EP1078166B1 - Reibungsvakuumpumpe mit stator und rotor - Google Patents
Reibungsvakuumpumpe mit stator und rotor Download PDFInfo
- Publication number
- EP1078166B1 EP1078166B1 EP98946450A EP98946450A EP1078166B1 EP 1078166 B1 EP1078166 B1 EP 1078166B1 EP 98946450 A EP98946450 A EP 98946450A EP 98946450 A EP98946450 A EP 98946450A EP 1078166 B1 EP1078166 B1 EP 1078166B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- vacuum pump
- pump
- friction vacuum
- stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a friction vacuum pump with the features of the preamble of the claim 1.
- DE-A-43 31 589 discloses using only one vacuum pump system the various from the corpuscular blasting machine generate required pressures.
- the pump system includes two turbomolecular and one molecular (Holweck) pump stage. These pumping stages are axially one behind the other arranged. Each pump stage has a gas inlet (front gas passage surface) on the connection means with the associated chamber of the evacuated Device is connected.
- connection means serve in the solution according to DE-A-34 31 589 Housing itself and an additional housing arranged on the side. The housing itself is located on the front Connection opening for connecting the gas inlet the first pump stage with the one to be evacuated Facility equipped. There are connecting cables in the additional housing provided the associated inlets the further pump stages with further connection openings connect.
- connection openings in the additional housing with the connection opening of the first pump stage in one common plane perpendicular to the rotor axis
- the connecting cables in the additional housing be relatively long. This results in relative large conductance losses in the connecting lines, which is particularly disadvantageous when Area of an intermediate connection has a high pumping speed is desired.
- the state of the art also includes the content of Documents DE 18 09 102 A1, US 31 89 264 A and US 36 28 894 A. Turbomolecular and molecular pumps are disclosed with only one connection opening on the suction side.
- the present invention is based on the object a friction vacuum pump of the type mentioned above to shape that the pumping speed of the intermediate stages not due to high conductance losses in connecting lines is impaired.
- the implementation of the measures according to the invention has this means that the gases to be pumped in the inlet area the first pump stage, i.e. exactly where the Pressure is lowest, must be redirected.
- the resulting loss of conductance can be kept small because the distance between the gas inlet and the level of the port opening is still relative is small and also in this area of choice larger diameter nothing stands in the way.
- particularly high pumping speeds in the area of the inlet of the first (high vacuum side) pump stage not required become. Often there is even a need for this Throttling pumping speed at this point.
- the main purpose of the first pump stage is to ensure a high compression ratio.
- the for the first pump stage selected blade properties must take this function into account.
- Essential is a separation of the two working pressure ranges of the two pump stages.
- a high pumping speed is usually only at the intermediate entrance (s) desired. This goal can also be chosen special blade geometries can be achieved.
- Accessibility is essential for the pumping speed of a pump stage of the gas molecules to the gas inlet (effective gas passage area) prevail.
- it is known at an intermediate stage between the previous stage and its gas inlet one provide a larger distance. It is particularly advantageous it if this distance is at least a quarter, preferably one third of the diameter of the rotor.
- the pump itself is 1, its housing with 2, their stator system with 3 and their rotor system designated with 4.
- the shaft 5 belongs to the rotor system, which in turn are on the bearings 6, 7 in the bearing housing 8, connected to the pump housing 2, supports.
- In the bearing housing there is also the drive motor 9, 10.
- the axis of rotation of the rotor system 4 is 15 designated.
- a total of three pump stages 12, 13, 14 are provided, two of which (12, 13) as turbomolecular vacuum pump stages and a (14) as a molecular (Holweck) pumping stage are trained.
- (12, 13) as turbomolecular vacuum pump stages
- (14) as a molecular (Holweck) pumping stage
- the first pump stage 12 is located on the high vacuum side from four pairs of rotor blade rows 21 and Stator blade rows 22. Your inlet, the effective gas passage area, is designated 23. To the first Pump stage 12 is followed by second pump stage 13, that of three pairs of one stator blade row 22 each and a rotor blade row 21. Your entry is designated 28.
- the second pump stage 13 is from the first pump stage 12 spaced.
- the selected distance (height) a secures the free accessibility of the gas molecules to be conveyed to the gas inlet 28.
- the distance a is expediently greater than a quarter, preferably greater than a third the diameter of the rotor system 4.
- the subsequent Holweck pump includes one rotating cylinder section 29, the outside and inside in a known manner, each with a thread groove 30, 31 equipped stator elements 32, 33 face each other.
- the rotor-side parts of the pump stages 12, 13, 14 form a unit that is ready for use with the Wave 5 is connected.
- a central bore 25 so that no immediate Connection between the storage room and the intermediate space exists and thus the risk of back diffusion of Lubricant vapors are eliminated.
- This serves the purpose also the flying bearing of the rotor system 4.
- the back diffusion of lubricant vapors can also be done by using magnetic bearings avoided, which are arranged in a more convenient place can be.
- connection means serves the housing 2 itself. It is in the embodiment formed in such a way that the Levels of all connection openings 36, 37 parallel to the rotor axis 15. This is special the distance of the connection 37 to the associated gas inlet 28 very small, so the pumping speed of the pump stage 13 impairing conductance losses negligible are. This would also apply to any other intermediate connection apply to the downstream of the intermediate connection 37/28. Otherwise exceeds the diameter of the connection opening 37 around the height a about double. This measure also serves the reduction the conductance losses between inlet 28 and Connection opening 37.
- the pump 1 shown and its pump-effective elements are expediently designed such that a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and in the area of the connection opening 36 A pressure of approximately 10 -2 to 10 -4 mbar is generated in the area of the connection opening 37.
- the second pumping stage is intended to generate a high pumping speed (eg 200 l / s).
- the subsequent two-stage Holweck pump stage (29, 30; 29, 31) ensures high fore-vacuum resistance, so that the pumping speed of the second pump stage is usually independent of the fore-vacuum pressure.
- the embodiment of Figure 2 differs from the embodiment of Figure 1 in that the Diameter of those following the first pump stage 12 Pump stages 13 and 14 are larger than the diameter the pump stage 12. This fact is the level of Connection openings 36, 37 adapted. It is like that Axis 15 of the rotor 4 inclined that the distance between the connection openings 36, 37 to the associated gas inlets 23, 28 is as small as possible. The angle of inclination a the Level of the connection openings 36, 37 to the rotor axis 15 corresponds to the increase in the diameter of the pump stages. This allows optimally favorable spacing ratios can be achieved. In the illustrated embodiment the angle of inclination is about 5 °.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
Claims (13)
- Einflutige Reibungsvakuumpumpe (1) mit einem Stator (3) und einem Rotor (4), welche mindestens zwei Pumpstufen (12, 13, 14) mit jeweils einem Gaseinlass (23, 28) bilden, sowie mit Anschlussmitteln für die Pumpstufen, welche mit Anschlussöffnungen ( 36, 37) für jeden der Gaseinlässe (23, 28) ausgerüstet sind, wobei die Anschlussöffnungen (36, 37) in einer gemeinsamen Ebene liegen und der Verbindung der Gaseinlässe (23, 28) der Pumpstufen mit einer zu evakuierenden Einrichtung dienen, dadurch gekennzeichnet, dass sich alle Anschlussöffnungen (36, 37) und auch die gemeinsame Ebene der Anschlussöffnungen seitlich neben den Pumpstufen (12, 13, 14) befinden, so dass der Abstand zwischen den Anschlussöffnungen (36, 37) und der Rotorachse (15) möglichst klein wählbar ist.
- Reibungsvakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Ebene der Anschlussöffnungen (36, 37) parallel zur Achse (15) des Rotors (4) angeordnet ist.
- Reibungsvakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass der Durchmesser nachfolgender Pumpstufen (13, 14) größer ist als der Durchmesser vorhergehender Pumpstufen (12, 13) und dass die Neigung der Ebene der Anschlussöffnungen (36, 37) in Bezug auf die Richtung der Achse (15) des Rotors (4) der Durchmesservergrößerung angepasst ist.
- Reibungsvakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Anschlussöffnungen (36, 37) Bestandteile des Gehäuses (2) der Reibungsvakuumpumpe (1) sind.
- Reibungsvakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die beiden ersten Pumpstufen (12, 13) als Turbomolekularpumpenstufen ausgebildet sind und dass ihre pumpwirksamen Elemente (Stator-, Rotorschaufeln) derart gestaltet sind, dass die erste Pumpstufe (12) ein hohes Kompressionsverhältnis sichert und dass die zweite Pumpstufe (13) ein hohes Saugvermögen erzeugt.
- Reibungsvakuumpumpe nach Anspruch 5, dadurch gekennzeichnet, dass die beiden Pumpstufen (12 und 13) voneinander beabstandet sind und dass ihr Abstand (a) größer als ein Viertel des Rotordurchmessers, vorzugsweise etwa ein Drittel des Rotordurchmessers, beträgt.
- Reibungsvakuumpumpe nach Anspruch 6, dadurch gekennzeichnet, dass der Durchmesser derjenigen Anschlussöffnung (37), die über die Anschlussmittel mit dem Gaseinlass (28) der zweiten Pumpstufe verbunden ist, größer als der Abstand (a), vorzugsweise etwa das Doppelte des Abstandes (a), ist.
- Reibungsvakuumpumpe nach Anspruch 5, 6 oder 7, dadurch gekennzeichnet, dass sich an die beiden Pumpstufen (12, 13) eine zweistufige Holweck-Pumpstufe anschließt.
- Reibungsvakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Rotor (4) vorvakuumseitig angetrieben und fliegend gelagert ist.
- Reibungsvakuumpumpe nach Anspruch 9, dadurch gekennzeichnet, dass ein freies Wellenende eine zentrale Bohrung (25) im Rotor (4) durchsetzt und dass der Rotor (4) auf diesem Wellenende befestigt ist.
- Reibungsvakuumpumpe nach Anspruch 9 oder 10, dadurch gekennzeichnet, dass der motornahe Teil des Rotors (4) glockenförmig ausgebildet ist.
- Reibungsvakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass dem Einlass (23) der ersten Pumpstufe (12) eine Blende (38) zur Begrenzung des Saugvermögens zugeordnet ist.
- Reibungsvakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie mit Magnetlagern ausgerüstet ist.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19821634 | 1998-05-14 | ||
DE19821634A DE19821634A1 (de) | 1998-05-14 | 1998-05-14 | Reibungsvakuumpumpe mit Stator und Rotor |
PCT/EP1998/005802 WO1999060275A1 (de) | 1998-05-14 | 1998-09-11 | Reibungsvakuumpumpe mit stator und rotor |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1078166A1 EP1078166A1 (de) | 2001-02-28 |
EP1078166B1 true EP1078166B1 (de) | 2003-06-11 |
EP1078166B2 EP1078166B2 (de) | 2007-09-05 |
Family
ID=7867761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98946450A Expired - Lifetime EP1078166B2 (de) | 1998-05-14 | 1998-09-11 | Reibungsvakuumpumpe mit stator und rotor |
Country Status (10)
Country | Link |
---|---|
US (1) | US6435811B1 (de) |
EP (1) | EP1078166B2 (de) |
JP (1) | JP4173637B2 (de) |
KR (1) | KR20010025024A (de) |
CN (1) | CN1115488C (de) |
AU (1) | AU754944B2 (de) |
CA (1) | CA2332777C (de) |
DE (2) | DE19821634A1 (de) |
TW (1) | TW370594B (de) |
WO (1) | WO1999060275A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6090100A (en) * | 1992-10-01 | 2000-07-18 | Chiron Technolas Gmbh Ophthalmologische Systeme | Excimer laser system for correction of vision with reduced thermal effects |
GB9921983D0 (en) * | 1999-09-16 | 1999-11-17 | Boc Group Plc | Improvements in vacuum pumps |
JP3777498B2 (ja) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | ターボ分子ポンプ |
JP2002138987A (ja) * | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
US7033142B2 (en) * | 2003-01-24 | 2006-04-25 | Pfeifer Vacuum Gmbh | Vacuum pump system for light gases |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
DE10353034A1 (de) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Mehrstufige Reibungsvakuumpumpe |
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
GB0503946D0 (en) * | 2005-02-25 | 2005-04-06 | Boc Group Plc | Vacuum pump |
DE202005019644U1 (de) * | 2005-12-16 | 2007-04-26 | Leybold Vacuum Gmbh | Turbomolekularpumpe |
JP2007231938A (ja) * | 2006-02-06 | 2007-09-13 | Boc Edwards Kk | 真空装置、真空装置における水蒸気分圧の急速低減方法、ロードロックチャンバー内の水蒸気分圧の上昇防止方法、および、真空装置用真空ポンプ |
DE102008024764A1 (de) * | 2008-05-23 | 2009-11-26 | Oerlikon Leybold Vacuum Gmbh | Mehrstufige Vakuumpumpe |
DE202009003880U1 (de) | 2009-03-19 | 2010-08-05 | Oerlikon Leybold Vacuum Gmbh | Multi-Inlet-Vakuumpumpe |
FR2984972A1 (fr) * | 2011-12-26 | 2013-06-28 | Adixen Vacuum Products | Adaptateur pour pompes a vide et dispositif de pompage associe |
EP2757266B1 (de) * | 2013-01-22 | 2016-03-16 | Agilent Technologies, Inc. | Rotationsvakuumpumpe |
DE102013109637A1 (de) * | 2013-09-04 | 2015-03-05 | Pfeiffer Vacuum Gmbh | Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe |
DE102013114290A1 (de) | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP6488898B2 (ja) * | 2015-06-09 | 2019-03-27 | 株式会社島津製作所 | 真空ポンプおよび質量分析装置 |
US10655638B2 (en) | 2018-03-15 | 2020-05-19 | Lam Research Corporation | Turbomolecular pump deposition control and particle management |
US11519419B2 (en) | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
GB2601515B (en) * | 2020-12-02 | 2022-12-28 | Agilent Technologies Inc | Vacuum pump with elastic spacer |
EP4293232A1 (de) * | 2023-10-17 | 2023-12-20 | Pfeiffer Vacuum Technology AG | Pumpe |
EP4379216A1 (de) * | 2024-04-22 | 2024-06-05 | Pfeiffer Vacuum Technology AG | Turbomolekularvakuumpumpe mit kompakter bauform |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3189264A (en) * | 1963-06-04 | 1965-06-15 | Arthur Pfeiffer Company | Vacuum pump drive and seal arrangement |
DE1809902C3 (de) * | 1968-11-20 | 1973-11-15 | Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar | Mehrstufige Turbo Molekularhoch vakuumpumpe |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
DE2442614A1 (de) † | 1974-09-04 | 1976-03-18 | Siemens Ag | Turbomolekularpumpe |
DE3826710A1 (de) * | 1987-08-07 | 1989-02-16 | Japan Atomic Energy Res Inst | Vakuumpumpe |
DE4331589C2 (de) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
EP0603694A1 (de) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
US5733104A (en) | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
US6193461B1 (en) * | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
-
1998
- 1998-05-14 DE DE19821634A patent/DE19821634A1/de not_active Withdrawn
- 1998-09-11 KR KR1020007012771A patent/KR20010025024A/ko not_active Application Discontinuation
- 1998-09-11 DE DE59808723T patent/DE59808723D1/de not_active Expired - Lifetime
- 1998-09-11 CN CN98814028A patent/CN1115488C/zh not_active Expired - Fee Related
- 1998-09-11 EP EP98946450A patent/EP1078166B2/de not_active Expired - Lifetime
- 1998-09-11 AU AU93481/98A patent/AU754944B2/en not_active Ceased
- 1998-09-11 US US09/700,046 patent/US6435811B1/en not_active Expired - Lifetime
- 1998-09-11 CA CA002332777A patent/CA2332777C/en not_active Expired - Fee Related
- 1998-09-11 WO PCT/EP1998/005802 patent/WO1999060275A1/de not_active Application Discontinuation
- 1998-09-11 JP JP2000549859A patent/JP4173637B2/ja not_active Expired - Fee Related
- 1998-10-19 TW TW087117262A patent/TW370594B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1078166B2 (de) | 2007-09-05 |
CA2332777C (en) | 2007-11-06 |
CN1115488C (zh) | 2003-07-23 |
TW370594B (en) | 1999-09-21 |
CN1292851A (zh) | 2001-04-25 |
EP1078166A1 (de) | 2001-02-28 |
DE19821634A1 (de) | 1999-11-18 |
AU9348198A (en) | 1999-12-06 |
JP4173637B2 (ja) | 2008-10-29 |
DE59808723D1 (de) | 2003-07-17 |
JP2002515568A (ja) | 2002-05-28 |
WO1999060275A1 (de) | 1999-11-25 |
AU754944B2 (en) | 2002-11-28 |
CA2332777A1 (en) | 1999-11-25 |
KR20010025024A (ko) | 2001-03-26 |
US6435811B1 (en) | 2002-08-20 |
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