EP0695813A3 - Process for carburizing carburisable work pieces under the action of plasma-pulses - Google Patents

Process for carburizing carburisable work pieces under the action of plasma-pulses Download PDF

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Publication number
EP0695813A3
EP0695813A3 EP95109082A EP95109082A EP0695813A3 EP 0695813 A3 EP0695813 A3 EP 0695813A3 EP 95109082 A EP95109082 A EP 95109082A EP 95109082 A EP95109082 A EP 95109082A EP 0695813 A3 EP0695813 A3 EP 0695813A3
Authority
EP
European Patent Office
Prior art keywords
carburisable
carburizing
pulses
plasma
action
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95109082A
Other languages
German (de)
French (fr)
Other versions
EP0695813A2 (en
EP0695813B1 (en
Inventor
Frank Dr Schnatbaum
Albrecht Dr Melber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
ALD Vacuum Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALD Vacuum Technologies GmbH filed Critical ALD Vacuum Technologies GmbH
Publication of EP0695813A2 publication Critical patent/EP0695813A2/en
Publication of EP0695813A3 publication Critical patent/EP0695813A3/en
Application granted granted Critical
Publication of EP0695813B1 publication Critical patent/EP0695813B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38—Treatment of ferrous surfaces

Abstract

Workpieces of carburizable materials, especially steels, are carburized by means of a pulsed plasma discharge in a carbon-containing atmosphere at pressures of 0.1-30 mbars and at pulsed voltages of 200-2,000 V, preferably of 300-1,000 V. A continuously applied baseline voltage, which is below the breakdown voltage, is superimposed on the pulsed voltage. The baseline voltage is preferably a direct-current voltage, which is in the range of 10-150 V, preferably of 20-100 V.
EP95109082A 1994-08-06 1995-06-13 Process for carburizing carburisable work pieces under the action of plasma-pulses Expired - Lifetime EP0695813B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4427902 1994-08-06
DE4427902A DE4427902C1 (en) 1994-08-06 1994-08-06 Method for carburising components made from carburisable materials by means of a plasma discharge operated in a pulsed fashion

Publications (3)

Publication Number Publication Date
EP0695813A2 EP0695813A2 (en) 1996-02-07
EP0695813A3 true EP0695813A3 (en) 1997-02-12
EP0695813B1 EP0695813B1 (en) 1999-09-08

Family

ID=6525098

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95109082A Expired - Lifetime EP0695813B1 (en) 1994-08-06 1995-06-13 Process for carburizing carburisable work pieces under the action of plasma-pulses

Country Status (5)

Country Link
US (1) US5558725A (en)
EP (1) EP0695813B1 (en)
JP (1) JPH08170162A (en)
AT (1) ATE184329T1 (en)
DE (2) DE4427902C1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19547131A1 (en) † 1995-12-16 1997-06-19 Ipsen Ind Int Gmbh Process for plasma carburizing metallic workpieces
WO1999031291A2 (en) * 1997-12-15 1999-06-24 Volkswagen Aktiengesellschaft Plasma boronizing
GB2336603A (en) * 1998-04-23 1999-10-27 Metaltech Limited A method and apparatus for plasma boronising
IT1309928B1 (en) * 1999-12-01 2002-02-05 Bundy S P A PIPE FOR PRESSURE FLUID SUPPLY SYSTEMS, IN PARTICULAR FOR FUEL SUPPLY IN DIESEL ENGINES,
DE10021583A1 (en) * 2000-05-04 2001-11-15 Ald Vacuum Techn Ag Assembly to carburize and harden steel workpiece charges has structured pressures in the transport tunnel and heating chambers and carburizing and quenching chambers to reduce energy costs
JP4744019B2 (en) * 2000-07-12 2011-08-10 大阪府 Method for surface treatment of titanium metal
DE10109565B4 (en) 2001-02-28 2005-10-20 Vacuheat Gmbh Method and device for partial thermochemical vacuum treatment of metallic workpieces
KR100614288B1 (en) * 2005-01-17 2006-08-21 한국에너지기술연구원 The process control technology of low-pressure carburizing with pulse injection of gas
DE102013006589A1 (en) * 2013-04-17 2014-10-23 Ald Vacuum Technologies Gmbh Method and device for the thermochemical hardening of workpieces
JP7421373B2 (en) * 2020-03-02 2024-01-24 日立Astemo株式会社 Carburizing method and base material to be treated

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946708A (en) * 1950-11-09 1960-07-26 Berghaus Elektrophysik Anst Nitriding with electric glow discharge
DE2842407A1 (en) * 1978-09-29 1980-04-03 Norbert Stauder Surface treatment of workpiece in sealed chamber by glow discharge - where ionisation plasma burner is used to reinforce ionised gas in chamber, e.g. for nitriding or carburising steel
US4406765A (en) * 1980-01-28 1983-09-27 Fuji Photo Film Co., Ltd. Apparatus and process for production of amorphous semiconductor
JPH02125856A (en) * 1988-11-04 1990-05-14 Shindengen Electric Mfg Co Ltd Device for thermochemically treating metal of the like
DE4003623A1 (en) * 1990-02-07 1991-08-08 Kloeckner Ionon METHOD FOR CONTROLLING A PLANT TREATMENT SYSTEM FOR WORKPIECES
DE4238993C1 (en) * 1992-01-20 1993-07-01 Leybold Durferrit Gmbh, 5000 Koeln, De
FR2708624A1 (en) * 1993-07-30 1995-02-10 Neuville Stephane Process for deposition of a protective coating based on amorphous diamond pseudocarbon or on modified silicon carbide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE601847C (en) * 1933-04-01 1934-08-25 Siemens Schuckertwerke Akt Ges Method for introducing a substance into a metal
FR2501727A1 (en) * 1981-03-13 1982-09-17 Vide Traitement PROCESS FOR THE THERMOCHEMICAL TREATMENT OF METALS BY ION BOMBING
US5127967A (en) * 1987-09-04 1992-07-07 Surface Combustion, Inc. Ion carburizing
US5383980A (en) * 1992-01-20 1995-01-24 Leybold Durferrit Gmbh Process for hardening workpieces in a pulsed plasma discharge

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946708A (en) * 1950-11-09 1960-07-26 Berghaus Elektrophysik Anst Nitriding with electric glow discharge
DE2842407A1 (en) * 1978-09-29 1980-04-03 Norbert Stauder Surface treatment of workpiece in sealed chamber by glow discharge - where ionisation plasma burner is used to reinforce ionised gas in chamber, e.g. for nitriding or carburising steel
US4406765A (en) * 1980-01-28 1983-09-27 Fuji Photo Film Co., Ltd. Apparatus and process for production of amorphous semiconductor
JPH02125856A (en) * 1988-11-04 1990-05-14 Shindengen Electric Mfg Co Ltd Device for thermochemically treating metal of the like
DE4003623A1 (en) * 1990-02-07 1991-08-08 Kloeckner Ionon METHOD FOR CONTROLLING A PLANT TREATMENT SYSTEM FOR WORKPIECES
DE4238993C1 (en) * 1992-01-20 1993-07-01 Leybold Durferrit Gmbh, 5000 Koeln, De
FR2708624A1 (en) * 1993-07-30 1995-02-10 Neuville Stephane Process for deposition of a protective coating based on amorphous diamond pseudocarbon or on modified silicon carbide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 14, no. 342 (C - 0743) 24 July 1990 (1990-07-24) *

Also Published As

Publication number Publication date
DE59506771D1 (en) 1999-10-14
US5558725A (en) 1996-09-24
EP0695813A2 (en) 1996-02-07
EP0695813B1 (en) 1999-09-08
JPH08170162A (en) 1996-07-02
ATE184329T1 (en) 1999-09-15
DE4427902C1 (en) 1995-03-30

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