CN1212476C

CN1212476C - Pump and its mfg. method

Info

Publication number: CN1212476C
Application number: CNB021184593A
Authority: CN
Inventors: 浦野洋二; 川口达治; 北原治伦
Original assignee: Matsushita Electric Works Ltd
Current assignee: Panasonic Electric Works Co Ltd
Priority date: 2001-04-24
Filing date: 2002-04-24
Publication date: 2005-07-27
Anticipated expiration: 2022-04-24
Also published as: EP1253320B1; US20030002995A1; CN1382909A; EP1253320A2; KR100494262B1; DE60209054D1; TW561223B; KR20020082800A; DE60209054T2; EP1253320A3; HK1051061A1; HK1051061B

Abstract

A pump and a manufacturing method thereof are provided. The compact pump has a pump chamber, inlet and outlet channels communicating with the pump chamber, and a check valve units(8) placed between the pump chamber and the inlet and outlet channels. The check valve unit has a thin film check valve membrane, and a check valve body(7) having a channel opened and closed by the check valve membrane due to pressure difference. The compact pump is manufactured easily by installing the check valve unit in the casing after checking function, and the reliability is improved by increasing efficiency.

Description

Pump and manufacture method thereof

Technical field

The present invention relates to be used for the miniature pump of sphygmomanometer etc., particularly relate to the piezoelectricity pump structure of the effect that utilizes piezoelectric actuator.

Background technique

In the past, open clear 59-200081 communique and U. S. Patent the spy and wait in the communique for the 6th, 033, No. 191 and disclose this pump.

Figure 46 represents U. S. Patent the 6th, 033, disclosed pump in No. 191, between top framework 50 and bottom framework 51, clamp valve block 52 form stacked, formation suction side and discharge effluent road 53 on bottom framework 51.Diaphragm 54 by the piezoelectric actuator vibration is housed in top framework 50, between the upper surface of diaphragm 54 and top framework 50, forms pump chamber.The stream 53 of in the pump chamber and suction side and discharge side is communicated with by the through hole 55 of top framework 50 respectively, utilizes valve block 52 to form suction side and discharge side safety check on the part that is communicated with through hole 55 and stream 53.When making diaphragm 54 vibrations, the stream 53 of air from the suction side is drawn into the pump chamber.

But, in the example of above-mentioned prior art, in order to ensure tightness, be necessary fully to guarantee integral planar degree, the parallelism of the fitting surface of top and

bottom framework

50,51, and exist and be difficult to 52 3 layers of top framework 50, bottom framework 51 and the valve blocks problem of location simultaneously.And, valve block 52 being clipped between top framework 50 and the bottom framework 51 when forming safety check, the passing rate of processing of pump main body is low when Location accuracy is low.And then, in order to ensure tightness, laser cladding (symbol 56 is melt-coating part) is carried out to the fitting surface of top and

bottom framework

50,51 as shown in figure 47 in longshore current road 53, and valve block 52 in the stream portion 53 and the gas leakage between the top framework 50 are inevitably, the problem that exists compression efficiency to worsen.And the formation of stream 53 itself also is not easy.

And, open in the clear 59-200081 communique in the disclosed pump the spy owing to adopted the detection valve, thereby in the framework of top for the detection valve is set, certain thickness must be arranged, the problem that existence can't design the top framework as thin as a wafer.

The present invention is in view of existing problem in the prior art, its objective is provide a kind of and be easy to make, efficient and high compact type pump and the manufacture method of reliability.

Summary of the invention

To achieve these goals, the present invention makes the volume-variation of pump chamber for a kind of effect that utilizes piezoelectric actuator, the piezoelectric pump indoor or that fluid is discharged from pump chamber with the fluid suction pump whereby, it is characterized in that, comprise: have the suction side that is communicated with pump chamber and discharge the effluent road and be respectively formed at pump chamber with suction side and discharge effluent road between the box body of the 1st and the 2nd safety check accommodation section, with by the check valve membrane that forms with film and have the 1st and the 2nd check valve unit of utilizing the safety check framework of this check valve membrane by the pipeline of pressure difference switch to constitute, the the 1st and the 2nd check valve unit is installed in respectively on the described the 1st and the 2nd safety check accommodation section with freely loading and unloading, each the described the 1st and the 2nd check valve unit can be disassembled from the described the 1st and the 2nd safety check accommodation section individually.

Adopt this structure, not only can make the compact type pump at an easy rate, and can improve the efficient of pump.And, can after the function of confirming safety check, again check valve unit be installed in the box body, can improve the up-to-standard rate of pump itself simultaneously in the reliability that improves pump.And,, only need the check valve unit of replacing damaged just passable even safety check is sustained damage because use for a long time waits.

In addition, in box body that piezoelectric actuator and sheetmetal and the diaphragm that is formed by stacking are packed into, when between them, forming pump chamber, compared with prior art, can reduce the volume of fluid portion, improve the pump chamber internal pressure when discharging from pump chamber to check valve membrane.Thereby, can discharge high-pressure liquid, improve the efficient of pump.

And then the 1st check valve unit is identical with the shape of the 2nd check valve unit, and when being installed in the box body up and down on the contrary, can make the check valve unit sharing that is arranged on the fluid suction side and discharges side, can cut down finished cost.

In addition, when the opposite side that face is set from diaphragm is installed to the 1st and the 2nd check valve unit the box, does not take off diaphragm and just can change check valve unit.

Though diaphragm is easy to sustain damage because of external force, but when the box body portion of box body portion that diaphragm is set and installation check valve unit is made of independent parts, since can make diaphragm be provided with portion and check valve unit be provided with part from, so can carry out the replacing of oscillatory mode and the replacing of check valve unit at an easy rate.Even the change diaphragm, but owing to can utilize same check valve unit combination, so be easy to pump characteristics be estimated by changing diaphragm.

In addition, between box body and check valve unit, and be embedded structure as between two box body portions of separate part at least one, when installing by being pressed into this telescoping part, when changing check valve unit (or diaphragm), separate box body and check valve unit (or two box bodys) easily with interference fit.And, utilize interference fit easily check valve unit (or box body portion) to be fixed on (or in another box body portion) on the box body, can utilize to be pressed into and guarantee tightness, improve the reliability of pump.

In addition, replace interference fit, utilize transition fit or Spielpassung and carry out bonding or deposited the installation, also can obtain same effect.

In addition, when forming worm tooth, when making box body and check valve unit or two box body portion screw-thread fit, can fix at an easy rate and separate at telescoping part.

When disposing check valve membrane, when joining to check valve membrane on the safety check framework, can only use the check valve membrane of necessary bottom line size, so the stock utilization of thin-film material is good in the mode of blocking safety check framework pipeline.

In addition, when dispose the check valve membrane that forms ventilating hole in the mode of blocking safety check framework pipeline, when engaging around the ventilating hole that comprises pipeline, can set film dimensions freely, easy operating during assembling depositedly also can carry out easily.

In addition, when being positioned at the mode shape ventilating hole of pipeline both sides, can utilize simple structure to form the safety check of reliable in action, simultaneously, not need very high check valve membrane Location accuracy with the leap pipeline.

In addition, when one of formation is parallel to the ventilating hole of pipeline periphery tangent line on the position of leaving pipeline, the difficult leakage when circumferentially many of formation are parallel to the ventilating hole of pipeline periphery tangent line in the upper edge, position of leaving pipeline, is difficult for producing fold on check valve membrane.

In addition, be formed at ventilating hole on the check valve membrane be shaped as continuous curve-like the time, can suppress the check valve membrane breakage that causes because of tension force.

In addition,, engage when clamping the both sides of pipeline, can utilize simple structure to form safety check, simultaneously, do not need very high check valve membrane Location accuracy when disposing check valve membrane in the mode of blocking pipeline.

In addition, but, in the time of around the pipeline of joint except that an aforementioned limit, can have the function of safety check, be difficult for simultaneously leaking with simple structure when disposing the check valve membrane on limit with an opening in the mode of blocking pipeline.

In addition, when disposing check valve membrane, engage check valve membrane along the periphery fixed point of pipeline in the mode of blocking pipeline, and when between the joining portion, forming ventilating hole, because the joining portion is to be on the circumference at center with the pipeline, so be difficult on check valve membrane, producing fold.

In addition, when disposing the polygonal check valve membrane in the mode of blocking pipeline, when engaging polygonal each summit, not only owing to the safety check joining portion is to be difficult for producing on check valve membrane fold on the circumference that is the center with the pipeline, so and because the limit of opening is in line the shape check valve membrane can not roll.

In addition, when cutting its part on check valve membrane, form tabs portion, when joining to check valve membrane on the safety check framework around the tabs portion, can utilize simple structure to provide does not need the very check valve unit of high position precision.And then, can utilize the bending elasticity switch stream of film, can reduce the pressure loss that the tension force by film causes.

In addition, when utilizing a plurality of opening portions that separate with predetermined distance to form pipeline, when forming the supporting portion of supporting tabs portion, can utilize the introducing of film to prevent the leakage of fluid, and can further increase pressure reduction in the central authorities of a plurality of opening portions.

In addition, when check valve membrane is formed band shape, when the one-sided edge of check valve membrane was engaged with the safety check framework with the direction of its length direction quadrature, can utilize simple structure to provide did not need the very check valve unit of high position precision.And then, the bending elasticity switch stream of film can be utilized, and the pressure loss that causes by membrane tension can be reduced.

In addition,, make the 1st and the 2nd spacing body form embedded structure simultaneously, between the 1st and the 2nd spacer element, clamp check valve membrane and when engaging, for example can utilizing, interference fit is easy to fixedly check valve membrane when form the safety check framework with the 1st and the 2nd spacer element.

In addition, when the bonding the 1st and the 2nd spacer element, can prevent air leakage.

In addition, when with check valve membrane with the safety check framework is deposited when being integral, can utilize the deposited joint that carries out check valve membrane reliably.

In addition, when utilizing the 1st and the 2nd spacer element to form the safety check framework, simultaneously between the 1st and the 2nd spacer element, clamp check valve membrane, when the 1st and the 2nd spacer element is integral with check valve membrane is deposited, so depositedly can on check valve membrane, not produce deposited damage owing to being three layers.

And then, pump manufacture method of the present invention, it is characterized in that, on the check valve membrane that forms by film, form ventilating hole, on the safety check framework, form pipeline, dispose check valve membrane in the mode of blocking safety check framework pipeline, check valve membrane around the ventilating hole is joined on the safety check framework, and utilize check valve membrane and safety check framework to constitute check valve unit, utilize check valve membrane to open and close pipeline by pressure difference, this check valve unit is installed on the box body, diaphragm is installed on the box body top, cover check valve unit.

This method is easy to form ventilating hole on film, even also needn't need very high Location accuracy when deposited.

In addition, after forming check valve unit, also can form ventilating hole on check valve membrane, in this case, the location when not needing check valve membrane to engage fully can form ventilating hole afterwards in position.

In addition, when utilizing excimer laser on film, to form ventilating hole, can not carry out micro machining to film, simultaneously, be difficult on the safety check framework residual because the damage (laser trace) that following process causes owing to processing heat produces fold.

And then, pump manufacture method of the present invention, it is characterized in that, on the safety check framework, form pipeline, dispose check valve membrane in the mode of the pipeline of blocking the safety check framework, around pipeline, check valve membrane is joined on the safety check framework, between joining portion and pipeline, on check valve membrane, form ventilating hole, utilize check valve membrane to open and close pipeline, check valve unit is installed in the box body by pressure difference, diaphragm is installed on the box body top, covers check valve unit.

And then, pump manufacture method of the present invention, it is characterized in that, on the safety check framework, form pipeline, mode with the pipeline of blocking the safety check framework disposes check valve membrane, utilize glass crimping check valve membrane and safety check framework, irradiating laser is deposited to carry out simultaneously, constitute check valve unit by check valve membrane and safety check framework, utilize check valve membrane to open and close pipeline, and check valve unit is installed in the box body with freely loading and unloading, and can disassemble individually from box body by pressure difference, diaphragm is installed on the box body top, covers check valve unit.

Adopt this method, can keep check valve membrane closely to contact and with the safety check framework with check valve membrane is deposited is integral, improve tightness with the safety check framework.

When utilizing laser cladding,, then can alleviate the influence of deposited heat if utilization has the deposited check valve membrane of shutter while of opening portion and the regulation position of safety check framework.

Description of drawings

Fig. 1 is the stereogram of the diaphragm pump of embodiments of the invention 1.

Fig. 2 is the exploded perspective view of the pump of Fig. 1.

Fig. 3 is provided in a side of the exploded perspective view of the check valve unit on the pump of Fig. 1.

Fig. 4 A is the sectional view of the action of check valve unit when sucking of explanatory drawing 3.

Fig. 4 B is the sectional view of the action of check valve unit when discharging of explanatory drawing 3.

Fig. 5 A is provided in a side of the stereogram of the check valve unit in the diaphragm pump of embodiments of the invention 2.

Fig. 5 B is the sectional view of diaphragm pump that the check valve unit of Fig. 5 A has been installed.

Fig. 6 A is provided in a side of the stereogram of the check valve unit in the diaphragm pump of embodiments of the invention 3.

Fig. 6 B is the sectional view of diaphragm pump that the check valve unit of Fig. 6 A has been installed.

Fig. 7 A is the exploded perspective view of the diaphragm pump of embodiments of the invention 4.

Fig. 7 B is the sectional view of the diaphragm pump of Fig. 7 A.

The variation of the diaphragm pump of Fig. 8 presentation graphs 7A is the stereogram of observing from the back side under assembled state.

Fig. 9 is provided in a side of the stereogram of the check valve membrane in the check valve unit.

Figure 10 A is the stereogram of the check valve membrane open mode of Fig. 9.

Figure 10 B is the sectional view of the check valve membrane open mode of Fig. 9.

Figure 11 A is the stereogram of the check valve membrane closed condition of Fig. 9.

Figure 11 B is the sectional view of the check valve membrane closed condition of Fig. 9.

Figure 12 is the stereogram of another check valve membrane.

Figure 13 A is the stereogram of the check valve membrane open mode of Figure 12.

Figure 13 B is the sectional view of the check valve membrane open mode of Figure 12.

Figure 14 A is the stereogram of the check valve membrane closed condition of Figure 12.

Figure 14 B is the sectional view of the check valve membrane closed condition of Figure 12.

Figure 15 A is the stereogram of another check valve membrane.

Figure 15 B is the stereogram of the check valve membrane open mode of Figure 15 A.

Figure 16 A is the stereogram of another check valve membrane.

Figure 16 B is the stereogram of the check valve membrane open mode of Figure 16 A.

Figure 17 A is the stereogram of another check valve membrane.

Figure 17 B is the stereogram of the check valve membrane open mode of Figure 17 A.

Figure 18 is the stereogram of another check valve membrane.

Figure 19 A is the stereogram of the check valve membrane open mode of Figure 18.

Figure 19 B is the sectional view of the check valve membrane open mode of Figure 18.

Figure 20 A is the stereogram of the check valve membrane closed condition of Figure 18.

Figure 20 B is the sectional view of the check valve membrane closed condition of Figure 18.

Figure 21 is the stereogram of another check valve membrane.

Figure 22 A is the stereogram of the check valve membrane open mode of Figure 21.

Figure 22 B is the sectional view of the check valve membrane open mode of Figure 21.

Figure 23 A is the stereogram of the check valve membrane closed condition of Figure 21.

Figure 23 B is the sectional view of the check valve membrane closed condition of Figure 21.

Figure 24 is the stereogram of another check valve membrane.

Figure 25 A is the stereogram of the check valve membrane open mode of Figure 24.

Figure 25 B is the sectional view of the check valve membrane open mode of Figure 24.

Figure 26 A is the stereogram of the check valve membrane closed condition of Figure 24.

Figure 26 B is the sectional view of the check valve membrane closed condition of Figure 24.

Figure 27 A is the stereogram of another check valve membrane.

Figure 27 B is the stereogram of the check valve membrane open mode of Figure 27 A.

Figure 28 A is the stereogram with the variform pipeline shape of the pipeline of Figure 27 A.

Figure 28 B is the stereogram of the check valve membrane open mode of Figure 28 A.

Figure 29 A is the stereogram of another check valve membrane.

Figure 29 B is the stereogram of the check valve membrane open mode of Figure 29 A.

Figure 30 is the exploded perspective view of check valve unit.

Figure 31 is the stereogram of the check valve unit of Figure 30.

Figure 32 is the sectional view of the check valve unit of Figure 30.

Figure 33 is the exploded perspective view of another check valve unit.

Figure 34 is the stereogram of the check valve unit of Figure 33.

Figure 35 is the sectional view of the check valve unit of Figure 33.

Figure 36 is the exploded perspective view of another check valve unit.

Figure 37 is the stereogram of the check valve unit of Figure 36.

Figure 38 is the sectional view of the check valve unit of Figure 36.

Figure 39 is illustrated in after the check valve unit assembling, forms the stereogram of the state of vent on check valve membrane.

Figure 40 is the stereogram of the check valve unit before the deposited check valve membrane.

The stereogram of the check valve unit when Figure 41 is deposited check valve membrane.

Figure 42 is the stereogram of the state of expression when using the deposited check valve membrane of laser device.

Figure 43 A represents the stereogram according to an example of diaphragm pump of the present invention.

The exploded perspective view of the diaphragm pump of Figure 43 B Figure 43 A.

Figure 43 C is provided in a side of the exploded perspective view of the check valve unit on the diaphragm pump of Figure 43 A.

Figure 44 A is the stereogram of an example of the check valve unit of presentation graphs 43C.

Figure 44 B is the partial perspective view of the check valve membrane unit of Figure 44 A.

Figure 44 C is mounted in the stereogram of the check valve membrane open mode on the check valve unit of Figure 43 C.

Figure 45 A is with the stereogram of YAG laser with the deposited state on check valve unit of check valve membrane.

Figure 45 B is the stereogram that forms the state of vent with excimer laser on check valve membrane.

Figure 46 is the exploded perspective view of existing diaphragm pump.

Figure 47 is the partial sectional view of the existing diaphragm pump of Figure 46.

Embodiment

Embodiment 1

Fig. 1 to Fig. 4 represents to vibrate the pump of membranous type, and it is to be made of discoid diaphragm 12, discoid box body 9 and check valve unit 8.Diaphragm 12 mountings are above box body 9, and the periphery of deposited or bonding diaphragm 12 forms pump chamber 1 to fix between the upper surface of diaphragm 12 and box body 9 on box body 9.

The size of pump, for example the outer diameter A of diaphragm 12 is φ 20mm, and the external diameter B of box body 9 is φ 22mm, and height C is 3mm.

In box body 9, form suction side stream 2 that sucks pump chamber 1 and the discharge effluent road 3 of discharging from pump chamber 1 along the thickness direction of box body 9.Between pump chamber 1 and suction side and discharge effluent road 2,3, be provided with safety check accommodating part 18, in safety check accommodating part 18, hold, install check valve unit 8.The check valve membrane 5 that check valve unit 8 is formed by the rubber-like film, have by the safety check framework 7 of check valve membrane 5 and constitute with the pipeline 6 of pressure difference switch.In safety check framework 7, form the pipeline 6 that connects, be communicated with the suction side and discharge effluent road 2,3 and pump chamber 1 inside by this pipeline 6.

Safety check framework 7 is made of the 1st spacer element 7a and the 2nd spacer element 7b, between the 1st spacer element 7a and the 2nd spacer element 7b, dispose check valve membrane 5 in the mode of blocking pipeline 6, by making the 1st spacer element 7a, the 2nd spacer element 7b and check valve membrane 5 form one, check valve membrane 5 is installed in the safety check framework 7.Be arranged on the check valve unit 8 in the suction side stream 2,, check valve membrane 5 flexible major diameter spaces 19 be set being positioned on the 1st spacer element 7a of pump chamber 1 side by crooked upward the opening of pressure that is subjected at pump chamber 1 side joint to come from stream 2.On the other hand, be arranged on the check valve unit 8 of discharging in the effluent road 3, by crooked the opening of pressure that is subjected at stream 3 side joints to come from pump chamber 1, on the 2nd spacer element 7b that is positioned at pump chamber 1 opposition side, check valve membrane 5 flexible major diameter spaces 19 are set downwards.

And, utilize the drive unit of piezoelectric actuator etc. to make diaphragm 12 vibrations, utilize the vibration of diaphragm 12 fluid to be sucked in the pump chamber 1 from suction side stream 2, by pump chamber 1 fluid of compression is discharged from discharging effluent road 3.When sucking, shown in Fig. 4 A, drive diaphragm 12 in the mode of leaving box body 9, at this moment, open the check valve membrane 5 that is communicated with the stream 2 of suction side, close simultaneously and discharge the check valve membrane 5 that effluent road 3 is communicated with, thereby can fluid be sucked in the pump chamber 1 from the stream 2 of suction side.When discharging, shown in Fig. 4 B, towards driving diaphragm 12 with the box body 9 tight directions that contact, at this moment, close the check valve membrane 5 that is communicated with suction side stream 2, simultaneously, open and discharge the check valve membrane 5 that effluent road 3 is communicated with, discharge the effluent road 3 thereby can fluid be discharged to from pump chamber 1.

As mentioned above, constitute the parts that are independent of box body 9, can after the safety check function of having confirmed check valve unit 8, again check valve unit 8 be installed on the box body 9, can improve the passing rate of processing of pump main body by making check valve unit 8.And, even, also can only change the check valve unit 8 of damaged because long-term the use waited under the situation that makes safety check generation damage.

Diaphragm 12 for example is made of sheetmetals such as brass sheet 11 and piezoelectric actuator 10.Piezoelectric actuator 10 is provided with the metallic conductor as silver on piezoelectric elements such as PZT element electrode forms.When on piezoelectric actuator 10, applying generating positive and negative voltage (for example commercial ac voltage), utilize piezoelectric actuator 10 counter-rotatings to drive diaphragm 12, carry out pumping action.

And the 1st and the

2nd spacer element

7a, 7b and the check valve membrane 5 of safety check framework 7 are for example formed by PC (polycarbonate (PC)) resin on the one hand, and on the other hand, box body 9 is for example formed by PPA (polyphtalamide) resin.

Adopt the present invention, compare with the example of above-mentioned prior art, the distance to check valve membrane 5 shortens above box body 9 below pump chamber 1, when fluid is inhaled into pump chamber 1, reduces from the volume of the fluid portion of pump chamber 1 to two check valve membrane 5.When fluid is inhaled into pump chamber 1, from the fluid portion volume of pump chamber 1 to two check valve membrane 5 is V, eliminating volume as the volume of discharging with respect to V is Δ V, when the internal pressure rising value with respect to the initial stage pressure P is Δ P, the relation that has Δ P=Δ V/ (V-Δ V) * P increases Δ P by reducing V.

Embodiment 2

It is identical that Fig. 5 A and Fig. 5 B represent that check valve unit 8 and the fluid of the suction side of fluid are discharged side check valve unit 8 shapes, and in the suction side with discharge side and on the contrary check valve unit 8 is installed to embodiment in the box body 9 up and down.

Identical with embodiment 1, form safety check framework 7 by the 1st spacer element 7a and the 2nd spacer element 7b, still, in the present embodiment, the 1st spacer element 7a and the 2nd spacer element 7b are formed the discoid of same thickness, same outer diameter as.Check valve membrane 5 is installed between the 1st spacer element 7a and the 2nd spacer element 7b, is flexible major diameter space 19 on the 1st spacer element 7a and check valve membrane 5 is set.And the mode that forms pump chamber 1 side with the 1st spacer element 7a side in the suction side is installed check valve unit 8, in the mode that the 2nd spacer element 7b forms pump chamber 1 side check valve unit 8 is installed discharging side.

Adopt this structure, owing to can make check valve unit 8 sharings that are located at the fluid suction side and discharge side, so can cut down finished cost.

Embodiment 3

The opposition side that Fig. 6 A and Fig. 6 B represent face to be set from diaphragm 12 is installed to embodiment the box body 9 with check valve unit 8.

Shown in Fig. 6 A and Fig. 6 B, safety check framework 7 is formed by the 1st spacer element 7a, the 2nd spacer element 7b and the 3rd spacer element 7c.The 3rd spacer element 7c is the same with the 1st spacer element 7a and the 2nd spacer element 7b, is made by the PC resin.

Check valve membrane 5 is installed between the 1st spacer element 7a and the 2nd spacer element 7b, the flexible space 19 of check valve membrane 5 is set in the 1st spacer element 7a side in suction side check valve unit 8, the flexible space 19 of check valve membrane 5 is set in the 2nd spacer element 7b side in the check valve unit 8 of discharging side.

In the present embodiment, owing to be to insert check valve unit 8, attach it in the safety check accommodating part 18 of box body 9, so do not take off the just replaceable check valve unit 8 of diaphragm 12 from the face that is provided with opposition side with the diaphragm 12 of box body 9.

Embodiment 4

Fig. 7 A and Fig. 7 B represent that the 9b of box body portion that the 9a of box body portion of diaphragm 12 is set and check valve unit 8 is installed is the embodiment who is made of separate part.

Shown in Fig. 7 A and Fig. 7 B, discoid box body 9 is to be made of independent part cartridge body 9a and the 9b of box body portion.The 9a of box body portion is formed circular, and its central authorities have hole portion 20.The 9b of box body portion is discoid, has lug boss 21 above it, by lug boss 21 is embedded in the hole portion 20 of the 9a of box body portion, makes 9b of box body portion and the 9a of box body portion form one.Diaphragm 12 is disposed on the 9a of box body portion, the edge that makes diaphragm 12 with contact above the 9a of box body portion in, check valve unit 8 is installed among the 9b of box body portion.

Diaphragm 12 is easy to because of external force produces damage, but adopts said structure, because the portion that is provided with of diaphragm 12 and the portion of setting of check valve unit 8 are separable, so the replacing of the replacing of diaphragm 12 and check valve unit 8 can be carried out respectively at an easy rate.Even, also can be used in the combination of same check valve unit 8, so can utilize the change of diaphragm 12 that pump characteristics is estimated at an easy rate owing to change diaphragm 12.

Below, for the installation of check valve unit 8 with box body 9, perhaps the installation of two 9a of box body portion, 9b describes.

Box body 9 is interference fit into by the bump 21 with the 9b of box body portion in the hole portion 20 of the 9a of box body portion and is mounted to one, and check valve unit 8 can be installed in the safety check accommodating part 18 of the 9b of box body portion by interference fit.For example, chimeric for hole portion 20 and lug boss 21 is under the situation of φ 16mm at the diameter of hole portion 20 and lug boss 21, the tolerance of hole portion 20 can be set at+0.018～0mm, the tolerance of lug boss 21 is set at 0.029～+ 0.018mm.

By adopting above-mentioned interference fit, when changing check valve unit 8 (or diaphragm 12), can be easy to box body 9 and check valve unit 8 (or 9a of box body portion and the 9b of box body portion) are separated.In addition, utilize the interference fit machining tolerance at an easy rate check valve unit 8 (or the 9b of box body portion) to be fixed on the box body 9 (or the 9a of box body portion), can utilize to be pressed into and guarantee tightness.

In addition, between box body 9 and check valve unit 8, perhaps, also can utilize the machining tolerance of transition fit or Spielpassung bonding or deposited fixing between the 9a of box body portion of separate part and the 9b of box body portion.

For example, be under the situation of φ 16mm at the diameter of hole portion 20 and lug boss 21, the tolerance of hole portion 20 can be set at+0.018～0mm, the tolerance of lug boss 21 is set at 0～0.018mm, simultaneously, after chimeric, can pass through bonding or deposited fixing box body 9a and the 9b of box body portion.Fig. 8 is illustrated in and uses the bonding example of binder between 9a of box body portion and the 9b of box body portion, and in same figure, 22 expression binders are coated with belly.

As mentioned above, by bonding or deposited, can guarantee the tightness of (or between the 9a of box body portion and the 9b of box body portion) between box body 9 and the check valve unit 8.

And then, on the outer circumferential face of the lug boss 21 of hole portion 20 inner peripheral surfaces of the 9a of box body portion and the 9b of box body portion, form female thread and external screw thread respectively, by a screw-thread fit is fixed up both on another.Equally, on the outer circumferential face of the inner peripheral surface of the safety check accommodating part 18 of the 9b of box body portion and check valve unit 8, form female thread and external screw thread respectively, by a screw-thread fit is fixed up both on another.

Under the above-mentioned situation fixing, can carry out fixing or separating of check valve unit 8 (or the 9b of box body portion) and box body 9 (or the 9a of box body portion) at an easy rate by screw-thread fit.

The various forms of check valve membrane

In the foregoing description 1～4, as the parts of realizing the safety check function, adopt check valve membrane 5, but the various forms of check valve membrane 5 below will be described.

The assembly department of the check valve membrane 5 in the check valve unit 8 shown in Fig. 9 presentation graphs 5A, the check valve membrane 5 that is made of film is formed band shape (rectangle), cross over configuration check valve membrane 5 in the mode of blocking pipeline 6 after, in position that pipeline 6 is crossed over respectively along with the deposited check valve membrane 5 of direction of the length direction quadrature of check valve membrane 5.Among the figure 14 is joining portion.

Under the state of opening, shown in Figure 10 A and 10B, open the edge part parallel with the length direction of check valve membrane 5, under closing state, shown in Figure 11 A and Figure 11 B, blind off a line 6.

When using above-mentioned banded check valve membrane 5, owing to only constitute check valve membrane 5 with the film of the bottom line size of necessity as safety check, so can save thin-film material.

Figure 12 represents to dispose the check valve membrane 5 that is formed with a pair of slit-shaped ventilating hole 13 that extends in parallel in the mode of blocking pipeline 6, around the deposited ventilating hole 13 that contains pipeline 6 in joining portion 14.

Figure 13 A and Figure 13 B represent the state that the ventilating hole 13 of check valve membrane shown in Figure 12 5 is opened, and Figure 14 A and Figure 14 B represent by blind off a line 6 state of check valve membrane 5.

In this case, owing to be free to set the size of check valve membrane 5, the processing ease during assembling depositedly also can carry out at an easy rate.

Figure 15 A and Figure 15 B represent to dispose in the mode of blocking pipeline 6 example of the check valve membrane 5 that is formed by rectangular film.Both sides at pipeline 6 form a pair of slit-shaped ventilating hole 13 that extends in parallel on check valve membrane 5, spread all over the ventilating hole 13 circular joining portion 14 of full week formation on every side.

Shown in Figure 15 B, when opening the ventilating hole 13 of check valve membrane 5, the part protuberance between a pair of ventilating hole 13 of check valve membrane 5 is horizontal semicircle tubular.

In this case, can utilize simple structure to form the safety check of reliable in action, the while does not need the Location accuracy of very high check valve membrane 5.

Shown in Figure 16 A, also can be on check valve membrane 5 form a slit-shaped ventilating hole 13 with the position of leaving pipeline 6.Ventilating hole 13 is parallel to the tangent direction of pipeline periphery and extends, and utilizes the circular joining portion 14 that spreads all over ventilating hole 13 full week settings that check valve membrane 5 is deposited on safety check framework 7.

Shown in Figure 16 B, when opening the ventilating hole 13 of check valve membrane 5, swell from ventilating hole 13 to the part of pipeline 6 of check valve membrane 5.

This shape even the distance of the opening edge of pipeline 6 and ventilating hole 13 shortens, also is not easy to leak.

And, shown in Figure 17 A, also can on check valve membrane 5, form a plurality of ventilating holes 13.In more detail, be to dispose the check valve membrane 5 that constitutes by rectangular film in the mode of blocking pipeline 6, on check valve membrane 5, there is the mode of many (for example three) to bore a hole out with the position of leaving pipeline 6 peripheries with the dispersed distribution that makes progress in week and is parallel to the slit ventilating hole 13 of pipeline 6 periphery tangent directions.Spread all over the circular joining portion of ventilating hole 13 full Zhou Liyong 14 deposited check valve membranes 5.

Figure 17 B represents the state that the ventilating hole 13 of check valve membrane 5 is opened.

In this case, it is that simultaneously, ventilating hole 13 is spacedly distributed on Zhou Fangxiang on center circle-shaped that joining portion 14 is positioned at pipeline 6, thereby, on check valve membrane 5, be difficult for producing fold.

In addition, be necessary to make the bight of the ventilating hole 13 of check valve membrane 5 to form curve-like, form under the situation of shape that rectangles etc. have the bight, when on check valve membrane 5, applying tension force, be easy to produce be full of cracks in the bight at ventilating hole 13.And,, then can suppress the breakage of the check valve membrane 5 that causes because of tension force if ventilating hole 13 forms circular or approximate with circle shape.That is, the shape that is formed at the ventilating hole on the check valve membrane is preferably continuous curve-like.

Figure 18 represents to dispose the check valve membrane 5 that is formed by rectangular film in the mode of blocking pipeline 6, but one side of the opening of check valve membrane 5 utilizes 14 deposited one-tenth roughly U font in joining portion near pipeline 6 configurations in the mode on every side that surrounds pipeline 6 except a limit.

Shown in Figure 19 A and Figure 19 B,, shown in Figure 20 A and Figure 20 B, utilize check valve membrane 5 to blind off a line 6 Yi Bian this check valve membrane 5 is only being opened.

In this case, can utilize simple shape and have the safety check function, difficult simultaneously the leakage.

In addition, also can dispose check valve membrane 5 in the mode of blocking pipeline 6 as shown in figure 21,, between joining portion 14, form ventilating hole along the periphery of the pipeline 6 deposited check valve membrane 5 of fixing a point.In the example of Figure 21, three positions on Zhou Fangxiang around the equally spaced deposited check valve membrane 5.

Shown in Figure 22 A and Figure 22 B, three limits of this check valve membrane 5 except that melt-coating part are swelled, are opened, and shown in Figure 23 A and Figure 23 B, pipeline 6 is closed.

Like this, when joining portion 14 is on the circumference that with pipeline 6 is the center, on check valve membrane 5, be difficult for producing fold.

And then, also can dispose formation roughly polygonal check valve membrane 5 as shown in figure 24 in the mode of blocking pipeline 6, engage each apex, between joining portion 14, form ventilating hole.

In example shown in Figure 24, as a polygonal example, the check valve membrane 5 that is formed by film forms triangle, and shown in Figure 25 A and Figure 25 B, rectilinear three limits are swelled, opened, and shown in Figure 26 A and Figure 26 B, pipeline 6 is closed.

In this case, because the joining portion 14 of check valve membrane 5 is being on the circumference at center with pipeline 6,,, roll so be difficult for taking place check valve membrane 5 because the limit of opening is a lineal shape so on check valve membrane 5, also be difficult for producing fold.

In addition, also can be shown in Figure 27 A, dispose in the mode of blocking pipeline 6 and to form the check valve membrane 5 be circular-arc or semicircle film otch and constitute the 5b of tabs portion, along the peripheral rounded deposited check valve membrane 5 of pipeline 6 and notch 5a, will be formed at the roughly semicircular tabs 5b of portion of notch 5a inboard as the valve film.

Shown in Figure 27 B, this check valve membrane 5 is swung with switch pipeline 6 as the 5b of tabs portion of valve body.

The simple structure of this example utilization does not only need very high positional accuracy, and can utilize the bending elasticity flow path 6 of valve film to carry out switch, thereby reduces the valve film because the pressure loss that tension force causes.

In addition, preferably shown in Figure 28 A and Figure 28 B, pipeline 6 is made of a plurality of (for example three) that separate with predetermined distance circular-arc opening portion 6a, forms the supporting portion 6b of the support tabs 5b of portion in the central authorities of a plurality of opening portion 6a.

Pipeline 6 is under the situation of shape that is Figure 27, when the 5b of tabs portion as valve body closes, be introduced into inside though block the central part of the 5b of tabs portion of pipeline 6 to pipeline 6, but under the situation of the shape of Figure 28 A and Figure 28 B and since with the position of the central part subtend of the 5b of tabs portion on form supporting portion 6b, thereby, even close the 5b of tabs portion, the central part of the 5b of tabs portion can not introduced to pipeline 6 inside yet, be difficult for producing the leakage of fluid, and can further increase internal pressure.

In addition, the shape of opening portion 6a is not limited only to circular-arc, also can be other shapes such as circle, ellipse.

In addition, the pipeline shape of Figure 28 A and Figure 28 B is applicable to the check valve membrane 5 that has illustrated.

And then, shown in Figure 29 A, the check valve membrane 5 that is made of film is formed banded (rectangle), cross over configuration check valve membrane 5 in the mode of blocking pipeline 6 after, can be only at the deposited check valve membrane 5 of the one-sided edge of check valve membrane 5 direction vertical with its length direction.

In this case, the rectangle tabs 5b of portion that is positioned at pipeline 6 tops plays valve body, and shown in Figure 29 B, the 5b of tabs portion swings with switch pipeline 6.

This example, structure are very simple, not only do not need very high Location accuracy, and owing to can utilize the bending elasticity flow path 6 of valve film to carry out switch, so can reduce the pressure loss that causes because of valve film tension force.

The various forms of check valve unit

Figure 30 is to form safety check framework 7 by the 1st and the

2nd spacer element

7a, 7b to structure shown in Figure 32, and simultaneously, the chimeric the 1st and the

2nd spacer element

7a, 7b clamp check valve membrane 5 and mutually combine between the 1st and the 2nd spacer element 7a, 7b.For the ventilating hole of check valve membrane 5, there is above-mentioned various forms, omitted at this.

For example, at the outer warp of the fitting projection of the internal diameter of the chimeric recess of the 1st spacer element 7a and the 2nd spacer element 7b is that the thickness of φ 4mm, check valve membrane 5 is under the situation of 0.002mm, if the id tolerance of the chimeric recess of the 1st spacer element 7a is set in+0.02mm～+ 0.01mm, the external diameter tolerance of the fitting projection of the 2nd spacer element 7b is set at-0.01～0.02mm, and then the 1st and the

2nd spacer element

7a, 7b can be bonded together at an easy rate by interference fit.

In addition, replace interference fit, also check valve membrane 5 can be clipped between the 1st spacer element 7a and the 2nd spacer element 7b and spread all over complete bonding allly the 1st spacer element 7a and the 2nd spacer element 7b.

In addition, to shown in Figure 35, on safety check framework 7, dispose the check valve membrane 5 that constitutes by film as Figure 33, check valve membrane 5 is deposited to the peripheral part of safety check framework 7, also can the safety check framework 7 of check valve membrane 5 be engaged reliably.In the drawings, 25 expression melt-coating parts.

And then, shown in Figure 36 to 38, constitute safety check framework 7 by the 1st spacer element 7a and the 2nd spacer element 7b, be clipped between the 1st spacer element 7a and the 2nd spacer element 7b, spread all over and full week the 1st spacer element 7a, the 2nd spacer element 7b and check valve membrane 5 threes are deposited over together constitute check valve membrane 5 by film.In this case and since be three layers deposited, so be difficult on check valve membrane 5 producing the deposition damage.

The manufacturing of piezoelectric pump

When making piezoelectric pump of the present invention, perforation forms ventilating hole 13 on film in advance, perhaps film is formed predetermined shape to form check valve membrane 5, simultaneously, on safety check framework 7, form the pipeline 6 that carries out switch by check valve membrane 5 by pressure difference, afterwards, dispose non-return in the mode of blocking pipeline 6

Valve film 5 forms one with safety check framework 7, so that form check valve unit 8, and then on the box body 9 between pump chamber 1 and suction side and the discharge effluent road 2,3 this check valve unit 8 is installed.This method can form ventilating hole 13 at an easy rate on film 4.

In addition, making check valve membrane 5 and safety check framework 7 form one, can carry out the perforation of ventilating hole 13 with after forming check valve unit 8.In this case, because the location when not needing check valve membrane 5 to install fully forms ventilating hole 13 so can go up in position.

And, as shown in figure 39, on film 4, form ventilating hole 13 by excimer laser.

In the example of Figure 39, owing to form safety check framework 7 by the 1st spacer element 7a and the 2nd spacer element 7b, and under the situation of using laser such as excimer laser, utilize for example transparent PC resin to form the 1st spacer element 7a, for example utilizing, black PC resin forms the 2nd spacer element 7b.Before processing ventilating hole 13, between the 1st spacer element 7a and the 2nd spacer element 7b,

clamp film

4,14 places carry out deposited with assembling check valve unit 8 at the joining portion simultaneously.And from laser device 28 irradiating lasers 27, and perforation forms ventilating hole 13.

When laser beam perforations such as utilizing excimer laser forms ventilating hole 13, can not produce because of processing the fold that heat causes, can carry out micro machining to film 4.And, be difficult for the residual damage (laser vestige) that causes because of following process on safety check framework 7.

In addition, as shown in figure 40, on safety check framework 7, dispose rubber-like film 4 in the mode of blocking pipeline 6, as shown in figure 41, load glass 16 thereon, film 4 be crimped on the safety check framework 7 simultaneously on one side by glass 16, on one side irradiating laser on melt-coating part 25, carry out deposited.

Like this, if keep film 4 closely contact, and with safety check framework 7 and film 4 deposited being integral with safety check framework 7, then can be reliable and wrinkle resistant folding carry out deposited, the raising tightness.

And then, as shown in figure 42, when using laser cladding, utilize curtain-shaped cover member 17 simultaneously at the position irradiating laser 27 of regulation with opening portions such as apertures, the 1st spacer element 7a, film 4 and the 2nd spacer element 7b are bonded into one.In the example of Figure 42, overlapping two curtain-shaped cover members 17 with opening portion, and be installed on the laser device 28 while irradiating laser 27 on the circle regulation position of the 1st spacer element 7a, film 4 and the 2nd spacer element 7b.In the drawings, 25 expression melt-coating parts.Adopt YAG laser as laser device 28, an example of the illuminate condition of laser is shown in Table 1.

Table 1

	Allyl	Polycarbonate (PC)
	Allyl	Polycarbonate (PC)	Energy	0.56J/ emission	0.24J/ emission
The emission number	5 emissions	5 emissions	Energy	0.56J/ emission	0.24J/ emission

As mentioned above, carried out be easy to alleviate the influence of deposited heat under the deposited situation full week simultaneously.

Embodiment

Utilize following method to make diaphragm pump.Figure 43 A represents the outward appearance of diaphragm pump, and Figure 43 B is the exploded perspective view of diaphragm.

The driving voltage of this diaphragm pump, driver frequency, pressure maximum, flow are as follows

Driving voltage :-100,400V

Driver frequency: 100Hz (rectangular wave)

Pressure maximum: 450hPa

Flow: 85ml/min

Diaphragm pump is made of discoid diaphragm 12, discoid box body 9 and check valve unit 8.Diaphragm 12 mountings above box body 9, with top and fixing to box body 9 of the periphery of diaphragm 12, are formed pump chamber at diaphragm 12 with between above the box body 9.

Box body 9 is made of 9a of box body portion and the 9b of box body portion as separate part.The 9a of box body portion is formed circular, and central authorities have hole portion 20.9b is in the form of annular discs in box body portion, has bump 21 in the above, by bump 21 is embedded in the hole portion 20 of the 9a of box body portion, makes 9b of box body portion and the 9a of box body portion form one.Configuration diaphragm 12 on the 9a of box body portion, with the periphery of diaphragm 12 bond to the 9a of box body portion above.On the 9b of box body portion, safety check accommodating part 18 is set, check valve unit 8 is held and is bonded on this safety check accommodating part 18.

Safety check framework 7 is formed by the 1st spacer element 7a and the 2nd spacer element 7b, and the 1st spacer element 7a and the 2nd spacer element 7b are formed the discoid of same thickness, same outer diameter as.In addition, the 1st spacer element 7a is formed by transparent PC resin, and the 2nd spacer element 7b is formed by black PC resin, and check valve membrane 5 is formed by transparent PC resin.Check valve membrane 5 is installed between the 1st spacer element 7a and the 2nd spacer element 7b, and by the deposited check valve unit 8 that is assembled into.

Diaphragm 12 is made of sheetmetal 11 and piezoelectric actuated 10, and piezoelectric actuator 10 is the PZT element, and diameter is that  20mm, thickness are 0.25mm.Sheetmetal 11 is a brass sheet, and diameter is  20.2mm, and thickness is 0.05mm.The electrode of PZT element is a silver, and diameter is  18mm.

Check valve membrane 5 is a polycarbonate film, and thickness is 0.002mm.This check valve membrane 5 is clipped between the 1st spacer element 7a and the 2nd spacer element 7b of safety check framework 7, by with check valve membrane the 5, the 1st spacer element 7a and the 2nd spacer element 7b three deposited being integral in melt-coating part 25 places, be assembled into check valve unit 8.

Shown in Figure 44 A, the height of check valve unit 8 is 1.6mm, and the outer warp of check valve unit 8 is  5.5mm, and chimeric tolerance for example is-0.004～0.012mm.The diameter in the space 19 of check valve membrane 5 bendings shown in Figure 44 B, is  2.8mm, and the diameter of pipeline 6 is  1mm.This check valve unit 8 adopts the suction side and discharges the identical shape of side, and installs on the contrary up and down.Figure 44 c represents the action of safety check, and the length of ventilating hole 13 is 1mm, a pair of ventilating hole 13 be spaced apart 2mm, the width of ventilating hole 13 is 0.3mm.

The 9a of box body portion of box body 9 is formed by the PPA resin, and the 9b of box body portion is formed by transparent propene base resin.The outer warp of fit 9 the 9a of box body portion is  22mm, and internal diameter is  13mm, and chimeric tolerance for example is+0.018～0mm, and thickness is 1mm.The outer warp of the 9b of box body portion of box body 9 is  15mm, and thickness is 2mm.The outer warp of the bump 21 of the 9b of box body portion is  13mm, and chimeric tolerance for example is-0.006～0.017mm.The internal diameter of safety check accommodating part 18 is  5.5mm, and chimeric tolerance for example is+0.012～0mm, and the degree of depth is 1.6mm.

Utilize YAG laser at melt-coating part 25 places with the 1st spacer element 7a, the 2nd spacer element 7b and check valve membrane 5, shown in Figure 45 A, spread all over deposited being integral of full week.And shown in Figure 45 B, irradiation excimer laser carries out the perforation of ventilating hole 13.

Claims

1. a pump is the volume-variation that makes pump chamber by the effect that utilizes piezoelectric actuator, and with the fluid suction pump piezoelectric pump indoor or that fluid is discharged from pump chamber,

It is characterized in that, comprise: have the suction side that is communicated with pump chamber and discharge the effluent road and be respectively formed at pump chamber with suction side and discharge effluent road between the box body of the 1st and the 2nd safety check accommodation section, with by the check valve membrane that forms with film and have the 1st and the 2nd check valve unit of utilizing the safety check framework of this check valve membrane by the pipeline of pressure difference switch to constitute, the the 1st and the 2nd check valve unit is installed in respectively on the described the 1st and the 2nd safety check accommodation section with freely loading and unloading, each the described the 1st and the 2nd check valve unit can be disassembled from the described the 1st and the 2nd safety check accommodation section individually.

2. pump according to claim 1, the diaphragm that piezoelectric actuator and sheetmetal are formed by stacking are packed in the box body, form pump chamber between diaphragm and box body.

3. pump according to claim 1 is characterized in that, the 1st check valve unit is identical with the shape of the 2nd check valve unit, and is installed in the box body on the contrary up and down.

4. pump according to claim 2 is characterized in that, the opposite side that face is set from diaphragm is installed to the 1st and the 2nd check valve unit the box body.

5. pump according to claim 2 is characterized in that, box body is to be that individual components and the 2nd box body portion that the 1st and the 2nd check valve unit is installed constitute by the 1st box body portion that diaphragm is set with respect to the 1st box body portion.

6. pump according to claim 5 is characterized in that, between box body and the 1st and the 2nd check valve unit, and between the 1st and the 2nd box body portion at least one be embedded structure, adopts interference fit by being pressed into this telescoping part to be installed.

7. pump according to claim 5, it is characterized in that, between box body and the 1st and the 2nd check valve unit, and between the 1st and the 2nd box body portion at least one be embedded structure, adopts transition fit or Spielpassung, by bonding or deposited this telescoping part of installing.

8. pump according to claim 5 is characterized in that, between box body and the 1st and the 2nd check valve unit, and between the 1st and the 2nd box body portion at least one be embedded structure, forms worm tooth to carry out screw-thread fit on this telescoping part.

9. pump according to claim 1 is characterized in that, disposes check valve membrane in the mode of the pipeline of blocking the safety check framework, and check valve membrane is joined on the safety check framework.

10. pump according to claim 9 is characterized in that, disposes the check valve membrane that is formed with vent in the mode of the pipeline of blocking the safety check framework, and the check valve membrane that will comprise around the ventilating hole of pipeline joins on the safety check framework.

11. pump according to claim 10 is characterized in that, forms 2 ventilating holes in the mode that is positioned at the pipeline both sides.

12. pump according to claim 10 is characterized in that, is leaving on the position of pipeline, forms a ventilating hole that is parallel to pipeline periphery tangent line.

13. pump according to claim 10 is characterized in that, is leaving on the position of pipeline, along circumferentially forming many ventilating holes that are parallel to pipeline periphery tangent line.

14. pump according to claim 10 is characterized in that, is formed at the continuous curve-like that is shaped as of ventilating hole on the check valve membrane.

15. pump according to claim 9 is characterized in that, disposes check valve membrane in the mode of blocking pipeline, and the both sides of clamping pipeline are joined on the safety check framework.

16. pump according to claim 9 is characterized in that, but disposes the check valve membrane on the limit with an opening in the mode of blocking pipeline, but will join on the safety check framework except that around the stream the limit of described opening.

17. pump according to claim 9 is characterized in that, disposes check valve membrane in the mode of blocking pipeline, along the periphery of pipeline check valve membrane is fixed a point to join on the safety check framework, and form ventilating hole between the joining portion.

18. pump according to claim 17 is characterized in that, disposes the polygonal check valve membrane in the mode of blocking pipeline, and polygonal each angular vertex is joined on the safety check framework.

19. pump according to claim 9 is characterized in that, check valve membrane has a part of cutting film and the tabs portion that forms, and around tabs portion check valve membrane is joined on the safety check framework.

20. pump according to claim 19 is characterized in that, a plurality of opening portions that utilization separates with predetermined distance form the pipeline by tabs portion switch, form the supporting portion of support tabs portion in the central authorities of a plurality of opening portions.

21. pump according to claim 9 is characterized in that, check valve membrane is formed band shape, and the one-sided edge of check valve membrane is engaged with the safety check framework with the direction of its length direction quadrature.

22. pump according to claim 9 is characterized in that, forms the safety check framework with the 1st and the 2nd spacer element, makes the 1st and the 2nd spacing body form embedded structure simultaneously, clamps check valve membrane and engage between the 1st and the 2nd spacer element.

23. pump according to claim 22 is characterized in that, bonding the 1st spacer element and the 2nd spacer element.

24. pump according to claim 9 is characterized in that, with check valve membrane with the safety check framework is deposited is integral.

25. pump according to claim 9 is characterized in that, utilizes the 1st and the 2nd spacer element to form the safety check framework, clamps check valve membrane simultaneously between the 1st and the 2nd spacer element, with the 1st and the 2nd spacer element and check valve membrane is deposited is integral.

26. pump manufacture method, it is characterized in that, on the check valve membrane that forms by film, form ventilating hole, on the safety check framework, form pipeline, mode with the pipeline of blocking the safety check framework disposes check valve membrane, check valve membrane around the ventilating hole is joined on the safety check framework, and constitute check valve unit by check valve membrane and safety check framework, utilize check valve membrane to open and close pipeline by pressure difference, this check valve unit is installed in the box body, diaphragm is installed on the box body top, covers check valve unit.

27. pump manufacture method according to claim 26 is characterized in that, utilizes excimer laser to form ventilating hole on film.

28. pump manufacture method, it is characterized in that, on the safety check framework, form pipeline, mode with the pipeline of blocking the safety check framework disposes check valve membrane, around pipeline check valve membrane is joined on the safety check framework, forms ventilating hole between joining portion and pipeline on check valve membrane, utilize check valve membrane to open and close pipeline by pressure difference, check valve unit is installed in the box body, diaphragm is installed on the box body top, cover check valve unit.

29. pump manufacture method according to claim 28 is characterized in that, utilizes excimer laser to form ventilating hole on film.

30. pump manufacture method, it is characterized in that, on the safety check framework, form pipeline, mode with the pipeline of blocking the safety check framework disposes check valve membrane, utilize glass crimping check valve membrane and safety check framework, irradiating laser is deposited to carry out simultaneously, constitute check valve unit by check valve membrane and safety check framework, utilize check valve membrane to open and close pipeline by pressure difference, and check valve unit is installed in the box body with freely loading and unloading, and can disassemble individually from box body, diaphragm is installed on the box body top, cover check valve unit.

31. pump manufacture method according to claim 30 is characterized in that, when utilizing laser cladding, utilization has the deposited check valve membrane of shutter while of opening portion and the regulation position of safety check framework.