EP1168454A3 - Nichtflüchtiger Halbleiterspeicher - Google Patents
Nichtflüchtiger Halbleiterspeicher Download PDFInfo
- Publication number
- EP1168454A3 EP1168454A3 EP01114688A EP01114688A EP1168454A3 EP 1168454 A3 EP1168454 A3 EP 1168454A3 EP 01114688 A EP01114688 A EP 01114688A EP 01114688 A EP01114688 A EP 01114688A EP 1168454 A3 EP1168454 A3 EP 1168454A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- semiconductor memory
- nonvolatile semiconductor
- region
- silicon substrate
- ferroelectric film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/78391—Field effect transistors with field effect produced by an insulated gate the gate comprising a layer which is used for its ferroelectric properties
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000182643A JP2002009255A (ja) | 2000-06-19 | 2000-06-19 | 不揮発半導体記憶装置 |
JP2000182643 | 2000-06-19 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1168454A2 EP1168454A2 (de) | 2002-01-02 |
EP1168454A3 true EP1168454A3 (de) | 2004-03-03 |
EP1168454B1 EP1168454B1 (de) | 2006-03-22 |
Family
ID=18683366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01114688A Expired - Lifetime EP1168454B1 (de) | 2000-06-19 | 2001-06-19 | Nichtflüchtiger Halbleiterspeicher |
Country Status (7)
Country | Link |
---|---|
US (1) | US6455883B2 (de) |
EP (1) | EP1168454B1 (de) |
JP (1) | JP2002009255A (de) |
KR (1) | KR100655028B1 (de) |
CN (1) | CN1181553C (de) |
DE (1) | DE60118061T2 (de) |
TW (1) | TW511275B (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004172355A (ja) * | 2002-11-20 | 2004-06-17 | National Institute Of Advanced Industrial & Technology | 強誘電体メモリアレイ |
JP4831562B2 (ja) * | 2005-06-23 | 2011-12-07 | 富士通株式会社 | 強誘電体メモリ装置 |
FR2973553B1 (fr) * | 2011-03-31 | 2013-03-29 | Thales Sa | Procédé de mise en oeuvre d'une jonction tunnel ferroelectrique, dispositif comprenant une jonction tunnel ferroelectrique et utilisation d'un tel dispositif |
US11502103B2 (en) * | 2018-08-28 | 2022-11-15 | Intel Corporation | Memory cell with a ferroelectric capacitor integrated with a transtor gate |
US11018239B2 (en) * | 2019-04-13 | 2021-05-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11980037B2 (en) | 2020-06-19 | 2024-05-07 | Intel Corporation | Memory cells with ferroelectric capacitors separate from transistor gate stacks |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5578846A (en) * | 1995-03-17 | 1996-11-26 | Evans, Jr.; Joseph T. | Static ferroelectric memory transistor having improved data retention |
US5744374A (en) * | 1995-03-22 | 1998-04-28 | Samsung Electronics Co., Ltd. | Device and manufacturing method for a ferroelectric memory |
-
2000
- 2000-06-19 JP JP2000182643A patent/JP2002009255A/ja active Pending
-
2001
- 2001-06-13 US US09/879,081 patent/US6455883B2/en not_active Expired - Fee Related
- 2001-06-19 CN CNB011188332A patent/CN1181553C/zh not_active Expired - Fee Related
- 2001-06-19 DE DE60118061T patent/DE60118061T2/de not_active Expired - Lifetime
- 2001-06-19 TW TW090114863A patent/TW511275B/zh not_active IP Right Cessation
- 2001-06-19 KR KR1020010034609A patent/KR100655028B1/ko not_active IP Right Cessation
- 2001-06-19 EP EP01114688A patent/EP1168454B1/de not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5578846A (en) * | 1995-03-17 | 1996-11-26 | Evans, Jr.; Joseph T. | Static ferroelectric memory transistor having improved data retention |
US5744374A (en) * | 1995-03-22 | 1998-04-28 | Samsung Electronics Co., Ltd. | Device and manufacturing method for a ferroelectric memory |
Non-Patent Citations (1)
Title |
---|
COLE M W ET AL: "The effects of Mg doping on the materials and dielectric properties of Ba/sub 1-x/SrTiO/sub 3/ thin films", MATERIALS SCIENCE OF NOVEL OXIDE-BASED ELECTRONICS. SYMPOSIUM. (MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOL.623), MATERIALS SCIENCE OF NOVEL OXIDE-BASED ELECTRONICS. SYMPOSIUM, SAN FRANCISCO, CA, USA, 24-27 APRIL 2000, 2000, Warrendale, PA, USA, Mater. Res. Soc, USA, pages 125 - 130, XP008025264, ISBN: 1-55899-531-5 * |
Also Published As
Publication number | Publication date |
---|---|
EP1168454B1 (de) | 2006-03-22 |
DE60118061T2 (de) | 2006-08-17 |
KR20010113555A (ko) | 2001-12-28 |
EP1168454A2 (de) | 2002-01-02 |
CN1181553C (zh) | 2004-12-22 |
KR100655028B1 (ko) | 2006-12-07 |
TW511275B (en) | 2002-11-21 |
US20010052607A1 (en) | 2001-12-20 |
CN1350333A (zh) | 2002-05-22 |
US6455883B2 (en) | 2002-09-24 |
JP2002009255A (ja) | 2002-01-11 |
DE60118061D1 (de) | 2006-05-11 |
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