ATE246315T1 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- ATE246315T1 ATE246315T1 AT00112483T AT00112483T ATE246315T1 AT E246315 T1 ATE246315 T1 AT E246315T1 AT 00112483 T AT00112483 T AT 00112483T AT 00112483 T AT00112483 T AT 00112483T AT E246315 T1 ATE246315 T1 AT E246315T1
- Authority
- AT
- Austria
- Prior art keywords
- ejection
- stage
- pump
- vacuum pump
- vol
- Prior art date
Links
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Electrophonic Musical Instruments (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19930952A DE19930952A1 (de) | 1999-07-05 | 1999-07-05 | Vakuumpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE246315T1 true ATE246315T1 (de) | 2003-08-15 |
Family
ID=7913691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00112483T ATE246315T1 (de) | 1999-07-05 | 2000-06-13 | Vakuumpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US6409477B1 (de) |
EP (1) | EP1067290B1 (de) |
JP (1) | JP4584420B2 (de) |
AT (1) | ATE246315T1 (de) |
DE (2) | DE19930952A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6419461B2 (en) * | 1997-08-13 | 2002-07-16 | Seiko Instruments Inc. | Turbo molecular pump |
DE10114585A1 (de) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE10130426B4 (de) * | 2001-06-23 | 2021-03-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
KR20030000735A (ko) * | 2001-06-26 | 2003-01-06 | 김덕겸 | 개선된 시일구조를 가지는 진공펌프 장치 |
JP2005042709A (ja) | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
US7021888B2 (en) * | 2003-12-16 | 2006-04-04 | Universities Research Association, Inc. | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump |
DE102008034948A1 (de) * | 2008-07-26 | 2010-01-28 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
DE102009021642B4 (de) | 2009-05-16 | 2021-07-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102009021620B4 (de) | 2009-05-16 | 2021-07-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102010019940B4 (de) | 2010-05-08 | 2021-09-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
WO2012002084A1 (ja) * | 2010-07-02 | 2012-01-05 | エドワーズ株式会社 | 真空ポンプ |
DE102011112689B4 (de) | 2011-09-05 | 2024-03-21 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102013114290A1 (de) * | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
WO2016201455A1 (en) * | 2015-06-12 | 2016-12-15 | Ac (Macao Commercial Offshore) Limited | Axial fan blower |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
NL7010108A (de) * | 1969-09-30 | 1971-04-01 | ||
BE757354A (fr) * | 1969-10-27 | 1971-03-16 | Sargent Welch Scientific Co | Pompe turbomoleculaire a stators et rotors perfectionnes |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
JPS62261696A (ja) * | 1986-05-08 | 1987-11-13 | Mitsubishi Electric Corp | タ−ボ分子ポンプ装置 |
DE3826710A1 (de) * | 1987-08-07 | 1989-02-16 | Japan Atomic Energy Res Inst | Vakuumpumpe |
JPH01277698A (ja) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Kk | 複合型真空ポンプ |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
FR2656658B1 (fr) * | 1989-12-28 | 1993-01-29 | Cit Alcatel | Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique. |
ES2069713T3 (es) * | 1990-07-06 | 1995-05-16 | Cit Alcatel | Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo. |
JPH05195957A (ja) * | 1992-01-23 | 1993-08-06 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
DE19632375A1 (de) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE19634095A1 (de) * | 1996-08-23 | 1998-02-26 | Pfeiffer Vacuum Gmbh | Eingangsstufe für eine zweiflutige Gasreibungspumpe |
JP3550465B2 (ja) * | 1996-08-30 | 2004-08-04 | 株式会社日立製作所 | ターボ真空ポンプ及びその運転方法 |
-
1999
- 1999-07-05 DE DE19930952A patent/DE19930952A1/de not_active Withdrawn
-
2000
- 2000-06-13 EP EP00112483A patent/EP1067290B1/de not_active Expired - Lifetime
- 2000-06-13 AT AT00112483T patent/ATE246315T1/de not_active IP Right Cessation
- 2000-06-13 DE DE50003075T patent/DE50003075D1/de not_active Expired - Lifetime
- 2000-06-28 JP JP2000194357A patent/JP4584420B2/ja not_active Expired - Fee Related
- 2000-07-05 US US09/609,978 patent/US6409477B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE19930952A1 (de) | 2001-01-11 |
EP1067290A3 (de) | 2001-04-11 |
JP4584420B2 (ja) | 2010-11-24 |
JP2001027195A (ja) | 2001-01-30 |
US6409477B1 (en) | 2002-06-25 |
EP1067290A2 (de) | 2001-01-10 |
DE50003075D1 (de) | 2003-09-04 |
EP1067290B1 (de) | 2003-07-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
REN | Ceased due to non-payment of the annual fee |