EP1253320B1 - Pump and method of manufacturing same - Google Patents
Pump and method of manufacturing same Download PDFInfo
- Publication number
- EP1253320B1 EP1253320B1 EP02008979A EP02008979A EP1253320B1 EP 1253320 B1 EP1253320 B1 EP 1253320B1 EP 02008979 A EP02008979 A EP 02008979A EP 02008979 A EP02008979 A EP 02008979A EP 1253320 B1 EP1253320 B1 EP 1253320B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- check valve
- channel
- valve membrane
- casing
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000012528 membrane Substances 0.000 claims description 238
- 125000006850 spacer group Chemical group 0.000 claims description 82
- 239000010409 thin film Substances 0.000 claims description 42
- 238000003466 welding Methods 0.000 claims description 23
- 239000012530 fluid Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 8
- 238000005304 joining Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 description 20
- 230000001070 adhesive effect Effects 0.000 description 20
- 239000011324 bead Substances 0.000 description 9
- 230000037303 wrinkles Effects 0.000 description 8
- 229920005668 polycarbonate resin Polymers 0.000 description 6
- 239000004431 polycarbonate resin Substances 0.000 description 6
- 239000004954 Polyphthalamide Substances 0.000 description 3
- 210000000554 iris Anatomy 0.000 description 3
- 229920006375 polyphtalamide Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 210000000887 face Anatomy 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
- F04B53/1062—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at two or more points at its periphery
Definitions
- the present invention relates generally to a small pump used in a sphygmomanometer, for example, and, in particular but not exclusively, to the structure of a piezoelectric pump that operates with the action of a piezoelectric actuator.
- the pump taught in USP No. 6,033,191 is of a lamellar construction having a valve membrane 52 disposed between an upper housing 50 and a lower housing 51 with inlet and outlet flow channels 53 formed on the upper surface of the lower housing 51.
- a diaphragm 54 vibrated by a piezoelectric actuator is disposed on the upper housing 50, forming a pump chamber between the diaphragm 54 and top of the upper housing 50.
- the pump chamber and inlet and outlet side flow channels 53 communicate through respective holes 55 in the upper housing 50, and inlet and outlet check valves are formed by the valve membrane 52 at portions where holes 55 and flow channels 53 communicate.
- a problem with a compact pump thus comprised is that in order to assure airtightness it is necessary to assure sufficient flatness and parallelism on the mating surfaces of the upper and lower housings 50, 51. It is also difficult to simultaneously position the three layers, upper housing 50, lower housing 51, and valve membrane 52.
- the mating faces of the upper and lower housings 50, 51 are laser welded along the flow channels 53 as indicated by the welding beads 56 shown in Fig. 47 for airtightness, but air leaks between the valve membrane 52 and upper housing 50 are unavoidable in the flow channels 53. This creates a problem of degraded compression efficiency. Forming .the flow channels 53 is not simple, in addition.
- a problem with the pump taught in Japanese Laid-Open Patent Publication No. 59-200081 is that because it uses a check valve the upper housing must be thick enough to dispose the check valve therein, and the upper housing cannot be made extremely thin.
- the present invention is therefore directed to solving the problems described above by providing a compact pump that is easy to manufacture and offers high efficiency and reliability, and by providing a manufacturing method for this pump.
- a pump according to the present Invention is a piezoelectric pump for sucking fluid to a pump chamber and discharging fluid from the pump chamber by changing a volume of the pump chamber by action of a piezoelectric actuator.
- the piezoelectric pump includes a casing having inlet and outlet flow channels both communicating with the pump chamber, and first and second check valve units each having a thin-film check valve membrane and a check valve body having a channel opened and closed by the check valve membrane.
- the first and second check valve units are disposed between the pump chamber and the inlet and outlet flow channels, respectively.
- This configuration makes it possible to easily manufacture a compact pump and improve the pump efficiency.
- check valve function of the check valve units can also be confirmed before installation to the casing, thereby improving pump reliability and improving pump manufacturing yield. Furthermore, if a check valve becomes damaged from extended use, this configuration enables replacing only the damaged check valve unit.
- the diaphragm is preferably made up of a piezoelectric actuator and a thin metal plate joined together and is mounted to the casing, forming a pump chamber between the diaphragm and casing. This makes it possible to reduce the volume of fluid from the pump chamber to the check valve membrane, and increases the pressure inside the pump chamber during discharge, as compared with conventional pumps. High pressure fluid discharge is thus possible, and pump efficiency improves.
- first and second check valve units are identically configured and installed to the casing in inverse positions. Identical check valve units can therefore be used on both suction and discharge sides, and production cost can therefore be reduced.
- the check valve units are installed to the casing from the side opposite the diaphragm side, making it possible to replace the check valve unit without removing the diaphragm.
- the diaphragm is easily damaged by external force.
- the casing part to which the diaphragm is disposed and the casing part to which the check valve units are installed are separate parts, the part to which the diaphragm is joined and the part to which the check valve units are fit can be separated, making it easier to replace the diaphragm and easier to replace the check valve units.
- the same check valve unit can be used with different diaphragms, it is easy to determine how pump characteristics change when the diaphragm is changed.
- a fitting structure is used at least between the casing and check valve units or between the discrete casing parts, and this fitting structure is preferably an interference fitting assembled by press fitting. This makes it simple to separate the casing and check valve unit (or the casing parts) when replacing a check valve unit (or a diaphragm). An interference fitting also makes it easy to secure the check valve unit (or casing part) in the casing (or other casing part), airtightness is assured by interference fitting, and pump reliability can be improved.
- check valve membrane is disposed covering the channel in the check valve body and the check valve membrane is joined to the check valve body, a check valve membrane of the smallest necessary size can be used and the yield of the thin film material used for the check valve membrane can be improved.
- the check valve membrane having one or more vents formed therein is disposed covering the channel in the check valve body, and the check valve membrane around the vent containing the channel is joined to the check valve body, the size of the thin film can be freely set, handling is easier during assembly, and welding is also easier.
- vents are formed at positions on opposite sides of the channel, a check valve that operates reliably and has an extremely simple configuration can be provided, and high precision positioning is not needed for the check valve membrane.
- check valve membrane is disposed covering the channel and two sides on opposite sides of the channel are joined to the check valve body, a check valve can be formed with a simple configuration and high precision positioning is not needed for the check valve membrane.
- a check valve membrane having one openable side is disposed covering the channel and is joined to the check valve body surrounding the channel except on the one openable side, a check valve function can be achieved with a simple configuration and leaks cannot occur easily.
- the check valve membrane is disposed covering the channel, the check valve membrane is joined in spots around the circumference of the channel to the check valve body, and intervals between the joined spots function as vents, and therefore the spots where the check valve membrane is joined to the check valve body will be concentric to the channel and wrinkles will not easily occur in the check valve membrane.
- the check valve membrane has a flap formed by removing a part of a thin film, and the check valve membrane is joined to the check valve body around the flap, a check valve unit with a simple configuration not requiring high precision positioning of the check valve membrane can be provided. Furthermore, because the channel is opened and closed by the flexural modulus of the thin film, pressure loss due to the tension of the thin film can be reduced.
- the channel opened and closed by the flap is formed from a plurality of openings separated a specific interval and a support part for supporting the flap is formed in a center of the plurality of openings, fluid leaks resulting from the thin film being pulled into the channel can be prevented, and the pressure inside the pump can be further increased.
- check valve membrane is formed into a rectangular strip and is joined on only one side perpendicular to a long side to the check valve body, a check valve unit with a simple configuration not requiring high precision positioning of the check valve membrane can be provided.
- the channel can be opened and closed by the flexural modulus of the thin film, and pressure loss due to the tension of the thin film can be reduced.
- the check valve body is formed with first and second spacers, the first and second spacers have a fitting structure, and the check valve membrane is inserted between and joined to the first and second spacers when they are fit together, the check valve membrane can be easily fixed in place by an interference fitting, for example.
- first and second spacers are adhesively bonded, air leaks can be eliminated.
- the check valve membrane and check valve body are welded together, the check valve membrane can be reliably joined to the check valve body by welding.
- the check valve membrane is disposed between the first and second spacers, and the first and second spacers and check valve membrane are welded together, welding damage to the check valve membrane is prevented because three layers are welded.
- a manufacturing method for a pump includes: forming a vent in a check valve membrane made of a thin film; forming a channel in a check valve body; placing the check valve membrane so as to cover the channel; joining the check valve membrane around the vent to the check valve body to form a check valve unit in which the channel is opened and closed by the check valve membrane due to a pressure differential; and installing the check valve unit in a casing.
- Vents can thus be easily formed in the thin film, and high precision positioning is not needed when welding.
- vents can be formed in the check valve membrane after check valve unit is assembled. This completely eliminates any need for positioning the check valve membrane for joining to the check valve body.
- the vents can also be formed at appropriate positions after the check valve membrane is fixed.
- vents in the thin film are formed with an excimer laser, wrinkles are not formed by process heat, the thin film can be precision processed, and there is little likelihood of damage (laser marks) being left on the check valve body from post-processing.
- Another manufacturing method for a pump according to the present invention includes: forming a channel in a check valve body; placing a check valve membrane so as to cover the channel; joining the check valve membrane to the check valve body around the channel; forming a vent in the check valve membrane at a position between a joint and the channel to form a check valve unit in which the channel is opened and closed by the check valve membrane due to a pressure differential; and installing the check valve unit in a casing.
- This method holds the check valve membrane and the check valve body tight together while welding them together, and thus improves airtightness.
- Figs. 1 to 3 and Figs. 4A and 4B show a diaphragm pump having a disc-shaped diaphragm 12, a disc-shaped casing 9, and a pair of check valve units 8.
- the diaphragm 12 is disposed on top of the casing 9 with the edges of the diaphragm 12 welded or adhesively bonded to the top of the casing 9, thereby forming a pump chamber 1 between the diaphragm 12 and casing 9.
- the outside diameter A of the diaphragm 12 in this exemplary pump is 20 mm, the outside diameter B of the casing 9 is 22 mm, and the height C is 3 mm.
- An inlet channel 2 for suction into the pump chamber 1 and an outlet channel 3 for discharge from the pump chamber 1 are formed in the casing 9 through the thickness direction of the casing 9.
- Check valve housings 18 are formed between the pump chamber 1 and the inlet and outlet channels 2, 3.
- the check valve units 8 are housed in these check valve housings 18.
- Each check valve unit 8 has a check valve membrane 5, which is a thin film with elasticity, and a check valve body 7, which has a channel 6 opened and closed by the check valve membrane 5 according to the pressure differential between respective sides thereof.
- Channel 6 passes completely through the check valve body 7, and channels 2, 3 communicate with the pump chamber 1 through channels 6.
- the check valve body 7 has a first spacer 7a and a second spacer 7b.
- the check valve membrane 5 is located between the first spacer 7a and second spacer 7b so as to block the channel 6, and the check valve membrane 5 is disposed in the check valve body 7 by integrating the check valve membrane 5 with the first spacer 7a and second spacer 7b.
- the check valve unit 8 on the inlet channel 2 side displaces upward and opens when pressure is applied from the inlet channel 2 to the pump chamber 1, and a space 19 large enough for the check valve membrane 5 to so displace is disposed in the first.spacer 7a on the pump chamber 1 side.
- the check valve unit 8 on the outlet channel 3 side displaces downward and opens when pressure is applied from the pump chamber 1 to the outlet channel 3 side, and a space 19 large enough for the check valve membrane 5 to so displace is disposed in the second spacer 7b on the side away from the pump chamber 1.
- the check valve unit 8 By constructing the check valve unit 8 separately from the casing 9 as described above, the check valve unit 8 can be installed to the casing 9 after first confirming that the check valve unit 8 functions properly, and pump production yield can therefore be improved. Furthermore, if a check valve becomes damaged with extended use, for example, it is possible to replace just the damaged check valve unit 8.
- the diaphragm 12 is made up of a piezoelectric actuator 10 and a brass or other thin metal plate 11.
- the piezoelectric actuator 10 is a PZT element or other piezoelectric element with silver or other metallic conductor electrodes.
- a voltage such as a commercial AC voltage is applied to the piezoelectric actuator 10
- the diaphragm 12 is reciprocally driven by the piezoelectric actuator 10 and a pumping action is achieved.
- the first and second spacers 7a, 7b and the check valve membrane 5 of the check valve body 7 are made, for example, from polycarbonate (PC) resin, and the casing 9 is made of polyphthalamide (PPA), for example.
- PC polycarbonate
- PPA polyphthalamide
- V is the volume of the channels from the pump chamber 1 to both check valve membranes 5 when fluid is ingested to the pump chamber 1
- ⁇ V is the discharge volume, that is, the volume discharged for this V
- ⁇ P is the internal pressure rise from the initial pressure P
- ⁇ P ⁇ V/(V- ⁇ V) x P
- ⁇ P is increased by reducing V.
- Fig. 5A and Fig. 5B show a different embodiment in which the fluid suction side check valve unit 8 and fluid discharge side check valve unit 8 are identically constructed, and are simply installed to the casing 9 in different directions on the suction and discharge sides.
- the check valve body 7 has a first spacer 7a and second spacer 7b, but in this embodiment the first spacer 7a and second spacer 7b have the same thickness and outside diameter.
- a check valve membrane 5 is disposed between the first spacer 7a and second spacer 7b, and a space 19 of a diameter large enough for the check valve membrane 5 to displace is disposed in the first spacer 7a.
- the suction-side check valve unit 8 is installed so that the first spacer 7a is on the pump chamber 1 side, and the discharge-side check valve unit 8 is installed so that the second spacer 7b is on the pump chamber 1 side.
- Fig. 6A and Fig. 6B show a different embodiment in which the check valve units 8 are housed to the casing 9 from the side opposite the diaphragm 12 side.
- the check valve body 7 has a first spacer 7a, second spacer 7b, and third spacer 7c. Similarly to the first spacer 7a and second spacer 7b, this third spacer 7c is made of polycarbonate resin.
- a check valve membrane 5 is again disposed between the first spacer 7a and second spacer 7b, but the space 19 for check valve membrane 5 displacement is disposed to the first spacer 7a in the suction-side check valve unit 8 and is disposed to the second spacer 7b in the discharge-side check valve unit 8.
- this embodiment enables the check valve units 8 to be replaced without removing the diaphragm 12.
- Fig. 7A and Fig. 7B show an embodiment in which the casing part 9a to which the diaphragm 12 is disposed and the casing part 9b to which the check valve units 8 are disposed are separate components.
- the disc-shaped casing 9 is formed from a casing part 9a and a separate casing part 9b.
- the one casing part 9a is annularly shaped with a hole 20 in the center.
- the other casing part 9b is disc-shaped with a protrusion 21 on top.
- the protrusion 21 of this casing part 9b is fit to the hole 20 in casing part 9a to integrate casing part 9a and casing part 9b.
- the diaphragm 12 is disposed on top of casing part 9a and integrated with the casing part 9a by bonding the edge of the diaphragm 12 to the top of the casing part 9a.
- the check valve units 8 are installed to casing part 9b.
- the diaphragm 12 is susceptible to damage from external forces with this configuration, the part to which the diaphragm 12 is disposed can be separated from the part to which the check valve units 8 are disposed, and the diaphragm 12 and check valve units 8 can therefore be easily replaced. Furthermore, because the same set of check valve units 8 can be used when the diaphragm 12 is replaced, pump characteristics can be easily evaluated after the diaphragm 12 is exchanged.
- An integrated casing 9 is assembled by interference fitting the protrusion 21 of casing part 9b into the hole 20 in casing part 9a.
- the check valve units 8 can also be installed by interference fitting them into the check valve housings 18 in the casing part 9b. If the inside diameter of the hole 20 and the outside diameter of the protrusion 21 are both nominally 16 mm, the protrusion 21 can be interference fit in the hole 20 by forming the hole 20 with a tolerance of +0.018 mm to 0 mm and the protrusion 21 with a tolerance of +0.029 mm to +0.018 mm.
- the check valve unit 8 and casing 9 (or casing part 9a and casing part 9b) can be easily separated in order to replace a check valve unit 8 (or diaphragm 12). Furthermore, the tolerances of the interference fitting makes it easy to secure the check valve units 8 (or casing part 9b) in the casing 9 (or casing part 9a), and airtightness can be assured by press fitting.
- the process tolerances between the casing 9 and check valve units 8, or between the separate casing parts 9a and 9b can be set for transition fitting or clearance fitting with the fitting then secured by adhesive bonding or welding.
- the casing part 9a and casing part 9b can be fastened by bonding or welding after they are fit together.
- Fig. 8 shows an example in which the casing part 9a and casing part 9b are bonded together with adhesive.
- Reference numeral 22 in Fig. 8 shows where the adhesive is applied.
- female threads and male threads can be formed on the inside circumference of the hole 20 in casing part 9a and the outside circumference of the protrusion 21 on casing part 9b so that one can be screwed into the other for fastening.
- Female threads and male threads can likewise be formed on the inside circumference of the check valve housings 18 in casing part 9b and the outside circumference of the check valve units 8 so that these can be similarly screwed together and fastened.
- a check valve membrane 5 is used as the member achieving the check valve function in the first to fourth embodiments described above, and various embodiments of the check valve membrane 5 are described next below.
- Fig. 9 shows the part where the check valve membrane 5 is installed to the check valve unit 8 shown in Fig. 5A.
- the thin-film check valve membrane 5 is formed as a rectangular band and is disposed across so as to cover the channel 6. With the check valve membrane 5 thus covering the channel 6, the check valve membrane 5 is bonded with adhesive 14 on opposite sides of the channel 6 perpendicular to the longitudinal direction of the check valve membrane 5.
- the check valve membrane 5 can be made of the smallest piece of thin film necessary as a check valve, and less thin film material is therefore required.
- Fig. 12 shows a variation in which two parallel slitted vents 13 are formed in the check valve membrane 5 disposed so as to cover the channel 6. The check valve membrane 5 is then bonded with adhesive 14 around the vents 13 containing channel 6.
- Fig. 13A and Fig. 13B show the vents 13 in the check valve membrane 5 shown in Fig. 12 when open, and Fig. 14A and Fig. 14B show the channel 6 closed by the check valve membrane 5.
- the size of the check valve membrane 5 can be freely determined with this embodiment so that handling during assembly is easier and welding is also easier.
- Fig. 15A and Fig. 15B show a rectangular thin film check valve membrane 5 placed covering the channel 6.
- a pair of parallel slitted vents 13 is formed in the check valve membrane 5 on opposite sides of the channel 6, and the check valve membrane 5 is bonded with adhesive 14 completely encircling the vents 13.
- the check valve membrane 5 lifts up so that a horizontal semi-cylinder is formed between the two vents 13 when the vents 13 of the check valve membrane 5 open.
- This embodiment assures that the check valve operates reliably with a simple configuration, and does not require high precision positioning of the check valve membrane 5.
- Fig. 16A It is also possible as shown in Fig. 16A to form a single slitted vent 13 in the check valve membrane 5 at a point separated from the channel 6.
- This vent 13 extends parallel to a tangent to the outside circumference of the channel 6, and the check valve membrane 5 is fixed to the check valve body 7 with adhesive 14 completely encircling the vent 13.
- This configuration is resistant to leaks even when the distance from the channel 6 to the opening of the vent 13 is short.
- vents 13 can also be formed in the check valve membrane 5 as shown in Fig. 17A. More specifically, the rectangular thin film check valve membrane 5 is placed so as to cover the channel 6, and multiple (three in this example) slitted vents 13 parallel to tangents to the outside circumference of the channel 6 are formed at positions apart from the outside circumference of the channel 6 and circumferentially to the channel 6. The check valve membrane 5 is fixed with adhesive 14 completely encircling the vents 13.
- Fig. 17B shows the vents 13 of this check valve membrane 5 when open.
- vents 13 in the check valve membrane 5 must be curved. If the vents 13 have sharp corners such as in a square, the corners can tear easily when tension is applied to the check valve membrane 5. If the corners of the vents 13 are round or nearly round, however, tension tears in the check valve membrane 5 can be prevented. More specifically, the vents formed in the check valve membrane are preferably continuous curves.
- Fig. 18 shows an embodiment in which the rectangular thin film check valve membrane 5 is placed so as to cover the channel 6 with an openable side of the check valve membrane 5 proximal to the channel 6.
- the check valve membrane 5 is then fixed with a U-shaped adhesive bead 14 encircling the channel 6 except on this one openable side.
- This check valve membrane 5 opens on only one side as shown in Fig. 19A and Fig. 19B, and the channel 6 is closed by the check valve membrane 5 as shown in Fig. 20A and Fig. 20B.
- This embodiment provides a check valve with a very simple configuration, and leaks cannot occur easily.
- Fig. 21 it is also possible to place the check valve membrane 5 covering the channel 6 and spot bond the check valve membrane 5 around the channel 6 with adhesive bead 14 so that the spaces between the adhesive beads 14 function as vents.
- the three adhesive spots are spaced at equal intervals in the circumferential direction around the check valve membrane 5.
- This check valve membrane 5 opens on three sides except the adhesive spots as shown in Fig. 22A and Fig. 22B, and the channel 6 is closed by the check valve membrane 5 as shown in Fig. 23A and Fig. 23B.
- the check valve membrane 5 could yet further alternatively be substantially polygonal in shape, covering the channel 6 with adhesive bead 14 placed at each corner of the membrane. The spaces between the adhesive beads 14 become vents in this case.
- the thin film check valve membrane 5 is shaped as a triangle as an example of one polygon.
- the check valve opens when the three straight sides of the check valve membrane 5 balloon up, and the channel 6 is closed when the check valve membrane 5 settles down as shown in Fig. 26A and Fig. 26B.
- the adhesive beads 14 of this check valve membrane 5 are also located concentrically to the channel 6, thus preventing wrinkles in the check valve membrane 5. Because they are straight, the opening edges of the check valve membrane 5 also do not curl up.
- a flap 5b can be formed in the check valve membrane 5 by arcuatedly cutting the thin film.
- the check valve membrane 5 is then placed with the flap 5b covering the channel 6, and is bonded with adhesive 14 encircling the channel 6 and the cut-out part 5a.
- the substantially semicircular flap 5b inside the cut-out part 5a thus functions as a valve membrane.
- This variation of the check valve membrane 5 is extremely simple, does not require high precision positioning, and reduces pressure loss due to the tension of the valve membrane because it opens and closes the channel 6 using the flexural modulus of the valve membrane.
- the channel 6 in this case preferably has plural (three in this example) equidistantly spaced arc-shaped openings 6a with a support 6b for supporting the flap 5b in the center of the plural openings 6a.
- the shape of the openings 6a shall not be limited to an arc, and could be circular, elliptical, or other shape.
- the thin film check valve membrane 5 could also have a band (rectangular) shape placed covering the channel 6 and then bonded with adhesive 14 perpendicular to the long side at only one end of the check valve membrane 5.
- the rectangular flap 5b thus disposed over the channel 6 operates as the valving element in this configuration, and the channel 6 opens and closes as the flap 5b moves up and down as shown in Fig. 29B.
- This variation of the check valve membrane 5 is also extremely simple, does not require high precision positioning, and reduces pressure loss due to valve membrane tension because it opens and closes the channel 6 using the flexural modulus of the valve membrane.
- the check valve body 7 shown in Fig. 30 to Fig. 32 is formed by first and second spacers 7a, 7b.
- the check valve membrane 5 is inserted between the first and second spacers 7a, 7b, which are fit together to fix the check valve membrane 5.
- the vents of the check valve membrane 5 can be as in any of the variations described above, and further description thereof is thus omitted here.
- the first and second spacers 7a, 7b can be easily joined by interference fitting.
- check valve membrane 5 could be disposed between the first spacer 7a and second spacer 7b and the entire perimeters of the first spacer 7a and second spacer 7b are then bonded.
- the check valve membrane 5 can alternatively be reliably joined to the check valve body 7 by placing the thin film check valve membrane 5 on top of the check valve body 7 and then welding the check valve membrane 5 around the outside edge of the check valve body 7 with a welding bead 25 as shown in Fig. 34 and Fig. 35.
- Fig. 36 to Fig. 38 it is yet further possible, as shown in Fig. 36 to Fig. 38, to form the check valve body 7 with a first spacer 7a and second spacer 7b, dispose the thin film check valve membrane 5 between the first spacer 7a and second spacer 7b, and weld the first spacer 7a, second spacer 7b, and check valve membrane 5 around the entire outside perimeter. Welding damage to the check valve membrane 5 is less likely with this method because the three layers are welded at a time.
- a piezoelectric pump according to the present invention can be easily manufactured as follows.
- One or more vents 13 are first formed in the thin film, or the check valve membrane 5 is formed by processing a thin film to the desired configuration.
- the channel 6 that will be opened and closed by the check valve membrane 5 is also formed in the check valve body 7.
- the check valve membrane 5 is then placed covering the channel 6 and joined to the check valve body 7 by various methods such as described above to form the check valve unit 8.
- the check valve unit 8 is then installed to the casing 9 between the pump chamber 1 and inlet and outlet channels 2, 3.
- the one or more vents 13 can thus be easily formed in a thin film.
- vents 13 can also be formed in the check valve membrane 5 after joining the check valve membrane 5 and check valve body 7 to form the check valve unit 8. This method completely eliminates the need to position the check valve membrane 5 for installation, and enables the vents 13 to be formed appropriately to the desired locations.
- the vents 13 can be formed in a thin film 4 (blank of the check valve membrane 5) using an excimer laser as shown in Fig. 39.
- the first spacer 7a is preferably made of a transparent polycarbonate resin and the second spacer 7b is made of a black polycarbonate resin, for example.
- the thin film 4 is disposed between the first spacer 7a and second spacer 7b, joined with adhesive 14, and the check valve unit 8 is assembled. A laser beam 27 is then emitted from the laser device 28 to form a vent 13.
- Wrinkles caused by process heat do not occur and the thin film 4 can be precision processed by thus using an excimer laser or other type of laser to form the vents 13. Damage (laser marks) from post-processing to the check valve body 7 is also less likely to occur.
- a check valve membrane made of a flexible thin film 4 is placed on the check valve body 7 covering the channel 6 as shown in Fig. 40.
- a glass plate 16 is then placed over the thin film 4 as shown in Fig. 41 to press the thin film 4 to the check valve body 7 while emitting a laser to form a weld 25.
- the thin film 4 can be reliably welded without producing any wrinkles, and airtightness can be improved.
- an iris 17 with a specific aperture or other opening can be used as shown in Fig. 42 to simultaneously emit the laser beam 27 to a specific place and thereby integrally bond the first spacer 7a, thin film 4, and second spacer 7b.
- two irises 17 each with a specific aperture are installed stacked together in the laser device 28, and the laser beam 27 is emitted simultaneously to a specific circle around the first spacer 7a, thin film 4, and second spacer 7b, thus a weld 25 is formed.
- a YAG laser is used for the laser device 28 in this example, and sample laser emission conditions are shown in Table 1. Table 1 Acrylic Polycarbonate Power 0.56 J/shot 0.24 J/shot Number of shots 5 5
- a diaphragm pump according to the present invention can be manufactured as described below.
- Fig. 43A shows the assembled diaphragm pump
- Fig. 43B is an exploded perspective view of the diaphragm pump.
- This diaphragm pump is made up of a disc-shaped diaphragm 12, disc-shaped casing 9, and check valve units 8.
- the diaphragm 12 is placed on top of the casing 9 and the edge of the diaphragm 12 is bonded to the top of the casing 9 to form a pump chamber.
- the casing 9 is formed from a casing part 9a and a separate casing part 9b.
- the one casing part 9a is annularly shaped with a hole 20 in the center.
- the other casing part 9b is disc-shaped with a protrusion 21 on top.
- the protrusion 21 of this casing part 9b is fit to the hole 20 in casing part 9a to integrate casing part 9a and casing part 9b.
- the diaphragm 12 is disposed on top of casing part 9a and integrated with the casing part 9a by bonding the edge of the diaphragm 12 to the top of the casing part 9a.
- Check valve housings 18 are formed in casing part 9b, and the check valve units 8 are installed to these check valve housings 18.
- the check valve body 7 is made up of a first spacer 7a and second spacer 7b, which are disc shaped members identical in thickness and outside diameter.
- the first spacer 7a is made of a transparent polycarbonate resin
- the second spacer 7b is made of a black polycarbonate resin
- the check valve membrane 5 is made of a transparent polycarbonate resin.
- the check valve unit 8 is assembled by placing the check valve membrane 5 between the first spacer 7a and second spacer 7b and then joining the first spacer 7a and second spacer 7b.
- the diaphragm 12 is made of a thin metal plate 11 and piezoelectric actuator 10.
- the piezoelectric actuator 10 is a PZT element 20 mm in diameter and 0.25 mm thick.
- the thin metal plate 11 is preferably brass, 20.2 mm in diameter and 0.05 mm thick. Electrodes of the PZT element are silver and 18 mm in diameter.
- the check valve membrane 5 is made of a polycarbonate film 0.002 mm thick. This check valve membrane 5 is disposed between the first spacer 7a and second spacer 7b of the check valve body 7, and the check valve unit 8 is assembled by integrally welding the check valve membrane 5, first spacer 7a, and second spacer 7b with a weld 25.
- the height of the check valve unit 8 is 1.6 mm
- the outside diameter of the check valve unit 8 is 5.5 mm
- the fitting tolerance is -0.004 mm to -0.012 mm, for example.
- the diameter of the space 19 into which the check valve membrane 5 displaces is 2.8 mm as shown in Fig. 448, and the diameter of the channel 6 is 1 mm.
- the suction side and discharge side of this check valve unit 8 are identically configured, and the orientation of the check valve unit 8 is simply inverted on the suction and discharge sides.
- Fig. 44C shows the operation of this check valve.
- the vents 13 are 1 mm long, the gap between the pair of vents 13 is 2 mm, and the vents 13 are 0.3 mm wide.
- Casing part 9a of this casing 9 is made of PPA resin, and casing part 9b is made of transparent acrylic resin.
- the outside diameter of casing part 9a of casing 9 is 22 mm, the inside diameter is 13 mm, the fitting tolerance is +0.018 mm to 0 mm, for example, and the thickness is 1 mm.
- the outside diameter of casing part 9b of casing 9 is 15 mm and the thickness is 2 mm.
- the outside diameter of the protrusion 21 of casing part 9b is 13 mm, and the fitting tolerance is -0.006 mm to -0.017 mm, for example.
- the inside diameter of the check valve housing 18 is 5.5 mm, the fitting tolerance is +0.012 mm to 0 mm, for example, and the depth is 1.6 mm.
- a YAG laser is used to integrally weld the first spacer 7a, second spacer 7b, and check valve membrane 5 with a weld 25, which as shown in Fig. 45A completely encircles the space 19.
- the vents 13 are formed using an excimer laser as shown In Fig. 45B.
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- Reciprocating Pumps (AREA)
Description
- The present invention relates generally to a small pump used in a sphygmomanometer, for example, and, in particular but not exclusively, to the structure of a piezoelectric pump that operates with the action of a piezoelectric actuator.
- A pump of this type is taught in Japanese Laid-Open Patent Publication (unexamined) No. 59-200081, USP No. 6,033,191 and the like.
- As shown in Fig. 46, the pump taught in USP No. 6,033,191 is of a lamellar construction having a
valve membrane 52 disposed between anupper housing 50 and alower housing 51 with inlet andoutlet flow channels 53 formed on the upper surface of thelower housing 51. Adiaphragm 54 vibrated by a piezoelectric actuator is disposed on theupper housing 50, forming a pump chamber between thediaphragm 54 and top of theupper housing 50. The pump chamber and inlet and outletside flow channels 53 communicate throughrespective holes 55 in theupper housing 50, and inlet and outlet check valves are formed by thevalve membrane 52 at portions whereholes 55 andflow channels 53 communicate. When thediaphragm 54 vibrates, air is sucked to the pump chamber from the suctionside flow channel 53 and air is discharged from the pump chamber to the dischargeside flow channel 53. - A problem with a compact pump thus comprised is that in order to assure airtightness it is necessary to assure sufficient flatness and parallelism on the mating surfaces of the upper and
lower housings upper housing 50,lower housing 51, andvalve membrane 52. - In addition, if positioning precision drops when the check valve is formed by disposing the
valve membrane 52 between theupper housing 50 andlower housing 51, production yield of the pump body also drops. - Furthermore, the mating faces of the upper and
lower housings flow channels 53 as indicated by thewelding beads 56 shown in Fig. 47 for airtightness, but air leaks between thevalve membrane 52 andupper housing 50 are unavoidable in theflow channels 53. This creates a problem of degraded compression efficiency. Forming .theflow channels 53 is not simple, in addition. - Other piezoelectric pumps are described in EP 0 424 087 A1 which is considered to be the closest priort art EP 0 789 146 A1, DE 197 11 270 A1 and US 5,759,014.
- A problem with the pump taught in Japanese Laid-Open Patent Publication No. 59-200081 is that because it uses a check valve the upper housing must be thick enough to dispose the check valve therein, and the upper housing cannot be made extremely thin.
- The present invention is therefore directed to solving the problems described above by providing a compact pump that is easy to manufacture and offers high efficiency and reliability, and by providing a manufacturing method for this pump.
- In accomplishing the above and other objectives, a pump according to the present Invention is a piezoelectric pump for sucking fluid to a pump chamber and discharging fluid from the pump chamber by changing a volume of the pump chamber by action of a piezoelectric actuator. The piezoelectric pump includes a casing having inlet and outlet flow channels both communicating with the pump chamber, and first and second check valve units each having a thin-film check valve membrane and a check valve body having a channel opened and closed by the check valve membrane. The first and second check valve units are disposed between the pump chamber and the inlet and outlet flow channels, respectively.
- This configuration makes it possible to easily manufacture a compact pump and improve the pump efficiency.
- The check valve function of the check valve units can also be confirmed before installation to the casing, thereby improving pump reliability and improving pump manufacturing yield. Furthermore, if a check valve becomes damaged from extended use, this configuration enables replacing only the damaged check valve unit.
- The diaphragm is preferably made up of a piezoelectric actuator and a thin metal plate joined together and is mounted to the casing, forming a pump chamber between the diaphragm and casing. This makes it possible to reduce the volume of fluid from the pump chamber to the check valve membrane, and increases the pressure inside the pump chamber during discharge, as compared with conventional pumps. High pressure fluid discharge is thus possible, and pump efficiency improves.
- Further preferably, the first and second check valve units are identically configured and installed to the casing in inverse positions. Identical check valve units can therefore be used on both suction and discharge sides, and production cost can therefore be reduced.
- Further preferably, the check valve units are installed to the casing from the side opposite the diaphragm side, making it possible to replace the check valve unit without removing the diaphragm.
- The diaphragm is easily damaged by external force. However, if the casing part to which the diaphragm is disposed and the casing part to which the check valve units are installed are separate parts, the part to which the diaphragm is joined and the part to which the check valve units are fit can be separated, making it easier to replace the diaphragm and easier to replace the check valve units. Furthermore, because the same check valve unit can be used with different diaphragms, it is easy to determine how pump characteristics change when the diaphragm is changed.
- Further preferably, a fitting structure is used at least between the casing and check valve units or between the discrete casing parts, and this fitting structure is preferably an interference fitting assembled by press fitting. This makes it simple to separate the casing and check valve unit (or the casing parts) when replacing a check valve unit (or a diaphragm). An interference fitting also makes it easy to secure the check valve unit (or casing part) in the casing (or other casing part), airtightness is assured by interference fitting, and pump reliability can be improved.
- The same benefits can be achieved using a transition fitting or clearance fitting completed with adhesion or welding.
- It is also possible to form screw threads on the fitting surfaces so that the casing and check valve units, or the casing parts, are screwed together. The parts can thus be easily fastened together or separated.
- If the check valve membrane is disposed covering the channel in the check valve body and the check valve membrane is joined to the check valve body, a check valve membrane of the smallest necessary size can be used and the yield of the thin film material used for the check valve membrane can be improved.
- If the check valve membrane having one or more vents formed therein is disposed covering the channel in the check valve body, and the check valve membrane around the vent containing the channel is joined to the check valve body, the size of the thin film can be freely set, handling is easier during assembly, and welding is also easier.
- If the vents are formed at positions on opposite sides of the channel, a check valve that operates reliably and has an extremely simple configuration can be provided, and high precision positioning is not needed for the check valve membrane.
- If a single vent parallel to a tangent to the outside circumference of the channel is formed at a position removed from the channel, leaks cannot easily occur. If a plurality of vents each parallel to a tangent to the outside circumference of the channel are formed circumferentially to the channel at positions removed therefrom, the check valve membrane is prevented from wrinkling.
- Furthermore, if the shape of a vent formed in the check valve membrane is a continuous curve, damage to the check valve membrane due to tension is prevented.
- Yet further, if the check valve membrane is disposed covering the channel and two sides on opposite sides of the channel are joined to the check valve body, a check valve can be formed with a simple configuration and high precision positioning is not needed for the check valve membrane.
- If a check valve membrane having one openable side is disposed covering the channel and is joined to the check valve body surrounding the channel except on the one openable side, a check valve function can be achieved with a simple configuration and leaks cannot occur easily.
- If the check valve membrane is disposed covering the channel, the check valve membrane is joined in spots around the circumference of the channel to the check valve body, and intervals between the joined spots function as vents, and therefore the spots where the check valve membrane is joined to the check valve body will be concentric to the channel and wrinkles will not easily occur in the check valve membrane.
- If a polygonally shaped check valve membrane is placed covering the channel and each corner of the polygon is joined to the check valve body, the spots where the check valve membrane is joined to the check valve body will be concentric to the channel. Wrinkles will therefore not easily occur in the check valve membrane, and the edges of the check valve membrane will not curl because the sides that open are straight.
- Furthermore, if the check valve membrane has a flap formed by removing a part of a thin film, and the check valve membrane is joined to the check valve body around the flap, a check valve unit with a simple configuration not requiring high precision positioning of the check valve membrane can be provided. Furthermore, because the channel is opened and closed by the flexural modulus of the thin film, pressure loss due to the tension of the thin film can be reduced.
- Furthermore, if the channel opened and closed by the flap is formed from a plurality of openings separated a specific interval and a support part for supporting the flap is formed in a center of the plurality of openings, fluid leaks resulting from the thin film being pulled into the channel can be prevented, and the pressure inside the pump can be further increased.
- If the check valve membrane is formed into a rectangular strip and is joined on only one side perpendicular to a long side to the check valve body, a check valve unit with a simple configuration not requiring high precision positioning of the check valve membrane can be provided. In addition, the channel can be opened and closed by the flexural modulus of the thin film, and pressure loss due to the tension of the thin film can be reduced.
- If the check valve body is formed with first and second spacers, the first and second spacers have a fitting structure, and the check valve membrane is inserted between and joined to the first and second spacers when they are fit together, the check valve membrane can be easily fixed in place by an interference fitting, for example.
- If the first and second spacers are adhesively bonded, air leaks can be eliminated.
- Furthermore, if the check valve membrane and check valve body are welded together, the check valve membrane can be reliably joined to the check valve body by welding.
- If the check valve body is formed with first and second spacers, the check valve membrane is disposed between the first and second spacers, and the first and second spacers and check valve membrane are welded together, welding damage to the check valve membrane is prevented because three layers are welded.
- A manufacturing method for a pump according to another aspect of the invention includes: forming a vent in a check valve membrane made of a thin film; forming a channel in a check valve body; placing the check valve membrane so as to cover the channel; joining the check valve membrane around the vent to the check valve body to form a check valve unit in which the channel is opened and closed by the check valve membrane due to a pressure differential; and installing the check valve unit in a casing.
- Vents can thus be easily formed in the thin film, and high precision positioning is not needed when welding.
- The vents can be formed in the check valve membrane after check valve unit is assembled. This completely eliminates any need for positioning the check valve membrane for joining to the check valve body. The vents can also be formed at appropriate positions after the check valve membrane is fixed.
- If the vents in the thin film are formed with an excimer laser, wrinkles are not formed by process heat, the thin film can be precision processed, and there is little likelihood of damage (laser marks) being left on the check valve body from post-processing.
- Another manufacturing method for a pump according to the present invention includes: forming a channel in a check valve body; placing a check valve membrane so as to cover the channel; joining the check valve membrane to the check valve body around the channel; forming a vent in the check valve membrane at a position between a joint and the channel to form a check valve unit in which the channel is opened and closed by the check valve membrane due to a pressure differential; and installing the check valve unit in a casing.
- This method holds the check valve membrane and the check valve body tight together while welding them together, and thus improves airtightness.
- Furthermore, if an iris having an aperture is used for laser welding to simultaneously weld specific parts of the check valve membrane to the check valve body, the effects of welding heat can be further lessened.
- The above and other objectives and features of the present invention will become more apparent from the following description of preferred embodiments thereof with reference to the accompanying drawings, throughout which like parts are designated by like reference numerals, and wherein:
- Fig. 1 is a perspective view of a diaphragm pump according to a first embodiment of the present invention;
- Fig. 2 is an exploded perspective view of the pump shown in Fig. 1;
- Fig. 3 is an exploded perspective view of a check valve unit disposed in the pump shown in Fig. 1;
- Fig. 4A is a sectional view showing the suction operation of the check valve unit shown in Fig. 3;
- Fig. 4B is a sectional view showing the discharge operation of the check valve unit shown in Fig. 3;
- Fig. 5A is a perspective view of a check valve unit in a diaphragm pump according to a second preferred embodiment of the present invention;
- Fig. 5B is a sectional view of the diaphragm pump having the check valve unit shown in Fig. 5A;
- Fig. 6A is a perspective view of a check valve unit in a diaphragm pump according to a third preferred embodiment of the present invention;
- Fig. 6B is a sectional view of the diaphragm pump having the check valve unit shown in Fig. 6A;
- Fig. 7A is an exploded perspective view of a diaphragm pump according to a fourth preferred embodiment of the present invention;
- Fig. 7B is a sectional view of the diaphragm pump shown in Fig. 7A;
- Fig. 8 is a perspective view as viewed from the back of an assembled diaphragm pump according to a modification of the pump shown in Fig. 7A;
- Fig. 9 is a perspective view of a check valve membrane disposed in a check valve unit according to the present invention;
- Fig. 10A is a perspective view of the check valve membrane shown in Fig. 9 when open;
- Fig. 10B is a sectional view of the check valve membrane shown in Fig. 9 when open;
- Fig. 11A is a perspective view of the check valve membrane shown in Fig. 9 when closed;
- Fig. 11B is a sectional view of the check valve membrane shown in Fig. 9 when closed;
- Fig. 12 is a perspective view of an alternative check valve membrane;
- Fig. 13A is a perspective view of the check valve membrane shown in Fig. 12 when open;
- Fig. 13B is a sectional view of the check valve membrane shown in Fig. 12 when open;
- Fig. 14A is a perspective view of the check valve membrane shown in Fig. 12 when closed;
- Fig. 14B is a sectional view of the check valve membrane shown in Fig. 12 when closed;
- Fig. 15A is a perspective view of another alternative check valve membrane;
- Fig. 15B is a perspective view of the check valve membrane shown in Fig. 15A when open;
- Fig. 16A is a perspective view of another alternative check valve membrane;
- Fig. 16B is a perspective view of the check valve membrane shown in Fig. 16A when open;
- Fig. 17A is a perspective view of another alternative check valve membrane;
- Fig. 17B is a perspective view of the check valve membrane shown in Fig. 17A when open;
- Fig. 18 is a perspective view of another alternative check valve membrane;
- Fig. 19A is a perspective view of the check valve membrane shown in Fig. 18 when open;
- Fig. 19B is a sectional view of the check valve membrane shown in Fig. 18 when open;
- Fig. 20A is a perspective view of the check valve membrane shown in Fig. 18 when closed;
- Fig. 20B is a sectional view of the check valve membrane shown in Fig. 18 when closed;
- Fig. 21 is a perspective view of another alternative check valve membrane;
- Fig. 22A is a perspective view of the check valve membrane shown in Fig. 21 when open;
- Fig. 22B is a sectional view of the check valve membrane shown in Fig. 21 when open;
- Fig: 23A is a perspective view of the check valve membrane shown in Fig. 21 when closed;
- Fig. 23B is a sectional view of the check valve membrane shown in Fig. 21 when closed;
- Fig. 24 is a perspective view of another alternative check valve membrane;
- Fig. 25A is a perspective view of the check valve membrane shown in Fig. 24 when open;
- Fig. 25B is a sectional view of the check valve membrane shown in Fig. 24 when open;
- Fig. 26A is a perspective view of the check valve membrane shown in Fig. 24 when closed;
- Fig. 26B is a sectional view of the check valve membrane shown in Fig. 24 when closed;
- Fig. 27A is a perspective view of another alternative check valve membrane;
- Fig. 27B is a perspective view of the check valve membrane shown in Fig. 27A when open;
- Fig. 28A is a perspective view of a channel with a configuration different from that shown in Fig. 27A;
- Fig. 28B is a perspective view of the check valve membrane shown in Fig. 28A when open;
- Fig. 29A is a perspective view of another alternative check valve membrane;
- Fig. 29B is a perspective view of the check valve membrane shown in Fig. 29A when open;
- Fig. 30 is an exploded perspective view of a check valve unit;
- Fig. 31 is a perspective view of the check valve unit shown in Fig. 30;
- Fig. 32 is a sectional view of the check valve unit shown in Fig. 30;
- Fig. 33 is an exploded perspective view of another check valve unit;
- Fig. 34 is a perspective view of the check valve unit shown in Fig. 33;
- Fig. 35 is a sectional view of the check valve unit shown in Fig. 33;
- Fig. 36 is an exploded perspective view of another check valve unit;
- Fig. 37 is a perspective view of the check valve unit shown in Fig. 36;
- Fig. 38 is a sectional view of the check valve unit shown in Fig. 36;
- Fig. 39 is a perspective view showing the formation of vents in the check valve membrane after the check valve unit is assembled;
- Fig. 40 is a perspective view of the check valve unit before the check valve membrane is welded;
- Fig. 41 is a perspective view of the check valve unit when the check valve membrane is welded;
- Fig. 42 is a perspective view showing welding of the check valve membrane using a laser device;
- Fig. 43A is a perspective view showing a preferred embodiment of a diaphragm pump according to the present invention;
- Fig. 43B is an exploded perspective view of the diaphragm pump shown in Fig. 42A;
- Fig. 43C is an exploded perspective view of a check valve unit disposed in the diaphragm pump shown in Fig. 43A;
- Fig. 44A is a perspective view showing an example of the check valve unit shown in Fig. 43C;
- Fig. 44B is a partial perspective view of the check valve unit shown in Fig. 44A;
- Fig. 44C is a perspective view showing the check valve membrane in the check valve unit shown in Fig. 43C when open;
- Fig. 45A is a perspective view showing welding of the check valve membrane to the check valve unit using a YAG laser;
- Fig. 45B is a perspective view showing the formation of vents in the check valve membrane using an excimer laser;
- Fig. 46 is an exploded perspective view of a prior art diaphragm pump; and
- Fig. 47 is a partial sectional view of the prior art diaphragm pump shown in Fig. 46.
- This application is based on an application No. 2001-125904 filed April 24, 2001 in Japan, the content of which is herein expressly incorporated by reference in its entirety.
- Preferred embodiments of the present invention are described below with reference to the accompanying drawings.
- Figs. 1 to 3 and Figs. 4A and 4B show a diaphragm pump having a disc-shaped
diaphragm 12, a disc-shapedcasing 9, and a pair ofcheck valve units 8. Thediaphragm 12 is disposed on top of thecasing 9 with the edges of thediaphragm 12 welded or adhesively bonded to the top of thecasing 9, thereby forming a pump chamber 1 between thediaphragm 12 andcasing 9. - The outside diameter A of the
diaphragm 12 in this exemplary pump is 20 mm, the outside diameter B of thecasing 9 is 22 mm, and the height C is 3 mm. - An
inlet channel 2 for suction into the pump chamber 1 and anoutlet channel 3 for discharge from the pump chamber 1 are formed in thecasing 9 through the thickness direction of thecasing 9.Check valve housings 18 are formed between the pump chamber 1 and the inlet andoutlet channels check valve units 8 are housed in thesecheck valve housings 18. Eachcheck valve unit 8 has acheck valve membrane 5, which is a thin film with elasticity, and acheck valve body 7, which has achannel 6 opened and closed by thecheck valve membrane 5 according to the pressure differential between respective sides thereof.Channel 6 passes completely through thecheck valve body 7, andchannels channels 6. - The
check valve body 7 has afirst spacer 7a and asecond spacer 7b. Thecheck valve membrane 5 is located between thefirst spacer 7a andsecond spacer 7b so as to block thechannel 6, and thecheck valve membrane 5 is disposed in thecheck valve body 7 by integrating thecheck valve membrane 5 with thefirst spacer 7a andsecond spacer 7b. - The
check valve unit 8 on theinlet channel 2 side displaces upward and opens when pressure is applied from theinlet channel 2 to the pump chamber 1, and aspace 19 large enough for thecheck valve membrane 5 to so displace is disposed in thefirst.spacer 7a on the pump chamber 1 side. - The
check valve unit 8 on theoutlet channel 3 side displaces downward and opens when pressure is applied from the pump chamber 1 to theoutlet channel 3 side, and aspace 19 large enough for thecheck valve membrane 5 to so displace is disposed in thesecond spacer 7b on the side away from the pump chamber 1. - When the
diaphragm 12 is vibrated by the piezoelectric actuator or other drive means, vibration ofdiaphragm 12 causes suction of fluid from theinlet channel 2 to the pump chamber 1, and causes the fluid compressed inside the pump chamber 1 to then be discharged from theoutlet channel 3. During suction phase thediaphragm 12 is driven to separate from thecasing 9 as shown in Fig. 4A and fluid can be suctioned from theinlet channel 2 into the pump chamber 1 because thecheck valve membrane 5 communicating with theinlet channel 2 opens while thecheck valve membrane 5 communicating with theoutlet channel 3 closes. Similarly during the discharge phase, thediaphragm 12 is driven in the direction closing to thecasing 9 as shown in Fig. 4B, but this time thecheck valve membrane 5 communicating with theinlet channel 2 closes and thecheck valve membrane 5 communicating with theoutlet channel 3 opens so that fluid can be discharged from the pump chamber 1 to theoutlet channel 3. - By constructing the
check valve unit 8 separately from thecasing 9 as described above, thecheck valve unit 8 can be installed to thecasing 9 after first confirming that thecheck valve unit 8 functions properly, and pump production yield can therefore be improved. Furthermore, if a check valve becomes damaged with extended use, for example, it is possible to replace just the damagedcheck valve unit 8. - The
diaphragm 12 is made up of apiezoelectric actuator 10 and a brass or other thin metal plate 11. Thepiezoelectric actuator 10 is a PZT element or other piezoelectric element with silver or other metallic conductor electrodes. When a voltage such as a commercial AC voltage is applied to thepiezoelectric actuator 10, thediaphragm 12 is reciprocally driven by thepiezoelectric actuator 10 and a pumping action is achieved. - The first and
second spacers check valve membrane 5 of thecheck valve body 7 are made, for example, from polycarbonate (PC) resin, and thecasing 9 is made of polyphthalamide (PPA), for example. - The distance from the top of the
casing 9, which is the bottom of the pump chamber 1, to thecheck valve membrane 5 is shorter, and the volume of the channels from the pump chamber 1 to bothcheck valve membranes 5 when fluid is ingested to the pump chamber 1 is less in this embodiment than in the related art described above. If V is the volume of the channels from the pump chamber 1 to bothcheck valve membranes 5 when fluid is ingested to the pump chamber 1, ΔV is the discharge volume, that is, the volume discharged for this V, and ΔP is the internal pressure rise from the initial pressure P, ΔP = ΔV/(V-ΔV) x P, and ΔP is increased by reducing V. - Fig. 5A and Fig. 5B show a different embodiment in which the fluid suction side
check valve unit 8 and fluid discharge sidecheck valve unit 8 are identically constructed, and are simply installed to thecasing 9 in different directions on the suction and discharge sides. - As in the first embodiment the
check valve body 7 has afirst spacer 7a andsecond spacer 7b, but in this embodiment thefirst spacer 7a andsecond spacer 7b have the same thickness and outside diameter. Acheck valve membrane 5 is disposed between thefirst spacer 7a andsecond spacer 7b, and aspace 19 of a diameter large enough for thecheck valve membrane 5 to displace is disposed in thefirst spacer 7a. The suction-sidecheck valve unit 8 is installed so that thefirst spacer 7a is on the pump chamber 1 side, and the discharge-sidecheck valve unit 8 is installed so that thesecond spacer 7b is on the pump chamber 1 side. - Production cost is reduced with this embodiment because the same
check valve unit 8 can be used on both the suction and discharge sides. - Fig. 6A and Fig. 6B show a different embodiment in which the
check valve units 8 are housed to thecasing 9 from the side opposite thediaphragm 12 side. - As shown in Fig. 6A and Fig. 6B, the
check valve body 7 has afirst spacer 7a,second spacer 7b, andthird spacer 7c. Similarly to thefirst spacer 7a andsecond spacer 7b, thisthird spacer 7c is made of polycarbonate resin. - A
check valve membrane 5 is again disposed between thefirst spacer 7a andsecond spacer 7b, but thespace 19 forcheck valve membrane 5 displacement is disposed to thefirst spacer 7a in the suction-sidecheck valve unit 8 and is disposed to thesecond spacer 7b in the discharge-sidecheck valve unit 8. - By thus inserting the
check valve units 8 to thecheck valve housings 18 in thecasing 9 from the side of thecasing 9 opposite thediaphragm 12, this embodiment enables thecheck valve units 8 to be replaced without removing thediaphragm 12. - Fig. 7A and Fig. 7B show an embodiment in which the
casing part 9a to which thediaphragm 12 is disposed and thecasing part 9b to which thecheck valve units 8 are disposed are separate components. - As shown in Fig. 7A and Fig. 7B, the disc-shaped
casing 9 is formed from acasing part 9a and aseparate casing part 9b. The onecasing part 9a is annularly shaped with ahole 20 in the center. Theother casing part 9b is disc-shaped with aprotrusion 21 on top. Theprotrusion 21 of thiscasing part 9b is fit to thehole 20 incasing part 9a to integratecasing part 9a andcasing part 9b. Thediaphragm 12 is disposed on top of casingpart 9a and integrated with thecasing part 9a by bonding the edge of thediaphragm 12 to the top of thecasing part 9a. Thecheck valve units 8 are installed to casingpart 9b. - While the
diaphragm 12 is susceptible to damage from external forces with this configuration, the part to which thediaphragm 12 is disposed can be separated from the part to which thecheck valve units 8 are disposed, and thediaphragm 12 andcheck valve units 8 can therefore be easily replaced. Furthermore, because the same set ofcheck valve units 8 can be used when thediaphragm 12 is replaced, pump characteristics can be easily evaluated after thediaphragm 12 is exchanged. - Installing the
check valve units 8 to thecasing 9, and assembling the twocasing parts - An
integrated casing 9 is assembled by interference fitting theprotrusion 21 ofcasing part 9b into thehole 20 incasing part 9a. Thecheck valve units 8 can also be installed by interference fitting them into thecheck valve housings 18 in thecasing part 9b. If the inside diameter of thehole 20 and the outside diameter of theprotrusion 21 are both nominally 16 mm, theprotrusion 21 can be interference fit in thehole 20 by forming thehole 20 with a tolerance of +0.018 mm to 0 mm and theprotrusion 21 with a tolerance of +0.029 mm to +0.018 mm. - By interference fitting components together as described above, the
check valve unit 8 and casing 9 (or casingpart 9a andcasing part 9b) can be easily separated in order to replace a check valve unit 8 (or diaphragm 12). Furthermore, the tolerances of the interference fitting makes it easy to secure the check valve units 8 (or casingpart 9b) in the casing 9 (or casingpart 9a), and airtightness can be assured by press fitting. - The process tolerances between the
casing 9 andcheck valve units 8, or between theseparate casing parts - For example, if the inside diameter of the
hole 20 and the outside diameter of theprotrusion 21 are both nominally 16 mm and the tolerance of thehole 20 is +0.018 mm to 0 mm and the tolerance ofprotrusion 21 is 0 mm to -0.018 mm, thecasing part 9a andcasing part 9b can be fastened by bonding or welding after they are fit together. Fig. 8 shows an example in which thecasing part 9a andcasing part 9b are bonded together with adhesive.Reference numeral 22 in Fig. 8 shows where the adhesive is applied. - It is therefore possible as described above to reliably assure airtightness between the
casing 9 and check valve units 8 (or betweencasing part 9a andcasing part 9b) by thus adhesively bonding or welding them. - It is also possible to form female threads and male threads on the inside circumference of the
hole 20 incasing part 9a and the outside circumference of theprotrusion 21 on casingpart 9b so that one can be screwed into the other for fastening. Female threads and male threads can likewise be formed on the inside circumference of thecheck valve housings 18 incasing part 9b and the outside circumference of thecheck valve units 8 so that these can be similarly screwed together and fastened. - It will also be noted that by threading the
check valve units 8 to thecasing 9 or casingpart 9b to casingpart 9a, the parts can be easily connected and disconnected. - A
check valve membrane 5 is used as the member achieving the check valve function in the first to fourth embodiments described above, and various embodiments of thecheck valve membrane 5 are described next below. - Fig. 9 shows the part where the
check valve membrane 5 is installed to thecheck valve unit 8 shown in Fig. 5A. The thin-filmcheck valve membrane 5 is formed as a rectangular band and is disposed across so as to cover thechannel 6. With thecheck valve membrane 5 thus covering thechannel 6, thecheck valve membrane 5 is bonded with adhesive 14 on opposite sides of thechannel 6 perpendicular to the longitudinal direction of thecheck valve membrane 5. - When the
check valve unit 8 is open, the long sides of thecheck valve membrane 5 are lifted as shown in Fig. 10A and Fig. 10B. When thecheck valve unit 8 is closed, thechannel 6 is closed by thecheck valve membrane 5 as shown in Fig. 11A and Fig. 11B. - By thus using a band-shaped
check valve membrane 5 thecheck valve membrane 5 can be made of the smallest piece of thin film necessary as a check valve, and less thin film material is therefore required. - Fig. 12 shows a variation in which two parallel
slitted vents 13 are formed in thecheck valve membrane 5 disposed so as to cover thechannel 6. Thecheck valve membrane 5 is then bonded with adhesive 14 around thevents 13 containingchannel 6. - Fig. 13A and Fig. 13B show the
vents 13 in thecheck valve membrane 5 shown in Fig. 12 when open, and Fig. 14A and Fig. 14B show thechannel 6 closed by thecheck valve membrane 5. - The size of the
check valve membrane 5 can be freely determined with this embodiment so that handling during assembly is easier and welding is also easier. - Fig. 15A and Fig. 15B show a rectangular thin film
check valve membrane 5 placed covering thechannel 6. A pair of parallelslitted vents 13 is formed in thecheck valve membrane 5 on opposite sides of thechannel 6, and thecheck valve membrane 5 is bonded with adhesive 14 completely encircling thevents 13. - As shown in Fig. 15B, the
check valve membrane 5 lifts up so that a horizontal semi-cylinder is formed between the twovents 13 when thevents 13 of thecheck valve membrane 5 open. - This embodiment assures that the check valve operates reliably with a simple configuration, and does not require high precision positioning of the
check valve membrane 5. - It is also possible as shown in Fig. 16A to form a single
slitted vent 13 in thecheck valve membrane 5 at a point separated from thechannel 6. Thisvent 13 extends parallel to a tangent to the outside circumference of thechannel 6, and thecheck valve membrane 5 is fixed to thecheck valve body 7 with adhesive 14 completely encircling thevent 13. - When the
vent 13 of thischeck valve membrane 5 opens, thecheck valve membrane 5 is displaced upward from thevent 13 in thecheck valve membrane 5 across thechannel 6 as shown in Fig. 16B. - This configuration is resistant to leaks even when the distance from the
channel 6 to the opening of thevent 13 is short. -
Multiple vents 13 can also be formed in thecheck valve membrane 5 as shown in Fig. 17A. More specifically, the rectangular thin filmcheck valve membrane 5 is placed so as to cover thechannel 6, and multiple (three in this example)slitted vents 13 parallel to tangents to the outside circumference of thechannel 6 are formed at positions apart from the outside circumference of thechannel 6 and circumferentially to thechannel 6. Thecheck valve membrane 5 is fixed with adhesive 14 completely encircling thevents 13. - Fig. 17B shows the
vents 13 of thischeck valve membrane 5 when open. - Wrinkles do not easily form in the
check valve membrane 5 because thevents 13 are formed equidistantly in the circumferential direction to thechannel 6 and the adhesive 14 is located on a circle centered on thechannel 6. - The corners of the
vents 13 in thecheck valve membrane 5 must be curved. If thevents 13 have sharp corners such as in a square, the corners can tear easily when tension is applied to thecheck valve membrane 5. If the corners of thevents 13 are round or nearly round, however, tension tears in thecheck valve membrane 5 can be prevented. More specifically, the vents formed in the check valve membrane are preferably continuous curves. - Fig. 18 shows an embodiment in which the rectangular thin film
check valve membrane 5 is placed so as to cover thechannel 6 with an openable side of thecheck valve membrane 5 proximal to thechannel 6. Thecheck valve membrane 5 is then fixed with a U-shapedadhesive bead 14 encircling thechannel 6 except on this one openable side. - This
check valve membrane 5 opens on only one side as shown in Fig. 19A and Fig. 19B, and thechannel 6 is closed by thecheck valve membrane 5 as shown in Fig. 20A and Fig. 20B. - This embodiment provides a check valve with a very simple configuration, and leaks cannot occur easily.
- As shown in Fig. 21 it is also possible to place the
check valve membrane 5 covering thechannel 6 and spot bond thecheck valve membrane 5 around thechannel 6 withadhesive bead 14 so that the spaces between theadhesive beads 14 function as vents. In the example shown in Fig. 21 note that the three adhesive spots are spaced at equal intervals in the circumferential direction around thecheck valve membrane 5. - This
check valve membrane 5 opens on three sides except the adhesive spots as shown in Fig. 22A and Fig. 22B, and thechannel 6 is closed by thecheck valve membrane 5 as shown in Fig. 23A and Fig. 23B. - Wrinkles do not occur easily with this
check valve membrane 5 because theadhesive bead 14 is in a circumference around thechannel 6. - As shown in Fig. 24, the
check valve membrane 5 could yet further alternatively be substantially polygonal in shape, covering thechannel 6 withadhesive bead 14 placed at each corner of the membrane. The spaces between theadhesive beads 14 become vents in this case. - In the example shown in Fig. 24 the thin film
check valve membrane 5 is shaped as a triangle as an example of one polygon. As shown in Fig. 25A and Fig. 25B, the check valve opens when the three straight sides of thecheck valve membrane 5 balloon up, and thechannel 6 is closed when thecheck valve membrane 5 settles down as shown in Fig. 26A and Fig. 26B. - The
adhesive beads 14 of thischeck valve membrane 5 are also located concentrically to thechannel 6, thus preventing wrinkles in thecheck valve membrane 5. Because they are straight, the opening edges of thecheck valve membrane 5 also do not curl up. - As shown in Fig. 27A, a
flap 5b can be formed in thecheck valve membrane 5 by arcuatedly cutting the thin film. Thecheck valve membrane 5 is then placed with theflap 5b covering thechannel 6, and is bonded with adhesive 14 encircling thechannel 6 and the cut-outpart 5a. The substantiallysemicircular flap 5b inside the cut-outpart 5a thus functions as a valve membrane. - With this
check valve membrane 5 theflap 5b functions as the valving element and flaps up and down to open and close thechannel 6 as shown in Fig. 27B. - This variation of the
check valve membrane 5 is extremely simple, does not require high precision positioning, and reduces pressure loss due to the tension of the valve membrane because it opens and closes thechannel 6 using the flexural modulus of the valve membrane. - As shown in Fig. 28A and Fig. 28B, the
channel 6 in this case preferably has plural (three in this example) equidistantly spaced arc-shapedopenings 6a with asupport 6b for supporting theflap 5b in the center of theplural openings 6a. - When the
channel 6 is shaped as shown in Fig. 27 and theflap 5b (valving element) closes, the center of theflap 5b occluding thechannel 6 is pulled down into thechannel 6. When asupport 6b positioned at the center of theflap 5b is provided as shown in Fig. 28A and Fig. 28B, however, the center of theflap 5b is not pulled into thechannel 6 when theflap 5b closes. Thischeck valve membrane 5 configuration is therefore more resistant to fluid leaks and enables an even higher pressure to be used. - It will also be obvious that the shape of the
openings 6a shall not be limited to an arc, and could be circular, elliptical, or other shape. - It will also be noted that the configuration of the
channel 6 shown in Fig. 28A and Fig. 28B can also be applied to the othercheck valve membranes 5 described above. - As shown in Fig. 29A, the thin film
check valve membrane 5 could also have a band (rectangular) shape placed covering thechannel 6 and then bonded with adhesive 14 perpendicular to the long side at only one end of thecheck valve membrane 5. - The
rectangular flap 5b thus disposed over thechannel 6 operates as the valving element in this configuration, and thechannel 6 opens and closes as theflap 5b moves up and down as shown in Fig. 29B. - This variation of the
check valve membrane 5 is also extremely simple, does not require high precision positioning, and reduces pressure loss due to valve membrane tension because it opens and closes thechannel 6 using the flexural modulus of the valve membrane. - The
check valve body 7 shown in Fig. 30 to Fig. 32 is formed by first andsecond spacers check valve membrane 5 is inserted between the first andsecond spacers check valve membrane 5. The vents of thecheck valve membrane 5 can be as in any of the variations described above, and further description thereof is thus omitted here. - If the nominal inside diameter of the fitting recess in the
first spacer 7a and the outside diameter of the fitting protrusion of thesecond spacer 7b is 4 mm and the thickness of thecheck valve membrane 5 is 0.002 mm, the inside diameter tolerance of the recess in thefirst spacer 7a is +0.02 mm to +0.01 mm, and the outside diameter tolerance of thesecond spacer 7b protrusion is -0.01 mm to -0.02 mm, the first andsecond spacers - It will also be obvious that instead of interference fitting the
check valve membrane 5 could be disposed between thefirst spacer 7a andsecond spacer 7b and the entire perimeters of thefirst spacer 7a andsecond spacer 7b are then bonded. - As shown in Fig. 33 to Fig. 35, the
check valve membrane 5 can alternatively be reliably joined to thecheck valve body 7 by placing the thin filmcheck valve membrane 5 on top of thecheck valve body 7 and then welding thecheck valve membrane 5 around the outside edge of thecheck valve body 7 with awelding bead 25 as shown in Fig. 34 and Fig. 35. - It is yet further possible, as shown in Fig. 36 to Fig. 38, to form the
check valve body 7 with afirst spacer 7a andsecond spacer 7b, dispose the thin filmcheck valve membrane 5 between thefirst spacer 7a andsecond spacer 7b, and weld thefirst spacer 7a,second spacer 7b, andcheck valve membrane 5 around the entire outside perimeter. Welding damage to thecheck valve membrane 5 is less likely with this method because the three layers are welded at a time. - A piezoelectric pump according to the present invention can be easily manufactured as follows. One or
more vents 13 are first formed in the thin film, or thecheck valve membrane 5 is formed by processing a thin film to the desired configuration. Thechannel 6 that will be opened and closed by thecheck valve membrane 5 is also formed in thecheck valve body 7. Thecheck valve membrane 5 is then placed covering thechannel 6 and joined to thecheck valve body 7 by various methods such as described above to form thecheck valve unit 8. Thecheck valve unit 8 is then installed to thecasing 9 between the pump chamber 1 and inlet andoutlet channels more vents 13 can thus be easily formed in a thin film. - The
vents 13 can also be formed in thecheck valve membrane 5 after joining thecheck valve membrane 5 andcheck valve body 7 to form thecheck valve unit 8. This method completely eliminates the need to position thecheck valve membrane 5 for installation, and enables thevents 13 to be formed appropriately to the desired locations. - The
vents 13 can be formed in a thin film 4 (blank of the check valve membrane 5) using an excimer laser as shown in Fig. 39. - When the
check valve body 7 is formed with afirst spacer 7a andsecond spacer 7b as shown in Fig. 39 and an excimer laser or other laser is used, thefirst spacer 7a is preferably made of a transparent polycarbonate resin and thesecond spacer 7b is made of a black polycarbonate resin, for example. Before thevent 13 is formed in this example thethin film 4 is disposed between thefirst spacer 7a andsecond spacer 7b, joined with adhesive 14, and thecheck valve unit 8 is assembled. Alaser beam 27 is then emitted from thelaser device 28 to form avent 13. - Wrinkles caused by process heat do not occur and the
thin film 4 can be precision processed by thus using an excimer laser or other type of laser to form thevents 13. Damage (laser marks) from post-processing to thecheck valve body 7 is also less likely to occur. - Alternatively, a check valve membrane made of a flexible
thin film 4 is placed on thecheck valve body 7 covering thechannel 6 as shown in Fig. 40. Aglass plate 16 is then placed over thethin film 4 as shown in Fig. 41 to press thethin film 4 to thecheck valve body 7 while emitting a laser to form aweld 25. - By thus holding the
thin film 4 tight to thecheck valve body 7 while welding thethin film 4 to thecheck valve body 7, thethin film 4 can be reliably welded without producing any wrinkles, and airtightness can be improved. - When welding with a laser, an
iris 17 with a specific aperture or other opening can be used as shown in Fig. 42 to simultaneously emit thelaser beam 27 to a specific place and thereby integrally bond thefirst spacer 7a,thin film 4, andsecond spacer 7b. In the example shown in Fig. 42 twoirises 17 each with a specific aperture are installed stacked together in thelaser device 28, and thelaser beam 27 is emitted simultaneously to a specific circle around thefirst spacer 7a,thin film 4, andsecond spacer 7b, thus aweld 25 is formed. A YAG laser is used for thelaser device 28 in this example, and sample laser emission conditions are shown in Table 1.Table 1 Acrylic Polycarbonate Power 0.56 J/shot 0.24 J/shot Number of shots 5 5 - When the entire perimeter is welded simultaneously, the effects of the welding heat can be lessened.
- A diaphragm pump according to the present invention can be manufactured as described below. Fig. 43A shows the assembled diaphragm pump, and Fig. 43B is an exploded perspective view of the diaphragm pump.
- The drive voltage, drive frequency, maximum pressure, and flow of this diaphragm pump are as follow.
- Drive voltage: -100, 400 V
- Drive frequency: 100 Hz (square wave)
- Maximum pressure: 450 hPa
- Flow: 85 ml/min
- This diaphragm pump is made up of a disc-shaped
diaphragm 12, disc-shapedcasing 9, andcheck valve units 8. Thediaphragm 12 is placed on top of thecasing 9 and the edge of thediaphragm 12 is bonded to the top of thecasing 9 to form a pump chamber. - The
casing 9 is formed from acasing part 9a and aseparate casing part 9b. The onecasing part 9a is annularly shaped with ahole 20 in the center. Theother casing part 9b is disc-shaped with aprotrusion 21 on top. Theprotrusion 21 of thiscasing part 9b is fit to thehole 20 incasing part 9a to integratecasing part 9a andcasing part 9b. Thediaphragm 12 is disposed on top of casingpart 9a and integrated with thecasing part 9a by bonding the edge of thediaphragm 12 to the top of thecasing part 9a.Check valve housings 18 are formed incasing part 9b, and thecheck valve units 8 are installed to thesecheck valve housings 18. - The
check valve body 7 is made up of afirst spacer 7a andsecond spacer 7b, which are disc shaped members identical in thickness and outside diameter. Thefirst spacer 7a is made of a transparent polycarbonate resin, thesecond spacer 7b is made of a black polycarbonate resin, and thecheck valve membrane 5 is made of a transparent polycarbonate resin. Thecheck valve unit 8 is assembled by placing thecheck valve membrane 5 between thefirst spacer 7a andsecond spacer 7b and then joining thefirst spacer 7a andsecond spacer 7b. - The
diaphragm 12 is made of a thin metal plate 11 andpiezoelectric actuator 10. Thepiezoelectric actuator 10 is aPZT element 20 mm in diameter and 0.25 mm thick. The thin metal plate 11 is preferably brass, 20.2 mm in diameter and 0.05 mm thick. Electrodes of the PZT element are silver and 18 mm in diameter. - The
check valve membrane 5 is made of a polycarbonate film 0.002 mm thick. Thischeck valve membrane 5 is disposed between thefirst spacer 7a andsecond spacer 7b of thecheck valve body 7, and thecheck valve unit 8 is assembled by integrally welding thecheck valve membrane 5,first spacer 7a, andsecond spacer 7b with aweld 25. - As shown in Fig. 44A, the height of the
check valve unit 8 is 1.6 mm, the outside diameter of thecheck valve unit 8 is 5.5 mm, and the fitting tolerance is -0.004 mm to -0.012 mm, for example. - The diameter of the
space 19 into which thecheck valve membrane 5 displaces is 2.8 mm as shown in Fig. 448, and the diameter of thechannel 6 is 1 mm. The suction side and discharge side of thischeck valve unit 8 are identically configured, and the orientation of thecheck valve unit 8 is simply inverted on the suction and discharge sides. - Fig. 44C shows the operation of this check valve. The
vents 13 are 1 mm long, the gap between the pair ofvents 13 is 2 mm, and thevents 13 are 0.3 mm wide. - Casing
part 9a of thiscasing 9 is made of PPA resin, and casingpart 9b is made of transparent acrylic resin. The outside diameter of casingpart 9a ofcasing 9 is 22 mm, the inside diameter is 13 mm, the fitting tolerance is +0.018 mm to 0 mm, for example, and the thickness is 1 mm. The outside diameter of casingpart 9b ofcasing 9 is 15 mm and the thickness is 2 mm. The outside diameter of theprotrusion 21 ofcasing part 9b is 13 mm, and the fitting tolerance is -0.006 mm to -0.017 mm, for example. The inside diameter of thecheck valve housing 18 is 5.5 mm, the fitting tolerance is +0.012 mm to 0 mm, for example, and the depth is 1.6 mm. - A YAG laser is used to integrally weld the
first spacer 7a,second spacer 7b, andcheck valve membrane 5 with aweld 25, which as shown in Fig. 45A completely encircles thespace 19. Thevents 13 are formed using an excimer laser as shown In Fig. 45B.
Claims (27)
- A piezoelectric pump for sucking fluid to a pump chamber (1) and discharging fluid from the pump chamber (1) by changing a volume of the pump chamber (1) by action of a piezoelectric actuator (10), said piezoelectric pump comprising:a casing (9) having inlet and outlet flow channels (2, 3) both communicating with the pump chamber (1);first and second check valve units (8) each having a thin-film check valve membrane (5) and a check valve body (7) having a channel (6) opened and dosed by the check valve membrane (5);the casing (9) having first and second check valve housings (18) formed between the pump chamber (1) and the inlet and outlet flow channels (2, 3), respectively; characterised in thatthe first and second check valve units (8) are removably housed in the first and second check valve housing (18) respectively, so that each check valve unit (8) can be removed as one unit from the respective check valve housing (18).
- The piezoelectric pump according to claim 1, further comprising a diaphragm (12) comprising a piezoelectric actuator (10) and a thin metal plate (11) joined together, wherein the diaphragm (12) is mounted to the casing (9) to form the pump chamber (1) between the diaphragm (12) and the casing (9).
- The piezoelectric pump according to claim 1 or 2, wherein the first and second check valve units (8) are identically configured and installed to the casing (9) in inverse positions.
- The piezoelectric pump according to one of the claims 1 to 3, wherein the first and second check valve units (8) are Installed to the casing (9) from a side opposite the diaphragm (12) side.
- The piezoelectric pump according to one of the claims 1 to 4, wherein the casing (9) comprises a first casing part (9a) to which the diaphragm (12) is disposed and a second casing part (9b) that is separate from the first casing part (9a) and to which the first and second check valve units (8) are installed.
- The piezoelectric pump according to claim 5, wherein a fitting structure is used at least between the casing (9) and the first and second check valve units (8) or between the first and second casing parts (9a, 9b), and the fitting structure is an interference fitting assembled by press fitting.
- The piezoelectric pump according to claim 5, wherein a fitting structure is used at least between the casing (9) and the first and second check valve units (8) or between the first and second casing parts (9a, 9b), and the fitting structure is a transition fitting or clearance fitting completed with adhesion or welding.
- The piezoelectric pump according to claim 5, wherein a fitting structure is used at least between the casing (9) and the first and second check valve units (8) or between the first and second casing parts (9a, 9b), and the fitting structure has screw threads formed therein for screw fitting.
- The piezoelectric pump according to one of the claims 1 to 8, wherein the check valve membrane (5) is positioned to cover the channel (6) in the check valve body, and the check valve membrane is joined to the check valve body (7).
- The piezoelectric pump according to claim 9, wherein the check valve membrane (5) has at least one vent (13) formed therein and is disposed so as to cover the channel (6) in the check valve body (7), and the check valve membrane (5) around the vent (13) is joined to the check valve body (7).
- The piezoelectric pump according to claim 10, wherein the check valve membrane (5) has two vents (13) formed at positions on opposite sides of the channel (6).
- The piezoelectric pump according to claim 10, wherein the check valve membrane (5) has a single vent (13) parallel to a tangent to the outside circumference of the channel (6), the single vent (13) being formed at a position removed from the channel (6).
- The piezoelectric pump according to claim 10, wherein the check valve membrane (5) has a plurality of vents (13) each parallel to a tangent to an outside circumference of the channel (6), the plurality of vents (13) being formed circumferentially to the channel (6) at positions removed therefrom.
- The piezoelectric pump according to claim 10, wherein the vent (13) in the check valve membrane (5) is shaped Into a continuous curve.
- The piezoelectric pump according to one of the claims 9 to 14, wherein the check valve membrane (5) is disposed so as to cover the channel (6), and two sides thereof on opposite sides of the channel (6) are joined to the check valve body (7).
- The piezoelectric pump according to one of the claims 9 to 14, wherein the check valve membrane (5) has one openable side and is disposed so as to cover the channel (6), the check valve membrane (5) being joined to the check valve body (7) surrounding the channel (6) except on the one openable side.
- The piezoelectric pump according to one of the claims 9 to 14, wherein the check valve membrane (5) is disposed so as to cover the channel (6) and joined in spots around the circumference of the channel (6) to the check valve body (7), and intervals between the joined spots are vents (13),
- The piezoelectric pump according to claim 17, wherein the check valve membrane (5) is shaped into a polygon and placed so as to cover the channel (6), and each corner of the polygon is joined to the check valve body (7).
- The piezoelectric pump according to one of the claims 9 to 18, wherein the check valve membrane (5) has a flap (5b) formed by removing a part of a thin film, and the check valve membrane (5) is joined to the check valve body (7) around the perimeter of the flap (5b).
- The piezoelectric pump according to claim 19, wherein the channel (6) opened and closed by the flap (5b) is formed from a plurality of openings (6a) separated a specific interval, and a support part (6b) for supporting the flap (5b) is formed in a center of the plurality of openings (6a).
- The piezoelectric pump according to claim 9, wherein the check valve membrane (5) is formed into a rectangular strip and is joined on only one side thereof perpendicular to a long side thereof to the check valve body (7).
- The piezoelectric pump according to one of the claims 9 to 21, wherein the check valve body (7) is formed with first and second spacers (7a, 7b) having a fitting structure, and the check valve membrane (7) is inserted between and joined to the first and second spacers (7a, 7b).
- The piezoelectric pump according to claim 22, wherein the first and second spacers (7a, 7b) are bonded.
- The piezoelectric pump according to one of the claims 9 to 23, wherein the check valve membrane (5) and the check valve body (7) are welded together.
- The piezoelectric pump according to one of the claims 9 to 21, wherein the check valve body (7) is formed with first and second spacers (7a, 7b), the check valve membrane (5) is disposed between the first and second spacers (7a, 7b), and the first and second spacers (7a, 7b) and the check valve membrane (5) are welded together.
- A method of manufacturing a pump, comprising:forming a channel (6) in a check valve body (7); placing a check valve membrane (5) so as to cover the channel (6); joining the check valve membrane (5) to the check valve body (7) around the channel (6);forming a vent (13) in the check valve membrane (5) at a position between a joint and the channel (6) to form a check valve unit (8) in which the channel (6) is opened and closed by the check valve membrane (5) due to a pressure differential;installing the check valve unit (8) in a casing (9)and disposing a diaphragm (12) on the top of the casing (9) so as to cover the check valve unit (8).
- The method according to claim 26, wherein the vent (13) in the thin film is formed with an excimer laser.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2001125904 | 2001-04-24 | ||
JP2001125904 | 2001-04-24 |
Publications (3)
Publication Number | Publication Date |
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EP1253320A2 EP1253320A2 (en) | 2002-10-30 |
EP1253320A3 EP1253320A3 (en) | 2004-02-04 |
EP1253320B1 true EP1253320B1 (en) | 2006-02-08 |
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Family Applications (1)
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EP02008979A Expired - Lifetime EP1253320B1 (en) | 2001-04-24 | 2002-04-23 | Pump and method of manufacturing same |
Country Status (7)
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US (1) | US20030002995A1 (en) |
EP (1) | EP1253320B1 (en) |
KR (1) | KR100494262B1 (en) |
CN (1) | CN1212476C (en) |
DE (1) | DE60209054T2 (en) |
HK (1) | HK1051061B (en) |
TW (1) | TW561223B (en) |
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- 2002-04-16 TW TW091107782A patent/TW561223B/en not_active IP Right Cessation
- 2002-04-23 US US10/127,535 patent/US20030002995A1/en not_active Abandoned
- 2002-04-23 DE DE60209054T patent/DE60209054T2/en not_active Expired - Lifetime
- 2002-04-23 EP EP02008979A patent/EP1253320B1/en not_active Expired - Lifetime
- 2002-04-24 KR KR10-2002-0022511A patent/KR100494262B1/en not_active IP Right Cessation
- 2002-04-24 CN CNB021184593A patent/CN1212476C/en not_active Expired - Fee Related
-
2003
- 2003-03-14 HK HK03101906.8A patent/HK1051061B/en not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
TW561223B (en) | 2003-11-11 |
US20030002995A1 (en) | 2003-01-02 |
HK1051061A1 (en) | 2003-07-18 |
DE60209054T2 (en) | 2006-08-31 |
KR20020082800A (en) | 2002-10-31 |
EP1253320A2 (en) | 2002-10-30 |
EP1253320A3 (en) | 2004-02-04 |
KR100494262B1 (en) | 2005-06-13 |
CN1382909A (en) | 2002-12-04 |
HK1051061B (en) | 2006-08-25 |
DE60209054D1 (en) | 2006-04-20 |
CN1212476C (en) | 2005-07-27 |
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