator | |
PL1559325T3 (pl) | Zbiornik solanki z systemem filtrującym | |
DE50003108D1 (de) | Seitenkanalverdichter | |
USD902258S1 (en) | Vacuum pump | |
USD979730S1 (en) | Air cleaning device | |
AU2001289704A1 (en) | Cage rack system with forced ventilation | |
EP1479987A3 (de) | Kühlschrank mit Verdampfer veränderlicher Grösse | |
GB0314692D0 (en) | Improvements in turbomolecular pumps |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
|
17P | Request for examination filed |
Effective date: 20041129 |
|
AKX | Designation fees paid |
Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
17Q | First examination report despatched |
Effective date: 20061123 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE PATENT HAS BEEN GRANTED |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP Ref country code: IE Ref legal event code: FG4D Free format text: LANGUAGE OF EP DOCUMENT: GERMAN |
|
REF | Corresponds to: |
Ref document number: 50309460 Country of ref document: DE Date of ref document: 20080508 Kind code of ref document: P |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
NLV1 | Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act | ||
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
ET | Fr: translation filed | ||
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FD4D |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080707 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080626 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080901 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
PLBI | Opposition filed |
Free format text: ORIGINAL CODE: 0009260 |
|
PLAX | Notice of opposition and request to file observation + time limit sent |
Free format text: ORIGINAL CODE: EPIDOSNOBS2 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 Ref country code: IE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
26 | Opposition filed |
Opponent name: OERLIKON LEYBOLD VACUUM GMBH Effective date: 20081218 |
|
PLBB | Reply of patent proprietor to notice(s) of opposition received |
Free format text: ORIGINAL CODE: EPIDOSNOBS3 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080626 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
BERE | Be: lapsed |
Owner name: PFEIFFER VACUUM G.M.B.H. Effective date: 20081231 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MC Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20081231 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20081231 Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20081231 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20081231 |
|
APAH | Appeal reference modified |
Free format text: ORIGINAL CODE: EPIDOSCREFNO |
|
APBM | Appeal reference recorded |
Free format text: ORIGINAL CODE: EPIDOSNREFNO |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20081210 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20081210 Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080927 |
|
PLBJ | Opposition found inadmissible |
Free format text: ORIGINAL CODE: 0009275 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080326 |
|
26U | Opposition found inadmissible |
Opponent name: OERLIKON LEYBOLD VACUUM GMBH Effective date: 20100716 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20080627 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20111129 Year of fee payment: 9 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20130830 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20130102 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20211129 Year of fee payment: 19 Ref country code: DE Payment date: 20211224 Year of fee payment: 19 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 50309460 Country of ref document: DE |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20221210 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20221210 Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20230701 |