EP0889501A1 - Ionisatinszelle für Massenspektrometer - Google Patents

Ionisatinszelle für Massenspektrometer Download PDF

Info

Publication number
EP0889501A1
EP0889501A1 EP98401523A EP98401523A EP0889501A1 EP 0889501 A1 EP0889501 A1 EP 0889501A1 EP 98401523 A EP98401523 A EP 98401523A EP 98401523 A EP98401523 A EP 98401523A EP 0889501 A1 EP0889501 A1 EP 0889501A1
Authority
EP
European Patent Office
Prior art keywords
cathode
anode
ionization
mass spectrometer
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98401523A
Other languages
English (en)
French (fr)
Other versions
EP0889501B1 (de
Inventor
Didier Pierrejean
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Alcatel Alsthom Compagnie Generale dElectricite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA, Alcatel Alsthom Compagnie Generale dElectricite filed Critical Alcatel SA
Publication of EP0889501A1 publication Critical patent/EP0889501A1/de
Application granted granted Critical
Publication of EP0889501B1 publication Critical patent/EP0889501B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment

Definitions

  • the present invention relates to an ionization cell for mass spectrometer.
  • the invention applies to mass spectrometers in which the electron emitting heating electric filament is replaced by a cold microtip cathode.
  • the cold cathode at microdots degrades due to the too large number of ions formed between the cathode and anode, forming an ionization cage.
  • These ions, positive, formed between the cathode and the ionization cage indeed return to the cathode negative.
  • the present invention aims to overcome this drawback and has for object an ionization cell for mass spectrometer comprising a cold cathode with electron-emitting microtips, an anode, forming a cage ionization, in non-magnetic material, positively polarized with respect to said cathode and having an entry slot for the emitted electrons, being located opposite said cathode, characterized in that it further comprises an ion collecting electrode brought to a potential lower than that of said cathode and located outside the space going from the cathode to the anode, but placed laterally with respect to this space from the cathode to the anode, and in this that an axial magnetic field ⁇ is created in the cathode-anode direction.
  • Figure 1 is a schematic view showing an ionization cell according to the invention.
  • Figure 2 is an electrical diagram showing the electrical connections elements of figure 1.
  • an ionization cell comprises a ceramic substrate 1 serving as a support for a cold cathode to microtips 2, associated with a grid 3, an anode 4 in the form of a box parallelepiped in non-magnetic material forming a faraday cage and constituting an ionization cage and comprising an inlet slot 5 of electrons emitted by cold cathode 2 and an extraction slot 6 for ions ions formed in the ionization cage.
  • the extraction of ions through the extraction slot 6 as well as the selection of ions, is not part of the invention and is carried out, for example, from a classic way as in the analysis cells where the emission of electrons, for the production of ions, is carried out by a heating filament.
  • an ion collecting electrode 7 brought to a potential lower than that of the cold cathode 2.
  • This ion collecting electrode 7 makes it possible to capture all the ions formed between cathode 2 anode 4.
  • this electrode 7 is located outside of the space 8 going from cathode 2 to anode 4, but is placed laterally by relative to this space and covering the entire distance between cathode 2 of the anode 4.
  • the electrode 7 is bent behind the support substrate 1 and the assembly is fixed to a frame, not shown.
  • an axial magnetic field ⁇ is created directed as indicated by the arrow, in the cathode-anode direction. Indeed, without this field, because of the electrode 7, the electrons would be deflected by the field electrostatic created by this collecting electrode 7.
  • the magnetic field ⁇ is created by an electromagnetic coil or by magnets, not shown.
  • FIG. 2 shows the electrical connections of the different electrodes.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP98401523A 1997-07-03 1998-06-22 Ionisationszelle für Massenspektrometer Expired - Lifetime EP0889501B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9708440 1997-07-03
FR9708440A FR2765728B1 (fr) 1997-07-03 1997-07-03 Cellule d'ionisation pour spectrometre de masse

Publications (2)

Publication Number Publication Date
EP0889501A1 true EP0889501A1 (de) 1999-01-07
EP0889501B1 EP0889501B1 (de) 2003-09-10

Family

ID=9508822

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98401523A Expired - Lifetime EP0889501B1 (de) 1997-07-03 1998-06-22 Ionisationszelle für Massenspektrometer

Country Status (5)

Country Link
US (1) US6111252A (de)
EP (1) EP0889501B1 (de)
JP (1) JP4071362B2 (de)
DE (1) DE69817929T2 (de)
FR (1) FR2765728B1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100445421C (zh) * 2005-07-08 2008-12-24 清华大学 溅射离子泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3852595A (en) * 1972-09-21 1974-12-03 Stanford Research Inst Multipoint field ionization source
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
JPH05190148A (ja) * 1992-01-14 1993-07-30 Matsushita Electric Works Ltd 発光素子
US5541408A (en) * 1993-11-01 1996-07-30 Rosemount Analytical Inc. Micromachined mass spectrometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810736A1 (de) * 1978-03-13 1979-09-27 Max Planck Gesellschaft Feldemissionskathode sowie herstellungsverfahren und verwendung hierfuer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3852595A (en) * 1972-09-21 1974-12-03 Stanford Research Inst Multipoint field ionization source
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
JPH05190148A (ja) * 1992-01-14 1993-07-30 Matsushita Electric Works Ltd 発光素子
US5541408A (en) * 1993-11-01 1996-07-30 Rosemount Analytical Inc. Micromachined mass spectrometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 017, no. 608 (E - 1457) 9 November 1993 (1993-11-09) *

Also Published As

Publication number Publication date
FR2765728B1 (fr) 1999-09-24
EP0889501B1 (de) 2003-09-10
JPH1173909A (ja) 1999-03-16
JP4071362B2 (ja) 2008-04-02
DE69817929T2 (de) 2004-07-22
DE69817929D1 (de) 2003-10-16
US6111252A (en) 2000-08-29
FR2765728A1 (fr) 1999-01-08

Similar Documents

Publication Publication Date Title
JP2010192454A (ja) 間接的に加熱されるカソードイオン源に使用されるカソード組立体
US5463277A (en) Micro vacuum device
EP0480518B1 (de) Elektronenquelle mit teilchenhaltender Anordnung
US6236156B1 (en) Micro vacuum pump for maintaining high degree of vacuum and apparatus including the same
US5543625A (en) Filament assembly for mass spectrometer ion sources
EP0889501B1 (de) Ionisationszelle für Massenspektrometer
EP0132180B1 (de) Röntgenröhre mit Drehanode und Mittel zur Abführung des Anodenstromes
EP0077738A1 (de) Ionenquelle mit Gasionisierungsraum mit Elektronenschwingungen
EP0295743B1 (de) Ionenquelle mit vier Elektroden
EP1162648A1 (de) Hohlkathodenlampe
US6060839A (en) Thin diamond electron beam amplifier
WO2002089168A2 (en) Silicon-based dielectric tunneling emitter
JP2001505355A (ja) マイクロチップ支持体を通して観測可能なマイクロチップ電子源を備えたディスプレイスクリーンならびにマイクロチップ電子源の製造方法
JPH10223162A (ja) 電子管
FR2714966A1 (fr) Jauge à ionisation munie d'une cathode à micropointes.
EP0300932B1 (de) ELektronenquelle
FR2792770A1 (fr) Fonctionnement a haute pression d'une cathode froide a emission de champ
US3527937A (en) Electron bombardment type ion source for a mass spectrometer
JPH1186778A (ja) イオン化装置
WO1994014153A1 (fr) Ecran plat a micropointes protegees individuellement par dipole
FR2645676A1 (fr) Cathode possedant une surface d'emission secondaire amelioree et amplificateur a champ croise contenant une telle cathode
JP2000243354A (ja) ホローカソードランプ
TW202221760A (zh) 用於質譜儀中的具有多個電離體積的離子源元件
TW202131366A (zh) 光調變電子源
JP2001523388A (ja) セシウム源を有する電子管

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): CH DE GB IT LI

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL

17P Request for examination filed

Effective date: 19990707

AKX Designation fees paid

Free format text: CH DE GB IT LI

17Q First examination report despatched

Effective date: 20020927

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE GB IT LI

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: CRONIN INTELLECTUAL PROPERTY

REF Corresponds to:

Ref document number: 69817929

Country of ref document: DE

Date of ref document: 20031016

Kind code of ref document: P

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20031029

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20040614

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20060630

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20070622

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20070621

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20080613

Year of fee payment: 11

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20080622

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080622

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070622

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630