EP1010473B1 - Dispositif et procédé de revêtement d'un substrat plan - Google Patents
Dispositif et procédé de revêtement d'un substrat plan Download PDFInfo
- Publication number
- EP1010473B1 EP1010473B1 EP99811153A EP99811153A EP1010473B1 EP 1010473 B1 EP1010473 B1 EP 1010473B1 EP 99811153 A EP99811153 A EP 99811153A EP 99811153 A EP99811153 A EP 99811153A EP 1010473 B1 EP1010473 B1 EP 1010473B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- coating
- substrate
- medium
- module
- coating module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
- B05C11/1013—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/04—Curtain coater
Definitions
- the invention relates to a device for coating a flat substrate, with a coating module having a capillary gap, according to the preamble of claim 1.
- the invention additionally relates to a method for coating a substrate, comprising a coating module, past which the substrate with the surface to be coated is deposited, and in which a layer of the coating medium deposits on this surface, coating medium being replenished to the coating module during the coating.
- a device of the type mentioned has become known in the prior art from US 5,654,041, US 5,650,196 and WO 94/25177.
- this device for example, rectangular or round plates can be provided with a uniform layer of paint or other initially liquid media such as color filters or special protective layers.
- the use of this device is particularly in the field of thin-film technology in the manufacture of LCD screens, masks for semiconductor manufacturing and semiconductor or ceramic substrates.
- This device is characterized in particular by a high uniformity of the paint layer thickness, in particular on rectangular plates at the same time low paint consumption.
- the substrate is guided with the surface to be coated down over the capillary gap, which is formed so that due to the capillarity of the gap, the coating medium is automatically replenished and with a particularly uniform speed.
- Such capillary action is achieved, for example, with a gap that is less than 0.5 mm wide. Due to the capillary action, the coating medium rises automatically against the force of gravity in the gap and exits at the opening of the capillary gap. In this process, the intermolecular bonding forces, the surface tension, and the peculiarities of surface wetting determine the process. Typical coating speeds are 5 to 15 mm / s. Since the volume flow is essentially determined by the intermolecular bonding forces, the coating speed can not be significantly increased.
- the invention has for its object to provide a device of the type mentioned, which allows a much higher coating speed, but nevertheless ensures a uniform layer thickness with low material consumption.
- the object is achieved by a device according to claim 1.
- the volume flow through the capillary gap is not determined solely by the intermolecular bonding forces, but can be actively determined.
- significantly higher coating speeds for example between 30 and 100 mm / s can be achieved.
- the higher coating speed accordingly enables a higher production and thus a significant reduction in manufacturing costs.
- a particularly reliable filling of the coating space results when an overflow vessel is provided, which is connected via a fluid line with the capillary and arranged over the opening of the capillary gap.
- the overflow vessel is adjustably mounted in height. The height of the overflow vessel is proportional to the medium flow through the capillary gap and thus to the layer thickness.
- the coating module has two plates arranged parallel to one another and a film arranged between them, different capillary gaps can be produced in a simple manner.
- This makes it possible to apply coating media of different viscosity and to generate different Schichtdikken on the variable feed rate of the substrate under the capillary.
- the said capillary gap can be determined in a simple manner by a section of the film.
- the two plates can for example be releasably screwed together. Replacing the film to change the width of the capillary gap is then particularly simple.
- the device 1 shown in FIG. 1 has a coating module 2 which is fastened to a frame 3. Below the coating module 2, a transport device 19 is arranged, with which a substrate 23 to be coated for coating an upper flat surface 23a is preferably guided horizontally past the coating module 2.
- the substrate 23 is in particular a plate or disc, for example a glass or ceramic plate.
- the coating module 2 is connected via a liquid line 14 to an overflow vessel 25, from which the coating medium 28 is replenished to the coating module 2 during coating.
- the coating module 2 has two plates 4 and 5 arranged parallel to one another, between which a film 6 having a defined thickness is arranged.
- the two plates 4 and 5 are made for example of glass or metal and are ground and polished to ensure a corresponding surface quality.
- the film 6 is according to FIG. 2 provided with a cutout 8a which forms a gap 8 which is substantially rectangular and is closed laterally and upwardly.
- the gap 8 has an opening 9 which has a rectangular shape and is formed by parallel, comparatively sharp edges 7 of the plates 4 and 5 and lateral edges 6a of the film 6.
- the width A of the capillary gap 8 is in the range of 5 microns to several millimeters.
- a capillary gap 8 with a width A of 150 microns is suitable.
- the coating medium 28 is in this case applied at a temperature of about 20 ° C and has a viscosity of about 7 mPas -1 .
- the two plates 4 and 5 are screwed firmly together with a plurality of fastening screws 33.
- the film 6 is fixed by the screws 33 and liquid-tight between the plates 4 and 5. After loosening the fixing screws 33, the film can be removed and replaced by another film with a different thickness.
- the width A of the capillary gap 8 can be changed in a simple manner.
- the film 6 is preferably a plastic or metal foil. Such films can be produced with a very small tolerance, for example with a thickness deviation ⁇ 1%.
- the width A of the capillary 8 is thus well defined, but can still be changed by replacing the film 6 in a simple manner.
- a channel 10 is arranged, which extends according to Figure 2 substantially over the entire length of the capillary gap, and which is located in the upper region of the capillary 8.
- This channel 10 is connected via a bore 11 in the plate 5 and via a connecting device 12 with the liquid line 14.
- a control device 16 is provided which is connected via a line 15 to the valve 13.
- the valve 13 is preferably pneumatically controlled. However, it is also conceivable a controller with a stepper motor.
- the conduit 14 is connected to the overflow vessel 25, which is arranged above the opening 9 of the capillary gap 8.
- the overflow vessel 25 is mounted by means of a suitable adjusting device 34 adjustable in height on a support 40.
- the height of the overflow vessel 25 above the opening 9 is in the range of 10 to 50 cm.
- the pressure of the coating medium 28 in the capillary gap 8 is proportional to the height of the liquid level 29a above the opening 9 of the capillary gap 8.
- the overflow vessel 25 has an outer vessel 26 and an inner vessel 27.
- the inner vessel 27 is connected at its lower end to the liquid line 14 and has an overflow edge 29, via which coating medium 28 can pass from the inner vessel 27 into the outer vessel 26.
- a liquid pump 31 delivers via a liquid line 30 coating medium 28 from a reservoir 32 to the overflow vessel 25 to. Excess coating medium 28 is returned via a return line 41 from the overflow vessel 25 to the reservoir 32.
- the liquid level 29a is thus kept constant regardless of the height of the overflow vessel 25 and also independent of the consumption of the coating medium 28 during the coating. Accordingly, this ensures that the pressure of the coating medium 28 in the capillary gap 8 is constant during the coating process.
- the overflow vessel 25 could also be replaced by a screw conveyor or a pressure cylinder. It is essential that medium can be replenished with constant pressure by this device.
- the transport device 19 has an endless conveyor belt 20, which is placed around a drive roller 21 and a deflection roller 22.
- the drive roller 21 is driven by a drive 18, for example an electric motor, which is connected via a signal line 17 to the controller 16.
- a transport carriage or a transport device with rollers.
- the substrate 23 can be held on its underside 23b by suitable means not shown here, for example by means of a vacuum plate.
- the substrate 23 is transported by the transport device 19 from left to right.
- the transport is preferably uniform and can be adjusted continuously by means of the controller 16.
- the substrate 23 is preferably transported in a horizontal orientation. It is also conceivable inclined orientation.
- a design is conceivable in which the substrate 23 is not transported linearly, but is rotated.
- coating medium 28 is conveyed with the pump 31 from the reservoir 32 into the overflow vessel 35.
- the coating medium flows with open valve 13 into the capillary gap 8. Due to the capillary forces, the medium is held in the capillary gap 8, whereby according to FIG. 5 a meniscus 28b is formed.
- the pressure in the liquid 28a here depends in particular on the height of the overflow vessel 25, the viscosity of the coating medium 28 and the temperature.
- the channel 10 promotes a uniform distribution of the coating medium 28 over the entire length of the capillary gap. 8
- valve 13 After coating the substrate 23, the valve 13 is closed again.
- the closing of the valve 13 is preferably carried out before reaching the substrate end, such that upon reaching the substrate end in the gap S, the supply of coating medium is interrupted and the coating medium can not flow over the edge of the substrate end.
- the suitable time for closure depends in particular on the viscosity of the medium 28 and can be optimized in the process.
- the device 1 is now ready for another coating.
- the applied layer 43 is dried in a known manner.
- the layer thickness after drying is for example 2.5 to 3 microns.
- the layer thickness is essentially determined by the viscosity and the solids content of the coating medium 28, as well as the height of the overflow vessel 25 above the opening 9, the width A of the capillary gap 8 and by the transport speed of the substrate 23.
- the above-mentioned layer thickness of 2.5 to 3 ⁇ m is obtained, for example, with a coating medium 28 having a solids content of 10% and a viscosity of about 5.5 mPas -1 .
- the temperature of the coating medium 28 in this case is 20 ° C and the height of the overflow vessel 25 above the surface to be coated 23a is in this case 28 mm.
- the variations in the thickness of the layer 43 are usually less than 1%.
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Optical Filters (AREA)
Claims (14)
- Dispositif pour enduire un substrat plan (23), comprenant un module d'enduction (2) pourvu d'un interstice capillaire (8) qui est rempli d'un produit d'enduction liquide (28) et qui comporte une ouverture (9) devant laquelle défile, à une distance comparativement réduite, une surface à enduire (23a) du substrat (23), de sorte qu'une couche (43) se dépose sur ladite surface (23a), l'interstice capillaire (8) étant ouvert en bas et étant rempli de produit d'enduction (28a) par l'intermédiaire d'une chambre d'alimentation (25, 27), et le substrat (23) défilant sous l'ouverture (9) de l'interstice capillaire (8) avec la surface à enduire (23a) orientée vers le haut, caractérisé en ce qu'en plus est prévu un vase de trop-plein (25) qui est relié à l'interstice capillaire (8) par l'intermédiaire d'une conduite de liquide (14) et qui est disposé au-dessus de l'ouverture (9) de l'interstice capillaire (8) afin de garantir à la couche (43) une épaisseur uniforme.
- Dispositif selon la revendication 1, caractérisé par un dispositif d'amenée (25) pour fournir en continu du produit d'enduction (28) à l'interstice capillaire (28) par l'intermédiaire d'une ouverture (11) du module d'enduction (2).
- Dispositif selon la revendication 2, caractérisé en ce qu'une valve (13) est implantée sur la conduite de liquide (14).
- Dispositif selon une des revendications 1 à 3, caractérisé en ce que le vase de trop-plein (25) est réglable en hauteur.
- Dispositif selon une des revendications 1 à 4, caractérisé en ce que le module d'enduction (2) comporte deux plaques (4, 5) disposées parallèlement l'une à l'autre et une feuille (6) disposée entre ces plaques.
- Dispositif selon la revendication 5, caractérisé en ce que la feuille (6) est échangeable.
- Dispositif selon la revendication 5 ou 6,
caractérisé en ce que les deux plaques (4, 5) sont vissées entre elles de manière détachable. - Dispositif selon une des revendications 1 à 7, caractérisé en ce que l'interstice capillaire (8) est fermé en haut et sur les côtés.
- Procédé pour enduire un substrat (23) à l'aide d'un module d'enduction (2) devant lequel défile la surface à enduire (23a) du substrat (23) et qui dépose alors une couche (43) de produit d'enduction (28) sur cette surface (23a), des produits d'enduction (28) étant fournis en continu au module d'enduction (2) en cours d'enduction, le substrat (23) défilant devant le module d'enduction (2) avec la surface à enduire (23a) tournée vers le haut, et le produit d'enduction (28) étant envoyé au substrat (23) de haut en bas, caractérisé en ce que le produit d'enduction (28) est amené au module d'enduction (2) à partir d'un vase de trop-plein (25) disposé au-dessus du module d'enduction (2), ce qui garantit à la couche (43) une épaisseur uniforme.
- Procédé selon la revendication 9, caractérisé en ce que du produit d'enduction (28) est fourni de manière continue et uniforme au module d'enduction (2) en cours d'enduction à partir du vase de trop-plein (25) au moyen d'une conduite de liquide (14) reliée au module d'enduction (2).
- Procédé selon la revendication 9 ou 10, caractérisé en ce que le produit d'enduction (28) est amené du réservoir (32) au vase de trop-plein (25) et, de celui-ci, au module d'enduction (2).
- Procédé selon la revendication 11, caractérisé en ce que le produit d'enduction (28) qui déborde dans le vase de trop-plein (25) est renvoyé au réservoir (32).
- Procédé selon une des revendications 10 à 12, caractérisé en ce qu'il est prévu une valve (13) commandée par un dispositif de commande (16) ainsi qu'un dispositif de transport (19) pour le substrat (23), et en ce que le dispositif de commande (16) commande le dispositif de transport (19).
- Procédé selon une des revendications 10 à 13, caractérisé en ce qu'après ouverture de la valve (13) et utilisation du substrat (23) à l'arrêt, le substrat (23) est transporté pour enduction pendant un laps de temps prédéterminé en activant le dispositif de transport (19).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH249698 | 1998-12-17 | ||
CH249698 | 1998-12-17 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1010473A2 EP1010473A2 (fr) | 2000-06-21 |
EP1010473A3 EP1010473A3 (fr) | 2003-05-28 |
EP1010473B1 true EP1010473B1 (fr) | 2006-07-12 |
Family
ID=4235122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99811153A Expired - Lifetime EP1010473B1 (fr) | 1998-12-17 | 1999-12-13 | Dispositif et procédé de revêtement d'un substrat plan |
Country Status (6)
Country | Link |
---|---|
US (1) | US6383571B1 (fr) |
EP (1) | EP1010473B1 (fr) |
CA (1) | CA2292271C (fr) |
DE (1) | DE59913661D1 (fr) |
ES (1) | ES2274611T3 (fr) |
MX (1) | MXPA99011776A (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009172556A (ja) * | 2008-01-28 | 2009-08-06 | Seiko Epson Corp | スリットコート式塗布装置及び塗布方法 |
JP5719546B2 (ja) * | 2009-09-08 | 2015-05-20 | 東京応化工業株式会社 | 塗布装置及び塗布方法 |
US8608525B1 (en) | 2012-06-05 | 2013-12-17 | Guardian Industries Corp. | Coated articles and/or devices with optical out-coupling layer stacks (OCLS), and/or methods of making the same |
US9956752B2 (en) | 2012-10-04 | 2018-05-01 | Guardian Glass, LLC | Methods of making laminated LED array and/or products including the same |
US9651231B2 (en) | 2012-10-04 | 2017-05-16 | Guardian Industries Corp. | Laminated LED array and/or products including the same |
US9696012B2 (en) | 2012-10-04 | 2017-07-04 | Guardian Industries Corp. | Embedded LED assembly with optional beam steering optical element, and associated products, and/or methods |
US9263701B2 (en) | 2013-03-14 | 2016-02-16 | Guardian Industries Corp. | Coated article and/or device with optical out-coupling layer stack (OCLS) including vacuum deposited index match layer over scattering matrix, and/or associated methods |
JP6272138B2 (ja) * | 2014-05-22 | 2018-01-31 | 東京エレクトロン株式会社 | 塗布処理装置 |
CN105080789B (zh) * | 2015-08-10 | 2017-11-07 | 深圳市华星光电技术有限公司 | 涂布装置及涂布器 |
US10823541B2 (en) * | 2016-05-18 | 2020-11-03 | San Diego State University Research Foundation | Methods and systems for ballistic manufacturing of micro/nano coatings and artifacts |
CN105964481A (zh) * | 2016-06-11 | 2016-09-28 | 深圳市新嘉拓自动化技术有限公司 | 双模腔模头 |
KR101990704B1 (ko) * | 2017-11-24 | 2019-06-18 | 고려대학교 산학협력단 | 코팅 비드 영역이 개선된 슬롯 코팅 장치 |
CN108107523A (zh) * | 2017-12-29 | 2018-06-01 | 山东太平洋光纤光缆有限公司 | 一种缓冲型紧套光纤润滑层生产装置 |
CN109759282B (zh) * | 2019-03-19 | 2023-06-16 | 宁波甬安光科新材料科技有限公司 | 一种用于连续稳定均匀涂胶的供胶装置及胶液涂布方法 |
WO2021019435A1 (fr) * | 2019-07-29 | 2021-02-04 | Xtpl S.A. | Procédés de distribution d'une composition de nanoparticules métalliques par une buse sur un substrat |
EP3825012A1 (fr) * | 2019-11-22 | 2021-05-26 | Bostik Sa | Utilisation d'une ébauche de plaque de calage pour empêcher les bavures dans un revêtement de filière plate |
CN111229541B (zh) * | 2020-03-17 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | 用于单面涂膜的降液式提拉涂膜机 |
CN113210198A (zh) * | 2021-04-27 | 2021-08-06 | 深圳顺络电子股份有限公司 | 一种流延设备 |
CN113893997B (zh) * | 2021-09-26 | 2023-02-10 | 浙江航威专用设备有限公司 | 一种狭缝涂布头 |
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GB1395988A (en) * | 1972-10-26 | 1975-05-29 | Armour Moore Marine Service | Surface treatment |
FR2323456A1 (fr) * | 1975-09-10 | 1977-04-08 | Omnitechnic Gmbh | Dispositif pour l'enduction d'une zone determinee de pieces usinees de forme cylindrique avec une substance visqueuse |
US4489671A (en) | 1978-07-03 | 1984-12-25 | Polaroid Corporation | Coating apparatus |
US4445458A (en) | 1982-07-21 | 1984-05-01 | E. I. Du Pont De Nemours And Company | Beveled edge metered bead extrusion coating apparatus |
US4485387A (en) | 1982-10-26 | 1984-11-27 | Microscience Systems Corp. | Inking system for producing circuit patterns |
US4605573A (en) | 1985-02-11 | 1986-08-12 | Celanese Corporation | Methods and apparatus for applying a finish liquid to a bundle of filmentary material |
JPH0677711B2 (ja) | 1986-07-15 | 1994-10-05 | 富士写真フイルム株式会社 | 塗布装置 |
US4735169A (en) * | 1986-09-03 | 1988-04-05 | Nordson Corporation | Adhesive applicator assembly |
US4938994A (en) | 1987-11-23 | 1990-07-03 | Epicor Technology, Inc. | Method and apparatus for patch coating printed circuit boards |
JPH02277571A (ja) * | 1989-04-17 | 1990-11-14 | Mitsubishi Heavy Ind Ltd | 塗工装置 |
US5516545A (en) * | 1991-03-26 | 1996-05-14 | Sandock; Leonard R. | Coating processes and apparatus |
US5622747A (en) * | 1991-09-18 | 1997-04-22 | National Semiconductor Corporation | Method for dispensing a layer of photoresist on a wafer without spinning the wafer |
JPH05235388A (ja) | 1992-02-24 | 1993-09-10 | Mitsubishi Electric Corp | 低抵抗線状パターンの形成方法及び形成装置並びに太陽電池 |
US5455062A (en) | 1992-05-28 | 1995-10-03 | Steag Microtech Gmbh Sternenfels | Capillary device for lacquering or coating plates or disks |
KR0153355B1 (ko) | 1993-05-05 | 1998-11-16 | 페터 옐리히; 울리히 비블 | 플레이트 또는 디스크를 래커링 또는 코팅하기 위한 장치 |
US5650196A (en) | 1993-05-05 | 1997-07-22 | Steag Microtech Gmbh | Device for coating substrates in semiconductor production |
DE4445985A1 (de) * | 1994-12-22 | 1996-06-27 | Steag Micro Tech Gmbh | Verfahren und Vorrichtung zur Belackung oder Beschichtung eines Substrats |
EP0761317B1 (fr) * | 1994-12-28 | 2002-07-10 | Toray Industries, Inc. | Procede de depot d'une revetement et appareil associe |
US5871585A (en) * | 1996-03-20 | 1999-02-16 | Minnesota Mining And Maufacturing Company | Apparatus for applying a fluid to a moving web of material |
WO1998042451A1 (fr) | 1997-03-25 | 1998-10-01 | Tyco Group S.A.R.L. | Gainage capillaire double |
-
1999
- 1999-12-13 ES ES99811153T patent/ES2274611T3/es not_active Expired - Lifetime
- 1999-12-13 EP EP99811153A patent/EP1010473B1/fr not_active Expired - Lifetime
- 1999-12-13 DE DE59913661T patent/DE59913661D1/de not_active Expired - Lifetime
- 1999-12-15 MX MXPA99011776A patent/MXPA99011776A/es not_active IP Right Cessation
- 1999-12-16 CA CA002292271A patent/CA2292271C/fr not_active Expired - Fee Related
- 1999-12-17 US US09/466,584 patent/US6383571B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
MXPA99011776A (es) | 2005-04-19 |
CA2292271A1 (fr) | 2000-06-17 |
EP1010473A2 (fr) | 2000-06-21 |
CA2292271C (fr) | 2008-03-18 |
EP1010473A3 (fr) | 2003-05-28 |
US6383571B1 (en) | 2002-05-07 |
DE59913661D1 (de) | 2006-08-24 |
ES2274611T3 (es) | 2007-05-16 |
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