EP1164207A3 - Method for preparing metal oxide film - Google Patents

Method for preparing metal oxide film Download PDF

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Publication number
EP1164207A3
EP1164207A3 EP00308173A EP00308173A EP1164207A3 EP 1164207 A3 EP1164207 A3 EP 1164207A3 EP 00308173 A EP00308173 A EP 00308173A EP 00308173 A EP00308173 A EP 00308173A EP 1164207 A3 EP1164207 A3 EP 1164207A3
Authority
EP
European Patent Office
Prior art keywords
metal oxide
oxide film
substrate
oligomer
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00308173A
Other languages
German (de)
French (fr)
Other versions
EP1164207A2 (en
Inventor
Seichi Rengakuji
Yosuke c/o Japan Carlit Co. Ltd. Hara
Takuro c/o Japan Carlit Co. Ltd. Kato
Kazuhiro c/o Japan Carlit Co. Ltd. Kubota
Akihiro c/o Japan Carlit Co. Ltd. Shinagawa
Syuko c/o Japan Carlit Co. Ltd. Shindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Carlit Co Ltd
Original Assignee
Japan Carlit Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Carlit Co Ltd filed Critical Japan Carlit Co Ltd
Publication of EP1164207A2 publication Critical patent/EP1164207A2/en
Publication of EP1164207A3 publication Critical patent/EP1164207A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1254—Sol or sol-gel processing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Ceramic Engineering (AREA)
  • Chemically Coating (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

A method for preparing a metal oxide film using a sol-gel method including the steps of: forming a solution containing a complex including a metal oxide oligomer and an organic solvent; depositing the solution on a substrate; removing at least part of the organic solvent from the solution on the substrate; and thermally treating the substrate for converting the metal oxide oligomer into the corresponding metal oxide film. In this method, since at least part of the solvent in the oligomer-solvent complex is removed before converting the metal oxide oligomer into the metal oxide film by the thermal treatment, the mutual diffusion between the substrate metal and in the metal oxide oligomer is prevented to provide a crack-free homogeneous metal oxide film on the substrate.
EP00308173A 2000-05-31 2000-09-19 Method for preparing metal oxide film Withdrawn EP1164207A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000162454 2000-05-31
JP2000162454A JP3985887B2 (en) 2000-05-31 2000-05-31 Metal oxide precursor solution

Publications (2)

Publication Number Publication Date
EP1164207A2 EP1164207A2 (en) 2001-12-19
EP1164207A3 true EP1164207A3 (en) 2004-03-24

Family

ID=18666347

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00308173A Withdrawn EP1164207A3 (en) 2000-05-31 2000-09-19 Method for preparing metal oxide film

Country Status (3)

Country Link
EP (1) EP1164207A3 (en)
JP (1) JP3985887B2 (en)
KR (1) KR20010096478A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007070673A (en) * 2005-09-06 2007-03-22 Univ Of Tokyo Antimony-containing stannic oxide film formed on aluminum substrate
EP2183408A2 (en) 2007-08-07 2010-05-12 President And Fellows Of Harvard College Metal oxide coating on surfaces
US8529795B2 (en) * 2007-08-22 2013-09-10 Gwangju Institute Of Science And Technology Wet-processible metal oxide solution, method of using the same, and organic photovoltaic cell of using the same
WO2009120254A1 (en) 2008-03-28 2009-10-01 President And Fellows Of Harvard College Surfaces, including microfluidic channels, with controlled wetting properties
CN109053462B (en) * 2018-08-14 2021-11-05 浙江今晖新材料股份有限公司 Preparation method of para-fluoroaniline
CN115624966B (en) * 2022-10-13 2024-07-05 中国科学院深圳先进技术研究院 Metal oxide composite material and preparation method and application thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11222690A (en) * 1998-02-06 1999-08-17 Japan Carlit Co Ltd:The Electrolytic electrode and its production
JPH11256342A (en) * 1998-03-13 1999-09-21 Agency Of Ind Science & Technol Production of metal oxide thin film

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01126208A (en) * 1987-11-11 1989-05-18 Shimadzu Corp Production of superconducting thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11222690A (en) * 1998-02-06 1999-08-17 Japan Carlit Co Ltd:The Electrolytic electrode and its production
JPH11256342A (en) * 1998-03-13 1999-09-21 Agency Of Ind Science & Technol Production of metal oxide thin film

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 0133, no. 72 (C - 627) 17 August 1989 (1989-08-17) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 13 30 November 1999 (1999-11-30) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22) *

Also Published As

Publication number Publication date
EP1164207A2 (en) 2001-12-19
JP3985887B2 (en) 2007-10-03
JP2001342019A (en) 2001-12-11
KR20010096478A (en) 2001-11-07

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