Classifications

• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
  • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
  • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/221—Ion beam deposition
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
  • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
  • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
  • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
  • C23C4/134—Plasma spraying
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
  • H05H1/00—Generating plasma; Handling plasma
  • H05H1/54—Plasma accelerators

Definitions

• the invention relates to a method for loading a solid surface, in particular a material surface, for the purpose of achieving changes in the structure and / or the structure and / or the composition. Furthermore, the invention is directed to devices for carrying out this method.
• the object of the invention is to provide a method which is particularly suitable for achieving particularly high-quality or special properties of surface layers of materials, which can be used in a variety of ways and can be implemented by means of devices which are known, at least in their basic concept, but so far have been used for technically completely different purposes.
• the object is essentially achieved by a method for applying a solid body surface, in particular a material surface, with a brief pulse of a mass of high energy and density, in which the energy stored in an energy store is conducted into an energy converter and there is transferred to an energy carrier to be accelerated in the direction of the solid surface in the form of a gas and / or a liquid and / or a solid such that the impulse occurring on the solid surface interacts with the boundary layer of the solid and becomes extremely thin in it Surface layer without influencing the base material causes changes in the structure and / or in the structure and / or in the composition.
• the method according to the invention is suitable depending on the choice of parameters
• ultra-hard materials such as fullerenes, diamonds or boron nitrides - into the material surface, as well as for the production of new, ultra-hard surface layers which consist of the material material alone or of the material material and the coating material.
• Impurities and / or doping in the surface layer of aluminum are dissolved.
• surface layers of pure iron After the treatment according to the invention with the additive graphite powder, surface layers of pure iron, depending on the treatment parameters, have a martensitic structure of the surface layer of the component (approximately ten times the hardness of the starting material) or an amorphous structure of the surface layer of the material (approximately twenty to twenty-five times hardness) ).
• This is not a coating, but a change in the surface layer of the material, namely a change in both the structure of the material and the original (before the treatment according to the invention) exposure material.
• the mass generating the short-term pulse consists of the plasma accelerated in the energy converter and, if this is necessary to achieve a certain effect on the material to be treated, of an additive which either ionizes and is generated by the electromagnetic field is accelerated, or is also accelerated by the plasma flow.
• the material generating the short pulse When interacting with the material to be influenced, the material generating the short pulse can be melted and alloyed for a short time. Like carbon, for example, this can accelerate the amorphization process, as has been demonstrated in experiments with carbon and pure iron.
• the surface of the material to be treated can be covered with graphite.
• the application of a high-pressure pulse then results in the formation of a diamond layer, the high-pressure pulse being effected by a plasma mass of high temperature and density, which strikes the material to be treated with or without additives.
• the method according to the invention not only makes it possible to achieve extremely hard and wear-resistant surfaces, but also to give these surfaces very specific properties, at least not previously achievable in this way, in particular with regard to the wettability and the microstructure lend, and above all to achieve material conversions, such as the conversion of graphite into diamond-like, ultra-hard carbon structures, so-called fullerenes.
• the process parameters can be specifically adapted to the desired layer properties.
• a particularly advantageously usable device for realizing the method according to the invention consists of a coaxial plasma accelerator with a compression coil.
• a Such a system delivers short pressures, that is to say in the micro to millisecond range, high pressures in the kbar range with temperatures of up to 20,000 K and can therefore in a plasma flow with flow velocities of up to 70 km / sec foreign particles at very high speeds accelerate. These speed ranges represent a significant difference to the existing coating processes, since such known speed treatment technologies cannot even approach such speed ranges.
• the use of such a magneto-gas-dynamic accelerator to carry out the method according to the invention enables extremely short application times and high power densities.
• Figure 1 the functional principle of an accelerator for influencing materials
• Figure 2 shows a schematic structure of a test facility
• Figure 3 is a schematic diagram of a plasma dynamic accelerator
• FIG. 4 shows a sectional illustration of a plasma dynamic accelerator with gas injection through the outer electrode and injection of additional materials through the central electrode
• FIG. 5 shows a plasma dynamic accelerator with a convergent / divergent compression coil
• Figure 6 shows the schematic structure of an electrothermal accelerator
• Figure 7 is a schematic representation of a guardrail accelerator with object material
• FIG. 8 shows a schematic compilation of embodiments of methods according to the invention for the application of a solid surface.
• Figure 1 shows the principle of operation of the accelerator systems for influencing the surface of materials for the purpose of implementing the method according to the invention.
• FIG. 2 A typical overall system is shown in Figure 2, and it shows the accelerator system, which consists of the actual plasma accelerator, which is installed in a vacuum tank, and a capacitor bank with ignitron switches as an external energy store.
• the plasma accelerator itself is formed by the two main groups of the coaxial accelerator and the compression coil, this coaxial accelerator with compression coil representing the energy converter.
• FIG. 3 shows a schematic diagram of a plasma dynamic accelerator with a compression coil.
• the coaxial part consists of a rod-shaped central electrode and an outer electrode with a ring cross-section. Adjoining this is a conically tapering coil which is fastened in an insulated manner at the rear end and is conductively connected to the outer electrode via a current feedback.
• the entire accelerator can be regarded as an electrical resonant circuit consisting of a capacitance, inductors and resistors. If the switch in the energy storage system is closed, a discharge current that changes over time begins to flow through the system.
• the conductive connection between the center electrode and the outer electrode is produced by a plasma representing the energy carrier, which is generated at the beginning of the current discharge either by evaporation and ionization of a metal foil or by ionization of a gas. Further details of such a plasma dynamic accelerator can be found in US Patents 3,929,119 and 3,916,761.
• Figure 4 shows a schematic representation of an embodiment of a plasma dynamic accelerator with gas injection through the outer electrode and the possibility of injecting filler materials through the central electrode.
• An inductive store or a capacitive store can be used as the energy store.
• the energy converter into which the energy is conducted from the energy store, converts the electrical energy supplied into thermal and / or kinetic and / or chemical energy of an energy carrier. If a gas is used as the energy carrier, this is brought briefly to very high temperature and to high pressure and density by the energy supply. In particular, the gas is ionized so that a plasma is formed.
• This plasma is used to serve as an energy carrier and / or to simultaneously provide and carry other additive materials with kinetic energy and finally to bring them into interaction with the object material, namely with the very thin peripheral layer of the object material , in particular the duration of the impulse exerted on the object material, the temperature, the density and the pressure being selected such that the structure and structure of this very thin edge layer are influenced in a targeted manner, but the depth of the thermal action on this thin layer Boundary layer is limited.
• the energy store, the energy converter and the energy carrier with or without introduced additional materials and the object material have to be brought into a special arrangement in order to carry out the corresponding influencing of the object material and in particular its peripheral layer.
• a suitable arrangement of the physical parameters of the energy store and the energy converter as well as a suitable selection of the energy carrier and of the material added to this energy carrier as well as, if appropriate, must be carried out, and these in turn must be in a suitable form with the selection and with the arrangement of the Object material in relation to the energy converter are related.
• Figure 5 shows a modification of a plasma dynamic accelerator with a convergent / divergent compression coil, which makes it possible to generate an essentially parallel plasma flow on the output side, which ensures an advantageous distribution of the temperature, the density and the flow velocity in the plasma jet, see above that the application of a solid surface and in particular a workpiece surface takes place in a particularly uniform manner. In particular, the greatest possible surface area is thereby applied.
• the object material can be arranged in a suitable manner inside or outside the coaxial accelerator with a compression coil, and the choice of the position of the object material is of essential importance for the solution of the particular task, since the duration, height, density and composition of the pulse differ in Ab ⁇ Change dependency on the respective position.
• the coaxial accelerator with compression coil can be operated in particular with a suitable total energy supply and the corresponding pulse duration in such a way that the erosion and ablation of the components of the accelerator is avoided, whereby a particularly defined exposure to the object material, which is unaffected by foreign substances, is ensured can.
• the ablation or evaporation of the plasma accelerator with compression coil can serve to introduce the admission material if the components of the accelerator exposed to the plasma flow consist of a material suitable for this purpose.
• the coaxial accelerator can also be operated without a compression coil. Particularly in this arrangement and also in the case of the arrangement with a compression coil, the amplitude and the time course of the energy supply in connection with the geometric parameters are of crucial importance for the parameters of the short-term plasma with or without exposure substances at the location of the material to be acted upon ( if this short-term plasma strikes the material).
• the length of the coaxial accelerator influences the transformation of the structure of the application material.
• introduction of the graphite dust loading material at the rear end (the beginning) of the coaxial accelerator with compression coil leads to the surface of the pure iron with the greatest increase in hardness. Similar dependencies exist for other electromagnetic accelerators such as guardrail accelerators.
• Figure 6 shows a half section of an electrothermal accelerator that can also be used as an energy converter.
• This consists of an external electrical energy store, a high-pressure chamber, which is also referred to hereinafter as an explosion chamber, and the actual accelerator tube.
• An electrically conductive material is located in the explosion chamber between two electrodes. If the energy store is discharged, a current begins to flow in the system, whereby energy is supplied to the material in the chamber. Due to the strong current surge, the material (under certain circumstances, the material to be influenced to the object material) evaporates spontaneously, and a hot, high-pressure plasma is created which expands in the axial direction.
• the object material is then exposed to the plasma flow at a suitable distance from the combustion chamber in the run or outside the run of the electrothermal accelerator, the type of introduction of the object material and in particular the distance of the object material from the combustion chamber from the Parameters of the energy storage and the electrothermal accelerator is dependent.
• the accelerator thermal energy supplied and thereby ein ⁇ directed pulse duration can be achieved an advantageous coating and interaction with the object material to special surface properties.
• the object material is suitably arranged inside or outside the electrothermal accelerator.
• this electrothermal accelerator can be operated with a suitable total amount of energy supplied and the corresponding pulse duration, so that the erosion and ablation of the components of the accelerator are avoided, whereby a particularly defined and unaffected by foreign matter is applied to the object material.
• the components of the electrothermal accelerator that come into contact with the plasma flow can consist of materials from which the application material is formed by removal and / or evaporation as by similar dissipative processes.
• the wall of the combustion chamber can consist of the same material as when iron surfaces are exposed to carbon-containing plasma.
• a further material can be added to this plasma, which is the actual energy carrier, which is suitable and has very special properties when influencing the object material to create.
• Figure 7 shows a guardrail accelerator that can also be used as an energy converter, as described, for example, in European patent application 89 900 590 for a completely different application.
• This guardrail accelerator can either consist of a guardrail accelerator with two parallel guardrails or can be a guardrail accelerator with more than two guardrail pairs.
• the energy source is generated by evaporation and ionization of a film, by gas injection or by injection of plasma using an electrothermal accelerator or by erosion of the electrodes and / or the insulators generated.
• the length of this accelerator is adapted in a suitable manner to the parameters of the energy supply in order to generate a short-term pulse of high density either inside the accelerator or outside the accelerator, which pulse is suitable according to the pulse duration, pressure temperature and density, a solid surface or material superficial to be applied so that special properties are generated there.
• the current surge discharge of the capacitor bank by ionization of a gas creates a high-energy plasma which accelerates to high speeds and is then compressed to high pressures in the kbar range.
• This plasma which represents the energy source, then hits the material to be treated with or without additives, the parameters of the impulse being chosen such that there is only an action on the very thin surface layer of the respective material and the base material - in contrast to all previous corresponding processes - is not influenced thermally.
• an eddy current accelerator is used as the energy converter.
• This consists of a flat coil through which the current is conducted from a surge current battery.
• the resulting time-varying electromagnetic field generates a short-circuit current in an electrically conductive plate lying on the coil (insulated), and the plate is accelerated to speeds of up to 2 km / sec perpendicular to the coil plane.
• the loading material can consist of the environment of the accelerator or else of material that is applied to the plate to be accelerated.
• the platelet and the loading material can be separated by a device which retains the platelet after acceleration.
• This eddy current principle 11 is used in a special embodiment of the invention for accelerating powdery, liquid and in particular molten application material.
• this arrangement is for accelerating very hot, liquid melts with temperatures above 1000 K to speeds above 100 m / sec is advantageous because there is no suitable accelerating device for this to date .
• a special configuration of the arrangement consists in that a liquid material to be acted upon is shot onto a surface with or without impingement, thereby increasing the Cooling rate this surface is cooled in a suitable manner.
• a sequential loading preferably takes place from the same energy source by adapting the electrical parameters as the inductance of the feed line.
• FIG. 8 shows a compilation of the designs according to the invention of the method or methods for applying a solid body surface. This is divided into the following levels:
• a method according to the invention can be put together from combinations with or without repetitions of individual stages.
• the division of the stages according to Figure 8 results in a transitivity specific to this invention, so that embodiments of the invention are also possible with this gradation that are not explicitly listed or described in the claims or in the description.

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Plasma & Fusion (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Materials Engineering (AREA)
• Physics & Mathematics (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• General Chemical & Material Sciences (AREA)
• Spectroscopy & Molecular Physics (AREA)
• Coating By Spraying Or Casting (AREA)
• Other Surface Treatments For Metallic Materials (AREA)
• Physical Or Chemical Processes And Apparatus (AREA)

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• 1993
  • 1993-05-19 EP EP93912725A patent/EP0596092A1/de not_active Ceased
  • 1993-05-19 RU RU94014248/02A patent/RU94014248A/ru unknown
  • 1993-05-19 WO PCT/EP1993/001249 patent/WO1993023587A1/de not_active Application Discontinuation
  • 1993-05-19 JP JP5519906A patent/JPH06511518A/ja active Pending

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