EP1243796A2 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP1243796A2 EP1243796A2 EP02005166A EP02005166A EP1243796A2 EP 1243796 A2 EP1243796 A2 EP 1243796A2 EP 02005166 A EP02005166 A EP 02005166A EP 02005166 A EP02005166 A EP 02005166A EP 1243796 A2 EP1243796 A2 EP 1243796A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- gas
- vacuum pump
- stage
- side channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts
Definitions
- the invention relates to a vacuum pump for conveying gases and for generating of high vacuum according to the preamble of the first claim.
- At least two vacuum pumps have been used to generate high vacuum different types and working methods combined to form a pumping station.
- pumping stations consisting of a turbomolecular pump have proven successful as a high vacuum pump and a rotary vane pump, which against Ejects atmospheric pressure.
- Pumping stations consisting of at least two vacuum pumps, which are used to achieve the required vacuum parameters, such as Pressure ratio and pumping speed, are necessary, have the disadvantage that they are complex and take up a lot of space. Every pump requires one own drive system with power supply, monitoring and control as well its own storage system. Connection lines between the pumps with valves and control devices increase the effort.
- the invention has for its object to develop a vacuum pump which covers the entire pressure range from atmospheric pressure to high vacuum pressure of approximately 10 -4 mbar and less.
- the pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations which consist of several pumps, are avoided. Furthermore, it should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use.
- a reliable and safe mode of operation is one of the basic requirements.
- Another goal is lubricant-free operation on the high vacuum side.
- a vacuum pump is presented, which in compact design the entire pressure range from atmospheric pressure to High vacuum area covers. Due to the parallel arrangement of the gas friction pumps on the high vacuum side, a double-flow suction area is formed, the one enables high pumping speed. This is sucked in within the gas friction pump Gas compresses sufficiently so that the subsequent pump only has one flow needs to be. This combination along with the characteristic that the two Gas flows of the gas friction pump merged within this and the Intake chamber are fed to the subsequent stage, which enables the compact Construction and significantly reduces the size and design effort.
- the present arrangement allows the shaft bearings on both Attaching ends of the rotor results in a stable bearing, with the bearing small diameter can be used, which is a problem Allow operation at high speeds.
- the bearings are powered by the gas friction pump separated from the high vacuum side, which has the advantage that the high vacuum side can be considered lubricant-free.
- the structural arrangement and the mode of operation offer the gas friction pump as Train Holweck pump. This is particularly suitable in a confined space to develop a maximum pressure ratio. Due to the double flow arrangement reaches the required pumping speed.
- a side channel pump is advantageously used for the subsequent pump. This is particularly suitable for that of the parallel gas friction pumps compress the expelled gas to atmospheric pressure. If there is a large amount of gas, bypassing the last stages facing atmospheric pressure, an intermediate stage directly connected to the gas discharge flange via a connecting line become. The large amounts of gas then do not have to go through the geometric Smaller sized amplifiers are pumped, which leads to long pumping times Episode. With smaller amounts of gas, the connecting line is replaced by a pressure relief valve closed and the compression up to atmospheric pressure takes place over the last pump stages. This measure is not based on the example here a side channel pump, but can be limited to all others, after higher Pressures emitting multi-stage pumps can be applied.
- a big advantage for the side channel pump is that its stator elements are made of undivided washers, as mentioned in claim 5.
- This crucial one The disadvantage of side channel pumps is one-piece by the inventive Stator disks avoided.
- the use of undivided stator elements is only possible, however, if the rotor elements, as described in claim 6, with Clamping rings are attached to the rotor, because only in this way can rotor and stator elements assembled one after the other and optimal axial clearances are observed.
- the pump housing 1 with intake flange 2 and gas discharge flange 3 are the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the side channel pump 8 housed.
- the rotor elements 10, 11a, 11b and 13 of the two pumps are located on the common shaft 4. This is in the centered two bearings 9a and 9b.
- the bearing 9a is in the area of Atmospheric pressure and the bearing 9b in the area of the fore-vacuum pressure.
- the drive arrangement 5 is also located in the area.
- the rotor elements of the double-flow Holweck pump consist of a support ring 10, on which cylindrical Components 11a and 11b for the two parallel pump stages are housed. Together with the stator elements 12a and 12b, which are designed as spiral grooves surround the cylindrical rotor elements 11a and 11b, they each form two two-stage Holweckpumpen.
- the side channel pump consists of the one-piece rotor disks 13, which with Clamping rings 14 are attached to the rotor 4.
- the stator components are located in between 15 with the delivery channels 16.
- the gas is pumped according to the arrows in the illustration.
- the gas is pumped from the suction area 22 through the parallel Holweck stages 6 and 7, each consisting of two pump stages connected in series 11a / 12a and 11b / 12b exist in the discharge areas 23 and 24 promoted.
- the gas flows merged into the discharge space 25 of the gas friction pump.
- the gas flow passes from the discharge space 25 into the intake space 27 of the side channel pump.
- the gas is pumped in several stages, which are connected to one another via channels 20, compressed to atmospheric pressure and supplied to the gas discharge flange 3 via the discharge chamber 29. From one An intermediate stage 30 of the side channel pump introduces a connecting line 30 Pressure relief valve 31 directly to the gas discharge flange 3.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
Die Erfindung betrifft eine Vakuumpumpe zur Förderung von Gasen und zur Erzeugung von Hochvakuum nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a vacuum pump for conveying gases and for generating of high vacuum according to the preamble of the first claim.
Zur Erzeugung von Hochvakuum sind Kombinationen von verschiedenen Typen von Vakuumpumpen notwendig, da der weite Druckbereich zwischen Atmosphärendruck und ca. 10-4 mbar oder kleiner mehrere Strömungsbereiche umfaßt, in denen die physikalischen Eigenschaften von Zuständen und Strömungen der Gase jeweils anderen Gesetzen unterworfen sind.Combinations of different types of vacuum pumps are necessary to generate high vacuum, since the wide pressure range between atmospheric pressure and approx. 10 -4 mbar or less comprises several flow ranges in which the physical properties of states and flows of the gases are each subject to different laws.
Seither wurden zur Erzeugung von Hochvakuum mindestens zwei Vakuumpumpen unterschiedlicher Bauart und Arbeitsweise zu einem Pumpstand zusammengefügt. Bewährt haben sich zum Beispiel Pumpstände, bestehend aus einer Turbomolekularpumpe als Hochvakuumpumpe und einer Drehschieberpumpe, welche gegen Atmosphärendruck ausstößt. Pumpstände, bestehend aus mindestens zwei Vakuumpumpen, welche zum Erzielen der geforderten vakuumtechnischen Größen, wie Druckverhältnis und Saugvermögen, notwendig sind, weisen den Nachteil auf, dass sie aufwendig sind und einen großen Platzbedarf haben. Jede Pumpe erfordert ein eigenes Antriebssystem mit Stromversorgung, -überwachung und -regelung sowie ein eigenes Lagersystem. Verbindungsleitungen zwischen den Pumpen mit Ventilen und Regeleinrichtungen vergrößern den Aufwand.Since then, at least two vacuum pumps have been used to generate high vacuum different types and working methods combined to form a pumping station. For example, pumping stations consisting of a turbomolecular pump have proven successful as a high vacuum pump and a rotary vane pump, which against Ejects atmospheric pressure. Pumping stations, consisting of at least two vacuum pumps, which are used to achieve the required vacuum parameters, such as Pressure ratio and pumping speed, are necessary, have the disadvantage that they are complex and take up a lot of space. Every pump requires one own drive system with power supply, monitoring and control as well its own storage system. Connection lines between the pumps with valves and control devices increase the effort.
Der Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe zu entwickeln, welche den gesamten Druckbereich von Atmosphärendruck bis Hochvakuumdruck von ca. 10-4 mbar und kleiner umfaßt. Die Pumpe soll aus einem Stück bestehen und einen kompakten Aufbau aufweisen, so dass die oben beschriebenen Nachteile, welche Pumpständen anhaften, die aus mehreren Pumpen bestehen, vermieden werden. Weiterhin soll sie ein ausreichend hohes Druckverhältnis und Saugvermögen aufweisen, um den Anforderungen im praktischen Einsatz gerecht zu werden. Eine zu verlässige und sichere Betriebsweise ist eine der Grundvoraussetzungen. Als weiteres Ziel wird ein schmiermittelfreier Betrieb auf der Hochvakuumseite angestrebt.The invention has for its object to develop a vacuum pump which covers the entire pressure range from atmospheric pressure to high vacuum pressure of approximately 10 -4 mbar and less. The pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations which consist of several pumps, are avoided. Furthermore, it should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use. A reliable and safe mode of operation is one of the basic requirements. Another goal is lubricant-free operation on the high vacuum side.
Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 - 9 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characterizing features of the first claim solved. Claims 2-9 represent further embodiments of the invention.
Mit der erfindungsgemäßen Anordnung wird eine Vakuumpumpe vorgestellt, die in kompakter Bauweise den gesamten Druckbereich von Atmosphärendruck bis in den Hochvakuumbereich abdeckt. Durch die parallele Anordnung der Gasreibungspumpen auf der Hochvakuumseite wird ein zweiflutiger Ansaugbereich gebildet, der ein hohes Saugvermögen ermöglicht. Innerhalb der Gasreibungspumpe wird das angesaugte Gas ausreichend verdichtet, so dass die nachfolgende Pumpe nur noch einflutig zu sein braucht. Diese Kombination zusammen mit dem Merkmal, dass die beiden Gasströme der Gasreibungspumpe innerhalb dieser zusammengeführt und dem Ansaugraum der nachfolgenden Stufe zugeführt werden, ermöglicht die kompakte Bauweise und reduziert die Baugröße und den konstruktiven Aufwand erheblich. Dadurch, dass die vorliegende Anordnung es ermöglicht, die Wellenlager an beiden Enden des Rotors anzubringen, ergibt sich eine stabile Lagerung, bei der Lager mit geringem Durchmesser eingesetzt werden können, welche einen problemlosen Betrieb bei hohen Drehzahlen erlauben. Außerdem sind die Lager durch die Gasreibungspumpe von der Hochvakuumseite getrennt, was den Vorteil mit sich bringt, dass die Hochvakuumseite als schmiermittelfrei angesehen werden kann.With the arrangement according to the invention, a vacuum pump is presented, which in compact design the entire pressure range from atmospheric pressure to High vacuum area covers. Due to the parallel arrangement of the gas friction pumps on the high vacuum side, a double-flow suction area is formed, the one enables high pumping speed. This is sucked in within the gas friction pump Gas compresses sufficiently so that the subsequent pump only has one flow needs to be. This combination along with the characteristic that the two Gas flows of the gas friction pump merged within this and the Intake chamber are fed to the subsequent stage, which enables the compact Construction and significantly reduces the size and design effort. The fact that the present arrangement allows the shaft bearings on both Attaching ends of the rotor results in a stable bearing, with the bearing small diameter can be used, which is a problem Allow operation at high speeds. In addition, the bearings are powered by the gas friction pump separated from the high vacuum side, which has the advantage that the high vacuum side can be considered lubricant-free.
Die bauliche Anordnung und die Betriebsweise bieten an, die Gasreibungspumpe als Holweckpumpe auszubilden. Diese eignet sich besonders dazu, auf engem Raum ein maximales Druckverhältnis auszubilden. Durch die zweiflutige Anordnung wird das geforderte Saugvermögen erreicht.The structural arrangement and the mode of operation offer the gas friction pump as Train Holweck pump. This is particularly suitable in a confined space to develop a maximum pressure ratio. Due to the double flow arrangement reaches the required pumping speed.
Für die nachfolgende Pumpe wird vorteilhafterweise eine Seitenkanalpumpe verwendet. Diese eignet sich besonders dazu, dass von den parallelen Gasreibungspumpen ausgestoßene Gas bis Atmosphärendruck zu verdichten. Bei hohem Gasanfall kann unter Umgehung der letzten, dem Atmosphärendruck zugewandten Stufen eine Zwischenstufe direkt an den Gasausstoßflansch über eine Verbindungsleitung angeschlossen werden. Die großen Gasmengen müssen dann nicht durch die geometrisch kleiner dimensionierten Endstufen gepumpt werden, was lange Pumpzeiten zur Folge hätte. Bei geringeren Gasmengen wird die Verbindungsleitung durch ein Überdruckventil geschlossen und die Verdichtung bis zum Atmosphärendruck erfolgt über die letzten Pumpstufen. Diese Maßnahme ist nicht auf das hier vorliegende Beispiel einer Seitenkanalpumpe beschränkt, sondern kann auf alle anderen, nach höheren Drücken hin ausstoßenden mehrstufigen Pumpen angewandt werden.A side channel pump is advantageously used for the subsequent pump. This is particularly suitable for that of the parallel gas friction pumps compress the expelled gas to atmospheric pressure. If there is a large amount of gas, bypassing the last stages facing atmospheric pressure, an intermediate stage directly connected to the gas discharge flange via a connecting line become. The large amounts of gas then do not have to go through the geometric Smaller sized amplifiers are pumped, which leads to long pumping times Episode. With smaller amounts of gas, the connecting line is replaced by a pressure relief valve closed and the compression up to atmospheric pressure takes place over the last pump stages. This measure is not based on the example here a side channel pump, but can be limited to all others, after higher Pressures emitting multi-stage pumps can be applied.
Ein großer Vorteil für die Seitenkanalpumpe ist es, dass deren Statorelemente aus
ungeteilten Scheiben bestehen, wie in Anspruch 5 erwähnt. Die übliche Bauweise,
bei der geteilte Scheiben zwischen die Rotorscheiben montiert werden, hat zur Folge,
dass durch die entstehenden Spalte Rückströmungen ermöglicht werden, welche
Verluste darstellen und das Druckverhältnis erheblich vermindern. Dieser entscheidende
Nachteil von Seitenkanalpumpen wird durch die erfindungsgemäßen einstückigen
Statorscheiben vermieden. Die Verwendung von ungeteilten Statorelementen
ist jedoch nur möglich, wenn die Rotorelemente, wie in Anspruch 6 beschrieben, mit
Klemmringen auf dem Rotor befestigt werden, denn nur so können Rotor- und Statorelemente
nacheinander montiert und optimale Axialspiele eingehalten werden.A big advantage for the side channel pump is that its stator elements are made of
undivided washers, as mentioned in
Anhand der einzigen Abbildung soll die Erfindung näher erläutert werden. Bei diesem Beispiel ist die Gasreibungspumpe als Holweckpumpe und die nachfolgende Pumpe als Seitenkanalpumpe ausgebildet.The invention is to be explained in more detail with the aid of the single figure. With this An example is the gas friction pump as a Holweck pump and the subsequent pump designed as a side channel pump.
In dem Pumpengehäuse 1 mit Ansaugflansch 2 und Gasausstoßflansch 3 sind die
beiden parallelen Stufen der Gasreibungspumpe nach der Bauart von Holweck 6 und
7 und die Seitenkanalpumpe 8 untergebracht. Die Rotorelemente 10, 11a, 11b und
13 der beiden Pumpen befinden sich auf der gemeinsamen Welle 4. Diese ist in den
beiden Lagern 9a und 9b zentriert. Dabei befindet sich das Lager 9a im Bereich des
Atmosphärendruckes und das Lager 9b im Bereich des Vorvakuumdruckes. In diesem
Bereich befindet sich auch die Antriebsanordnung 5. Die Rotorelemente der
zweiflutigen Holweckpumpe bestehen aus einem Tragring 10, auf welchem zylindrische
Bauteile 11a und 11b für die beiden parallelen Pumpstufen untergebracht sind.
Zusammen mit den Statorelementen 12a und 12b, welche als Spiralrillen ausgebildet
die zylindrischen Rotorelemente 11a und 11b umgeben, bilden sie jeweils zwei zweistufige
Holweckpumpen.In the pump housing 1 with
Die Seitenkanalpumpe besteht aus den einstückigen Rotorscheiben 13, welche mit
Klemmringen 14 auf dem Rotor 4 befestigt sind. Dazwischen befinden sich die Statorbauteile
15 mit den Förderkanälen 16.The side channel pump consists of the one-
Die Gasförderung erfolgt entsprechend den in der Abbildung eingetragenen Pfeilen.
Zunächst wird das Gas von dem Ansaugbereich 22 über die parallel pumpenden
Holweckstufen 6 und 7, welche aus jeweils zwei in Serie geschalteten Pumpstufen
11a / 12a und 11b / 12b bestehen, in die Ausstoßbereiche 23 und 24 gefördert.
Durch Verbindungselemente 26 zwischen diesen beiden Bereichen werden die Gasströme
in den Ausstoßraum 25 der Gasreibungspumpe zusammengeführt. Über Verbindungselemente
28 gelangt der Gasstrom von dem Ausstoßraum 25 in den Ansaugraum
27 der Seitenkanalpumpe. Hier wird das Gas in mehreren Pumpstufen,
welche über Kanäle 20 miteinander verbunden sind, bis auf Atmosphärendruck verdichtet
und über den Ausstoßraum 29 dem Gasausstoßflansch 3 zugeführt. Von einer
Zwischenstufe der Seitenkanalpumpe führt eine Verbindungsleitung 30 über ein
Überdruckventil 31 direkt zum Gasausstoßflansch 3.The gas is pumped according to the arrows in the illustration.
First, the gas is pumped from the
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10114585 | 2001-03-24 | ||
DE10114585A DE10114585A1 (en) | 2001-03-24 | 2001-03-24 | vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1243796A2 true EP1243796A2 (en) | 2002-09-25 |
EP1243796A3 EP1243796A3 (en) | 2003-08-27 |
EP1243796B1 EP1243796B1 (en) | 2006-11-08 |
Family
ID=7678927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02005166A Expired - Lifetime EP1243796B1 (en) | 2001-03-24 | 2002-03-08 | Vacuum pump |
Country Status (4)
Country | Link |
---|---|
US (1) | US6676384B2 (en) |
EP (1) | EP1243796B1 (en) |
JP (1) | JP2002310092A (en) |
DE (2) | DE10114585A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2886870A1 (en) * | 2013-12-18 | 2015-06-24 | Pfeiffer Vacuum GmbH | Vacuum pump with improved inlet geometry |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10150015A1 (en) * | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers |
GB0229352D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement and method of operating same |
GB0229353D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
US7140847B2 (en) * | 2004-08-11 | 2006-11-28 | The Boc Group, Inc. | Integrated high vacuum pumping system |
WO2009142905A1 (en) * | 2008-05-20 | 2009-11-26 | Sundew Technologies, Llc | Deposition method and apparatus |
GB2474507B (en) | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
DE102009056218A1 (en) * | 2009-11-28 | 2011-06-01 | Robert Bosch Gmbh | Screw pump with integrated pressure relief valve |
US20150377239A1 (en) * | 2013-02-15 | 2015-12-31 | Edwards Limited | Vacuum pump |
GB2592030B (en) * | 2020-02-12 | 2022-03-09 | Edwards Ltd | Multiple stage vacuum pump |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
US4183719A (en) * | 1976-05-13 | 1980-01-15 | Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) | Composite impeller wheel with improved centering of one component on the other |
DE3442843A1 (en) * | 1983-11-30 | 1985-06-05 | Hitachi, Ltd., Tokio/Tokyo | Vacuum pump |
US5040949A (en) * | 1989-06-05 | 1991-08-20 | Alcatel Cit | Two stage dry primary pump |
EP1067290A2 (en) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Vacuum pump |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19632375A1 (en) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gas friction pump |
US6220824B1 (en) * | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
DE19942410A1 (en) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vacuum pump |
-
2001
- 2001-03-24 DE DE10114585A patent/DE10114585A1/en not_active Withdrawn
-
2002
- 2002-02-07 JP JP2002030826A patent/JP2002310092A/en active Pending
- 2002-03-07 US US10/093,204 patent/US6676384B2/en not_active Expired - Fee Related
- 2002-03-08 EP EP02005166A patent/EP1243796B1/en not_active Expired - Lifetime
- 2002-03-08 DE DE50208630T patent/DE50208630D1/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
US4183719A (en) * | 1976-05-13 | 1980-01-15 | Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) | Composite impeller wheel with improved centering of one component on the other |
DE3442843A1 (en) * | 1983-11-30 | 1985-06-05 | Hitachi, Ltd., Tokio/Tokyo | Vacuum pump |
US5040949A (en) * | 1989-06-05 | 1991-08-20 | Alcatel Cit | Two stage dry primary pump |
EP1067290A2 (en) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Vacuum pump |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2886870A1 (en) * | 2013-12-18 | 2015-06-24 | Pfeiffer Vacuum GmbH | Vacuum pump with improved inlet geometry |
EP2886870B1 (en) | 2013-12-18 | 2017-12-20 | Pfeiffer Vacuum GmbH | Vacuum pump with improved inlet geometry |
Also Published As
Publication number | Publication date |
---|---|
DE50208630D1 (en) | 2006-12-21 |
US20020136643A1 (en) | 2002-09-26 |
EP1243796A3 (en) | 2003-08-27 |
DE10114585A1 (en) | 2002-09-26 |
JP2002310092A (en) | 2002-10-23 |
US6676384B2 (en) | 2004-01-13 |
EP1243796B1 (en) | 2006-11-08 |
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