EP0825346A1 - Inlet-stage for a double-flow gas friction pump - Google Patents
Inlet-stage for a double-flow gas friction pump Download PDFInfo
- Publication number
- EP0825346A1 EP0825346A1 EP97112843A EP97112843A EP0825346A1 EP 0825346 A1 EP0825346 A1 EP 0825346A1 EP 97112843 A EP97112843 A EP 97112843A EP 97112843 A EP97112843 A EP 97112843A EP 0825346 A1 EP0825346 A1 EP 0825346A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- double
- pump
- gas
- rotor
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010276 construction Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 21
- 238000005086 pumping Methods 0.000 description 6
- 230000003993 interaction Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000006735 deficit Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Definitions
- the invention relates to an input stage for a double-flow gas friction pump according to the preamble of the first claim.
- Single-flow pumps have the advantage that the connection flange and thus the recipient to be evacuated directly to the high vacuum side of the pump rotor. So the gas to be pumped immediately and taken over by pump-active parts without significant flow resistance and be promoted.
- Double-flow pumps have the disadvantage that the gas flow from Intake flange must first be redirected to the pump active Parts to reach. This is with a high flow resistance and thus associated with great losses in pumping speed.
- Still own double-flow pumps have fundamental advantages over single-flow designs. Both with conventional bearings with ball bearings and with Magnetic bearings of various designs can be Easier to meet stability criteria with double-flow pumps. Come in addition, that the bearings and drive elements are always on the fore-vacuum side and therefore no impairment of the high vacuum by this occurs.
- the invention has for its object the advantages of double-flow gas friction pumps especially the fact that in the intake area double active pumping area available compared to single-flow pumps stands to be able to use better.
- Figure 1 shows the arrangement according to the invention in connection with a Turbomolecular pump.
- Figure 2 shows the arrangement according to the invention in connection with a Molecular pump of the Holweck pump type.
- Figure 3 shows an example of a device with a gas-producing structure.
- FIG. 1 is a gas friction pump in the form of a double flow turbomolecular pump shown. It is in the housing 1 with a suction opening 2 and gas outlet opening 3, a rotor shaft 10 is supported in bearing devices 13. The drive for the rotor shaft is designated by 12. On the rotor shaft there are impellers 8, which are equipped with blades. The wheels 8 opposite stator disks 4 are attached with appropriate blades. The interaction of the impellers 8 with the stator disks 4 causes the Pump effect.
- These rotor and stator elements are - as shown here - with double flow Turbomolecular pumps perpendicular to the plane of the intake opening 2 arranged. So that the gas flow from the suction opening 2 the rotor and Stator elements can be supplied better, is according to the invention
- a device 15 is present, which has a gas-producing structure has and rotates with the rotor elements.
- FIG. 3 An example of such a device is shown in Figure 3. It deals is a paddle wheel, in which either an inner ring 17 or two outer rings 18 are equipped with blades 16.
- the inner ring can be a disk 19 be formed, which is fixedly connected to the rotor shaft 10.
- FIG 2 is a gas friction pump in the form of a double flow molecular pump after the execution of Holweck.
- a helical one Groove 5 as a stator element is a smooth cylinder 9 as a rotor element.
- the interaction of these two creates the pumping effect.
- a device 15 is present which is a gas-producing Has structure and rotates with the rotor elements. Fixing this Device with the rotating parts can, as in the first example, via a inner disc 19 directly with the rotor shaft 10 or via outer rings 18 the rotating cylinder 9.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Die Erfindung betrifft eine Eingangsstufe für eine zweiflutige Gasreibungspumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to an input stage for a double-flow gas friction pump according to the preamble of the first claim.
Bei der ersten Gasreibungspumpe nach Gaede rotiert ein zylindrischer Läufer in einem zylindrischen Gehäuse mit einer ringförmigen Nut, welche an einer Stelle unterbrochen ist. Zur Erhöhung des Druckverhältnisses kann man in dieser Anordnung mehrere Stufen hintereinander schalten. Eine Weiterentwicklung stellt die Konstruktion von Holweck dar, bei welcher an die Stelle mehrerer solcher Stufen eine wendelförmige Nut tritt. Eine Konstruktion von Siegbahn weist spiralförmige Nuten zu beiden Seiten eines diskusförmigen Läufers auf. Diese Pumpen zeichnen sich durch ein hohes Druckverhältnis aus und sind daher, was besonders für die beiden letztgenannten Typen gilt, für solche Einsatzgebiete gut geeignet, bei denen ein hoher Vorvakuumdruck bewältigt werden muß. Dagegen ist jedoch, bedingt durch die engen Kanäle, ihr Saugvermögen sehr begrenzt. Ein weitaus höheres Saugvermögen liefern Turbomolekularpumpen, welche durch ihre turbinenartige Konstruktion ein höheres Schöpfvolumen aufweisen.In the first gas friction pump according to Gaede, a cylindrical rotor rotates in a cylindrical housing with an annular groove, which at one point is interrupted. To increase the pressure ratio you can in this arrangement switch several stages in a row. A further development poses the construction of Holweck, in which several such Steps a helical groove occurs. A construction by Siegbahn shows spiral grooves on both sides of a disc-shaped rotor. This Pumps are characterized by a high pressure ratio and are therefore something applies particularly to the latter two types, good for such areas of application suitable where a high backing pressure has to be managed. On the other hand however, due to the narrow channels, their pumping speed is very limited. A Turbomolecular pumps deliver much higher pumping speeds their turbine-like construction have a higher volume.
Molekularpumpen und Turbomolekularpumpen gibt es in einflutiger und zweiflutiger Bauweise. Einflutige Pumpen haben den Vorteil, daß der Anschlußflansch und somit der zu evakuierende Rezipient direkt an die Hochvakuumseite des Pumpenrotors anschließt. So kann das zu pumpende Gas unmittelbar und ohne wesentlichen Strömungswiderstand von pumpaktiven Teilen übernommen und weitergefördert werden. Molecular pumps and turbomolecular pumps are available in single-flow and double-flow Construction. Single-flow pumps have the advantage that the connection flange and thus the recipient to be evacuated directly to the high vacuum side of the pump rotor. So the gas to be pumped immediately and taken over by pump-active parts without significant flow resistance and be promoted.
Zweiflutige Pumpen hingegen haben den Nachteil, daß der Gasstrom vom Ansaugflansch aus zunächst umgelenkt werden muß, um die pumpaktiven Teile zu erreichen. Dies ist mit einem hohen Strömungswiderstand und somit mit großen Einbußen beim Saugvermögen verbunden. Dennoch besitzen zweiflutige Pumpen grundsätzliche Vorteile gegenüber einflutigen Konstruktionen. Sowohl bei konventieller Lagerung mit Kugellagern als auch bei Magnetlagerungen der verschiedensten Ausführungen lassen sich die Stabilitätskriterien bei zweiflutigen Pumpen leichter erfüllen. Hinzu kommt, daß die Lager und Antriebselemente sich immer auf der Vorvakuumseite befinden und so keine Beeinträchtigung des Hochvakuums durch diese auftritt.Double-flow pumps, however, have the disadvantage that the gas flow from Intake flange must first be redirected to the pump active Parts to reach. This is with a high flow resistance and thus associated with great losses in pumping speed. Still own double-flow pumps have fundamental advantages over single-flow designs. Both with conventional bearings with ball bearings and with Magnetic bearings of various designs can be Easier to meet stability criteria with double-flow pumps. Come in addition, that the bearings and drive elements are always on the fore-vacuum side and therefore no impairment of the high vacuum by this occurs.
Im Ansaugbereich einer zweiflutigen Pumpe steht bei gleichem Aufwand für Lagerung und Antrieb wie bei einflutigen Pumpen die doppelte pumpaktive Fläche zur Förderung der Gase zur Verfügung. Dieser Vorteil kann jedoch nur teilweise ausgenutzt werden, da wie oben erwähnt, durch die Umlenkung des Gasstromes ein hoher Strömungsverlust entsteht.In the suction area of a double-flow pump stands with the same effort for storage and drive as with single-flow pumps, the double pump active Area available for the promotion of gases. This advantage can however, can only be partially used, as mentioned above, by the Deflection of the gas flow creates a high flow loss.
Der Erfindung liegt die Aufgabe zugrunde, die Vorteile von zweiflutigen Gasreibungspumpen insbesondere die Tatsache, daß im Ansaugbereich die doppelte pumpaktive Fläche gegenüber einflutigen Pumpen zur Verfügung steht, besser nutzen zu können.The invention has for its object the advantages of double-flow gas friction pumps especially the fact that in the intake area double active pumping area available compared to single-flow pumps stands to be able to use better.
Die Aufgabe wird durch die kennzeichnenden Merkmale des ersten Patentanspruches gelöst. Die Ansprüche zwei bis fünf stellen weitere Ausgestaltungsmöglichkeiten der Erfindung dar. The object is achieved by the characterizing features of the first claim solved. Claims two to five provide further design options of the invention.
Durch die zusätzliche Vorrichtung mit gasfördernder Struktur im Bereich der Ansaugöffnung können die vakuumtechnischen Leistungsdaten einer Gasreibungspumpe insbesondere deren Saugvermögen erheblich verbessert werden. Die Strömungsverluste, welche durch das Umlenken des Gasstromes im Eingangsbereich entstehen, werden deutlich herabgesetzt. Durch die rotierenden Schaufeln wird der Gasstrom von der Ansaugöffnung herkommend direkt den pumpaktiven Teilen zugeführt. Die Strömungsverluste können weiter verringert werden, wenn das zylindrische Laufrad in axialer Richtung nach beiden Seiten sich so weit ausdehnt, daß es die Stator- und Rotorelemente koaxial umschließt. Die Vorrichtung kann bei Gasreibungspumpen jeglicher Bauart Anwendung finden. Der hier vorliegenden Beschreibung wurde das Zusammenwirken der erfindungsgemäßen Einrichtung mit Gasreibungspumpen von der Art einer Turbomolekularpumpe und von der Art einer Molekularpumpe nach Holweck zugrundegelegt.Due to the additional device with gas-producing structure in the area of Intake opening can be the vacuum performance data of a gas friction pump in particular, their pumping speed improved considerably will. The flow losses caused by the redirection of the gas flow created in the entrance area are significantly reduced. By rotating The gas stream will come from the suction opening by scooping fed directly to the pump-active parts. The flow losses can continue be reduced if the cylindrical impeller in the axial direction after both Pages extends so far that it coaxially encloses the stator and rotor elements. The device can be used in gas friction pumps of any type Find. The interaction here has become the description the device according to the invention with gas friction pumps of the type Turbomolecular pump and of the type of a molecular pump according to Holweck based on.
An Hand der Abbildungen 1 bis 3 soll die Erfindung näher erläutert werden.The invention will be explained in more detail with reference to FIGS. 1 to 3.
Abbildung 1 zeigt die erfindungsgemäße Anordnung in Verbindung mit einer Turbomolekularpumpe.Figure 1 shows the arrangement according to the invention in connection with a Turbomolecular pump.
Abbildung 2 zeigt die erfindungsgemäße Anordnung in Verbindung mit einer Molekularpumpe vom Typ einer Holweck-Pumpe.Figure 2 shows the arrangement according to the invention in connection with a Molecular pump of the Holweck pump type.
Abbildung 3 zeigt ein Beispiel eine Vorrichtung mit gasfördernder Struktur.Figure 3 shows an example of a device with a gas-producing structure.
In Abbildung 1 ist eine Gasreibungspumpe in Form einer zweiflutigen Turbomolekularpumpe
dargestellt. Dabei ist in dem Gehäuse 1 mit Ansaugöffnung
2 und Gasaustrittsöffnung 3 eine Rotorwelle 10 in Lagervorrichtungen 13 gelagert.
Mit 12 ist der Antrieb für die Rotorwelle bezeichnet. Auf der Rotorwelle
befinden sich Laufräder 8, welche mit Schaufeln bestückt sind. Den Laufrädern
8 gegenüber sind Statorscheiben 4 mit entsprechenden Schaufeln angebracht.
Das Zusammenwirken der Laufräder 8 mit den Statorscheiben 4 bewirkt den
Pumpeffekt. Diese Rotor- und Statorelemente sind - wie hier gezeigt - bei zweiflutigen
Turbomolekularpumpen senkrecht zur Ebene der Ansaugöffnung 2
angeordnet. Damit der Gasstrom von der Ansaugöffnung 2 her den Rotor- und
Statorelementen besser zugeführt werden kann, ist erfindungsgemäß
zusätzlich eine Vorrichtung 15 vorhanden, welche eine gasfördernde Struktur
aufweist und mit den Rotorelementen umläuft.In Figure 1 is a gas friction pump in the form of a double flow turbomolecular pump
shown. It is in the
Ein Beispiel für eine solche Vorrichtung ist in Abbildung 3 dargestellt. Es handelt
sich dabei um ein Schaufelrad, bei dem entweder ein innerer Ring 17 oder zwei
äußere Ringe 18 mit Schaufeln 16 bestückt sind. Zur Befestigung dieser Vorrichtung
mit den rotierenden Teilen der Pumpe kann der innere Ring als Scheibe 19
ausgebildet sein, welche mit der Rotorwelle 10 fest verbunden ist. Alternativ können
die äußeren Ringe 18 jeweils mit den inneren Laufrädern 8 fest verbunden
sein.An example of such a device is shown in Figure 3. It deals
is a paddle wheel, in which either an
In Abbildung 2 ist eine Gasreibungspumpe in Form einer zweiflutigen Molekularpumpe
nach der Ausführung von Holweck dargestellt. Gegenüber einer wendelförmigen
Nut 5 als Statorelement befindet sich ein glatter Zylinder 9 als Rotorelement.
Durch das Zusammenwirken dieser beiden wird der Pumpeffekt hervorgerufen.
Damit der Gasstrom von der Ansaugöffnung 2 her den Rotor- und Statorelementen
besser zugeführt werden kann, ist erfindungsgemäß zusätzlich wie
im Beispiel Abbildung 1 eine Vorrichtung 15 vorhanden, welche eine gasfördernde
Struktur aufweist und mit den Rotorelementen umläuft. Die Befestigung dieser
Vorrichtung mit den rotierenden Teilen kann wie im ersten Beispiel über eine
innere Scheibe 19 direkt mit der Rotorwelle 10 oder über äußere Ringe 18 mit
dem rotierenden Zylinder 9 erfolgen.In Figure 2 is a gas friction pump in the form of a double flow molecular pump
after the execution of Holweck. Opposite a helical one
Groove 5 as a stator element is a
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19634095 | 1996-08-23 | ||
DE19634095A DE19634095A1 (en) | 1996-08-23 | 1996-08-23 | Entry stage for a double-flow gas friction pump |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0825346A1 true EP0825346A1 (en) | 1998-02-25 |
EP0825346B1 EP0825346B1 (en) | 2003-09-10 |
Family
ID=7803497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97112843A Expired - Lifetime EP0825346B1 (en) | 1996-08-23 | 1997-07-25 | Inlet-stage for a double-flow gas friction pump |
Country Status (5)
Country | Link |
---|---|
US (1) | US5927940A (en) |
EP (1) | EP0825346B1 (en) |
JP (1) | JP4050811B2 (en) |
AT (1) | ATE249583T1 (en) |
DE (2) | DE19634095A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1503199A3 (en) * | 2003-07-29 | 2008-05-07 | Pfeiffer Vacuum GmbH | Procedure and device for leak detection |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6328527B1 (en) * | 1999-01-08 | 2001-12-11 | Fantom Technologies Inc. | Prandtl layer turbine |
DE19930952A1 (en) * | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vacuum pump |
DE10008691B4 (en) * | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gas friction pump |
JP5149472B2 (en) * | 2000-05-15 | 2013-02-20 | プファイファー・ヴァキューム・ゲーエムベーハー | Gas friction pump |
DE10111546A1 (en) | 2000-05-15 | 2002-01-03 | Pfeiffer Vacuum Gmbh | Gas friction pump |
FR2854933B1 (en) * | 2003-05-13 | 2005-08-05 | Cit Alcatel | MOLECULAR, TURBOMOLECULAR OR HYBRID PUMP WITH INTEGRATED VALVE |
CN100513798C (en) * | 2005-10-10 | 2009-07-15 | 储继国 | Dual-drive molecular pump |
DE102018119747B3 (en) | 2018-08-14 | 2020-02-13 | Bruker Daltonik Gmbh | TURBOMOLECULAR PUMP FOR MASS SPECTROMETERS |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB475840A (en) * | 1935-12-21 | 1937-11-26 | Wolfgang Gaede | High vacuum pumps |
FR1293546A (en) * | 1961-02-09 | 1962-05-18 | Alsacienne Constr Meca | Improvements to rotary molecular pumps |
US3189264A (en) * | 1963-06-04 | 1965-06-15 | Arthur Pfeiffer Company | Vacuum pump drive and seal arrangement |
DE2034285A1 (en) * | 1970-07-10 | 1972-01-13 | Pfeiffer Vakuumtechnik | Molecular pump |
DD109918A1 (en) * | 1974-02-22 | 1974-11-20 | ||
RU1807242C (en) * | 1990-10-24 | 1993-04-07 | Научно-Исследовательский Институт Точного Электронного Машиностроения "Слава" | Turbomolecular vacuum pump |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB536238A (en) * | 1939-11-06 | 1941-05-07 | Fritz Albert Max Heppner | Improvements in and relating to internal combustion turbine plants |
DE1428072A1 (en) * | 1962-01-22 | 1969-03-20 | Akad Wissenschaften Ddr | Turbo molecular pump |
DE2052120A1 (en) * | 1970-10-23 | 1972-04-27 | Pfeiffer Vakuumtechnik | Bearing arrangement for molecular pumps and turbo molecular pumps |
GB1400011A (en) * | 1972-01-18 | 1975-07-16 | British Oxygen Co Ltd | Rotary vacuum pumps |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
GB8507010D0 (en) * | 1985-03-19 | 1985-04-24 | Framo Dev Ltd | Compressor unit |
GB9525337D0 (en) * | 1995-12-12 | 1996-02-14 | Boc Group Plc | Improvements in vacuum pumps |
-
1996
- 1996-08-23 DE DE19634095A patent/DE19634095A1/en not_active Withdrawn
-
1997
- 1997-07-25 AT AT97112843T patent/ATE249583T1/en not_active IP Right Cessation
- 1997-07-25 EP EP97112843A patent/EP0825346B1/en not_active Expired - Lifetime
- 1997-07-25 DE DE59710716T patent/DE59710716D1/en not_active Expired - Lifetime
- 1997-08-07 US US08/908,630 patent/US5927940A/en not_active Expired - Lifetime
- 1997-08-21 JP JP22479397A patent/JP4050811B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB475840A (en) * | 1935-12-21 | 1937-11-26 | Wolfgang Gaede | High vacuum pumps |
FR1293546A (en) * | 1961-02-09 | 1962-05-18 | Alsacienne Constr Meca | Improvements to rotary molecular pumps |
US3189264A (en) * | 1963-06-04 | 1965-06-15 | Arthur Pfeiffer Company | Vacuum pump drive and seal arrangement |
DE2034285A1 (en) * | 1970-07-10 | 1972-01-13 | Pfeiffer Vakuumtechnik | Molecular pump |
DD109918A1 (en) * | 1974-02-22 | 1974-11-20 | ||
RU1807242C (en) * | 1990-10-24 | 1993-04-07 | Научно-Исследовательский Институт Точного Электронного Машиностроения "Слава" | Turbomolecular vacuum pump |
Non-Patent Citations (1)
Title |
---|
DATABASE WPI Section PQ Week 9425, 10 August 1994 Derwent World Patents Index; Class Q56, AN 94-207184, XP002048547 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1503199A3 (en) * | 2003-07-29 | 2008-05-07 | Pfeiffer Vacuum GmbH | Procedure and device for leak detection |
Also Published As
Publication number | Publication date |
---|---|
US5927940A (en) | 1999-07-27 |
DE19634095A1 (en) | 1998-02-26 |
JPH10141277A (en) | 1998-05-26 |
JP4050811B2 (en) | 2008-02-20 |
EP0825346B1 (en) | 2003-09-10 |
ATE249583T1 (en) | 2003-09-15 |
DE59710716D1 (en) | 2003-10-16 |
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