EP1164207A3 - Method for preparing metal oxide film - Google Patents
Method for preparing metal oxide film Download PDFInfo
- Publication number
- EP1164207A3 EP1164207A3 EP00308173A EP00308173A EP1164207A3 EP 1164207 A3 EP1164207 A3 EP 1164207A3 EP 00308173 A EP00308173 A EP 00308173A EP 00308173 A EP00308173 A EP 00308173A EP 1164207 A3 EP1164207 A3 EP 1164207A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- metal oxide
- oxide film
- substrate
- oligomer
- solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1254—Sol or sol-gel processing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
- C23C18/1216—Metal oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
- C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Dispersion Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Ceramic Engineering (AREA)
- Chemically Coating (AREA)
- Silicon Compounds (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000162454 | 2000-05-31 | ||
JP2000162454A JP3985887B2 (en) | 2000-05-31 | 2000-05-31 | Metal oxide precursor solution |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1164207A2 EP1164207A2 (en) | 2001-12-19 |
EP1164207A3 true EP1164207A3 (en) | 2004-03-24 |
Family
ID=18666347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00308173A Withdrawn EP1164207A3 (en) | 2000-05-31 | 2000-09-19 | Method for preparing metal oxide film |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1164207A3 (en) |
JP (1) | JP3985887B2 (en) |
KR (1) | KR20010096478A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007070673A (en) * | 2005-09-06 | 2007-03-22 | Univ Of Tokyo | Antimony-containing stannic oxide film formed on aluminum substrate |
EP2183408A2 (en) | 2007-08-07 | 2010-05-12 | President And Fellows Of Harvard College | Metal oxide coating on surfaces |
US8529795B2 (en) * | 2007-08-22 | 2013-09-10 | Gwangju Institute Of Science And Technology | Wet-processible metal oxide solution, method of using the same, and organic photovoltaic cell of using the same |
WO2009120254A1 (en) | 2008-03-28 | 2009-10-01 | President And Fellows Of Harvard College | Surfaces, including microfluidic channels, with controlled wetting properties |
CN109053462B (en) * | 2018-08-14 | 2021-11-05 | 浙江今晖新材料股份有限公司 | Preparation method of para-fluoroaniline |
CN115624966B (en) * | 2022-10-13 | 2024-07-05 | 中国科学院深圳先进技术研究院 | Metal oxide composite material and preparation method and application thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11222690A (en) * | 1998-02-06 | 1999-08-17 | Japan Carlit Co Ltd:The | Electrolytic electrode and its production |
JPH11256342A (en) * | 1998-03-13 | 1999-09-21 | Agency Of Ind Science & Technol | Production of metal oxide thin film |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01126208A (en) * | 1987-11-11 | 1989-05-18 | Shimadzu Corp | Production of superconducting thin film |
-
2000
- 2000-05-31 JP JP2000162454A patent/JP3985887B2/en not_active Expired - Fee Related
- 2000-09-19 EP EP00308173A patent/EP1164207A3/en not_active Withdrawn
- 2000-09-19 KR KR1020000055028A patent/KR20010096478A/en not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11222690A (en) * | 1998-02-06 | 1999-08-17 | Japan Carlit Co Ltd:The | Electrolytic electrode and its production |
JPH11256342A (en) * | 1998-03-13 | 1999-09-21 | Agency Of Ind Science & Technol | Production of metal oxide thin film |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 0133, no. 72 (C - 627) 17 August 1989 (1989-08-17) * |
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 13 30 November 1999 (1999-11-30) * |
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22) * |
Also Published As
Publication number | Publication date |
---|---|
EP1164207A2 (en) | 2001-12-19 |
JP3985887B2 (en) | 2007-10-03 |
JP2001342019A (en) | 2001-12-11 |
KR20010096478A (en) | 2001-11-07 |
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Legal Events
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Effective date: 20020515 |
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18W | Application withdrawn |
Effective date: 20040902 |