EP1090231B1 - Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump - Google Patents
Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump Download PDFInfo
- Publication number
- EP1090231B1 EP1090231B1 EP99917896A EP99917896A EP1090231B1 EP 1090231 B1 EP1090231 B1 EP 1090231B1 EP 99917896 A EP99917896 A EP 99917896A EP 99917896 A EP99917896 A EP 99917896A EP 1090231 B1 EP1090231 B1 EP 1090231B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- housing
- pump
- pump according
- stator
- tie
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
- F04D29/602—Mounting in cavities
Definitions
- the invention relates to a turbomolecular vacuum pump with the characteristics of the generic term of the Patent claim 1, and a corresponding device with the features of the preamble of claim 19.
- DE-A-43 14 419 discloses various friction vacuum pumps (Turbomolecular pumps, pumps with turbomolecular pump stages and other friction pump stages) a type known as z. Zt. Is common and on offered to the market. You own a chassis that equipped with the drive motor and on the itself the rotor is supported. In addition, the housing is supported the pump on the chassis. It surrounds the rotor and the stator and also more or less the chassis. The Housing secures the assignment of said components to each other. Furthermore, it has the task of Stator Halbring discs and spacer rings existing stator center exactly, so that with friction vacuum pumps necessary small column to be adhered to can. The housing seals the vacuum pump to the outside down.
- a turbomolecular vacuum pump with the features of The preamble of claim 1 is known from DE-A-34 02 549 known.
- the first inner component is a tie rod system, that only has the task, stator components to hold together.
- the present invention is based on the object the adaptation of turbomolecular vacuum pumps to the Variety of applications specified by the customers to simplify.
- the friction vacuum pump 1 according to FIG 1 three pumping stages 12, 13, 14, two of which (12, 13) as turbomolecular vacuum pumping stages and one (14) as Molecular (Holweck) pumping stage are formed. To the Molecular pumping stage 14 joins the outlet of the Pump 17 on.
- the pump 1 is provided with two housings 18, 19 equipped.
- the inner housing 18 is substantially cylindrical and surrounds the stator 3.
- On his high-vacuum-side end face is with one inside directed edge 20 equipped, the stator 3 and in this case at the same time the upper one Stator ring forms.
- the housing 18th attached to the chassis 5, with the help of the flange 21.
- Flange 21 and chassis 5 are vacuum-tight connected with each other. This is between the flange 21st and the chassis 5, the sealing ring 21 'is arranged.
- the outer housing 19 has an inner bore 22 with an inward grading 23, whose height the width of the rim 20 corresponds to the first housing 18.
- a seal 24 which expedient in the front side of the housing 18 is inserted.
- a radial Sealing is possible.
- the housing 19 a device, e.g. the flange 25, with which it is attached to the chassis 5 or on the housing 18 is. After loosening this attachment, the from the inner housing 18 and the components therein formed unit as a whole from the bore 22nd be taken out. It forms one of the second housing 19 independent slot 27.
- the first, high vacuum side pump stage 12 is of four pairs of rotor blade rows and stator blade rows. Your inlet, the effective gas passage area, is designated 26.
- the rim 20 surrounds the gas passage area 26 and forms a passage opening 28 for entering the pump 1 gases.
- the second closes Pump stage 13, consisting of three pairs of one stator blade row and a rotor blade row. Your inlet is designated 29.
- the second pumping stage 13 is from the first pumping stage 12 spaced.
- the selected distance (height) a secures the free accessibility of the gas molecules to be pumped Gas inlet 29.
- the distance a is greater than a quarter, preferably greater than one third of the Diameter of the rotor system 4.
- the adjoining Holweck pump includes one rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing.
- Another, formed by the inner housing 18 opening is arranged laterally and designated 35. She is used for the passage of gases directly to the Inlet 29 of the second pumping stage 13 are supplied.
- the outer housing 19 has the task of the pump 1 and two pump stages (12, 13) of this pump with the device of the customer.
- the housing 19 is formed in the embodiment of Figure 1 in such a way that the levels of all the connection openings 36, 37 are located laterally. This is especially true the distance of the opening 37 to the associated gas inlet 29 very small, so the pumping speed of the pumping stage 13 impairing conductance losses negligible are. This would also for any further intermediate connection apply downstream of the intermediate connection 37/29 would be located. Otherwise, the diameter exceeds the connection opening 37, the height a by about the Double. This measure also serves to reduce the conductance losses between inlet 29 and port 37.
- the side connection openings can be equipped with one flange each. In the embodiment according to Figure 1 is a common Flange 39 is provided.
- the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
- a high pumping speed is to be generated (eg 200 l / s).
- the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
- FIG. 2 shows a single-flow friction vacuum pump 1, their pump-active surfaces exclusively of stator blades 41 and rotor blades 42 are formed (Turbomolecular vacuum pump).
- the second, outer housing 19 carries frontally the flange 43, which is the front side arranged connecting opening 44 surrounds. To one Pump 1 of this type with a different type of flange and / or flange size, it is only necessary to dismantle the outer housing 19 and to be replaced by a housing 19 with the desired flange.
- FIG. 3 shows a device 51 according to the invention with chambers to be evacuated 52, 53, 54 and a push-in Unit 27, as described for Figure 1 has been.
- the housing of the device e.g. a particle beam device - Is essentially in one piece formed and designated 55.
- the essence of the present idea is that a largely functional unit (inset, cartridge) a friction vacuum pump in one of the application adapted housing is releasably supported. That so far described inner housing 18 has the task, the Function elements of the friction vacuum pump to the desired Unit to summarize. Instead of the housing Other components - e.g. Tie rods, brackets or the like - be present who fulfill this task. It is essential that for the fulfillment of the Functions of the usual housing in the subject the invention provides two components 18 and 19,55 are.
- the two components of two are concentric Housing formed, of which the inner of the centering, Assignment and mounting of chassis 5, stator 3 and rotor 4 is used, which thereby the already operational, form independent drawer from the outer casing.
- the outer housing 19, 55 seals the vacuum pump to the outside and serves to connect with those to be evacuated Chambers, whether via connecting flanges or in that it already forms part of the facility with the chambers to be evacuated.
- tie rod system It is particularly useful in the inner slot the to replace inner housings with a tie rod system. This allows a more compact design of the interior Slot. In addition, held together by the tie rod system Components are made easier. For example, the tie rods take over the centering of stator rings, so that they themselves are no longer with Centering must be equipped.
- FIGS. 4 and 5 show exemplary embodiments (FIG 4: longitudinal section through an insert 27; FIG. 5: Cross section through a slot 27 at the level of the opening 35) for an inner drawer 27 with a tie rod system 61.
- This comprises three to six (or more) tie rods 62 as well as holes and threads in the components (Chassis 5, stator 3) coming from the tie rod system 61 a unit to be joined together.
- Figures 4 and 5 show that the opening 35 extends over the entire circumference of the insert 27 and only interrupted by the tie rods 62.
- the access of the gas molecules to the inlet 29 of the pumping stage 13 is characterized almost unhindered free.
- FIG. 4 makes the structure particularly advantageous Recognize tie rod 62. They are designed in two parts.
- the pre-vacuum side tie rod sections 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator element 33 of the pumping stage 14. Their threaded ends are in the Screwed flange 21 of the chassis 5.
- the length of the Heads 64 determines the axial extent of the opening 35.
- Heads 64 each provided with an internal thread, in the respective high-vacuum-side tie rod sections 65 can be screwed.
- Their heads 66 are the highest Statorring the pumping stage 13 on. In other enforce they cause the stator rings of the pumping stage 12 and thereby not only one in the screwed state Connection of the high vacuum 12 with the rest Stages 13 and 14 but also a centering of Stator.
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- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
Die Erfindung bezieht sich auf eine Turbomolekularvakuumpumpe
mit den Merkmalen des Oberbegriffs des
Patentanspruchs 1, sowie eine entsprechende Einrichtung mit den Merkmalen
des Oberbegriffs des Patentanspruchs 19.The invention relates to a turbomolecular vacuum pump
with the characteristics of the generic term of the
Patent claim 1, and a corresponding device with the features
of the preamble of
Aus der DE-A-43 14 419 sind verschiedene Reibungsvakuumpumpen (Turbomolekularpumpen, Pumpen mit Turbomolekularpumpenstufen und anderen Reibungspumpenstufen) mit einer Bauart bekannt, wie sie z. Zt. üblich ist und auf dem Markt angeboten wird. Sie besitzen ein Chassis, das mit dem Antriebsmotor ausgerüstet ist und auf dem sich der Rotor abstützt. Außerdem stützt sich das Gehäuse der Pumpe auf dem Chassis ab. Es umgibt den Rotor und den Stator und auch mehr oder weniger das Chassis. Das Gehäuse sichert die Zuordnung der genannten Bauteile zueinander. Weiterhin hat es die Aufgabe, den aus Statorhalbring-Scheiben und Distanzringen bestehenden Stator exakt zu zentrieren, damit die bei Reibungsvakuumpumpen notwendigen kleinen Spalte eingehalten werden können. Das Gehäuse dichtet die Vakuumpumpe nach außen hin ab. Schließlich ist es mit dem stirnseitig angeordneten Anschlussflansch ausgerüstet, mit dem die Reibungsvakuumpumpen an Einrichtungen mit zu evakuierenden Kammern angeschlossen werden. Da es unterschiedliche Flanscharten und Flanschgrößen gibt, ist es für den Hersteller von Reibungsvakuumpumpen notwendig, eine Vielzahl von Reibungsvakuumpumpen-Typen herzustellen und bereitzuhalten, um sämtliche Applikationswünsche der Kunden erfüllen zu können.DE-A-43 14 419 discloses various friction vacuum pumps (Turbomolecular pumps, pumps with turbomolecular pump stages and other friction pump stages) a type known as z. Zt. Is common and on offered to the market. You own a chassis that equipped with the drive motor and on the itself the rotor is supported. In addition, the housing is supported the pump on the chassis. It surrounds the rotor and the stator and also more or less the chassis. The Housing secures the assignment of said components to each other. Furthermore, it has the task of Statorhalbring discs and spacer rings existing stator center exactly, so that with friction vacuum pumps necessary small column to be adhered to can. The housing seals the vacuum pump to the outside down. Finally, it is arranged with the front side Connection flange equipped with the friction vacuum pumps at facilities to be evacuated Chambers are connected. Because it is different Flange types and flange sizes, it is for the Manufacturer of friction vacuum pumps necessary, one Produce variety of friction vacuum pump types and ready to handle all application requests to satisfy the customers.
Eine Turbomolekularvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 ist aus der DE-A-34 02 549 bekannt. Das erste innere Bauteil ist ein Zugankersystem, das nur die Aufgabe hat, Statorbauteile zusammen zu halten.A turbomolecular vacuum pump with the features of The preamble of claim 1 is known from DE-A-34 02 549 known. The first inner component is a tie rod system, that only has the task, stator components to hold together.
Zum Stand der Technik gehört schließlich noch der Inhalt der US-Patentschriften 19 42 139 und 19 75 568 aus dem Jahre 1934. Sie offenbaren keine Turbomolekularvakuumpumpe der hier betroffenen Art.Finally, the content belongs to the state of the art of US Pat. Nos. 19 42 139 and 19 75 568 the year 1934. They do not disclose a turbomolecular vacuum pump of the species concerned here.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Anpassung von Turbomolekularvakuumpumpen an die Vielfalt der durch die Kunden vorgegebenen Applikationen zu vereinfachen.The present invention is based on the object the adaptation of turbomolecular vacuum pumps to the Variety of applications specified by the customers to simplify.
Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst. Durch die Anwendung dieser Merkmale wird es möglich, die eingangs beschriebenen Funktionen des bisher üblichen, einteiligen Gehäuses auf zwei Bauteile zu verteilen. Das innere Bauteil sichert die Zuordnung der einzelnen Bauteile der Vakuumpumpe zueinander. Dadurch entsteht eine Turbomolekularvakuumpumpe in Form eines Einschubs, die bereits vielen Funktionsprüfungen, z.B. der des Auswuchtens, unterworfen werden kann. Das äußere Gehäuse hat die Aufgabe, die auch ohne äußeres Gehäuse funktionstüchtige Molekularvakuumpumpe an die Applikation des Kunden anzupassen. Es ist nicht mehr erforderlich, eine Vielfalt von Pumpentypen herzustellen oder bereitzuhalten, sondern lediglich eine oder wenige universelle, kompakte und funktionsfähige Pumpeinheiten (Einschübe, Kartuschen) sowie die den jeweiligen Kundenapplikationen angepassten äußeren Gehäuse. According to the invention this object is achieved by the characterizing Characteristics of the claims solved. By the Application of these features will make it possible at the beginning described functions of the usual one-piece Distribute housing on two components. The inner Component secures the assignment of the individual components the vacuum pump to each other. This creates a turbomolecular vacuum pump in the form of a plug-in that already many functional tests, e.g. that of balancing, can be subjected. The outer case has the task that works without external housing Molecular vacuum pump to the application of Customize customers. It is no longer necessary, one To manufacture or maintain a variety of pump types, but only one or a few universal, compact and functional pumping units (plug-ins, Cartridges) as well as the respective customer applications adapted outer housing.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von den Figuren 1 bis 5 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen
- Figur 1 eine mit drei Pumpstufen ausgerüstete Reibungsvakuumpumpe nach der Erfindung,
- Figur 2 eine Turbomolekularvakuumpumpe nach der Erfindung,
Figur 3 eine mit einer Reibungsvakuumpumpe nach der Erfindung ausgerüstete Einrichtung und- Figuren 4 und 5 Schnitte durch eine Ausführung des Einschubs mit Zugankern.
- FIG. 1 shows a friction pump equipped with three pump stages according to the invention,
- FIG. 2 shows a turbomolecular vacuum pump according to the invention,
- Figure 3 is a equipped with a friction vacuum pump according to the invention means and
- Figures 4 and 5 sections through an embodiment of the insert with tie rods.
In Figur 1 ist eine Reibungsvakuumpumpe 1 mit Stator 3,
Rotor 4 und Chassis 5 dargestellt. Im Chassis 5 befindet
sich der Motorantrieb 6, 7, dessen Anker 7 sich
über die Lager 8 im Chassis 5 abstützt. Mit dem Anker 7
ist die aus dem Chassis 5 herausgeführte Welle 9 verbunden,
die den Rotor 4 trägt. Die Drehachse des Rotorsystems
ist mit 11 bezeichnet.1 is a friction vacuum pump 1 with
Insgesamt besitzt die Reibungsvakuumpumpe 1 nach Figur
1 drei Pumpstufen 12, 13, 14, von denen zwei (12, 13)
als Turbomolekularvakuumpumpstufen und eine (14) als
Molekular(Holweck)-Pumpstufe ausgebildet sind. An die
Molekularpumpstufe 14 schließt sich der Auslass der
Pumpe 17 an. Overall, the friction vacuum pump 1 according to FIG
1 three
Erfindungsgemäß ist die Pumpe 1 mit zwei Gehäusen 18,
19 ausgerüstet. Das innere Gehäuse 18 ist im wesentlichen
zylindrisch und umgibt den Stator 3. Auf seiner
hochvakuumseitigen Stirnseite ist es mit einem nach innen
gerichteten Rand 20 ausgerüstet, der dem Stator 3
aufliegt und in diesem Falle gleichzeitig den oberen
Statorring bildet. Vorvakuumseitig ist das Gehäuse 18
am Chassis 5 befestigt, und zwar mit Hilfe des Flansches
21. Flansch 21 und Chassis 5 sind vakuumdicht
miteinander verbunden. Dazu ist zwischen dem Flansch 21
und dem Chassis 5 der Dichtring 21' angeordnet.According to the invention, the pump 1 is provided with two
Das äußere Gehäuse 19 besitzt eine innere Bohrung 22
mit einer einwärts gerichteten Stufung 23, deren Höhe
der Breite des Randes 20 am ersten Gehäuse 18 entspricht.
Zwecks Abdichtung des Spaltes zwischen den
beiden Gehäusen 18, 19 zur Hochvakuumseite der Pumpe 1
hin befindet sich zwischen deren Rand 20 und der Stufung
23 eine Dichtung 24, die zweckmäßig in die Stirnseite
des Gehäuses 18 eingelassen ist. Auch eine radiale
Abdichtung ist möglich. Vorvakuumseitig besitzt
auch das Gehäuse 19 eine Vorrichtung, z.B. den Flansch
25, mit dem es am Chassis 5 oder auch am Gehäuse 18 befestigt
ist. Nach dem Lösen dieser Befestigung kann die
vom inneren Gehäuse 18 und den darin befindlichen Bauteilen
gebildete Einheit als Ganzes aus der Bohrung 22
herausgenommen werden. Sie bildet einen vom zweiten Gehäuse
19 unabhängigen Einschub 27.The
Die erste, hochvakuumseitig gelegene Pumpstufe 12 besteht
aus vier Paaren von Rotorschaufelreihen und Statorschaufelreihen.
Ihr Einlass, die wirksame Gasdurchtrittsfläche,
ist mit 26 bezeichnet. Der Rand 20 umgibt
die Gasdurchtrittsfläche 26 und bildet eine Durchtrittsöffnung
28 für in die Pumpe 1 eintretenden Gase.
An die erste Pumpstufe 12 schließt sich die zweite
Pumpstufe 13 an, die aus drei Paaren von je einer Statorschaufelreihe
und einer Rotorschaufelreihe besteht.
Ihr Einlass ist mit 29 bezeichnet.The first, high vacuum
Die zweite Pumpstufe 13 ist von der ersten Pumpstufe 12
beabstandet. Der gewählte Abstand (Höhe) a sichert die
freie Zugänglichkeit der zu fördernden Gasmoleküle zum
Gaseinlass 29. Zweckmäßig ist der Abstand a größer als
ein Viertel, vorzugsweise größer als ein Drittel des
Durchmessers des Rotorsystems 4.The
Die sich daran anschließende Holweck-Pumpe umfasst einen
rotierenden Zylinderabschnitt 30, dem außen und innen
in bekannter Weise mit jeweils einer Gewindenut 31,
32 ausgerüstete Statorelemente 33, 34 gegenüberstehen.The adjoining Holweck pump includes one
rotating
Eine weitere, vom inneren Gehäuse 18 gebildete Öffnung
ist seitlich angeordnet und mit 35 bezeichnet. Sie
dient dem Durchtritt von Gasen, die unmittelbar dem
Einlass 29 der zweiten Pumpstufe 13 zugeführt werden.Another, formed by the
Das äußere Gehäuse 19 hat die Aufgabe, die Pumpe 1 bzw.
zwei Pumpenstufen (12, 13) dieser Pumpe mit der Einrichtung
des Kunden zu verbinden. Das Gehäuse 19 ist
beim Ausführungsbeispiel nach Figur 1 derart ausgebildet,
dass sich die Ebenen sämtlicher Verbindungsöffnungen
36, 37 seitlich befinden. Dadurch ist insbesondere
der Abstand der Öffnung 37 zum zugehörigen Gaseinlass
29 sehr klein, so dass das Saugvermögen der Pumpstufe
13 beeinträchtigende Leitwertverluste vernachlässigbar
sind. Dieses würde auch für jeden weiteren Zwischenanschluss
gelten, der stromabwärts vom Zwischenanschluss
37/29 gelegen wäre. Im übrigen überschreitet der Durchmesser
der Anschlussöffnung 37 die Höhe a um etwa das
Doppelte. Auch diese Maßnahme dient der Verringerung
der Leitwertverluste zwischen Einlass 29 und Anschlussöffnung
37. Die seitlichen Verbindungsöffnungen
können mit je einem Flansch ausgerüstet sein. Beim Ausführungsbeispiel
nach Figur 1 ist ein gemeinsamer
Flansch 39 vorgesehen.The
Die dargestellte Pumpe 1 bzw. ihre pumpwirksamen Elemente
(Stator-, Rotorschaufeln, Gewindestufen) sind
zweckmäßig derart ausgebildet, dass im Bereich der Anschlussöffnung
36 ein Druck von 10-4 bis 10-7, vorzugsweise
10-5 bis 10-6, und im Bereich der Anschlussöffnung
37 ein Druck von etwa 10-2 bis 10-4 mbar erzeugt wird.
Dadurch ergibt sich für die erste Pumpstufe 12 die Notwendigkeit,
für ein Kompressionsverhältnis von 102 bis
104, vorzugsweise größer 100, zu sorgen. Mit der zweiten
Pumpstufe soll ein hohes Saugvermögen erzeugt werden
(z.B. 200 l/s). Die sich anschließende, zweistufige
Holweck-Pumpstufe (29, 30; 29, 31) sichert eine hohe
Vorvakuumbeständigkeit, so dass üblicherweise das Saugvermögen
der zweiten Pumpstufe vom Vorvakuumdruck unabhängig
ist.The illustrated pump 1 or its pump-effective elements (stator, rotor blades, screw threads) are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the
Für den Fall, dass im Bereich der Anschlussöffnung 36
ein besonders hohes Saugvermögen nicht gefordert wird,
kann dieses Ziel durch entsprechende Gestaltung der
Schaufeln der ersten Pumpstufe 12 erreicht werden. Eine
andere Möglichkeit besteht darin, vor dem Einlass 26
der ersten Pumpstufe eine Blende 38 anzuordnen, deren
Innendurchmesser das gewünschte Saugvermögen bestimmt.In the event that in the region of the connection opening 36
a particularly high pumping speed is not required,
can achieve this goal by appropriate design of
Shovels of the
Figur 2 zeigt eine einflutige Reibungsvakuumpumpe 1,
deren pumpaktive Flächen ausschließlich von Statorschaufeln
41 und Rotorschaufeln 42 gebildet werden
(Turbomolekularvakuumpumpe). Das zweite, äußere Gehäuse
19 trägt stirnseitig den Flansch 43, der die stirnseitig
angeordnete Verbindungsöffnung 44 umgibt. Um eine
Pumpe 1 dieser Art mit einer anderen Flanschart
und/oder Flanschgröße auszurüsten, ist es lediglich erforderlich,
das äußere Gehäuse 19 zu demontieren und
durch ein Gehäuse 19 mit dem gewünschten Flansch zu ersetzen.FIG. 2 shows a single-flow friction vacuum pump 1,
their pump-active surfaces exclusively of
Figur 3 zeigt eine Einrichtung 51 nach der Erfindung
mit zu evakuierenden Kammern 52, 53, 54 und einer einschubförmigen
Einheit 27, wie sie zu Figur 1 beschrieben
wurde. Das Gehäuse der Einrichtung - z.B. ein Korpuskularstrahlgerät
- ist im wesentlichen einstückig
ausgebildet und mit 55 bezeichnet. In unmittelbarer
Nähe der zu evakuierenden Kammern 53, 54 ist das Gehäuse
mit der Bohrung 22 ausgerüstet, in der sich der
Einschub 27 befindet. Über die Durchtrittsöffnungen 28,
35 im Gehäuse 18 des Einschubs 27 und die Verbindungsöffnungen
36, 37 stehen die Kammern 53, 54 mit den jeweiligen
Einlässen 26, 29 in Verbindung. Durch die Integration
des Einschubs 27 im Gehäuse der Einrichtung
51 entfallen gesonderte Anschlussmittel. Die Abstände
zwischen den zu evakuierenden Kammern 53,54 und den
Einlässen 26, 29 sind optimal klein.FIG. 3 shows a
Der Kern der vorliegenden Idee liegt darin, dass eine
weitgehend funktionsfähige Einheit (Einschub, Kartusche)
einer Reibungsvakuumpumpe in einem der Applikation
angepassten Gehäuse lösbar gehaltert ist. Das bisher
beschriebene innere Gehäuse 18 hat die Aufgabe, die
Funktionselemente der Reibungsvakuumpumpe zu der gewünschten
Einheit zusammenzufassen. Anstelle des Gehäuses
können auch andere Bauteile - z.B. Zuganker, Klammern
oder dgl. - vorhanden sein, die diese Aufgabe erfüllen.
Wesentlich ist, dass für die Erfüllung der
Funktionen des sonst üblichen Gehäuses beim Gegenstand
der Erfindung zwei Bauelemente 18 bzw. 19,55 vorgesehen
sind. Bei den Ausführungen nach den Figuren 1 bis 3
werden die beiden Bauelemente von zwei konzentrischen
Gehäusen gebildet, von denen das innere der Zentrierung,
Zuordnung und Halterung von Chassis 5, Stator 3
und Rotor 4 dient, welche dadurch den bereits betriebsfähigen,
vom äußeren Gehäuse unabhängigen Einschub bilden.
Das äußere Gehäuse 19, 55 dichtet die Vakuumpumpe
nach außen ab und dient der Verbindung mit den zu evakuierenden
Kammern, sei es über Anschlussflansche oder
dadurch, dass es bereits Bestandteil der Einrichtung
mit den zu evakuierenden Kammern ist. The essence of the present idea is that a
largely functional unit (inset, cartridge)
a friction vacuum pump in one of the application
adapted housing is releasably supported. That so far
described
Besonders zweckmäßig ist es, beim inneren Einschub das innere Gehäuse durch ein Zugankersystem zu ersetzen. Dieses ermöglicht eine kompaktere Gestaltung des inneren Einschubs. Außerdem können vom Zugankersystem zusammengehaltene Bauteile einfacher hergestellt werden. Beispielsweise übernehmen die Zuganker die Zentrierung von Statorringen, so dass diese selbst nicht mehr mit Zentriermitteln ausgerüstet sein müssen.It is particularly useful in the inner slot the to replace inner housings with a tie rod system. This allows a more compact design of the interior Slot. In addition, held together by the tie rod system Components are made easier. For example, the tie rods take over the centering of stator rings, so that they themselves are no longer with Centering must be equipped.
Die Figuren 4 und 5 zeigen Ausführungsbeispiele (Figur
4: Längsschnitt durch einen Einschub 27; Figur 5: Querschnitt
durch einen Einschub 27 in Höhe der Öffnung 35)
für einen inneren Einschub 27 mit einem Zugankersystem
61. Dieses umfasst drei bis sechs (oder mehr) Zuganker
62 sowie Bohrungen und Gewinde in den Bauteilen
(Chassis 5, Stator 3), die vom Zugankersystem 61 zu
einer Baueinheit zusammengefügt werden sollen.FIGS. 4 and 5 show exemplary embodiments (FIG
4: longitudinal section through an
Die Figuren 4 und 5 lassen erkennen, dass sich die Öffnung
35 über den gesamten Umfang des Einschubs 27 erstreckt
und nur durch die Zuganker 62 unterbrochen ist.
Der Zugang der Gasmoleküle zum Einlass 29 der Pumpstufe
13 (in Figur 5 in Draufsicht dargestellt) ist dadurch
nahezu ungehindert frei. Die Befestigung des äußeren
Gehäuses - sei es das zweite Gehäuse 18, das weitere
Funktionen eines Pumpgehäuses erfüllt, oder ein Gehäuse
55, das Bestandteil eines Gerätes mit zu evakuierenden
Kammern ist - erfolgt am Flansch 21 des Chassis 5.Figures 4 and 5 show that the
Figur 4 lässt den Aufbau besonders vorteilhaft gestalteter
Zuganker 62 erkennen. Sie sind zweiteilig ausgebildet.
Die vorvakuumseitigen Zugankerabschnitte 63 mit
ihren Köpfen 64 durchsetzen die Statorringe der Pumpstufe
13 und das äußere Statorelement 33 der Pumpstufe
14. Ihre mit einem Gewinde versehenen Enden sind in den
Flansch 21 des Chassis 5 eingeschraubt. Die Länge der
Köpfe 64 bestimmt die axiale Ausdehnung der Öffnung 35. FIG. 4 makes the structure particularly advantageous
Recognize
Im Bereich ihrer hochvakuumseitigen Stirnseite sind die
Köpfe 64 jeweils mit einem Innengewinde versehen, in
die jeweils hochvakuumseitige Zugankerabschnitte 65
einschraubbar sind. Ihre Köpfe 66 liegen dem obersten
Statorring der Pumpstufe 13 auf. In übrigen durchsetzen
sie die Statorringe der Pumpstufe 12 und bewirken
dadurch im eingeschraubten Zustand nicht nur eine
Verbindung der Hochvakuumstufe 12 mit den übrigen
Stufen 13 und 14 sondern auch eine Zentrierung der
Statorringe.In the area of their high-vacuum-side end are the
Claims (20)
- A turbomolecular vacuum pump (1) having a frame (5), a stator (3) with stator rings, a rotor (4) with rotor blades which is supported in the frame (5) by way of a shaft (9), a first inner part (18, 61) which serves to group together the stator rings, and a second outer housing part (19) which is secured to the frame (5), receives the stator (3) and the rotor (4) and is equipped with a connection (39) to a chamber to be evacuated, characterised in that the first inner part (18, 61) brings together the frame (5), the stator (3) and the rotor (4) to form an insert which is detachably secured in the outer housing part.
- A pump according to Claim 1, characterised in that the first inner part is an inner housing (18).
- A pump according to Claim 2, characterised in that there is a seal (24) in the region of the high vacuum side of the pump, between the inner housing (18) and the outer housing (19, 55).
- A pump according to Claim 2 or 3, characterised in that, in the region of the pre-vacuum side of the pump, the inner and outer housings (18; 19, 55) are equipped with flanges which are detachably secured to the frame (5).
- A pump according to one of the preceding claims, characterised in that the inner housing (18) is equipped with an inwardly directed rim (20) on the high vacuum side.
- A pump according to Claim 5, characterised in that the inwardly directed rim (20) forms a first stator ring arranged on the high vacuum side.
- A frictional vacuum pump according to one of the preceding Claims 2 to 6, characterised in that there is associated with that end face of the inner housing (18) which is on the high vacuum side a stepped narrowing (23) of the bore (22) of the outer housing (19, 55).
- A pump according to Claims 3 and 7, characterised in that there is an O ring (24) between the end face of the inner housing (18) and the step (23), formed by the narrowing in diameter, in the outer housing (19, 55).
- A pump according to one of the preceding Claims 2 to 8, characterised in that that end of the inner housing (18) which is on the high vacuum side forms an aperture (28) for the gases coming into the pump to pass through.
- A pump according to Claim 9, characterised in that the inner housing (18) is equipped with at least one further, downstream aperture (35) for incoming gases to pass through.
- A pump according to one of Claims 1 to 10, characterised in that the connection flange (39) is arranged laterally on the second housing (19).
- A pump according to Claim 9 or 10, characterised in that one or more connection channels are made in the outer housing (19), and these make the connection between the passage apertures (28, 35) and one or more chambers (52 to 55) to be evacuated.
- A pump according to Claim 1, characterised in that the first inner part is formed by a tie-rod system (61).
- A pump according to Claim 13, characterised in that the tie-rod system (61) includes a plurality of tie rods (62) which connect the stator (3) to the frame (5).
- A pump according to Claim 14, characterised in that the tie rods (62) pass through the stator rings.
- A pump according to one of Claims 13 to 15, characterised in that the tie rods (62) are made in two parts and each comprise a tie-rod portion (63) on the pre-vacuum side, with head (64), and a tie-rod portion (65) on the high vacuum side, with head (66).
- A pump according to Claim 16, characterised in that the length of the head (64) of the tie-rod portion (63) on the pre-vacuum side determines the axial extent of a passage aperture (35) between the high vacuum stage (12) and the pre-vacuum stage (13 or 13, 14).
- A pump according to either of Claims 16 or 17, characterised in that the heads (64) of the tie-rod portions (63) on the pre-vacuum side are each equipped at their end face with a thread into which the tie-rod portions (65) on the high vacuum side may be screwed.
- A device (51), having a housing (55) in which there is at least one chamber (52, 53, 54) which may be evacuated, and having a turbomolecular vacuum pump (1) with a housing, according to one of the preceding claims, this turbomolecular vacuum pump (1) being connected to the chamber which is to be evacuated, characterised in that the housing (55) of the device (51) has a bore (22) within which the insert (27) of the turbomolecular vacuum pump (1) is located.
- A device according to Claim 19, characterised in that at least two chambers (52, 53, 54) are provided, in that the turbomolecular vacuum pump (1) is constructed to have a plurality of stages, in that at least two chambers (52, 53, 54) are arranged laterally next to the frictional vacuum pump (1), and the chambers are connected, by way of passage apertures in the inner housing (18) and connection apertures (36, 37) in the common housing (55), to the inlet (26, 29) of turbomolecular pump stages (12, 13, 14).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03029746.9A EP1422423B2 (en) | 1998-05-26 | 1999-03-27 | Apparatus with evacuatable chamber |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823270 | 1998-05-26 | ||
DE19823270 | 1998-05-26 | ||
DE19901340 | 1999-01-15 | ||
DE19901340.3A DE19901340B4 (en) | 1998-05-26 | 1999-01-15 | Friction vacuum pump with chassis, rotor and housing and device equipped with a friction vacuum pump of this type |
PCT/EP1999/002122 WO1999061799A1 (en) | 1998-05-26 | 1999-03-27 | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03029746.9A Division EP1422423B2 (en) | 1998-05-26 | 1999-03-27 | Apparatus with evacuatable chamber |
EP03029746.9A Division-Into EP1422423B2 (en) | 1998-05-26 | 1999-03-27 | Apparatus with evacuatable chamber |
EP03029746.9 Division-Into | 2003-12-23 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1090231A1 EP1090231A1 (en) | 2001-04-11 |
EP1090231B1 true EP1090231B1 (en) | 2005-10-05 |
EP1090231B2 EP1090231B2 (en) | 2015-07-08 |
Family
ID=26046389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99917896.5A Expired - Lifetime EP1090231B2 (en) | 1998-05-26 | 1999-03-27 | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
Country Status (5)
Country | Link |
---|---|
US (1) | US6457954B1 (en) |
EP (1) | EP1090231B2 (en) |
JP (1) | JP4520636B2 (en) |
DE (2) | DE59912626D1 (en) |
WO (1) | WO1999061799A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8529218B2 (en) | 2007-02-28 | 2013-09-10 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump having nested chambers associated with a mass spectrometer |
DE202013003855U1 (en) * | 2013-04-25 | 2014-07-28 | Oerlikon Leybold Vacuum Gmbh | Examination device and multi-inlet vacuum pump |
US8790070B2 (en) | 2008-08-28 | 2014-07-29 | Oerlikon Leybold Vacuum Gmbh | Stator-rotor arrangement for a vacuum pump and vacuum pump |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
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DE10308420A1 (en) * | 2003-02-27 | 2004-09-09 | Leybold Vakuum Gmbh | Test gas leak detector |
ITTO20030421A1 (en) * | 2003-06-05 | 2004-12-06 | Varian Spa | COMPACT VACUUM PUMP |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
DE102006020710A1 (en) * | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vacuum pump with housing |
US20070263477A1 (en) * | 2006-05-11 | 2007-11-15 | The Texas A&M University System | Method for mixing fluids in microfluidic channels |
US8591204B2 (en) * | 2008-03-31 | 2013-11-26 | Shimadzu Corporation | Turbo-molecular pump |
GB2462804B (en) * | 2008-08-04 | 2013-01-23 | Edwards Ltd | Vacuum pump |
DE102009013244A1 (en) | 2009-03-14 | 2010-09-16 | Pfeiffer Vacuum Gmbh | Arrangement with vacuum pump |
GB2473839B (en) * | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
FR2984972A1 (en) * | 2011-12-26 | 2013-06-28 | Adixen Vacuum Products | ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE |
DE202012000611U1 (en) * | 2012-01-21 | 2013-04-23 | Oerlikon Leybold Vacuum Gmbh | Turbo molecular pump |
US9982682B2 (en) | 2012-09-26 | 2018-05-29 | Edwards Japan Limited | Rotor and vacuum pump equipped with same |
GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
EP3460249B1 (en) * | 2015-07-01 | 2021-03-24 | Pfeiffer Vacuum GmbH | Split flow vacuum pump |
JP7196763B2 (en) * | 2018-10-25 | 2022-12-27 | 株式会社島津製作所 | turbomolecular pump and mass spectrometer |
EP3564538B1 (en) * | 2019-02-20 | 2021-04-07 | Pfeiffer Vacuum Gmbh | Vacuum system and method for manufacturing the same |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
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DE530462C (en) * | 1927-05-06 | 1931-07-29 | Karl Radlik | Water supply system with additional pumping station |
DE695872C (en) * | 1928-02-14 | 1940-09-04 | Werner Germershausen Dr | Incandescent cathode tubes with several anodes and interconnected conductive shields arranged in their vicinity |
US1942139A (en) | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
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DE2229725B2 (en) | 1972-06-19 | 1975-05-07 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Centrifugal vacuum pump for high vacua - has rotor projecting beyond coupling flange |
US4324532A (en) † | 1980-01-24 | 1982-04-13 | Trw Inc. | Cartridge pump |
DE3402549A1 (en) | 1984-01-26 | 1985-08-01 | Leybold-Heraeus GmbH, 5000 Köln | Molecular vacuum pump |
CH674785A5 (en) | 1988-03-07 | 1990-07-13 | Dino Systems Limited | Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls |
DE58907244D1 (en) * | 1989-07-20 | 1994-04-21 | Leybold Ag | Friction pump with bell-shaped rotor. |
JPH0466395U (en) * | 1990-10-22 | 1992-06-11 | ||
DE4216237A1 (en) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gas friction vacuum pump |
WO1994000694A1 (en) * | 1992-06-19 | 1994-01-06 | Leybold Aktiengesellschaft | Gas friction vacuum pump |
EP0603694A1 (en) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vacuum system |
DE4331589C2 (en) | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vacuum pumping system |
DE4314419A1 (en) | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with bearing support |
DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
JPH0914184A (en) * | 1995-06-28 | 1997-01-14 | Daikin Ind Ltd | Turbo-molecular pump |
FR2736103B1 (en) * | 1995-06-30 | 1997-08-08 | Cit Alcatel | TURBOMOLECULAR PUMP |
US6019581A (en) * | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
DE29516599U1 (en) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Friction vacuum pump with intermediate inlet |
JP3469055B2 (en) * | 1997-08-20 | 2003-11-25 | 三菱重工業株式会社 | Turbo molecular pump |
-
1999
- 1999-03-27 DE DE59912626T patent/DE59912626D1/en not_active Expired - Lifetime
- 1999-03-27 US US09/700,483 patent/US6457954B1/en not_active Expired - Lifetime
- 1999-03-27 DE DE59912629T patent/DE59912629D1/en not_active Expired - Lifetime
- 1999-03-27 WO PCT/EP1999/002122 patent/WO1999061799A1/en active IP Right Grant
- 1999-03-27 JP JP2000551160A patent/JP4520636B2/en not_active Expired - Lifetime
- 1999-03-27 EP EP99917896.5A patent/EP1090231B2/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8529218B2 (en) | 2007-02-28 | 2013-09-10 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump having nested chambers associated with a mass spectrometer |
US8858188B2 (en) | 2007-02-28 | 2014-10-14 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump or vacuum apparatus with vacuum pump |
DE102007010068B4 (en) | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump or vacuum apparatus with vacuum pump |
US8790070B2 (en) | 2008-08-28 | 2014-07-29 | Oerlikon Leybold Vacuum Gmbh | Stator-rotor arrangement for a vacuum pump and vacuum pump |
DE202013003855U1 (en) * | 2013-04-25 | 2014-07-28 | Oerlikon Leybold Vacuum Gmbh | Examination device and multi-inlet vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
WO1999061799A1 (en) | 1999-12-02 |
DE59912626D1 (en) | 2006-02-16 |
EP1090231B2 (en) | 2015-07-08 |
DE59912629D1 (en) | 2006-02-16 |
EP1090231A1 (en) | 2001-04-11 |
JP4520636B2 (en) | 2010-08-11 |
US6457954B1 (en) | 2002-10-01 |
JP2002516959A (en) | 2002-06-11 |
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