EP0697068B1 - Friction vacuum pump with bearing support - Google Patents
Friction vacuum pump with bearing support Download PDFInfo
- Publication number
- EP0697068B1 EP0697068B1 EP94910416A EP94910416A EP0697068B1 EP 0697068 B1 EP0697068 B1 EP 0697068B1 EP 94910416 A EP94910416 A EP 94910416A EP 94910416 A EP94910416 A EP 94910416A EP 0697068 B1 EP0697068 B1 EP 0697068B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sleeve
- rotor
- shaped carrier
- housing
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
- F04D25/0613—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
Definitions
- the invention relates to a friction vacuum pump a housing, a rotor and a rotor bearing, which itself supported in the housing via a sleeve-shaped carrier.
- a pump of this type is known from document FR-A-2 534 980.
- Frictional vacuum pumps include Gaede pumps (in one Housing rotating cylinder with pump gap and between Inlet and outlet located barrier gap), Holweck pumps (in a housing rotating cylinder with helical, grooves arranged on the stator or rotor side), Siegbahn pumps (rotating and standing washers with spiral designed grooves) and turbomolecular pumps with Rotor and guide vanes are equipped. It is known, Friction pumps with differently designed pump sections equip.
- the pump properties of a friction vacuum pump depend decisive for the distance between the moving, pump-active areas.
- the gap cannot be arbitrarily small be made because of slight vibrations of the rotor must be permitted. This applies in particular to the phase driving through resonance frequencies when starting the Rotor to its operating speed.
- the present invention is based on the object a friction vacuum pump of the type mentioned To support the rotor bearing in the housing in such a way that allow despite vibrations of the rotating system Support optimally small distances between the pump-active areas can be selected.
- this object is achieved in that the sleeve-shaped carrier on which the rotor bearing is located supports, in turn over several, preferably three, itself supports axially extending rods in the housing.
- Rotor are the vibrations that the rotor is still executing can, positively guided, in the radial direction.
- Axial directional components of movement of the rotor are themselves at relatively short rods practically zero. Radially yourself extending gaps between active pumping surfaces can therefore optimally small. Axial only directed columns still have the radial vibrations of the Rotor are taken into account.
- damping For damping and reducing the radial vibration amplitudes of the rotor it is advisable to use damping to provide.
- This advantageously consists of one O-ring, which is between the sleeve-shaped carrier and a housing part. The maximum vibration amplitude the rotor is thereby determined.
- the axially directed Columns must be chosen so that they are allow slight, maximum possible vibrations.
- the various friction vacuum pumps are generally with 1, their housing with 2 and the upper, cylindrical housing section with 3 designated.
- the cylindrical housing section 3 is centered the stator 4, which has a plurality of stator rings 5, 6 and 7 includes.
- the rotor 8 is mounted in the bearings 9. Both illustrated embodiments are the bearings 9 as Rolling bearings trained. Also magnetic bearings or plain bearings can be used in these places.
- the drive motor is designated 11. During the operation of the pump is a recipient to be evacuated at the inlet flange 12 connected. Due to the rotation of the rotor 8, the Gases conveyed to the outlet 13 to which a backing pump connected.
- the exemplary embodiment according to FIG. 1 is a turbomolecular vacuum pump.
- the stator rings 5 each carry inwards Directed stator blades 14, which are attached to the rotor 8 Rotor blades 15 are assigned.
- the rotor 8 is supported via a shaft 16 in the rotor bearings 9.
- the rotor support according to the invention comprises the sleeve-shaped Carrier 21, the upper end of which has a collar 22 is equipped.
- the lower end of the carrier 21 protrudes into one Recess 23 of a housing component 24, which only has a slightly larger diameter than the outside diameter of the carrier 21.
- An O-ring 25 between the Carrier 21 and the inside of the recess 23 secures the one the central position of the carrier 21 and is used for other than a damping element.
- Rods 26 are provided on the collar 22 and on the housing component 24 are attached. Performs one suspended in this way Rotor 8 due to shocks or when driving through resonances Vibrations, then these are vibrations positively driven and practically exclusively directed radially. When rotor vibrations occur, only one occurs radially directional parallel displacement of the rotor instead. Radial directed gap between the stator and rotor blades 14, 15 can be kept optimally small. When dimensioning the radially directed gap between the stator blades 14 and the rotor 8 on the one hand and the rotor blades 15 and the stator 4 on the other hand are only the minor Radial vibrations of the rotor must be taken into account. The amplitude of these vibrations depends on the design of the damping element 25.
- the rods 26 - preferably three - suitably consist of Metal and have a rigidity adapted to the machine dynamics over the length and the rod diameter. For lengths> 30 mm occur axially directed vibration components of the Rotor 8 in view of the small radial deflections ( ⁇ 0.2 mm) practically not.
- turbomolecular pump stages 14, 15 available on the high vacuum side. That includes itself Siegbahn pump section.
- the individual Siegbahn pump stages consist of rotor ring disks 16 and stator ring disks 17.
- the stator washers 17 are from the Stator rings 6 worn. At the front, they are spiral-shaped Grooves 19 equipped. The spiral shape is chosen so that a continuous gas flow from inlet 12 to outlet 13 is ensured, that is, that in the illustrated embodiment, the above a stator ring disk 17 pump-active surfaces the Siegbahn steps the gases from the outside in and the located below a stator washer 17 Pump-active surfaces convey the gases from the inside to the outside.
- the axial gaps between the stator and rotor ring disks 16, 17 can - since the rotor 8 axially directed vibrations can practically not do - optimally small being held.
- the pump characteristics of the Siegbahn pump section, especially their compression also optimal.
- the embodiment of Figure 4 differs from the embodiments of Figures 1 to 3 also still in that instead of a shaft 16 a housing fixed Pin 33 is provided on which the rotor 8 on the Layer 9 and the sleeve-shaped carrier 21 supports.
- the bars 26 extend between a collar 34 at the top of the pin 33 and an inward edge 35 on lower end of the sleeve-shaped carrier 21.
- the damping element 25 is located between the sleeve-shaped carrier 21 and the collar 34 of the pin 33. With a rotor support this type it is also necessary that the Drive motor 11 is designed as an external rotor.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Die Erfindung bezieht sich auf eine Reibungsvakuumpumpe mit einem Gehäuse, einem Rotor und einer Rotorlagerung, die sich im Gehäuse über einen hülsenförmigen Träger abstützt.The invention relates to a friction vacuum pump a housing, a rotor and a rotor bearing, which itself supported in the housing via a sleeve-shaped carrier.
Eine Pumpe dieser Art ist aus dem Dokument FR-A-2 534 980 bekannt.A pump of this type is known from document FR-A-2 534 980.
Zu den Reibungsvakuumpumpen gehören Gaede-Pumpen (in einem Gehäuse rotierender Zylinder mit Pumpspalt und zwischen Einlaß und Auslaß gelegenem Sperrspalt), Holweck-Pumpen (in einem Gehäuse rotierender Zylinder mit wendelförmigen, stator- oder rotorseitig angeordneten Nuten), Siegbahn-Pumpen (rotierende und stehende Ringscheiben mit spiralförmig gestalteten Nuten) und Turbomolekular-Pumpen, die mit Lauf- und Leitschaufeln ausgerüstet sind. Es ist bekannt, Reibungspumpen mit unterschiedlich gestalteten Pumpenabschnitten auszurüsten.Frictional vacuum pumps include Gaede pumps (in one Housing rotating cylinder with pump gap and between Inlet and outlet located barrier gap), Holweck pumps (in a housing rotating cylinder with helical, grooves arranged on the stator or rotor side), Siegbahn pumps (rotating and standing washers with spiral designed grooves) and turbomolecular pumps with Rotor and guide vanes are equipped. It is known, Friction pumps with differently designed pump sections equip.
Die Pumpeigenschaften einer Reibungsvakuumpumpe hängen maßgeblich vom Abstand der sich relativ zueinander bewegenden, pumpaktiven Flächen ab. Je kleiner der Spalt ist, desto besser ist insbesondere die Kompression der jeweiligen Reibungspumpe. Beliebig klein kann der Spalt jedoch nicht gemacht werden, da geringfügige Schwingungen des Rotors zulässig sein müssen. Dieses gilt insbesondere für die Phase des Durchfahrens von Resonanzfrequenzen beim Hochfahren des Rotors auf seine Betriebsdrehzahl.The pump properties of a friction vacuum pump depend decisive for the distance between the moving, pump-active areas. The smaller the gap, the more in particular, the compression of the respective is better Friction pump. However, the gap cannot be arbitrarily small be made because of slight vibrations of the rotor must be permitted. This applies in particular to the phase driving through resonance frequencies when starting the Rotor to its operating speed.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, bei einer Reibungsvakuumpumpe der eingangs erwähnten Art die Abstützung der Rotorlagerung im Gehäuse derart zu gestalten, daß trotz einer Schwingungen des rotierenden System zulassenden Abstützung optimal kleine Abstände zwischen den pumpaktiven Flächen gewählt werden können.The present invention is based on the object a friction vacuum pump of the type mentioned To support the rotor bearing in the housing in such a way that allow despite vibrations of the rotating system Support optimally small distances between the pump-active areas can be selected.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß sich der hülsenförmige Träger, auf den sich die Rotorlagerung abstützt, seinerseits über mehrere, vorzugsweise drei, sich im wesentlichen axial erstreckende Stäbe im Gehäuse abstützt. Bei einem in dieser Weise im Gehäuse aufgehängten Rotor sind die Schwingungen, die der Rotor noch ausführen kann, zwangsgeführt, und zwar in radialer Richtung. Axial gerichtete Bewegungskomponenten des Rotors sind selbst bei relativ kurzen Stäben praktisch gleich null. Radial sich erstreckende Spalte zwischen pumpaktiven Flächen können deshalb optimal klein gestaltet werden. Nur bei axial gerichteten Spalten müssen noch die Radialschwingungen des Rotors berücksichtigt werden.According to the invention, this object is achieved in that the sleeve-shaped carrier on which the rotor bearing is located supports, in turn over several, preferably three, itself supports axially extending rods in the housing. With one suspended in the housing in this way Rotor are the vibrations that the rotor is still executing can, positively guided, in the radial direction. Axial directional components of movement of the rotor are themselves at relatively short rods practically zero. Radially yourself extending gaps between active pumping surfaces can therefore optimally small. Axial only directed columns still have the radial vibrations of the Rotor are taken into account.
Zur Dämpfung und zur Reduzierung der radialen Schwingungsamplituden des Rotors ist es zweckmäßig, eine Dämpfung vorzusehen. Diese besteht vorteilhafterweise aus einem O-Ring, der sich zwischen dem hülsenförmigen Träger und einem Gehäuseteil befindet. Die maximale Schwingungsamplitude des Rotors ist dadurch festgelegt. Die axial gerichteten Spalte müssen derart gewählt werden, daß sie diese geringfügigen, maximal noch möglichen Schwingungen zulassen.For damping and reducing the radial vibration amplitudes of the rotor it is advisable to use damping to provide. This advantageously consists of one O-ring, which is between the sleeve-shaped carrier and a housing part. The maximum vibration amplitude the rotor is thereby determined. The axially directed Columns must be chosen so that they are allow slight, maximum possible vibrations.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren dargestellten Ausführungsbeispielen erläutert werden. Es zeigen
Figur 1- einen Längsschnitt durch eine als Turbomolekularvakuumpumpe ausgebildete Reibungsvakuumpumpe mit einer Rotoraufhängung nach der Erfindung,
Figur 2- einen Querschnitt durch das Ausführungsbeispiel
nach
Figur 1 und Figuren 3 und 4- weitere Ausführungsbeispiele für Reibunasvakuumpumpen mit der erfindungsgemäßen Rotoraufhängung.
- Figure 1
- 2 shows a longitudinal section through a friction vacuum pump designed as a turbomolecular vacuum pump with a rotor suspension according to the invention,
- Figure 2
- a cross section through the embodiment of Figure 1 and
- Figures 3 and 4
- further embodiments for friction vacuum pumps with the rotor suspension according to the invention.
In den Ausführungsbeispielen sind die verschiedenen Reibungsvakuumpumpen
jeweils allgemein mit 1, ihr Gehäuse mit 2
und der obere, zylindrisch gestaltete Gehäuseabschnitt mit 3
bezeichnet. Der zylindrische Gehäuseabschnitt 3 zentriert
den Stator 4, der eine Mehrzahl von Statorringen 5, 6 und 7
umfaßt. Der Rotor 8 ist in den Lagern 9 gelagert. Bei den
dargestellten Ausführungsbeispielen sind die Lager 9 als
Wälzlager ausgebildet. Auch Magnetlager oder Gleitlager
können an diesen Stellen eingesetzt werden. Der Antriebsmotor
ist mit 11 bezeichnet. Während des Betriebs der Pumpe
ist an den Einlaßflansch 12 ein zu evakuierender Rezipient
angeschlossen. Infolge der Drehung des Rotors 8 werden die
Gase zum Auslaß 13 gefördert, an den eine Vorvakuumpumpe
angeschlossen ist.In the exemplary embodiments, the various friction vacuum pumps are
generally with 1, their housing with 2
and the upper, cylindrical housing section with 3
designated. The
Das Ausführungsbeispiel nach Figur 1 ist eine Turbomolekularvakuumpumpe.
Die Statorringe 5 tragen jeweils nach innen
gerichtete Statorschaufeln 14, denen am Rotor 8 befestigte
Rotorschaufeln 15 zugeordnet sind. Der Rotor 8 stützt sich
über eine Welle 16 in den Rotorlagern 9 ab.The exemplary embodiment according to FIG. 1 is a turbomolecular vacuum pump.
The
Die erfindungsgemäße Rotorabstützung umfaßt den hülsenförmigen
Träger 21, dessen oberes Ende mit einem Kragen 22
ausgerüstet ist. Das untere Ende des Trägers 21 ragt in eine
Ausnehmung 23 eines Gehäusebauteiles 24 hinein, welche nur
einen geringfügig größeren Durchmesser hat als der Außendurchmessers
des Trägers 21. Ein O-Ring 25 zwischen dem
Träger 21 und der Innenseite der Ausnehmung 23 sichert zum
einen die zentrische Position des Trägers 21 und dient zum
anderen als Dämpfungselement.The rotor support according to the invention comprises the sleeve-
Zur Abstützung des Trägers 21 im Gehäuse 2 sind mehrere
vorzugsweise drei im wesentlichen sich axial erstreckende
Stäbe 26 vorgesehen, die am Kragen 22 und am Gehäusebauteil
24 befestigt sind. Führt eine in dieser Weise aufgehängter
Rotor 8 infolge von Stößen oder beim Durchfahren von Resonanzen
Schwingungen aus, dann sind diese Schwingungen
zwangsgeführt und praktisch ausschließlich radial gerichtet.
Beim Auftreten von Rotorschwingungen findet nur eine radial
gerichtete Parallelverschiebung des Rotors statt. Radial
gerichtete Spalte zwischen den Stator- und Rotorschaufeln
14, 15 können optimal klein gehalten werden. Bei der Bemessung
der radial gerichteten Spalte zwischen den Statorschaufeln
14 und dem Rotor 8 einerseits bzw. den Laufschaufeln
15 und dem Stator 4 andererseits sind nur noch die geringfügigen
Radialschwingungen des Rotors zu berücksichtigen.
Die Amplitude dieser Schwingungen hängt von der Bemessung
des Dämpfungselementes 25 ab.To support the
Die Stäbe 26 - vorzugsweise drei - bestehen zweckmäßig aus
Metall und haben eine der Maschinendynamik angepaßte Steifigkeit
über die Länge und den Stabdurchmesser. Bei Längen >
30 mm treten axial gerichtete Schwingungskomponenten des
Rotors 8 im Hinblick auf die geringen radialen Auslenkungen
(< 0,2 mm) praktisch nicht auf.The rods 26 - preferably three - suitably consist of
Metal and have a rigidity adapted to the machine dynamics
over the length and the rod diameter. For lengths>
30 mm occur axially directed vibration components of the
Beim Ausführungsbeispiel nach Figur 3 sind zwei Pumpenabschnitte
vorgesehen. Hochvakuumseitig sind Turbomolekularpumpenstufen
14, 15 vorhanden. Daran schließt sich ein
Siegbahn-Pumpenabschnitt an. Die einzelnen Siegbahn-Pumpenstufen
bestehen aus Rotorringscheiben 16 und Statorringsscheiben
17. Die Statorringscheiben 17 werden von den
Statorringen 6 getragen. Stirnseitig sind sie mit spiralförmigen
Nuten 19 ausgerüstet. Die spiralförmige Gestaltung
ist jeweils so gewählt, daß eine kontinuierliche Gasströmung
vom Einlaß 12 zum Auslaß 13 sichergestellt ist, das heißt,
daß beim dargestellten Ausführungsbeispiel die oberhalb
einer Statorringscheibe 17 befindlichen pumpaktiven Flächen
der Siegbahn-Stufen die Gase von außen nach innen und die
unterhalb einer Statorringscheibe 17 befindlichen
pumpaktiven Flächen die Gase von innen nach außen fördern.
Die axialen Spalte zwischen den Stator- und Rotorringscheiben
16, 17 können - da der Rotor 8 axial gerichtete Schwingungen
praktisch nicht ausführen kann - optimal klein
gehalten werden. Die Pumpeigenschaften des Siegbahn-Pumpenabschnittes,
insbesondere deren Kompression, sind dadurch
ebenfalls optimal.In the exemplary embodiment according to FIG. 3 there are two pump sections
intended. On the high vacuum side are
Beim Ausführungsbeispiel nach Figur 4 schließt sich an den
Turbomolekularpumpenabschnitt 14, 15 ein Holweck-Pumpenabschnitt
an. Dieser umfaßt den zylindrischen Statorring 7,
dessen Innenseite einem zylindrischen Rotorabschnitt 31 mit
wendelförmigem Vorsprung 32 zugeordnet ist. Bei der Bemessung
des zwischen den pumpaktiven Flächen befindlichen
Axialspaltes müssen lediglich die sehr kleinen, radial
gerichteten Schwingungsamplituden des rotierenden Systems
berücksichtigt werden.In the embodiment of Figure 4 follows the
Turbomolecular
Das Ausführungsbeispiels nach Figur 4 unterscheidet sich von
den Ausführungsbeispielen nach den Figuren 1 bis 3 außerdem
noch dadurch, daß anstelle einer Welle 16 ein gehäusefester
Zapfen 33 vorgesehen ist, auf dem sich der Rotor 8 über die
Lage 9 und den hülsenförmigen Träger 21 abstützt. Die Stäbe
26 erstrecken sich zwischen einem Kragen 34 am oberen Ende
des Zapfens 33 und einem nach innen gerichteten Rand 35 am
unteren Ende des hülsenförmigen Trägers 21. Das Dämpfungselement
25 befindet sich zwischen dem hülsenförmigen Träger
21 und dem Kragen 34 des Zapfens 33. Bei einer Rotorabstützung
dieser Art ist es außerdem erforderlich, daß der
Antriebsmotor 11 als Außenläufer ausgebildet ist.The embodiment of Figure 4 differs from
the embodiments of Figures 1 to 3 also
still in that instead of a shaft 16 a housing fixed
Pin 33 is provided on which the
Claims (12)
- Friction vacuum pump (1) having a housing (2, 3), a rotor (8) and a rotor bearing arrangement (9) which is supported in the housing (2, 3) by means of a sleeve-shaped carrier (21), characterized in that the entire rotor bearing arrangement (9) is supported on the carrier and that the sleeve-shaped carrier (21) is in turn supported in the housing (2, 3) by means of a plurality of, preferably three, substantially axially extending rods (26).
- Pump according to claim 1, characterized in that a damping device (25) is associated with the sleeve-shaped carrier (21).
- Pump according to claim 2, characterized in that the damping device comprises an O-ring (25) which is disposed between the sleeve-shaped carrier (21) and a housing-fixed structural part (24, 34).
- Pump according to claim 1, 2 or 3, characterized in that the rotor (8) is equipped with a shaft (16), which is supported by means of the bearings (9), the sleeve-shaped carrier (21) and the rods (26) in the housing (2, 3).
- Pump according to claim 4, characterized in that the sleeve-shaped carrier (21) is equipped at one end with a collar (22), which is used to fasten the rods (26).
- Pump according to claim 5, characterized in that the damping device (25) is associated with the opposite end of the sleeve-shaped carrier (21) to the collar (22).
- Pump according to claim 6, characterized in that the opposite end of the sleeve-shaped carrier to the collar (22) projects into a recess (23) of a housing structural part (24) and that an O-ring (25) situated between the carrier (21) and the inside of the recess (23) forms the damping device.
- Pump according to one of claims 1 or 2, characterized in that the rotor (8) is supported by means of its bearings (9), the sleeve-shaped carrier (21) and the rods (26) on a stationary journal (33) of the housing (2).
- Pump according to claim 8, characterized in that the journal (33) is equipped with a collar (34) and the sleeve-shaped carrier (21) at its opposite end to the collar (34) is equipped with an inside edge (35) and that the rods (26) extend between collar (34) and inside edge (35).
- Pump according to claim 9, characterized in that the sleeve-shaped carrier (21) surrounds the collar (34) and that the damping device formed by an O-ring (25) is disposed between collar (34) and sleeve-shaped carrier (21).
- Pump according to one of the preceding claims, characterized in that it is designed at the high-vacuum end as a turbomolecular vacuum pump and at the backing pressure end as a Siegbahn pump.
- Pump according to one of claims 1 to 10, characterized in that it is designed at the high-vacuum end as a turbomolecular pump stage and at the backing pressure end as a Holweck pump.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4314419A DE4314419A1 (en) | 1993-05-03 | 1993-05-03 | Friction vacuum pump with bearing support |
DE4314419 | 1993-05-03 | ||
PCT/EP1994/000785 WO1994025759A1 (en) | 1993-05-03 | 1994-03-14 | Friction vacuum pump with bearing support |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0697068A1 EP0697068A1 (en) | 1996-02-21 |
EP0697068B1 true EP0697068B1 (en) | 1998-02-25 |
Family
ID=6486924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94910416A Expired - Lifetime EP0697068B1 (en) | 1993-05-03 | 1994-03-14 | Friction vacuum pump with bearing support |
Country Status (5)
Country | Link |
---|---|
US (1) | US5662456A (en) |
EP (1) | EP0697068B1 (en) |
JP (1) | JPH08512377A (en) |
DE (2) | DE4314419A1 (en) |
WO (1) | WO1994025759A1 (en) |
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US6019581A (en) * | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
GB9809418D0 (en) * | 1998-05-02 | 1998-07-01 | Normalair Garrett Ltd | Electric motor |
DE19901340B4 (en) * | 1998-05-26 | 2016-03-24 | Leybold Vakuum Gmbh | Friction vacuum pump with chassis, rotor and housing and device equipped with a friction vacuum pump of this type |
US6457954B1 (en) | 1998-05-26 | 2002-10-01 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
DE19846189A1 (en) * | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Friction vacuum pump |
JP3788558B2 (en) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | Turbo molecular pump |
DE19915983A1 (en) * | 1999-04-09 | 2000-10-12 | Pfeiffer Vacuum Gmbh | Vacuum pump with gas storage |
DE10001509A1 (en) * | 2000-01-15 | 2001-07-19 | Leybold Vakuum Gmbh | Vacuum pump with vibration damper, casing of which is directly connected to enface of spring body |
GB0618745D0 (en) * | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
DE102012110691A1 (en) | 2012-11-08 | 2014-05-08 | Pfeiffer Vacuum Gmbh | Device for kinetic energy storage |
DE102013214662A1 (en) * | 2013-07-26 | 2015-01-29 | Pfeiffer Vacuum Gmbh | vacuum pump |
DE102014115507A1 (en) * | 2014-10-24 | 2016-04-28 | Pfeiffer Vacuum Gmbh | vacuum pump |
GB2569314A (en) * | 2017-12-12 | 2019-06-19 | Edwards Ltd | A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber |
GB2575450B (en) * | 2018-07-09 | 2022-01-26 | Edwards Ltd | A variable inlet conductance vacuum pump, vacuum pump arrangement and method |
GB2584076B (en) * | 2019-05-03 | 2022-04-20 | Edwards Ltd | Lubricant supply system and vacuum pump |
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FR1501477A (en) * | 1965-12-16 | 1967-11-10 | Daimler Benz Ag | Gas turbine rotor |
FR2086525A5 (en) * | 1970-04-01 | 1971-12-31 | Commissariat Energie Atomique | |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
DE3039196A1 (en) * | 1980-10-17 | 1982-05-13 | Leybold-Heraeus GmbH, 5000 Köln | METHOD FOR ASSEMBLING A SINGLE-FLOW TURBOMOLECULAR VACUUM PUMP AND ASSEMBLED TURBOMOLECULAR VACUUM PUMP BY THIS METHOD |
DE3239328C2 (en) * | 1982-10-23 | 1993-12-23 | Pfeiffer Vakuumtechnik | Magnetically mounted turbomolecular pump with vibration damping |
DE3410905A1 (en) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | DEVICE FOR CONVEYING GASES IN SUBATMOSPHAERIC PRESSURES |
JPS6172896A (en) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | High speed rotary pump |
DE3537822A1 (en) * | 1985-10-24 | 1987-04-30 | Leybold Heraeus Gmbh & Co Kg | VACUUM PUMP WITH HOUSING AND ROTOR |
DE8910040U1 (en) * | 1988-09-03 | 1989-12-14 | Leybold Ag | Turbomolecular vacuum pump |
EP0408791B1 (en) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Drag pump with a bell-shaped rotor |
-
1993
- 1993-05-03 DE DE4314419A patent/DE4314419A1/en not_active Withdrawn
-
1994
- 1994-03-14 WO PCT/EP1994/000785 patent/WO1994025759A1/en active IP Right Grant
- 1994-03-14 US US08/545,645 patent/US5662456A/en not_active Expired - Fee Related
- 1994-03-14 DE DE59405313T patent/DE59405313D1/en not_active Expired - Fee Related
- 1994-03-14 JP JP6523795A patent/JPH08512377A/en active Pending
- 1994-03-14 EP EP94910416A patent/EP0697068B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE59405313D1 (en) | 1998-04-02 |
DE4314419A1 (en) | 1994-11-10 |
EP0697068A1 (en) | 1996-02-21 |
JPH08512377A (en) | 1996-12-24 |
US5662456A (en) | 1997-09-02 |
WO1994025759A1 (en) | 1994-11-10 |
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