EP1234982A1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

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Publication number
EP1234982A1
EP1234982A1 EP01830121A EP01830121A EP1234982A1 EP 1234982 A1 EP1234982 A1 EP 1234982A1 EP 01830121 A EP01830121 A EP 01830121A EP 01830121 A EP01830121 A EP 01830121A EP 1234982 A1 EP1234982 A1 EP 1234982A1
Authority
EP
European Patent Office
Prior art keywords
pumping
pump
vacuum pump
pumping section
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01830121A
Other languages
English (en)
French (fr)
Other versions
EP1234982B1 (de
Inventor
Roberto Cerruti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Priority to EP20010830121 priority Critical patent/EP1234982B1/de
Priority to DE2001601368 priority patent/DE60101368T2/de
Publication of EP1234982A1 publication Critical patent/EP1234982A1/de
Application granted granted Critical
Publication of EP1234982B1 publication Critical patent/EP1234982B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/02—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid
    • F04F5/04—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids

Definitions

  • the present invention relates to an improved vacuum pump.
  • the invention relates to a turbomolecular vacuum pump with a particularly high compression ratio, capable of exhausting at atmospheric pressure.
  • Turbomolecular pumps which comprise pumping stages with plane or bladed rotors, see for instance EP-B 445 855 in the name of the same Applicant.
  • turbomolecular pumps have rather limited operation ranges, that is, they cannot reach a pressure difference, between the inlet and outlet ducts, such as to allow exhaust at atmospheric pressure. Even if considerable advances have been made in recent years, resulting in the development of turbomolecular pumps allowing exhaust at higher and higher pressures, providing a so-called fore pump coupled with the turbomolecular pump is at present still necessary.
  • Fore pumps are coupled outside the turbomolecular pump and therefore they require connection thereto through gas flow ducts, and electrical supply by the same control unit as that supplying the turbomolecular pump. All this makes the pumping system complex and more subject to failures.
  • a vacuum generating system comprising a molecular pump coupled with a fore pump, is disclosed in EP-A 256 234.
  • the exhaust port of a molecular rotary pump comprising a plurality of pumping stages defined by the coupling of a rotor and a stator, is directly connected with a suction duct of a screw pump.
  • the discharge port of the screw pump exhausts at atmospheric pressure.
  • Ejector or venturi pumps are also known which are actuated by a first, high-pressure fluid and suck a second, low-pressure fluid thereby generating an intermediate pressure level at the outlet.
  • Both the first and the second fluid can indiscriminately be either a liquid or a gas: for instance, by feeding the pump with pressurised water, it is possible to suck a gas such as air, thereby generating a low pressure in a closed space and creating a fore vacuum condition.
  • Ejector or venturi pumps of a kind suitable for sucking a gas, generally can work starting from pressures of about 30 millibars.
  • turbomolecular vacuum pump comprising, starting from the inlet port, a first pumping section having pumping stages with bladed rotor discs, a second pumping section having pumping stages with smooth rotor discs, a third pumping section having at least one pumping stage with toothed rotor disc, and a fourth ejector or venturi pumping section.
  • optimised progressive pumping stages are provided in the turbomolecular pump, capable of bringing the exhaust pressure of the turbomolecular pump to a level suitable for the operation of an ejector or venturi pump, typically 30 mbar.
  • the turbomolecular pump is capable of exhausting at a pressure of about 100 mbar already at the third stage.
  • the vacuum pump according to the invention can be used in all applications where a high vacuum condition is required in particularly clean environments, such as for instance in semiconductor working processes.
  • a vacuum pump 5 comprises four different pumping sections 1, 2, 3 and 4, arranged between a suction duct 6 and an exhaust duct 16.
  • the first three sections are part of a turbomolecular pump, comprising a rotor 20, shown in detail in Fig. 2, and equipped with a plurality of pumping stages defined by rotor discs 22a - 22h, 24a - 24f and 26, coupled with stator rings, not shown in Fig. 2.
  • Fig. 2 shows, in cross sectional view, the structure of rotor 20 of the turbomolecular pumping section.
  • the first pumping group 1 including eight rotor discs 22a - 22h with inclined blades, is provided on the pump side proximal to suction duct 6.
  • the blade inclination progressively increases from the first rotor disc 22a to the last rotor disc 22h. Indeed, the blades of the first rotor disc 22a are inclined of about 45° relative to the rotational axis of the rotor, whereas the blades of the last rotor disc 22h are almost horizontal.
  • a second pumping group 2 axially aligned with the first pumping group and comprising six smooth rotor discs 24a - 24f, is located below the first pumping stage.
  • the first two smooth rotor discs 24a and 24b have the same diameter as the preceding bladed rotor discs, whereas the last four smooth rotor discs 24c - 24f have smaller diameter.
  • a third pumping group 3 comprises a rotor disc 26 with straight teeth and is coupled with a stator ring 30.
  • Rotor 20 further comprises a rotation shaft 28, integral with the rotor discs and driven by a suitable electric motor.
  • Rotor disc 26 equipped with a plurality of straight teeth 34, is spaced from stator ring 30 so as to form, between the side surface of rotor disc 26 and the inner circumferential surface of stator ring 30, a free and tapered annular channel 36.
  • Tapered channel 36 has a suction port and a discharge port located at opposite ends of channel 36 and defining a gas suction region 32 and a gas discharge region 38, respectively.
  • a tapered groove in stator ring 30 forms channel 36 linearly tapered from suction region 32 towards discharge region 38.
  • the transverse size of channel 36 progressively decreases from the suction port towards the discharge port, in counterclockwise direction, in circumferential direction about rotor disc 26.
  • the third pumping section is capable of exhausting at a pressure of about 100 mbar. However even if such pressure is very high, it does not yet allow a direct connection with the outside environment (i.e. the environment at atmospheric pressure).
  • Discharge region 38 of the third pumping section is thus connected, through an intermediate duct 8, visible in the diagrammatic overall view of vacuum pump 5 shown in Fig. 1a, to a fourth ejector or venturi pumping section 4.
  • the fourth pumping section is fed, through a duct 14, by cooling water circuit 12 of the preceding turbomolecular pumping sections. Indeed, the pressurised cooling water enters pump 5 through an inlet duct 10, passes into cooling circuit 12 of turbomolecular sections 1, 2 and 3, and enters, via duct 14, the fourth ejector pumping section, shown in detail in Fig. 4.
  • the fourth pumping section could be fed through a suitable hydraulic circuit, as in the exemplary embodiment shown in Fig. 1b in which the cooling circuit of stages 1, 2 and 3 of the turbomolecular pump is not provided, or when the cooling circuit pressure is not sufficient to actuate ejector pump 4.
  • Fig. 1b actually shows a vacuum pump in which the ejector or venturi pumping section 4 is fed by an independent external hydraulic circuit.
  • Ejector pumping section 4 shown in detail in Fig. 4, comprises an inlet 14 for pressurised water, a suction duct 8 connected to the outlet of the third pumping section 3, and an exhaust duct 16 from which driving water and sucked gases are exhausted in admixture, at atmospheric pressure.
  • Water passage in the ejector or venturi pump actually creates a vacuum in suction duct 8 allowing the pump to exhaust at atmospheric pressure.
  • the fourth pumping section 4 having neither moving parts nor electrically powered parts, has a number of advantages. It is not easily subject to failures, it does not require special maintenance and lubrication and does not consume electric power, exploiting the pressurised water coming from the cooling circuit of the turbomolecular sections. Moreover, thanks to its structural simplicity, it scarcely adds to the overall cost of the vacuum pump.
  • the reduced power consumption of the pump obtained through the use of an ejector pump as the fourth pumping section, is moreover favoured by the presence of the third pumping stage including a rotor disc with straight teeth. Indeed, at the exhaust pressure of 30 mbar it has been experienced that the pump with a toothed pumping stage has lower electric current absorption than a pump not equipped with a stage with toothed rotor disc.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP20010830121 2001-02-22 2001-02-22 Vakuumpumpe Expired - Lifetime EP1234982B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP20010830121 EP1234982B1 (de) 2001-02-22 2001-02-22 Vakuumpumpe
DE2001601368 DE60101368T2 (de) 2001-02-22 2001-02-22 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20010830121 EP1234982B1 (de) 2001-02-22 2001-02-22 Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP1234982A1 true EP1234982A1 (de) 2002-08-28
EP1234982B1 EP1234982B1 (de) 2003-12-03

Family

ID=8184417

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010830121 Expired - Lifetime EP1234982B1 (de) 2001-02-22 2001-02-22 Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP1234982B1 (de)
DE (1) DE60101368T2 (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004055376A2 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement
WO2004055377A1 (en) 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
WO2004055378A1 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement and method of operating same
WO2005033522A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump
EP1609990A1 (de) * 2003-03-03 2005-12-28 OHMI, Tadahiro Vakuumvorrichtung und vakuumpumpe
US7452191B2 (en) * 2002-05-03 2008-11-18 Piab Ab Vacuum pump and method for generating sub-pressure
FR2952683A1 (fr) * 2009-11-18 2011-05-20 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
WO2014072276A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP3267040B1 (de) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0256234A2 (de) 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
EP0340685A2 (de) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Zusammengestellte Vakuumpumpe
EP0445855A1 (de) * 1990-03-09 1991-09-11 VARIAN S.p.A. Verbesserte Turbomolekularpumpe
US5118251A (en) * 1989-12-28 1992-06-02 Alcatel Cit Compound turbomolecular vacuum pump having two rotary shafts and delivering to atmospheric pressure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0256234A2 (de) 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
US4797068A (en) * 1986-06-12 1989-01-10 Hitachi, Ltd. Vacuum evacuation system
EP0340685A2 (de) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Zusammengestellte Vakuumpumpe
US5118251A (en) * 1989-12-28 1992-06-02 Alcatel Cit Compound turbomolecular vacuum pump having two rotary shafts and delivering to atmospheric pressure
EP0445855A1 (de) * 1990-03-09 1991-09-11 VARIAN S.p.A. Verbesserte Turbomolekularpumpe
EP0445855B1 (de) 1990-03-09 1994-10-26 VARIAN S.p.A. Verbesserte Turbomolekularpumpe

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7452191B2 (en) * 2002-05-03 2008-11-18 Piab Ab Vacuum pump and method for generating sub-pressure
WO2004055377A1 (en) 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
WO2004055378A1 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement and method of operating same
WO2004055376A3 (en) * 2002-12-17 2004-08-05 Boc Group Plc Vacuum pumping arrangement
US7896625B2 (en) 2002-12-17 2011-03-01 Edwards Limited Vacuum pumping system and method of operating a vacuum pumping arrangement
JP2006509955A (ja) * 2002-12-17 2006-03-23 ザ ビーオーシー グループ ピーエルシー 真空ポンプ排出システム及び真空ポンプ排出装置の作動方法
WO2004055376A2 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement
EP1609990A1 (de) * 2003-03-03 2005-12-28 OHMI, Tadahiro Vakuumvorrichtung und vakuumpumpe
EP1609990A4 (de) * 2003-03-03 2007-07-18 Tadahiro Ohmi Vakuumvorrichtung und vakuumpumpe
US7762763B2 (en) 2003-09-30 2010-07-27 Edwards Limited Vacuum pump
CN100429406C (zh) * 2003-09-30 2008-10-29 爱德华兹有限公司 真空泵
WO2005033522A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump
FR2952683A1 (fr) * 2009-11-18 2011-05-20 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
WO2011061429A3 (fr) * 2009-11-18 2012-07-12 Adixen Vacuum Products Procede et dispositif de pompage a consommation d'energie reduite
CN102713299A (zh) * 2009-11-18 2012-10-03 阿迪克森真空产品公司 具有低功耗的泵送方法和设备
US9175688B2 (en) 2009-11-18 2015-11-03 Adixen Vacuum Products Vacuum pumping system having an ejector and check valve
CN102713299B (zh) * 2009-11-18 2016-04-27 阿迪克森真空产品公司 具有低功耗的泵送方法和设备
WO2014072276A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems
CN104822943A (zh) * 2012-11-09 2015-08-05 厄利孔莱博尔德真空技术有限责任公司 用于对腔室抽真空的真空泵***以及用于控制真空泵***的方法
CN104822943B (zh) * 2012-11-09 2016-12-21 厄利孔莱博尔德真空技术有限责任公司 用于对腔室抽真空的真空泵***以及用于控制真空泵***的方法

Also Published As

Publication number Publication date
EP1234982B1 (de) 2003-12-03
DE60101368T2 (de) 2004-10-14
DE60101368D1 (de) 2004-01-15

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