SU1252552A1 - Rotor of radial turbomolecular vacuum pump - Google Patents

Rotor of radial turbomolecular vacuum pump Download PDF

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Publication number
SU1252552A1
SU1252552A1 SU843748773A SU3748773A SU1252552A1 SU 1252552 A1 SU1252552 A1 SU 1252552A1 SU 843748773 A SU843748773 A SU 843748773A SU 3748773 A SU3748773 A SU 3748773A SU 1252552 A1 SU1252552 A1 SU 1252552A1
Authority
SU
USSR - Soviet Union
Prior art keywords
rotor
vacuum pump
turbomolecular vacuum
radial
radial turbomolecular
Prior art date
Application number
SU843748773A
Other languages
Russian (ru)
Inventor
Галина Александровна Гарбуз
Вадим Павлович Иванов
Original Assignee
Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского filed Critical Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского
Priority to SU843748773A priority Critical patent/SU1252552A1/en
Application granted granted Critical
Publication of SU1252552A1 publication Critical patent/SU1252552A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

1one

Изобретение относитс  к вакуумной технике, а именно к конструкции ротора турбомолекул рного насоса.The invention relates to vacuum technology, in particular, to the rotor design of a turbomolecular pump.

Целью изобретени   вл етс  повышение производительности и степени сжати  насоса.The aim of the invention is to improve the performance and compression ratio of the pump.

На фиг. 1 представлен турбомолек л рнГ)1Й вакуумньш насос с предлагаемым ротором, продольный разрез; на фиг. 2 - разрез Л-А на фиг. 1j на фиг. 3 - разрез Б-Б на фиг. 1.FIG. Figure 1 shows the turbo-wheel (LRG) 1Y vacuum pump with the proposed rotor, longitudinal section; in fig. 2 is a section A-A in FIG. 1j in FIG. 3 shows a section BB in FIG. one.

Ротор радиального турбомолекул рного насоса содержит вал 1 и установленную на нем ступицу 2 с лопатками 3, которые выполнены с проА- А ра: вернуггюThe rotor of the radial turbomolecular pump contains the shaft 1 and the hub 2 mounted on it with the blades 3, which are made with proA-Ara: returnable

- -

252552. 1252552. 1

дольным изгибом и обращены вогнутой стороной навстречу потоку.longitudinal bend and facing the concave side towards the flow.

Ротор работает следующим образом.The rotor operates as follows.

При вращении ротора молекулы откачиваемого газа, соудар  сь с ло10During the rotation of the rotor of the pumped gas molecule, collide with 10

1515

патками 3, получают импульс в направлении откачки, причем одновременно они получают импульс и в направлении к середине лопаток благодар  их серповидной конфигурации. В результате уменьшаетс  веро тность обратного пролета молекул в зоне торцовых зазоров, т.е. на концах лопаток , что повышает производительность и степень сжати  насоса.The packs 3 receive a pulse in the direction of pumping, and at the same time they receive a pulse in the direction towards the middle of the blades due to their sickle-shaped configuration. As a result, the likelihood of the molecules flying backwards in the zone of the end gaps, i.e. at the ends of the blades, which improves the performance and degree of compression of the pump.

6-66-6

VV

Фи&.3Fi & .3

Редактор Л.ШандорEditor L.Shandor

Составитель В.Кр ковкин Техред Э.ЧижмарCompiled by V.Kr Kovkin Tehred E.Chizhmar

Заказ 8Order 8

Тираж 586ПодписноеCirculation 586 Subscription

ВНИИПИ Государственного комитета СССРVNIIPI USSR State Committee

по делам изобретений и открытий 113035, Москва, Ж-35, Раушска  наб., д. 4/5for inventions and discoveries 113035, Moscow, Zh-35, Raushsk nab., 4/5

Проичводстр)енно-11плнграфическое предпри тие, г. Ужгород, ул. Проектна  4Proichvodstroenno-11plngraficheskoe enterprise, Uzhgorod, st. Project 4

Корректор. Е. СирохманCorrector. E. Sirohman

Claims (1)

РОТОР РАДИАЛЬНОГО ТУРБОМОЛЕКУЛЯРНОГО ВАКУУМНОГО НАСОСА, содержащий вал и установленную на нем ступицу с лопатками, отличающийся тем, что, с целью повышения производительности и степени сжатия насоса, лопатки выполнены с продольным изгибом и обращены вогнутой стороной навстречу потоку.ROTOR OF A RADIAL TURBOMOLECULAR VACUUM PUMP containing a shaft and a hub mounted on it with vanes, characterized in that, in order to increase the productivity and degree of compression of the pump, the vanes are made with a longitudinal bend and face the concave side facing the flow. Фиг.1Figure 1
SU843748773A 1984-06-01 1984-06-01 Rotor of radial turbomolecular vacuum pump SU1252552A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU843748773A SU1252552A1 (en) 1984-06-01 1984-06-01 Rotor of radial turbomolecular vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU843748773A SU1252552A1 (en) 1984-06-01 1984-06-01 Rotor of radial turbomolecular vacuum pump

Publications (1)

Publication Number Publication Date
SU1252552A1 true SU1252552A1 (en) 1986-08-23

Family

ID=21122094

Family Applications (1)

Application Number Title Priority Date Filing Date
SU843748773A SU1252552A1 (en) 1984-06-01 1984-06-01 Rotor of radial turbomolecular vacuum pump

Country Status (1)

Country Link
SU (1) SU1252552A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0829645A3 (en) * 1996-09-12 1998-11-11 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
US7011491B2 (en) 2000-02-01 2006-03-14 Leybold Vakuum Gmbh Friction vacuum pump
CN112160919A (en) * 2020-09-28 2021-01-01 东北大学 Turbo molecular pump and composite molecular pump comprising same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0829645A3 (en) * 1996-09-12 1998-11-11 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
US7011491B2 (en) 2000-02-01 2006-03-14 Leybold Vakuum Gmbh Friction vacuum pump
CN112160919A (en) * 2020-09-28 2021-01-01 东北大学 Turbo molecular pump and composite molecular pump comprising same

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