EP1274942B1 - Vacuum pump with two co-operating rotors - Google Patents

Vacuum pump with two co-operating rotors Download PDF

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Publication number
EP1274942B1
EP1274942B1 EP01927731A EP01927731A EP1274942B1 EP 1274942 B1 EP1274942 B1 EP 1274942B1 EP 01927731 A EP01927731 A EP 01927731A EP 01927731 A EP01927731 A EP 01927731A EP 1274942 B1 EP1274942 B1 EP 1274942B1
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EP
European Patent Office
Prior art keywords
rotor shafts
gear
shaft
chamber
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01927731A
Other languages
German (de)
French (fr)
Other versions
EP1274942A1 (en
EP1274942B8 (en
Inventor
Manfred Behling
Lothar Brenner
Thomas Dreifert
Hartmut Kriehn
Klaus Rofall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1274942A1 publication Critical patent/EP1274942A1/en
Publication of EP1274942B1 publication Critical patent/EP1274942B1/en
Application granted granted Critical
Publication of EP1274942B8 publication Critical patent/EP1274942B8/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions

Definitions

  • FIGS. 2 and 3 indicate coupling possibilities of the type described.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cephalosporin Compounds (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)

Abstract

A vacuum pump ( 1 ) comprising a pump chamber casing ( 5 ) accommodating two co-operating rotors ( 2, 3 ) which are respectively arranged on a shaft ( 8, 9 ). A bearing/gear chamber ( 6 ) is disposed adjacent to the pump chamber casing ( 5 ) in which the rotor shafts ( 8, 9 ) are cantilevered and provided with a synchronisation gear ( 17 ). A drive motor ( 25 ) whose drive shaft ( 28 ) extending parallel to the rotor shafts ( 8, 9 ) and is provided with a drive gear ( 35 ). A gear stage ( 37 ) is disposed between the drive shaft ( 28 ) and one of the rotor shafts ( 8, 9 ). In order to provide a machine of this type which can be embodied in a compact form, the drive gear ( 35 ) of the drive shaft ( 28 ) engages directly with a driven gear ( 36 ) on one of the rotor shafts ( 8, 9 ), forming the gear stage ( 37 ).

Description

Die Erfindung bezieht sich auf eine Vakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a vacuum pump having the features of the preamble of patent claim 1.

Vakuumpumpen dieser Art gehören zur Gattung der Zwei-Wellen-Vakuumpumpen. Typische Beispiele für Zwei-Wellen-Vakuumpumpen sind Rootspumpen, Klauenpumpen und Schraubenpumpen. Die beiden Rotoren derartiger Pumpen befinden sich in einem Schöpfraum und bewirken eine Förderung der Gase von einem Einlaß zu einem Auslaß. Die fliegende Lagerung hat bei axialfördernden Maschinen den Vorteil, dass auf der Saugseite (Hochvakuum-Seite) Wellendichtungen nicht erforderlich sind.Vacuum pumps of this type belong to the category of two-shaft vacuum pumps. Typical examples of two-shaft vacuum pumps are Roots pumps, claw pumps and screw pumps. The two rotors of such pumps are located in a suction chamber and cause a promotion of the gases from an inlet to an outlet. On axial conveying machines, flying bearings have the advantage that shaft seals are not required on the suction side (high vacuum side).

Bei Zweiwellenmaschinen mit synchronisierten Wellen ist der Direktantrieb einer der beiden Wellen üblich (vgl. z.B. die DE 198 20 523 A1 ). Werden in Maschinen dieser Art gängige Wechselstromantriebsmotoren eingesetzt, ergeben sich Rotordrehzahlen von 3000 U/min (bei 50 Hz) bzw. 3600 U/min (bei 60 Hz). Mit derartigen Drehzahlen betriebene Pumpen haben eine geringe Leistungsdichte, benötigen enge Spalte und/oder viele Stufen und sind damit relativ groß, schwer und kostspielig. Eine Erhöhung der Drehzahlen wäre mit Hilfe eines Frequenzumformers möglich; Frequenzumformer bei großen Antriebsleistungen sind jedoch teuer.In twin-shaft machines with synchronized shafts, the direct drive of one of the two shafts is common (cf. DE 198 20 523 A1 ). If conventional AC drive motors are used in machines of this type, rotor speeds of 3000 rpm (at 50 Hz) or 3600 rpm (at 60 Hz) result. Pumps operated at such speeds have a low power density, require close Column and / or many stages and are thus relatively large, heavy and expensive. An increase of the speeds would be possible with the help of a frequency converter; Frequency converters at high power outputs are expensive.

Eine Vakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 ist aus der europäischen Patentschrift 472 933, Figur 15, bekannt. Der Antriebsmotor ist in einem seitlich neben der Pumpe befindlichen Gehäuse untergebracht. Um die Rotoren mit einer gegenüber der Motordrehzahl höheren Drehzahl betreiben zu können, ist ein Übersetzungsgetriebe vorgesehen. Das Antriebszahnrad der Motorwelle ist über ein weiteres Zahnrad mit einem auf einer der Rotorwellen angeordneten Zahnrad gekoppelt. Eine Lösung dieser Art hat einen hohen Raumbedarf. Außerdem sind vier Wellen vorhanden, die jeweils mit Lagerungen ausgerüstet sein müssen.A vacuum pump having the features of the preamble of claim 1 is known from European Patent 472 933, Figure 15. The drive motor is housed in a housing located laterally next to the pump. In order to operate the rotors with a relative to the engine speed higher speed, a transmission gear is provided. The drive gear of the motor shaft is coupled via a further gear with a gear arranged on one of the rotor shafts. A solution of this kind has a high space requirement. In addition, there are four shafts, each of which must be equipped with bearings.

Zum Stand der Technik gehört noch der Inhalt der JP 63 198 789 A . Sie offenbart eine Vakuumpumpe mit zwei Rotoren, die mit Wellen ausgerüstet sind. Die Rotoren stützen sich auf ortsfeste Bauteile (Stümpfe, Pumpengehäuse) und tragen selbst Synchronisationszahnräder. Mit einem der Synchronisationszahnräder steht das Antriebszahnrad eines Antriebsmotors in Eingriff.To the state of the art is still the content of JP 63 198 789 A , It discloses a vacuum pump with two rotors equipped with shafts. The rotors are based on stationary components (stumps, pump housing) and carry their own synchronization gears. With one of the synchronization gears, the drive gear of a drive motor is engaged.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe der hier betroffenen Art einfacher und kompakter zu gestalten. Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.The present invention has for its object to make a vacuum pump of the type concerned here simpler and more compact. According to the invention this object is achieved by the characterizing features of the claims.

Der wesentliche Vorteil der Erfindung liegt darin, dass die Mittel, die für eine Übersetzung ins Schnelle - z.B. eine Verdoppelung der Rotordrehzahl - erforderlich sind, wesentlich einfacher sind als beim Stand der Technik. Die gängige Motortechnologie kann beibehalten werden. Insbesondere dann, wenn auch der Antriebsmotor im Lager-/Getrieberaum untergebracht ist, ergeben sich eine äußerst schlanke und kompakte Bauform sowie eine vereinfachte Kühlung des Elektromotors.The essential advantage of the invention lies in the fact that the means used for a translation into fast - e.g. a doubling of the rotor speed - are required, are much simpler than in the prior art. The common motor technology can be maintained. In particular, even if the drive motor is housed in the bearing / gear compartment, resulting in an extremely slim and compact design and simplified cooling of the electric motor.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 10 schematisch dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

  • Figuren 1 bis 3 Ausführungsbeispiele nach der Erfindung, bei denen der Motorrotor auf einer separaten, neben den Rotorwellen angeordneten Motorwelle läuft.
Further advantages and details of the invention are intended to be based on in the FIGS. 1 to 10 schematically illustrated embodiments will be explained. Show it
  • FIGS. 1 to 3 Embodiments of the invention, in which the motor rotor runs on a separate, arranged next to the rotor shaft motor shaft.

In den Figuren sind die Zweiwellenvakuumpumpe mit 1, ihre Rotoren mit 2,3, ihr Schöpfraum mit 4 und ihr Schöpfraumgehäuse mit 5 bezeichnet. An das Schöpfraumgehäuse 5 grenzt der Lager-/Getrieberaum 6 an, dessen Gehäuse mit 7 bezeichnet ist. In den Lager-/Getrieberaum 7 erstrecken sich die Rotorwellen 8,9 hinein. Die Drehachsen der Rotoren und Wellen sind mit 11 und 12 bezeichnet. Die Wellen sind schöpfraumseitig und endseitig gelagert (Lager 13 bis 16), so daß die Rotoren 2,3 fliegend gelagert sind. Die Rotorwellen 2,3 sind über ein Synchronisationsgetriebe 17 miteinander gekoppelt, das von zwei miteinander in Eingriff stehenden Zahnrädern 18,19 gebildet wird. Zur Abdichtung des Schöpfraumes 4 gegenüber dem Lagerraum 6 sind Dichtungen 21,22 vorgesehen.In the figures, the two-shaft vacuum pump with 1, their rotors with 2.3, their suction chamber with 4 and their pump chamber housing 5 are designated. Adjacent to the pump chamber 5, the bearing / gear chamber 6, whose housing is denoted by 7. In the bearing / gear chamber 7, the rotor shafts 8,9 extend into it. The axes of rotation of the rotors and shafts are labeled 11 and 12. The waves are on the pumping chamber side and end mounted (bearings 13 to 16), so that the rotors are mounted 2.3 flying. The rotor shafts 2, 3 are coupled to one another via a synchronization gear 17, which is formed by two meshing gears 18, 19. For sealing the pump chamber 4 relative to the storage space 6 seals 21,22 are provided.

Bei allen dargestellten Ausführungsbeispielen befindet sich der Antriebsmotor 25 im Lager-/Getrieberaum 7. Der Stator 26 umgibt den Anker 27, der auf der Motorwelle 28 befestigt ist. Die Motorwelle 28 erstreckt sich jeweils parallel zu den Rotorwellen 8,9 und ist im Bereich ihrer Enden (Lager 31,32) im Lager-/Getrieberaum 7 gelagert. Ihre Drehachse ist mit 29 bezeichnet.In all the illustrated embodiments, the drive motor 25 is in the bearing / gear room 7. The stator 26 surrounds the armature 27 which is mounted on the motor shaft 28. The motor shaft 28 extends in each case parallel to the rotor shafts 8, 9 and is mounted in the region of its ends (bearings 31, 32) in the bearing / gear chamber 7. Its axis of rotation is designated 29.

Als Beispiel ist in Figur 1 eine Schraubenvakuumpumpe 1 dargestellt. Die von den Drehachsen 11,12 gebildete Ebene 23 (Figuren 2,3 und 4) steht senkrecht zur Zeichnungsebene, so dass nur eine rotierende Einheit sichtbar ist. Während ihres Betriebs fördern die Rotoren 2,3 Gase vom Einlaß 33 zu einem nicht dargestellten Auslaß.As an example, in FIG. 1 a screw vacuum pump 1 is shown. The plane 23 formed by the axes of rotation 11, 12 Figures 2,3 and 4) is perpendicular to the plane of the drawing, so that only one rotating unit is visible. During operation, the rotors feed 2.3 gases from the inlet 33 to an outlet, not shown.

Bei der Schraubenvakuumpumpe nach Figur 1 befindet sich die Motorwelle 28 seitlich neben der von den Drehachsen 11,12 gebildeten Ebene. Sie trägt ein Antriebszahnrad (Antriebsrad 35), das unmittelbar mit einem Zahnrad (Abtriebsrad 36) in Eingriff steht. Antriebsrad 35 und Abtriebsrad 36 bilden eine Getriebestufe 37. Das Abtriebsrad 36 ist auf einer der Rotorwellen 8,9 befestigt. Der synchrone Antrieb der jeweils zweiten Rotorwelle erfolgt über die Zahnräder 18,19 des Synchronisations-Getriebes 17.After the screw vacuum pump FIG. 1 the motor shaft 28 is laterally adjacent to the plane formed by the axes of rotation 11,12. It carries a drive gear (drive wheel 35), which directly with a gear (driven gear 36) into engagement stands. Drive wheel 35 and output gear 36 form a gear stage 37. The output gear 36 is mounted on one of the rotor shafts 8.9. The synchronous drive of the respective second rotor shaft via the gears 18,19 of the synchronization transmission 17th

Die Figuren 2 und 3 deuten Kopplungsmöglichkeiten der beschriebenen Art an.The FIGS. 2 and 3 indicate coupling possibilities of the type described.

Die Ausführung nach Figur 2 entspricht der in Figur 1 dargestellten Lösung. Unterhalb des Synchronisationszahnrades 18 auf der Welle 8 befindet sich ein weiteres, vorzugsweise im Durchmesser kleineres Zahnrad 36, das mit dem Antriebszahnrad 35 in Eingriff steht. Dieses gilt auch für die Lösung nach Figur 4. Unterschiedlich gegenüber Figur 3 ist, dass die Drehachsen 11,12 und 29 in einer Ebene liegen.The execution after FIG. 2 corresponds to the in FIG. 1 illustrated solution. Below the synchronization gear 18 on the shaft 8 is another, preferably smaller diameter gear 36 which is in engagement with the drive gear 35. This also applies to the solution according to Figure 4. Different compared FIG. 3 is that the axes of rotation 11, 12 and 29 lie in one plane.

Die Figur 2 läßt erkennen, dass zum einen der Bauraum zwischen den Rotorwellen 8,9 zum Teil für den Motorstator 26 genutzt werden kann, so dass sich kompakte Lösungen ergeben. Zum anderen besteht weitgehend freie Wahl in Bezug auf die Winkellage der Drehachsen zueinander.The FIG. 2 indicates that on the one hand, the space between the rotor shafts 8,9 can be partially used for the motor stator 26, so that there are compact solutions. On the other hand, there is largely free choice with respect to the angular position of the axes of rotation to each other.

Es wurde bereits vorgeschlagen, mindestens eine der Rotorwellen 8,9 mit einer zentralen Bohrung auszurüsten und diese Bohrung(en) zum Transport eines Schmier- und Kühl-Mittels (vorzugsweise Öl) zu nutzen. Bei im Lager-/Getrieberaum angeordnetem Antriebsmotor 25 kann dieser ebenfalls mit dem Öl gekühlt werden. Eine der Förderung des Öls dienende Ölpumpe kann auf einer der Wellen 8,9 oder 28 angeordnet sein. Liegt die Motorwelle 28 neben den Rotorwellen 8,9, dann besteht eine besonders zweckmäßige Lösung darin, daß die Ölpumpe - vorzugsweise als Exzenterpumpe ausgebildet - auf der Motorwelle 28 angeordnet ist, und zwar im Bereich ihres oberen Endes. Diese Ausführung ist in Figur 1 dargestellt. Die Ölpumpe ist mit 51 bezeichnet.It has already been proposed to equip at least one of the rotor shafts 8, 9 with a central bore and to use this bore (s) for transporting a lubricating and cooling agent (preferably oil). In arranged in the bearing / gear compartment drive motor 25 this can also be cooled with the oil. An oil pump for pumping the oil may be arranged on one of the shafts 8, 9 or 28. If the motor shaft 28 adjacent to the rotor shafts 8.9, then there is a particularly expedient solution in that the oil pump - preferably designed as an eccentric pump - is arranged on the motor shaft 28, in the region of its upper end. This design is in FIG. 1 shown. The oil pump is designated 51.

Zusätzlich kann eine der Wellen 8,9 oder 28 auf ihrer schöpfraumfernen Seite aus dem Lager-/Getrieberaum 6 dicht herausgeführt sein und ein Lüfterrad 52 tragen. Zweckmäßig wird dazu entsprechend Figur 1 ebenfalls die Motorwelle 28 verwendet. In addition, one of the shafts 8, 9 or 28 can be brought out of the bearing / gear compartment 6 tightly on its side remote from the pumping chamber and carry a fan wheel 52. Appropriately, it will be appropriate FIG. 1 also used the motor shaft 28.

Claims (3)

  1. Vacuum pump (1) having a suction-chamber housing (5) in which two interacting rotors (2, 3), which are each arranged on a shaft (8, 9), are located, having a bearing/transmission chamber (6) which adjoins the suction-chamber housing (5) and in which the rotor shafts (8, 9) are mounted in an overhung manner, and having a driving motor (25) whose driving shaft (28) extends parallel to the rotor shafts (8, 9) and has a driving wheel (35);
    - within the bearing/transmission chamber (6), the rotor shafts (8, 9) are each equipped with a synchronising gearwheel (18, 19), which gearwheels jointly form a synchronising transmission (17);
    - one of the rotor shafts (8, 9) is equipped with a driven wheel (36) which has a smaller diameter compared to the synchronising gearwheel (18 or 19) on this shaft;
    - the driving wheel (35) of the driving motor (25) is likewise located in the bearing/transmission chamber (6) and forms, with the driven wheel (36), a transmission stage (37);
    characterised by the following features:
    - the driving motor (25) is likewise accommodated within the bearing/transmission chamber (6);
    - the motor shaft (28) is arranged beside the rotor shafts (8, 9);
    - the driving wheel (35) of the driving motor (25) and the driven wheel (36) which is located on one of the rotor shafts are in direct engagement and form the transmission stage (37).
  2. Pump according to claim 1, characterised in that an oil pump (51) is located on one of the ends of the motor shaft (28), preferably on its end nearest the suction chamber.
  3. Pump according to claim 1 or 2, characterised in that the motor shaft (28) passes, with its end which is remote from the suction chamber, out of the bearing/transmission chamber (6) and carries a fan wheel (52).
EP01927731A 2000-04-18 2001-03-15 Vacuum pump with two co-operating rotors Expired - Lifetime EP1274942B8 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10019066 2000-04-18
DE10019066A DE10019066A1 (en) 2000-04-18 2000-04-18 Vacuum pump with two cooperating rotors has drive shaft with drive pulley engaging directly with take-off hear on rotor shaft to form transmission stage
PCT/EP2001/002972 WO2001079701A1 (en) 2000-04-18 2001-03-15 Vacuum pump with two co-operating rotors

Publications (3)

Publication Number Publication Date
EP1274942A1 EP1274942A1 (en) 2003-01-15
EP1274942B1 true EP1274942B1 (en) 2010-07-14
EP1274942B8 EP1274942B8 (en) 2010-09-01

Family

ID=7639093

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01927731A Expired - Lifetime EP1274942B8 (en) 2000-04-18 2001-03-15 Vacuum pump with two co-operating rotors

Country Status (8)

Country Link
US (1) US6964559B2 (en)
EP (1) EP1274942B8 (en)
JP (1) JP4838480B2 (en)
KR (1) KR100793456B1 (en)
AT (1) ATE474139T1 (en)
DE (2) DE10019066A1 (en)
TW (1) TW507048B (en)
WO (1) WO2001079701A1 (en)

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Also Published As

Publication number Publication date
KR100793456B1 (en) 2008-01-14
JP2004501308A (en) 2004-01-15
DE10019066A1 (en) 2001-10-25
EP1274942A1 (en) 2003-01-15
US6964559B2 (en) 2005-11-15
KR20020091213A (en) 2002-12-05
ATE474139T1 (en) 2010-07-15
JP4838480B2 (en) 2011-12-14
TW507048B (en) 2002-10-21
WO2001079701A1 (en) 2001-10-25
DE50115557D1 (en) 2010-08-26
EP1274942B8 (en) 2010-09-01
US20030152468A1 (en) 2003-08-14

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