EP1280615A1 - Verfahren und anordnung zur herstellung eines dünnen schichtaufbaus - Google Patents
Verfahren und anordnung zur herstellung eines dünnen schichtaufbausInfo
- Publication number
- EP1280615A1 EP1280615A1 EP01938206A EP01938206A EP1280615A1 EP 1280615 A1 EP1280615 A1 EP 1280615A1 EP 01938206 A EP01938206 A EP 01938206A EP 01938206 A EP01938206 A EP 01938206A EP 1280615 A1 EP1280615 A1 EP 1280615A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- carrier
- starting material
- coating
- radiation
- coating starting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000011248 coating agent Substances 0.000 claims abstract description 43
- 238000000576 coating method Methods 0.000 claims abstract description 43
- 238000004132 cross linking Methods 0.000 claims abstract description 4
- 238000001035 drying Methods 0.000 claims abstract description 4
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 4
- 230000015572 biosynthetic process Effects 0.000 claims abstract 4
- 239000007858 starting material Substances 0.000 claims description 23
- 239000010410 layer Substances 0.000 claims description 19
- 230000005855 radiation Effects 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 5
- 239000011888 foil Substances 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000000446 fuel Substances 0.000 claims description 3
- 239000004973 liquid crystal related substance Substances 0.000 claims description 3
- 229910001416 lithium ion Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 229910001111 Fine metal Inorganic materials 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 235000011837 pasties Nutrition 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- -1 polyethylene Polymers 0.000 claims 2
- 239000004698 Polyethylene Substances 0.000 claims 1
- 239000004743 Polypropylene Substances 0.000 claims 1
- 239000000470 constituent Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 239000002985 plastic film Substances 0.000 claims 1
- 229920006255 plastic film Polymers 0.000 claims 1
- 229920000573 polyethylene Polymers 0.000 claims 1
- 229920001155 polypropylene Polymers 0.000 claims 1
- 239000004800 polyvinyl chloride Substances 0.000 claims 1
- 229920000915 polyvinyl chloride Polymers 0.000 claims 1
- 238000010792 warming Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 5
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 230000007717 exclusion Effects 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
- B05D3/0263—After-treatment with IR heaters
Definitions
- the invention relates to a method for producing a thin layer structure according to the preamble of claim 1 and an arrangement for performing this method.
- Thin-film structures on large, thin substrates are becoming increasingly important in various fields of technology.
- thin-film transistor structures such as are used in particular in liquid crystal display arrangements, and other thin-film systems for display units, for example for plasma displays.
- separator structures of electrochemical elements in particular primary or secondary elements based on lithium (lithium batteries and lithium-ion batteries etc.) and highly differentiated membrane systems for material separation and energy generation, for example fuel cells.
- a thin coating applied to a thin carrier in an initial state usually has to be converted into a functional layer and firmly connected to the carrier.
- the important thing here is to run a process with a very high degree of reliability and with the exclusion of damage to the carrier or the coating material with high productivity, ie. H. a high throughput per unit of time.
- the invention is therefore based on the object of specifying an improved, highly universal and easily adaptable method of the generic type which can be adapted to different types of concrete layer structures and which is characterized by potentially high productivity, simplicity and reliability with extensive exclusion of damage to the coating (s) and / or the carrier.
- the invention includes the basic idea of converting the respective coating starting material into the functional layer of the layer structure while at the same time being connected to the carrier, electromagnetic radiation in the near infrared range, i. H. in the wavelength range between 0.8 and 1.5 ⁇ m, to be used on the continuously conveyed product. Depending on the specific layer system in different ranks, this causes, in particular, drying and / or crosslinking of the coating starting material, often combined with melting onto the support.
- the radiation used in accordance with the invention can be generated in a simple and cost-effective manner by high-power halogen lamps operated at elevated operating temperature.
- both the coating starting material and the carrier have an average thickness in the range between 5 ⁇ m and 500 ⁇ m, in particular between 20 ⁇ m and 200 ⁇ m.
- various plastic foils in particular PE, PP or PVC foils, or metal foils or fine metal mesh, especially made of aluminum or copper or their alloys, serve as carriers in important applications.
- the coating starting material is applied in particular in liquid or pasty or also in powder form by means of suitable coating techniques known per se, preferably spun on, rolled on, sprayed on, sprinkled on or inflated.
- the spectral composition of the processing infrared radiation is preferably adjusted in accordance with the absorption properties of the coating starting material in such a way that it heats up substantially uniformly over its layer thickness, avoiding an inadmissible thermal load on the carrier and also individual areas of the coating.
- This setting can be made via the operating voltage; Filters can also be used.
- the radiation power can be adjusted in particular by varying the distance between the radiation source and the surface of the layer structure. The radiation can act directly in the coating or through the carrier or from both sides.
- a gas flow sweeping over the surface of the applied coating starting material and / or the back surface of the carrier can, on the one hand, equalize the temperature distribution and, if necessary, lower the surface temperature, and on the other hand, the rapid removal of volatile substances Components of the coating starting material can be achieved. This further increases the reliability and efficiency of the method increase.
- the gas stream air stream is preferably dry and cold and is supplied at high pressure or pulse.
- a power control based on feedback detector signals for example temperature sensors
- the proposed method is suitable for the production of thin-film transistor arrangements, in particular for liquid crystal display arrangements, of separator membranes for electrochemical elements, in particular of lithium-ion batteries, for the production of thin-film structures for plasma displays and for the production of membrane structures for fuel cells.
- a preferred arrangement for carrying out the method comprises, for handling a quasi-endless carrier, a corresponding feed and feed device - which can in particular comprise a carrier supply roll and a roll feed device -, a feed and layer generation device for feeding the coating starting dimension - terials and its layer-forming application on the carrier surface and the NIR irradiation device, which in particular has one or more halogen lamps with a high spectral component in the NIR, with a corresponding power supply.
- a gas stream generating device for generating and aligning the above-mentioned gas stream and / or a device for power setting or control is additionally provided, the latter preferably comprising means for adjusting the distance between the radiation source and the layer structure.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Fuel Cell (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Moulding By Coating Moulds (AREA)
- Laminated Bodies (AREA)
- Drying Of Solid Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
Claims
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10022223 | 2000-05-08 | ||
DE10022223 | 2000-05-08 | ||
DE10024731 | 2000-05-19 | ||
DE10024731A DE10024731A1 (de) | 2000-05-08 | 2000-05-19 | Verfahren und Anordnung zur Herstellung eines dünnen Schichtaufbaus |
PCT/EP2001/005228 WO2001085363A1 (de) | 2000-05-08 | 2001-05-08 | Verfahren und anordnung zur herstellung eines dünnen schichtaufbaus |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1280615A1 true EP1280615A1 (de) | 2003-02-05 |
EP1280615B1 EP1280615B1 (de) | 2006-04-19 |
Family
ID=26005581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01938206A Expired - Lifetime EP1280615B1 (de) | 2000-05-08 | 2001-05-08 | Verfahren und anordnung zur herstellung eines dünnen schichtaufbaus |
Country Status (7)
Country | Link |
---|---|
US (1) | US20030175412A1 (de) |
EP (1) | EP1280615B1 (de) |
KR (1) | KR100747722B1 (de) |
AT (1) | ATE323556T1 (de) |
AU (1) | AU2001263921A1 (de) |
DE (2) | DE20022159U1 (de) |
WO (1) | WO2001085363A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002026897A2 (de) * | 2000-09-29 | 2002-04-04 | Advanced Photonics Technologies Ag | Verfahren und anordnung zur herstellung eines beschichteten wärmeempfindlichen artikels oder behälters mit wärmeempfindlichem inhalt |
DE10122076B4 (de) * | 2001-05-07 | 2007-06-06 | Advanced Photonics Technologies Ag | Verfahren und Anordnung zur Herstellung eines geklebten Verbundes aus saugfähigen Materialien |
US7425296B2 (en) | 2004-12-03 | 2008-09-16 | Pressco Technology Inc. | Method and system for wavelength specific thermal irradiation and treatment |
US10857722B2 (en) | 2004-12-03 | 2020-12-08 | Pressco Ip Llc | Method and system for laser-based, wavelength specific infrared irradiation treatment |
US7638780B2 (en) * | 2005-06-28 | 2009-12-29 | Eastman Kodak Company | UV cure equipment with combined light path |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3639762A (en) * | 1969-02-14 | 1972-02-01 | Burton B Hughes | Marking consumer items by rendering colorless markings permanently colored with radiation exposure |
JPS63275790A (ja) * | 1987-04-30 | 1988-11-14 | 神崎製紙株式会社 | キャスト塗被紙の製造方法 |
JPH0290194A (ja) * | 1988-09-28 | 1990-03-29 | Hitachi Ltd | 表示装置 |
US5236746A (en) * | 1991-04-15 | 1993-08-17 | Ciba-Geigy Corporation | Curtain coating process for producing thin photoimageable coatings |
US5749830A (en) * | 1993-12-03 | 1998-05-12 | Olympus Optical Co., Ltd. | Fluorescent endoscope apparatus |
CA2220108A1 (en) * | 1995-05-04 | 1996-11-07 | Nolle Gmbh | Apparatus for hardening a layer on a substrate |
WO1998008619A1 (en) * | 1996-08-30 | 1998-03-05 | Hoechst Celanese Corporation | Method for melt-coating surfaces with curable powder polymer compositions |
TR200002377T2 (tr) * | 1998-02-17 | 2000-12-21 | E.I.Du Pont De Nemours & Company, Inc | Toz cilanın üretimi için işlem. |
JP3948824B2 (ja) * | 1998-05-12 | 2007-07-25 | 帝人株式会社 | 延伸フィルムの製造方法およびその装置 |
-
2000
- 2000-05-19 DE DE20022159U patent/DE20022159U1/de not_active Expired - Lifetime
-
2001
- 2001-05-08 AU AU2001263921A patent/AU2001263921A1/en not_active Abandoned
- 2001-05-08 EP EP01938206A patent/EP1280615B1/de not_active Expired - Lifetime
- 2001-05-08 AT AT01938206T patent/ATE323556T1/de not_active IP Right Cessation
- 2001-05-08 WO PCT/EP2001/005228 patent/WO2001085363A1/de active IP Right Grant
- 2001-05-08 KR KR1020027014970A patent/KR100747722B1/ko not_active IP Right Cessation
- 2001-05-08 US US10/275,725 patent/US20030175412A1/en not_active Abandoned
- 2001-05-08 DE DE50109551T patent/DE50109551D1/de not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
See references of WO0185363A1 * |
Also Published As
Publication number | Publication date |
---|---|
KR100747722B1 (ko) | 2007-08-08 |
EP1280615B1 (de) | 2006-04-19 |
DE50109551D1 (de) | 2006-05-24 |
KR20030007593A (ko) | 2003-01-23 |
US20030175412A1 (en) | 2003-09-18 |
WO2001085363A1 (de) | 2001-11-15 |
ATE323556T1 (de) | 2006-05-15 |
DE20022159U1 (de) | 2001-04-05 |
AU2001263921A1 (en) | 2001-11-20 |
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