EP1162422A2 - Verfahren und Vorrichtung zur Gewinnung von Argon - Google Patents
Verfahren und Vorrichtung zur Gewinnung von Argon Download PDFInfo
- Publication number
- EP1162422A2 EP1162422A2 EP01113953A EP01113953A EP1162422A2 EP 1162422 A2 EP1162422 A2 EP 1162422A2 EP 01113953 A EP01113953 A EP 01113953A EP 01113953 A EP01113953 A EP 01113953A EP 1162422 A2 EP1162422 A2 EP 1162422A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- column
- argon
- crude argon
- pressure
- crude
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04642—Recovering noble gases from air
- F25J3/04648—Recovering noble gases from air argon
- F25J3/04721—Producing pure argon, e.g. recovered from a crude argon column
- F25J3/04727—Producing pure argon, e.g. recovered from a crude argon column using an auxiliary pure argon column for nitrogen rejection
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04406—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system
- F25J3/04412—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system in a classical double column flowsheet, i.e. with thermal coupling by a main reboiler-condenser in the bottom of low pressure respectively top of high pressure column
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04642—Recovering noble gases from air
- F25J3/04648—Recovering noble gases from air argon
- F25J3/04654—Producing crude argon in a crude argon column
- F25J3/04666—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system
- F25J3/04672—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser
- F25J3/04678—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser cooled by oxygen enriched liquid from high pressure column bottoms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04642—Recovering noble gases from air
- F25J3/04648—Recovering noble gases from air argon
- F25J3/04654—Producing crude argon in a crude argon column
- F25J3/04666—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system
- F25J3/04672—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser
- F25J3/04684—Producing crude argon in a crude argon column as a parallel working rectification column of the low pressure column in a dual pressure main column system having a top condenser and a bottom re-boiler
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04763—Start-up or control of the process; Details of the apparatus used
- F25J3/04769—Operation, control and regulation of the process; Instrumentation within the process
- F25J3/04793—Rectification, e.g. columns; Reboiler-condenser
- F25J3/048—Argon recovery
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2235/00—Processes or apparatus involving steps for increasing the pressure or for conveying of liquid process streams
- F25J2235/58—Processes or apparatus involving steps for increasing the pressure or for conveying of liquid process streams the fluid being argon or crude argon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2240/00—Processes or apparatus involving steps for expanding of process streams
- F25J2240/40—Expansion without extracting work, i.e. isenthalpic throttling, e.g. JT valve, regulating valve or venturi, or isentropic nozzle, e.g. Laval
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
- F25J2290/12—Particular process parameters like pressure, temperature, ratios
Definitions
- the invention relates to a method and an apparatus for the production of argon, at the compressed, pre-cleaned and cooled air in a rectification system at least one rectification column and one crude argon column is broken down, according to the Features of the preamble of claims 1 and 9.
- EP 0 628 777 B1 describes a method and an apparatus for Obtaining argon with up to 10 ppm residual oxygen known, in which the from the separation of air in a rectification system with at least one Rectification column obtained argon-containing oxygen fraction in a crude argon column and a semi-pure column equipped with a top condenser into one Argon product is broken down, with the residual fraction of the semi-pure column as reflux liquid is used for the crude argon column, the number of in the The raw argon column or semi-pure column theoretically used soils (steps) in the form of conventional floors and / or ordered packings and / or packing is at least 30 or 60, so there is no top capacitor in the crude argon column is required, which reduces the expenditure on equipment and the operating costs be lowered.
- the invention has for its object a method and an apparatus initially mentioned type with little equipment and low To create operating costs for the particularly economical extraction of raw argon.
- At least partial evaporation of the bottom liquid in the Crude argon column is found, preferably withdrawn from the pressure column, and preferably supercooled, oxygen-rich, liquid process stream use.
- the use of bottom product from the pressure column to evaporate has the essential advantage that the Rectification conditions in the low pressure column are not impaired, i.e. the nitrogen content contained in the side gas drawn off from the low pressure column not additionally increased, which means that at the top of the crude argon column Significant, increasing by a factor of 28 - 36 nitrogen enrichment and thus an impairment of the trouble-free operation of the crude argon condenser causing and also a, the further processing complicating nitrogen enrichment is avoided in the crude argon product.
- the raw argon present at the top of the raw argon column is replaced by indirect Heat exchange with a liquid removed from the process condenses and at least partially fed back into the crude argon column as reflux liquid.
- bottom liquid from the high pressure column is used as the cooling medium.
- a portion of the condensed crude argon fraction is withdrawn as a product and sent to further treatment of the pure argon column.
- the so-called Argon belly of the low pressure column under a pressure of about 1.2 to 1.6 bar withdrawn argon-rich oxygen stream before feeding into the crude argon column throttled to a pressure of 0.9 to 1.1 bar and in the crude argon column below it reduced pressure in the manner described to crude argon and liquid residual fraction rectified.
- the in Liquefied argon top fraction of the crude argon column Fine cleaning in one with a variable number of differently arranged conventional floors and / or ordered packings and / or packing, one Condenser and a bottom evaporator equipped pure argon column, in which the raw argon in liquid pure argon product and in a gaseous argon-nitrogen mixture is disassembled.
- the gaseous argon-nitrogen mixture present at the top of the pure argon column is partially liquefied by indirect heat exchange in the pure argon condenser, the liquefied fraction as reflux back into the pure argon column fed and the non-liquefied portion as a gaseous purge stream in the Plant environment is blown off.
- the invention also relates to a device for the production of argon according to the Features of claims 9 and 10.
- the figure of the drawing shows a process diagram of an argon production according to the invention with reduced-pressure crude argon rectification and additional Crude argon column swamp evaporation.
- the crude argon 6 present at the top of the crude argon column 5 with 0.1 to 10 ppm Residual oxygen content is at least partially affected by indirect heat exchange a liquid removed from the process by means of a condenser 10 condensed and at least partially back into the crude argon column as reflux liquid 5 fed.
- Part of the condensed raw argon fraction is called a liquid raw argon product withdrawn and via a line 15 of a pure argon column 16 for further treatment fed.
- a process stream for example high pressure air from 10 to 100 bar
- the at least partial evaporation of bottom liquid 7 is advantageous Crude argon column 5 from the bottom of the pressure column 1 via a line 9 in the Bottom liquid 7 arranged evaporators 11 supplied, preferably supercooled oxygen-rich liquid, use.
- the unevaporated portion of bottom liquid 7 of the crude argon column 5 is called Return via a line 13 equipped with a conveyor 14 back into the low pressure column 2 fed.
- liquid Head fraction in the raw argon column 5 present raw argon 6 via the line 15 in the with a variable number of differently arranged conventional floors and / or ordered packings and / or packing elements equipped with pure argon column 16 fed and in this to pure argon product 27 and one via line 22 removable purge gas rectified.
- Gaseous nitrogen-argon mixture 17 present at the top of the pure argon column 16 is by indirect heat exchange in one, through a line 20 with low-oxygen liquid from the pressure column 1 operated pure argon condenser 21 partially liquefied, with the liquefied fraction returning to the Pure argon column 16 fed and the non-liquefied portion of the nitrogen-argon mixture is blown off as a gaseous purge stream via line 22.
- the argon production according to the invention is in all known air rectification systems with at least one rectification column and one crude argon column with those shown Benefits can be used.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
Description
Claims (10)
- Verfahren zur Gewinnung von Argon, bei dem verdichtete, vorgereinigte und abgekühlte Luft in einem Rektifiziersystem mit mindestens einer Rektifiziersäule und einer Rohargonsäule zerlegt wird, wobeia) ein aus einer Niederdrucksäule der Rektifiziersäule abgezogener argonreicher Sauerstoffstrom über eine Leitung in der mit konventionellen Böden und/oder geordneten Packungen und/oder Füllkörpern ausgestatteten Rohargonsäule in Rohargon und in eine erste schwerersiedende flüssige Restfraktion zerlegt undb) eine Kopfkühlung der Rohargonsäule durch indirekten Wärmetausch mit verdampfender, auf etwa den Druck der Niederdrucksäule entspannter Sumpfflüssigkeit einer mit der Niederdrucksäule thermisch gekoppelten Drucksäule erfolgt undc) das aus dem Kopf der Rohargonsäule in eine Reinargonsäule eingeleitete Rohargon in Reinargon und in eine zweite leichtersiedende Fraktion zerlegt wird,
die in der Rohargonsäule (5) vorliegende Sumpfflüssigkeit (7) zumindest teilweise verdampft wird. - Verfahren nach Anspruch 1,
dadurch gekennzeichnet, dass
die in der Rohargonsäule (5) vorliegende Sumpfflüssigkeit (7) durch einen aus der Drucksäule (1) zugeführten Prozeßstrom zumindest teilweise verdampft wird. - Verfahren nach Anspruch 1 oder 2,
dadurch gekennzeichnet, dass
als Prozeßstrom zum Verdampfen der Sumpfflüssigkeit (7) in der Rohargonsäule (5) sauerstoffreiche, vorzugsweise unterkühlte Flüssigkeit der Drucksäule (1), Verwendung findet. - Verfahren nach Anspruch 1 oder 2,
dadurch gekennzeichnet, das
als Prozeßstrom zum Verdampfen der Sumpfflüssigkeit (7) in der Rohargonsäule (5) Hochdruckluft von 10 bis 100 bar Verwendung findet. - Verfahren nach einem der Ansprüche 1 bis 4,
dadurch gekennzeichnet, dass
der Druck der Rohargonsäule (5) geringer ist als der Druck in der Niederdrucksäule (2). - Verfahren nach Anspruch 5
dadurch gekennzeichnet, dass
der argonreiche Sauerstoffstrom in der Rohargonsäule (5) unter einem Druck von etwa 0,9 bis 1,1 bar rektifiziert wird. - Verfahren nach einem der Ansprüche 1 bis 6,
dadurch gekennzeichnet, dass
die Druckreduzierung des aus der Niederdrucksäule (2) abgezogenen argonreichen Sauerstoffstroms vor dessen Einspeisung in die Rohargonsäule (5) erfolgt. - Verfahren nach einem der Ansprüche 1 bis 7,
dadurch gekennzeichnet, dass
das am Kopf der Rohargonsäule (5) vorliegende gasförmige Rohargon (6) zumindestens teilweise mittels aus der Drucksäule (1) zugeführter Sumpfflüssigkeit zu Rücklauf und flüssigem Rohargon kondensiert wird. - Vorrichtung zur Gewinnung von Argon nach einem der Ansprüche 1 bis 8 mit einem Rektifiziersystem mit mindestens einer Rektifiziersäule und einer Rohargonsäule, wobei eine Niederdrucksäule des Rektifiziersystems mit einer Leitung zur Einspeisung von argonreichem Sauerstoffstrom in die mit einer variablen Anzahl von unterschiedlich angeordneten konventionellen Böden und/oder geordneten Packungen und/oder Füllkörpern und einem Kondensator ausgestatteten Rohargonsäule, welche durch eine Leitung zur Einspeisung von Rohargon in eine mit einer variablen Anzahl von unterschiedlich angeordneten konventionellen Böden und/oder geordneten Packungen und/oder Füllkörpern, einem Kondensator und einem Verdampfer ausgerüsteten Reinargonsäule sowie die Roh- und Reinargonsäule mittels eines Leitungsverbundsystems über mindestens einen Wärmetauscher mit der Rektifiziersäule verbunden sind,
dadurch gekennzeichnet, dass
die Rohargonsäule (5) einen Verdampfer (11) aufweist. - Vorrichtung nach Anspruch 9,
dadurch gekennzeichnet, dass
der im Sumpfbereich der Rohargonsäule (5) angeordnete Verdampfer (11) mit der Drucksäule (1) verbunden ist.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10028867 | 2000-06-10 | ||
DE10028867A DE10028867A1 (de) | 2000-06-10 | 2000-06-10 | Verfahren und Vorrichtung zur Gewinnung von Argon |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1162422A2 true EP1162422A2 (de) | 2001-12-12 |
EP1162422A3 EP1162422A3 (de) | 2002-01-09 |
Family
ID=7645421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01113953A Withdrawn EP1162422A3 (de) | 2000-06-10 | 2001-06-08 | Verfahren und Vorrichtung zur Gewinnung von Argon |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1162422A3 (de) |
DE (1) | DE10028867A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108645118A (zh) * | 2018-06-07 | 2018-10-12 | 上海联风能源科技有限公司 | 一种提高氩气回收率的装置及方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0341512A1 (de) * | 1988-04-29 | 1989-11-15 | Air Products And Chemicals, Inc. | Regelverfahren zum Maximieren der Argon-Rückgewinnung in kryogenen Lufttrennungseinheiten |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5207066A (en) * | 1991-10-22 | 1993-05-04 | Bova Vitaly I | Method of air separation |
US5305611A (en) * | 1992-10-23 | 1994-04-26 | Praxair Technology, Inc. | Cryogenic rectification system with thermally integrated argon column |
CA2142318A1 (en) * | 1994-02-24 | 1995-08-25 | Horst Corduan | Process and apparatus for recovery of pure argon |
CA2142317A1 (en) * | 1994-02-24 | 1995-08-25 | Anton Moll | Process and apparatus for the recovery of pure argon |
GB9410686D0 (en) * | 1994-05-27 | 1994-07-13 | Boc Group Plc | Air separation |
WO1997001068A1 (fr) * | 1995-06-20 | 1997-01-09 | Nippon Sanso Corporation | Procede et appareil de separation de l'argon |
DE19743731A1 (de) * | 1996-10-02 | 1998-04-09 | Linde Ag | Verfahren und Vorrichtung zur Gewinnung von reinem Argon |
US6202441B1 (en) * | 1999-05-25 | 2001-03-20 | Air Liquide Process And Construction, Inc. | Cryogenic distillation system for air separation |
-
2000
- 2000-06-10 DE DE10028867A patent/DE10028867A1/de not_active Ceased
-
2001
- 2001-06-08 EP EP01113953A patent/EP1162422A3/de not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0341512A1 (de) * | 1988-04-29 | 1989-11-15 | Air Products And Chemicals, Inc. | Regelverfahren zum Maximieren der Argon-Rückgewinnung in kryogenen Lufttrennungseinheiten |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108645118A (zh) * | 2018-06-07 | 2018-10-12 | 上海联风能源科技有限公司 | 一种提高氩气回收率的装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
DE10028867A1 (de) | 2001-12-20 |
EP1162422A3 (de) | 2002-01-09 |
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