EP0767307B1 - Groupe de pompage secondaire - Google Patents

Groupe de pompage secondaire Download PDF

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Publication number
EP0767307B1
EP0767307B1 EP96402094A EP96402094A EP0767307B1 EP 0767307 B1 EP0767307 B1 EP 0767307B1 EP 96402094 A EP96402094 A EP 96402094A EP 96402094 A EP96402094 A EP 96402094A EP 0767307 B1 EP0767307 B1 EP 0767307B1
Authority
EP
European Patent Office
Prior art keywords
pump
trap
cryogenic
mechanical
unit according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96402094A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0767307A1 (fr
Inventor
Guy Gorinas
Rainer Mathes
Alain Ravex
Jean-Marc Poncet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0767307A1 publication Critical patent/EP0767307A1/fr
Application granted granted Critical
Publication of EP0767307B1 publication Critical patent/EP0767307B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the present invention relates to a secondary pumping unit.
  • the pumped gases contain condensable gases and in particular water vapor, also it is known, as illustrated for example in EP-A-610 666, to associate a trap cryogenic to a mechanical secondary pump.
  • a trap is, either disposed in parallel, on the enclosure, with the mechanical secondary pump, be arranged in series with the pump upstream of its suction.
  • the cryogenic trap is cooled by a cryogenerator working according to the Gifford-Mc Mahon or Stirling principle.
  • the cycle is carried out using a movable piston.
  • a cryogenic generator of the pulsed tube type which has the advantage of having no movable piston and is therefore not the seat no vibration and is simple and economical to build.
  • Such generator consists of a compressor, a rotary valve ensuring alternating pressures, of an exchanger-regenerator constituting a mass thermal inertia, a pulsed tube having a hot end and a cold end and a buffer volume connected to the pulsed tube by a valve and to adjust the phase of the gas pressure in the tube relative to the speed of movement of the gas in the tube which is the subject of pressure waves.
  • the cold end of the pulsed tube is intimately linked to the thermally conductive surface playing the role of cryogenic trap.
  • cryogenerator of this type is described in the article entitled: "Experimental study and modelisation of a pulse tube” pages 9 to 12 of the volume 32 ICEC Supplement to the journal Cryogenics published in 1992.
  • the object of the invention is to propose a secondary pumping group, associating a cryogenic trap, having, for speed performance of pumping equal to the solutions mentioned above, less bulk.
  • the subject of the invention is therefore a secondary pumping group combining a mechanical secondary pump with a cryogenic trap, characterized in that said cryogenic trap forms a surrounding ring externally the mechanical secondary pump at its suction, said trap being enclosed in a casing delimiting the suction opening, in parallel, the mechanical pump and the cryogenic trap.
  • said trap has a U-shaped section the open part of which faces the aspiration.
  • the cryogenic trap is cooled by a cryogenic generator of the pulsed tube type surrounding the pump under said trap.
  • Figure 1 is a schematic view showing a pumping unit secondary associating a mechanical secondary pump with a trap cryogenic in an arrangement according to the prior art.
  • Figure 2 is a schematic view showing a pumping unit secondary according to the invention.
  • Figure 3 is a view similar to that of Figure 2, but in which has been shown schematically a particular cryogenerator ensuring the cooling of the cryogenic trap.
  • Figure 4 shows a group according to the invention connected to a vacuum chamber and comprising a pressure regulating device.
  • a pumping group associating in series a mechanical secondary pump 1 such as a turbomolecular pump for example, and a cryogenic trap 2, a control valve 3 being interposed between pump 1 and cold trap 2.
  • a mechanical secondary pump 1 such as a turbomolecular pump for example
  • a cryogenic trap 2 a control valve 3 being interposed between pump 1 and cold trap 2.
  • a casing 4 naturally surrounds the cold trap 2 and has a flange 5 for the connection of the assembly to a chamber to be emptied, not shown, in which an industrial process is carried out, for example the manufacture of semiconductor components.
  • the trap 2 is cooled by a cryogenerator 6 of the moving piston type 7 and compressor 8.
  • This arrangement introduces conductance between the pumping and suction of the turbomolecular pump which decreases the speed of effective pumping of the turbomolecular pump.
  • FIG. 2 shows the arrangement according to the invention.
  • the pump secondary mechanical 1 is associated with a cryogenic trap 2 which surrounds the pump to its suction.
  • the trap 2 also has a U-shaped section with the open part facing the suction.
  • the trap is enclosed in a casing 4 comprising a connecting flange 5.
  • the casing 4 delimits the suction opening, in parallel, of the entire pump mechanical 1 and cold trap 2.
  • the cryogenic generator for cooling trap 2 can be identical to that of FIG. 2, however, advantageously used, for its simplicity and its absence of a movable piston thus avoiding any vibration, a cryogenerator of the pulsed tube type as mentioned above.
  • this cryogenic generator of the pulsed tube type has its tube pulsed 9 which surrounds the mechanical pump 4 and is located below the trap 2.
  • the cold end of the pulsed tube 9 is fixed to the trap 2 by a thermally conductive piece 10.
  • the pulsed tube 9 is powered by a compressor 11 through a rotary valve 12 driven by a motor 13, and an exchanger-regenerator 14.
  • exchanger-regenerator 14 rotary valve 12 and engine 13 are aligned parallel to the axis ⁇ of the pump.
  • Figure 4 shows a device for regulating the pressure in a pumping chamber 15 connected to the pumping group.
  • a valve 3 located between the pump 1 and the trap 2.
  • this regulation is ensured by a injection of neutral gas, for example argon, inside the pump mechanical secondary 1.
  • a supply pipe 16 leading to the pump inlet is supplied with gas.
  • a pressure gauge 17 which measures the pressure in chamber 15 is linked to a flow regulator 18.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP96402094A 1995-10-04 1996-10-01 Groupe de pompage secondaire Expired - Lifetime EP0767307B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9511660 1995-10-04
FR9511660A FR2739574B1 (fr) 1995-10-04 1995-10-04 Groupe de pompage secondaire

Publications (2)

Publication Number Publication Date
EP0767307A1 EP0767307A1 (fr) 1997-04-09
EP0767307B1 true EP0767307B1 (fr) 2002-12-18

Family

ID=9483227

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96402094A Expired - Lifetime EP0767307B1 (fr) 1995-10-04 1996-10-01 Groupe de pompage secondaire

Country Status (5)

Country Link
US (1) US5720174A (ja)
EP (1) EP0767307B1 (ja)
JP (1) JP2763524B2 (ja)
DE (1) DE69625436T2 (ja)
FR (1) FR2739574B1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3623659B2 (ja) * 1998-06-12 2005-02-23 エア・ウォーター株式会社 クライオポンプ
JP2001194018A (ja) * 1999-10-19 2001-07-17 Aisin Seiki Co Ltd 極低温冷凍装置
US6560969B1 (en) * 2002-04-05 2003-05-13 Ge Medical Systems Global Technology, Co., Llc Pulse tube refrigeration system having ride-through
DE10305038A1 (de) * 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
JP6124776B2 (ja) * 2013-12-02 2017-05-10 住友重機械工業株式会社 コールドトラップ
US11319098B2 (en) * 2017-03-31 2022-05-03 The Boeing Company Vacuum volume reduction system and method with fluid fill assembly for a vacuum tube vehicle station
US10220972B2 (en) * 2017-03-31 2019-03-05 The Boeing Company Vacuum volume reduction system and method for a vacuum tube vehicle station

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4815303A (en) * 1988-03-21 1989-03-28 Duza Peter J Vacuum cryopump with improved first stage
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
US5335505A (en) * 1992-05-25 1994-08-09 Kabushiki Kaisha Toshiba Pulse tube refrigerator
JP3155366B2 (ja) * 1992-08-03 2001-04-09 日本真空技術株式会社 ターボ分子ポンプ用クライオトラップ
DE69409555T2 (de) * 1993-01-11 1998-12-03 Applied Materials, Inc., Santa Clara, Calif. Turbomolekularpumpe
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造

Also Published As

Publication number Publication date
US5720174A (en) 1998-02-24
DE69625436D1 (de) 2003-01-30
JPH09126126A (ja) 1997-05-13
FR2739574B1 (fr) 1997-11-14
EP0767307A1 (fr) 1997-04-09
FR2739574A1 (fr) 1997-04-11
JP2763524B2 (ja) 1998-06-11
DE69625436T2 (de) 2003-10-09

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