EP0889501A1 - Ionization cell for a mass spectrometer - Google Patents
Ionization cell for a mass spectrometer Download PDFInfo
- Publication number
- EP0889501A1 EP0889501A1 EP98401523A EP98401523A EP0889501A1 EP 0889501 A1 EP0889501 A1 EP 0889501A1 EP 98401523 A EP98401523 A EP 98401523A EP 98401523 A EP98401523 A EP 98401523A EP 0889501 A1 EP0889501 A1 EP 0889501A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- cathode
- anode
- ionization
- mass spectrometer
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
Definitions
- the present invention relates to an ionization cell for mass spectrometer.
- the invention applies to mass spectrometers in which the electron emitting heating electric filament is replaced by a cold microtip cathode.
- the cold cathode at microdots degrades due to the too large number of ions formed between the cathode and anode, forming an ionization cage.
- These ions, positive, formed between the cathode and the ionization cage indeed return to the cathode negative.
- the present invention aims to overcome this drawback and has for object an ionization cell for mass spectrometer comprising a cold cathode with electron-emitting microtips, an anode, forming a cage ionization, in non-magnetic material, positively polarized with respect to said cathode and having an entry slot for the emitted electrons, being located opposite said cathode, characterized in that it further comprises an ion collecting electrode brought to a potential lower than that of said cathode and located outside the space going from the cathode to the anode, but placed laterally with respect to this space from the cathode to the anode, and in this that an axial magnetic field ⁇ is created in the cathode-anode direction.
- Figure 1 is a schematic view showing an ionization cell according to the invention.
- Figure 2 is an electrical diagram showing the electrical connections elements of figure 1.
- an ionization cell comprises a ceramic substrate 1 serving as a support for a cold cathode to microtips 2, associated with a grid 3, an anode 4 in the form of a box parallelepiped in non-magnetic material forming a faraday cage and constituting an ionization cage and comprising an inlet slot 5 of electrons emitted by cold cathode 2 and an extraction slot 6 for ions ions formed in the ionization cage.
- the extraction of ions through the extraction slot 6 as well as the selection of ions, is not part of the invention and is carried out, for example, from a classic way as in the analysis cells where the emission of electrons, for the production of ions, is carried out by a heating filament.
- an ion collecting electrode 7 brought to a potential lower than that of the cold cathode 2.
- This ion collecting electrode 7 makes it possible to capture all the ions formed between cathode 2 anode 4.
- this electrode 7 is located outside of the space 8 going from cathode 2 to anode 4, but is placed laterally by relative to this space and covering the entire distance between cathode 2 of the anode 4.
- the electrode 7 is bent behind the support substrate 1 and the assembly is fixed to a frame, not shown.
- an axial magnetic field ⁇ is created directed as indicated by the arrow, in the cathode-anode direction. Indeed, without this field, because of the electrode 7, the electrons would be deflected by the field electrostatic created by this collecting electrode 7.
- the magnetic field ⁇ is created by an electromagnetic coil or by magnets, not shown.
- FIG. 2 shows the electrical connections of the different electrodes.
Abstract
Description
La présente invention concerne une cellule d'ionisation pour spectromètre de masse.The present invention relates to an ionization cell for mass spectrometer.
En particulier, l'invention s'applique aux spectromètres de masse dans lesquels le filament électrique chauffant émetteur d'électrons est remplacé par une cathode froide à micropointes.In particular, the invention applies to mass spectrometers in which the electron emitting heating electric filament is replaced by a cold microtip cathode.
On connaít les avantages d'une telle cathode froide par rapport à un filament de tungstène chauffé à 1800°C :
- le très bon rendement énergétique qui se situe pratiquement à 1, tout
électron émis étant prélevé à la source émissive dans un
rapport 1/1, contrairement au filament de tungstène qu'il est nécessaire de chauffer avec un courant important pour qu'il puisse émettre des électrons par effet thermoélectronique. Les ordres de grandeur des puissances mises en jeu sont : 10 W pour un filament chauffé, contre 0,2 W pour une source froide, - la rapidité de réaction du dispositif, aussi bien à l'allumage qu'à l'extinction : en cas d'entrée d'air brutale, le système peut être désactivé instantanément, contrairement au filament de tungstène qui va brûler à cause de son inertie thermique. Cette rapidité de réaction permet de plus d'envisager de couper l'alimentation du dispositif quand l'appareil n'est pas en mode mesure, et de le rallumer lorsqu'on veut effectuer une mesure,
- la directivité du faisceau émis : les électrons sont émis : perpendiculairement à la surface du réseau de micropointes, contrairement à un filament pour lequel les électrons sont émis dans tout l'espace,
- l'absence de dissipation thermique : le dispositif émettant des électrons par effet de champ ne dégage aucune chaleur, et par conséquent, ne perturbe pas les préamplificateurs de détection qui sont sensibles à la température.
- the very good energy efficiency which is practically 1, all electron emitted being taken from the emissive source in a 1/1 ratio, unlike the tungsten filament which it is necessary to heat with a large current for it to emit electrons by thermoelectronic effect. The orders of magnitude of the powers involved are: 10 W for a heated filament, against 0.2 W for a cold source,
- the speed of reaction of the device, both on switching on and off: in the event of sudden air entering, the system can be deactivated instantly, unlike the tungsten filament which will burn due to its inertia thermal. This speed of reaction also makes it possible to consider cutting the power supply to the device when the device is not in measurement mode, and turning it back on when a measurement is to be made,
- the directivity of the emitted beam: the electrons are emitted: perpendicular to the surface of the microtip array, unlike a filament for which the electrons are emitted throughout the space,
- the absence of heat dissipation: the device emitting electrons by field effect does not give off any heat, and therefore does not disturb the detection preamplifiers which are sensitive to temperature.
Cependant, la fiabilité et la capacité de fonctionnement à des pressions de l'ordre de 10-4 mbar ne sont pas assurées.However, reliability and ability to operate at pressures of the order of 10-4 mbar are not insured.
En effet, à partir de cette pression, et au-dessus, la cathode froide à micropointes se dégrade à cause du trop grand nombre d'ions formés entre la cathode et l'anode, formant une cage d'ionisation. Ces ions, positifs, formés entre la cathode et la cage d'ionisation reviennent en effet vers la cathode négative.Indeed, from this pressure, and above, the cold cathode at microdots degrades due to the too large number of ions formed between the cathode and anode, forming an ionization cage. These ions, positive, formed between the cathode and the ionization cage indeed return to the cathode negative.
La présente invention a pour but de pallier cet inconvénient et a pour objet une cellule d'ionisation pour spectromètre de masse comprenant une cathode froide à micropointes émettrice d'électrons, une anode, formant cage d'ionisation, en matériau amagnétique, polarisée positivement par rapport à ladite cathode et comportant une fente d'entrée pour les électrons émis, étant située en face de ladite cathode, caractérisée en ce qu'elle comporte en outre une électrode collectrice d'ions portée à un potentiel inférieur à celui de ladite cathode et située hors de l'espace allant de la cathode à l'anode, mais placée latéralement par rapport à cet espace depuis la cathode jusqu'à l'anode, et en ce qu'un champ magnétique axial β est créé dans le sens cathode-anode.The present invention aims to overcome this drawback and has for object an ionization cell for mass spectrometer comprising a cold cathode with electron-emitting microtips, an anode, forming a cage ionization, in non-magnetic material, positively polarized with respect to said cathode and having an entry slot for the emitted electrons, being located opposite said cathode, characterized in that it further comprises an ion collecting electrode brought to a potential lower than that of said cathode and located outside the space going from the cathode to the anode, but placed laterally with respect to this space from the cathode to the anode, and in this that an axial magnetic field β is created in the cathode-anode direction.
On va maintenant donner la description d'un exemple de mise en oeuvre de l'invention en se référant au dessin annexé dans lequel :We will now give the description of an example of implementation of the invention with reference to the accompanying drawing in which:
La figure 1 est une vue schématique montrant une cellule d'ionisation selon l'invention.Figure 1 is a schematic view showing an ionization cell according to the invention.
La figure 2 est un schéma électrique montrant les connexions électriques des éléments de la figure 1.Figure 2 is an electrical diagram showing the electrical connections elements of figure 1.
En se référant à la figure 1, une cellule d'ionisation selon l'invention
comprend un substrat en céramique 1 servant de support à une cathode froide à
micropointes 2, associée à une grille 3, une anode 4 en forme de boíte
parallélépipédique en matériau amagnétique formant cage de faraday et
constituant une cage d'ionisation et comportant une fente d'entrée 5 des
électrons émis par la cathode froide 2 et une fente d'extraction 6 des ions ⊕
formés dans la cage d'ionisation.Referring to Figure 1, an ionization cell according to the invention
comprises a
L'extraction des ions par la fente d'extraction 6 ainsi que la sélection des
ions, ne fait pas partie de l'invention et est effectuée, par exemple, d'une
manière classique comme dans les cellules d'analyse où l'émission des
électrons, pour la production des ions, est effectuée par un filament chauffant.The extraction of ions through the
Conformément à l'invention, afin d'éviter que les ions formés entre la
cathode froide 2 et l'anode-cage d'ionisation 4 ne reviennent vers les pointes de
la cathode et ne les dégradent, on dispose une électrode collectrice d'ions 7
portée à un potentiel inférieur à celui de la cathode froide 2.In accordance with the invention, in order to prevent the ions formed between the
Cette électrode collectrice d'ions 7 permet de capter tous les ions formés
entre la cathode 2 l'anode 4.This
Comme le montre la figure 1, cette électrode 7 est située en dehors de
l'espace 8 allant de la cathode 2 à l'anode 4, mais est placée latéralement par
rapport à cet espace et en couvrant toute la distance séparant la cathode 2 de
l'anode 4. Pour des facilités mécaniques de liaison, l'électrode 7 est recourbée
derrière le substrat support 1 et l'ensemble est fixé à un bâti non représenté. Afin
que les électrons émis par la cathode 2 se dirigent néanmoins vers la fente
d'entrée 5 de l'anode-cage d'ionisation 4, on crée un champ magnétique axial β
dirigé comme l'indique la flèche, dans le sens cathode-anode. En effet, sans ce
champ, à cause de l'électrode 7, les électrons seraient déviés par le champ
électrostatique créé par cette électrode collectrice 7.As shown in FIG. 1, this
Le champ magnétique β est créé par une bobine électromagnétique ou par des aimants, non représentés.The magnetic field β is created by an electromagnetic coil or by magnets, not shown.
Dans la figure 1, le signe ⊕ représente un ion positif, le signe O une molécule neutre et e- un électron.In Figure 1, the sign ⊕ represents a positive ion, the sign O a neutral molecule and e - an electron.
La figure 2 montre les connexions électriques des différentes électrodes.Figure 2 shows the electrical connections of the different electrodes.
A titre d'exemple, on peut avoir les valeurs suivantes pour les tensions
entre les différentes électrodes :
Claims (1)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9708440A FR2765728B1 (en) | 1997-07-03 | 1997-07-03 | IONIZATION CELL FOR MASS SPECTROMETER |
FR9708440 | 1997-07-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0889501A1 true EP0889501A1 (en) | 1999-01-07 |
EP0889501B1 EP0889501B1 (en) | 2003-09-10 |
Family
ID=9508822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98401523A Expired - Lifetime EP0889501B1 (en) | 1997-07-03 | 1998-06-22 | Ionization cell for a mass spectrometer |
Country Status (5)
Country | Link |
---|---|
US (1) | US6111252A (en) |
EP (1) | EP0889501B1 (en) |
JP (1) | JP4071362B2 (en) |
DE (1) | DE69817929T2 (en) |
FR (1) | FR2765728B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100445421C (en) * | 2005-07-08 | 2008-12-24 | 清华大学 | Sputter ion pump |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3852595A (en) * | 1972-09-21 | 1974-12-03 | Stanford Research Inst | Multipoint field ionization source |
DE4137527A1 (en) * | 1991-11-14 | 1993-05-19 | Siemens Ag | Ionisation gas pressure gauge for low pressure measurement - has electron emitting cathode with numerous field emitter elements, and applies positive voltage to extraction grating |
JPH05190148A (en) * | 1992-01-14 | 1993-07-30 | Matsushita Electric Works Ltd | Luminous element |
US5541408A (en) * | 1993-11-01 | 1996-07-30 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2810736A1 (en) * | 1978-03-13 | 1979-09-27 | Max Planck Gesellschaft | FIELD EMISSION CATHODE AND MANUFACTURING METHOD AND USE FOR IT |
-
1997
- 1997-07-03 FR FR9708440A patent/FR2765728B1/en not_active Expired - Fee Related
-
1998
- 1998-06-22 DE DE69817929T patent/DE69817929T2/en not_active Expired - Fee Related
- 1998-06-22 EP EP98401523A patent/EP0889501B1/en not_active Expired - Lifetime
- 1998-07-01 US US09/108,176 patent/US6111252A/en not_active Expired - Fee Related
- 1998-07-03 JP JP18947098A patent/JP4071362B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3852595A (en) * | 1972-09-21 | 1974-12-03 | Stanford Research Inst | Multipoint field ionization source |
DE4137527A1 (en) * | 1991-11-14 | 1993-05-19 | Siemens Ag | Ionisation gas pressure gauge for low pressure measurement - has electron emitting cathode with numerous field emitter elements, and applies positive voltage to extraction grating |
JPH05190148A (en) * | 1992-01-14 | 1993-07-30 | Matsushita Electric Works Ltd | Luminous element |
US5541408A (en) * | 1993-11-01 | 1996-07-30 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 017, no. 608 (E - 1457) 9 November 1993 (1993-11-09) * |
Also Published As
Publication number | Publication date |
---|---|
FR2765728A1 (en) | 1999-01-08 |
DE69817929D1 (en) | 2003-10-16 |
EP0889501B1 (en) | 2003-09-10 |
JPH1173909A (en) | 1999-03-16 |
US6111252A (en) | 2000-08-29 |
DE69817929T2 (en) | 2004-07-22 |
JP4071362B2 (en) | 2008-04-02 |
FR2765728B1 (en) | 1999-09-24 |
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