EP0399813B1 - Kryokälteanlage - Google Patents

Kryokälteanlage Download PDF

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Publication number
EP0399813B1
EP0399813B1 EP19900305632 EP90305632A EP0399813B1 EP 0399813 B1 EP0399813 B1 EP 0399813B1 EP 19900305632 EP19900305632 EP 19900305632 EP 90305632 A EP90305632 A EP 90305632A EP 0399813 B1 EP0399813 B1 EP 0399813B1
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EP
European Patent Office
Prior art keywords
displacer
cylinder
passage
cooling member
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19900305632
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English (en)
French (fr)
Other versions
EP0399813A3 (de
EP0399813A2 (de
Inventor
Toru C/O Intellectual Property Division Kuriyama
Hideki C/O Intellectual Property Div. Nakagome
Yoichi C/O Intellectual Property Div. Tokai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1127771A external-priority patent/JPH0668417B2/ja
Priority claimed from JP1127772A external-priority patent/JPH0668418B2/ja
Priority claimed from JP1265158A external-priority patent/JP2766341B2/ja
Priority claimed from JP26515989A external-priority patent/JPH03129258A/ja
Priority claimed from JP29757889A external-priority patent/JP2732686B2/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of EP0399813A2 publication Critical patent/EP0399813A2/de
Publication of EP0399813A3 publication Critical patent/EP0399813A3/de
Application granted granted Critical
Publication of EP0399813B1 publication Critical patent/EP0399813B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G1/00—Hot gas positive-displacement engine plants
    • F02G1/04—Hot gas positive-displacement engine plants of closed-cycle type
    • F02G1/043—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
    • F02G1/053—Component parts or details
    • F02G1/0535—Seals or sealing arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G2253/00—Seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G2258/00—Materials used
    • F02G2258/10—Materials used ceramic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/003—Gas cycle refrigeration machines characterised by construction or composition of the regenerator

Definitions

  • the present invention relates to a cryogenic refrigerator and, more particularly, a refrigerator of the refrigerant-accumulating type.
  • cryogenic refrigerators are now on the market.
  • One of them is of the Gifford-McMahon type. This refrigerator is usually arranged as shown in Fig. 1.
  • the refrigerator comprises generally a cold head 1 and a coolant gas introducing and discharging system 2.
  • the cold head 1 includes a closed cylinder 11, a displacer 12 freely reciprocating in the cylinder 11, and a motor 13 for driving the displacer 11.
  • the cylinder 11 includes a first large-diameter cylinder 14 and a second small-diameter cylinder 15 coaxially connected to the first cylinder 14.
  • the border wall between the first 14 and the second cylinder 15 forms a first stage 16 as a cooling face and the front wall of the cylinder 15 forms a second stage 17 which is lower in temperature than the first stage 16.
  • the displacer 12 includes a first displacer 18 reciprocating in the first cylinder 14 and a second displacer 19 reciprocating in the second cylinder 15.
  • the first and second displacers 18 and 19 are connected to each other in the axial direction of the cylinder 11 by a connector 20.
  • a fluid passage 21 is formed in the first displacer 18, extending in the axial direction of the displacer 18, and a cooling member 22 formed of copper meshes or the like is housed in the fluid passage 21.
  • a fluid passage 23 is formed in the second displacer 19, extending in the axial direction of the displacer 19, and a cooling member 24 formed of lead balls or the like is formed in the fluid passage 23.
  • Seal systems 25 and 26 are located between the outer circumference of the first displacer 18 and the inner circumference of the first cylinder 14 and between the outer circumference of the second displacer 19 and the inner circumference of the second cylinder 15, respectively.
  • the top of the first displacer 18 is connected to the rotating shaft of the motor 13 through a connector rod 31 and a Scotch yoke or crankshaft 32.
  • the displacer 12 reciprocates, as shown by an arrow in Fig. 1, synchronizing with the rotating shaft of the motor 13.
  • An inlet 34 and an outlet 35 for introducing and discharging coolant gas extend from the upper portion of one side of the first cylinder 14 and they are connected to the coolant gas introducing and discharging system 2.
  • the coolant gas introducing and discharging system 2 serves as a helium gas circulating system, comprising connecting the outlet 35 to the inlet 34 through a low-pressure valve 36, a compressor 37 and a high-pressure valve 38. Namely, this system 2 is intended to compress low-pressure (about 5 atm) helium to high-pressure (about 18 atm) one by the compressor 37 and send it into the cylinder 11.
  • the low- and high-pressure valves 36 and 38 are opened and closed, as will be described later, in a relation to the reciprocation of the displacer 12.
  • That portions in the refrigerator where cooling is effected or which act as cooling faces are the first and second stages 16 and 17, which are cooled or refrigerated to about 30 K and 10 K, respectively, when no thermal load is present. Therefore, a temperature gradient ranging from a normal temperature (300 K) to 30 K exists between the top and bottom of the first displacer 18 and a temperature gradient ranging from 30 K to 10 K exists between the top and bottom of the second displacer 19. These temperature gradients, however, are changed by thermal loads at the step stages and it usually ranges from 30 K to 80 K at the first stage 16 while it ranges from 10 K to 20 K at the second stage 17.
  • the displacer 12 When the motor 13 starts its rotation, the displacer 12 reciprocates between top and bottom dead centers. When the displacer 12 is at the bottom dead center, the high-pressure valve 38 is opened, allowing high-pressure helium gas to flow into the cold head 1. The displacer 12 then moves to the top dead center. As described above, the seal systems 25 and 26 are arranged between the outer circumference of the first displacer 18 and the inner circumference of the first cylinder 14 and between the outer circumference of the second displacer 19 and the inner circumference of the second cylinder 15, respectively.
  • high-pressure helium gas flows into a first stage expansion chamber 39 formed between the first 18 and the second displacer 19 and then into a second stage expansion chamber 40 formed between the second displacer 19 and the front wall of the second cylinder, passing through the fluid passage 21 in the first displacer 18 and the fluid passage 23 in the second displacer 19. While flowing in this manner, high-pressure helium gas is cooled or refrigerated by the cooling members 22 and 24, so that high-pressure helium gas flowing into the first stage expansion chamber 39 can be cooled to about 30 K and high-pressure helium gas flowing into the second stage expansion chamber 40 can be cooled to about 8 K.
  • the high-pressure valve 38 is closed and the low-pressure valve 36 is opened.
  • the low-pressure valve 36 is opened, high-pressure helium gas in the first stage expansion chamber 39 and the second stage expansion chamber 40 is expanded and cooling is effected.
  • the first stage 16 and the second stage 17 are cooled by this cooling phenomenon.
  • the displacer 12 moves to the bottom dead center again and helium gas in the first stage expansion chamber 39 and the second stage expansion chamber 40 is removed as the movement of the displacer 12.
  • the expanded helium gas is warmed by the cooling members 22 and 24 while passing through the fluid passages 21 and 22, and is an ordinary temperature and discharged. Thereafter, the above-mentioned cycle is repeated and the refrigerating operation is performed.
  • This type of the refrigerator is used for cooling a superconducting magnet or an infrared sensor, or as a cooling source of a cryopump.
  • the cylindrical fluid passage 23 is formed in the second displacer 19 and the inside of the passage is filled with the ball or grain-like cooling member 24.
  • Speed distribution in helium gas flowing through the passages which were filled with balls or grains was measured and it was found that velocity of flow was the lowest in the center of the flow of helium gas and that it became higher and higher as coming remoter from the center of the flow of helium gas outward in the radial direction thereof.
  • US-A-4366676 describes a Malone-type final stage in a Stirling Cycle Cryogenic Refrigerator.
  • the displacer of the final stage has an annular cross-section passage which is divided axially into two halves.
  • the coolant flows down through one half channel, and up through the other half channel, with check valves being provided to ensure unidirectional flow.
  • a static thermodynamic medium is housed in the central cylindrical chamber which is sealed.
  • An object of the present invention is to provide a cryogenic refrigerator capable of causing coolant gas to uniformly flow through a cooling member to increase the refrigerating capacity of the refrigerator.
  • a cryogenic refrigerator comprising a closed cylinder provided with an inlet and an outlet for introducing and discharging a coolant gas into and out of the cylinder; a displacer slidably housed in the closed cylinder and housing a cooling member therein and having a passage through which the coolant gas flows; a means coaxially arranged in and along the passage of the displacer in which the cooling member is housed for dividing the passage into outer and inner ones; a means for reciprocating the displacer in the cylinder; and a means for repeating the process of introducing the high pressure coolant gas into the cylinder through the inlet and discharging it out the cylinder, synchronizing with the reciprocating displacer.
  • a cryogenic refrigerator comprising a closed cylinder provided with an inlet and an outlet for introducing and discharging a coolant gas into and out of the cylinder; a displacer slidably arranged in the closed cylinder and housing a particulate cooling member therein and having a passage through which the coolant gas flows; plural gas permeable diaphragms arranged in the passage in which the cooling member is housed and separated from one another in a direction perpendicular to the direction in which the passage is directed, the particulate cooling member being housed between the gas permeable diaphragms; a means for reciprocating the displacer in the cylinder; and a means for repeating the process of introducing the coolant gas into the cylinder through the inlet and discharging it out of the cylinder through the outlet in a relation to the reciprocating displacer.
  • Fig. 8 is a sectional view showing an example of the Gifford-McMahon type refrigerator, which is same in arrangement as the one shown in Fig. 1 except a fluid path or passage 123.
  • the refrigerator includes generally a cold head 101 and a coolant gas introducing and discharging system 102.
  • the cold head 101 comprises a closed cylinder 111, a displacer 112 housed in the cylinder 111 and freely reciprocating therein, and a motor 113 for driving the displacer 112 to reciprocate in the cylinder 111.
  • the cylinder 111 includes a first large-diameter cylinder 114 and a second small-diameter cylinder 115 coaxially connected to the cylinder 114.
  • the border wall between the first cylinder 114 and the second cylinder 115 forms a first stage 116 which serves as a cooling face, and the front wall of the cylinder 115 forms a second stage 117 which is lower in temperature than the first stage 116.
  • the displacer 112 includes a first displacer 118 reciprocating in the first cylinder 114 and a second displacer 119 reciprocating in the second cylinder 115.
  • the first and second displacers 118 and 119 are connected to each other by a connector member 120 in the axial direction of the cylinder 112.
  • a fluid passage 121 is formed in the first displacer 118, extending in the axial direction of the displacer 118, and a cooling member 122 made by copper meshes or the like is contained in the fluid passage 121.
  • a fluid passage 123 is also formed in the second displacer 119, extending in the axial direction of the displacer 119, and a cooling member 124 made by copper balls or the like is contained in the fluid passage 123.
  • Seal systems 125 and 126 are located between the outer circumference of the first displacer 118 and the inner circumference of the first cylinder 114 and between the outer circumference of the second displacer 119 and the inner circumference of the second cylinder 115, respectively.
  • the top of the first displacer 118 is connected to the rotating shaft of the motor 113 through a connector rod 131 and a Scotch yoke or crankshaft 132.
  • the displacer 112 is reciprocated as shown by an arrow in Fig. 8, synchronizing with the rotating shaft of the motor 113.
  • An inlet 134 and an outlet 135 for coolant gas extend outwards from the upper portion of one side of the first cylinder 114 and they are connected to the coolant gas introducing and discharging system 102.
  • This system 102 serves to circulate helium gas flowing through the cylinder 111 and comprises connecting the outlet 135 to the inlet 134 through a low-pressure valve 136, a compressor 137 and a high-pressure valve 138.
  • the system 102 also serves to compress low pressure helium gas (about 5 atm) to high pressure one (about 18 atm) through the compressor 137 and send it into the cylinder 111.
  • the low- and high-pressure valves 136 and 138 are opened and closed in a relation to the reciprocating displacer 112.
  • a pipe 142 is coaxially housed in the fluid passage 123 and allows helium gas to flow inside and outside the pipe 142.
  • a fluid passage 143 inside the pipe 142 is filled with a cooling member 145 shaped like balls each having a diameter of 0.4 mm and another fluid passage 144 outside the pipe 142 is filled with a cooling member 146 shaped like balls each having a diameter of 0.2 mm.
  • the passage of helium gas is divided into two in the same direction as helium gas flows, and the large-diameter cooling balls 145 are housed in the inner fluid passage 143. This reduces the pressure loss of helium gas flowing through the inner fluid passage 143 and the amount of helium gas flowing through the passage 143 is increased accordingly. The partial flow of helium gas can be thus reduced to a greater extent. This enables the cooling efficiencies of the cooling balls 145 and 146 to be increased so as to enhance the refrigerating capacity of the refrigerator.
  • Fig. 10 shows results obtained by measuring the flow speed distributions of helium gas flowing through the cooling members in the fluid passages shown in Figs. 2 and 9. These results were obtained under normal temperature and with the refrigerators kept static, providing that the outer diameters of the fluid passages, the amounts of the cooling members contained in the fluid passages and the materials by which the cooling members are made are same. These conditions are different from those (cryogenic temperature and reciprocating motion) under which the refrigerators are practically operated, but it is understood that the flow speed distribution of helium gas flowing through the cooling member in the fluid passage shown in Fig. 9 is more uniform. It is supposed that this trend can be kept under the practical conditions.
  • Fig. 11 shows refrigerating curves achieved by the conventional cryogenic refrigerator in which the fluid passage 23 shown in Fig.
  • the horizontal axis of the coordinate shown in Fig. 11 represents temperatures (K) of the second stage 117 and the vertical axis thereof heat loads (W) added to the second stage 117.
  • refrigerating capacity under same temperature is higher in the case of the cryogenic refrigerator according to the present invention. It is therefore understood that refrigerating capacity can be increased when the fluid passage 123 which has the above-described arrangement is employed.
  • the fluid passage in this example is divided into two concentric ones, it may be divided into three or more ones.
  • the diameter of the ball is not limited to 0.4 mm or 0.2 mm.
  • Figs. 12 and 13 show a second example of the cryogenic refrigerator according to the present invention, in which the pipe 142 is coaxially housed in the fluid passage 141, the passage of helium gas is divided to flow inside and outside the pipe 142, and a cooling member 124 contained in the inner and outer passages 143 and 144 is shaped like balls each having same size.
  • the passage of helium gas is divided into two in same direction as helium gas flows, so that the partial flow of helium gas can be reduced to a greater extent, as compared with that in the conventional case. Therefore, cooling efficiency achieved by the cooling member 124 can be increased to thereby enhance the refrigerating capacity of the refrigerator.
  • Fig. 14 shows results obtained by measuring the flow speed distributions of helium gas flowing through the cooling members contained in the fluid passages shown in Figs. 2 and 13. These results were obtained under normal temperature and with the refrigerators kept static, providing that the outer diameters of the fluid passages, the amounts, shapes and sizes of the cooling members contained in the fluid passages, and the materials by which the cooling members are made are same. These conditions are different from those (cryogenic temperature and reciprocating motion) under which the refrigerators are practically operated but it is understood that the flow speed distribution of helium gas flowing through the cooling member in the fluid passage shown in Fig. 13 is more uniform. It is supposed that this trend can be kept under the practical conditions.
  • the fluid passage in this example is divided into two concentric ones, it may be divided into three or more ones. They may be neither concentric nor cylindrical.
  • Fig. 15 shows a third example of the cryogenic refrigerator according to the present invention.
  • This third example is different from the first example in the arrangement of a fluid passage 141 which is formed in the second displacer 119 and in which the cooling member 124 is contained.
  • the cooling member 124 shaped like balls, and sheets of meshes 147 are contained in the fluid passage 141 in such a way that they are alternately piled in the fluid passage 141 in direction perpendicular to the flow of helium gas.
  • helium gas flowing through the passage 141 can be made uniform by the sheets of meshes.
  • the partial flow of helium gas can be thus reduced to a greater extent, as compared with that in the conventional case. Therefore, cooling efficiency achieved by the cooling member 124 can be increased so as to enhance the refrigerating capacity of the refrigerator.
  • Fig. 17 shows results obtained by measuring the flow speed distributions of helium gas flowing through the cooling members in the fluid passages shown in Figs. 2 and 16. These results were measured under normal temperature and with the refrigerators kept static, providing that the outer diameters of the fluid passages, the amounts, shapes and sizes of the cooling members and the materials by which the cooling members are made are same. These conditions are different from those (cryogenic temperature and reciprocating motion) under which the refrigerators are practically operated, but it is understood that the flow speed distribution of helium gas flowing through the fluid passage shown in Fig. 16 is more uniform. It is supposed that this trend can be kept under the practical conditions. Glass wool or the like may be used as spacers instead of the sheets of meshes.
  • the fluid passage in the second displacer has been arranged as shown in Figs. 9, 13 and 16 in the case of the above-described three examples
  • the fluid passage in the first displacer may be arranged as shown in Figs. 9, 13 and 16.
  • These arrangements of the fluid passage can be applied to the cryogenic refrigerator which includes third and fourth displaces.
  • the fluid passage in which the cooling member is housed may be arranged as shown in Figs. 9, 13 and 16 even in the case of those cryogenic refrigerators in which the displacers and the cooling accumulator are not combined as a unit.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Claims (6)

  1. Kryokälteanlage, umfassend:
       einen geschlossenen Zylinder (111) mit Einlaß (134) und Auslaß (135) zum Einführen und Austragen eines Kältemittelgases in den bzw. aus dem Zylinder (111),
       einen verschiebbar im geschlossenen Zylinder (111) untergebrachten Verdränger (119), der ein Kälteelement (124) aufnimmt und einen Durchgang (123), der vom Kältemittelgas durchströmt wird, aufweist,
       eine koaxial im Durchgang (123) des Verdrängers (119), in welchem das Kälteelement (124) untergebracht ist, angeordnete Einrichtung (142) zum Unterteilen des Durchgangs (123) in äußere und innere Durchgänge,
       eine Einrichtung zum Hin- und Herverschieben des Verdrängers (119) im Zylinder (111) und
       eine Einrichtung zum Wiederholen des Vorgangs des Einführens des Hochdruck-Kältemittelgases in den Zylinder (111) über den Einlaß und seines Austragens aus dem Zylinder (111) synchron mit dem sich hin- und herbewegenden Verdränger (119).
  2. Kryokälteanlage nach Anspruch 1, dadurch gekennzeichnet, daß die den Durchgang unterteilende Einrichtung (142) ein zylindrisches Element (142) ist.
  3. Kryokälteanlage nach Anspruch 1, dadurch gekennzeichnet, daß das Kälteelement (124) teilchenförmig ist.
  4. Kryokälteanlage nach Anspruch 3, dadurch gekennzeichnet, daß die Körnchen des im äußeren Durchgang (144) des Verdrängers (119) untergebrachten Kälteelements (124) jeweils eine Größe besitzen, die kleiner ist als diejenige(n) des im inneren Durchgang (143) untergebrachten Käleelements (124).
  5. Kryokälteanlage, umfassend:
       einen geschlossenen Zylinder (111) mit Einlaß (134) und Auslaß (135) zum Einführen und Austragen eines Kältemittelgases in den bzw. aus dem Zylinder (111),
       einen verschiebbar im geschlossenen Zylinder (111) angeordneten Verdränger (119), der ein teilchenförmiges Kälteelement (124) aufnimmt und einen Durchgang (123), der vom Kältemittelgas durchströmt wird, aufweist,
       mehrere gasdurchlässige Membranen (147), die in dem Durchgang (141), in welchem das Kälteelement (124) untergebracht ist, voneinander beabstandet in einer Richtung senkrecht zur Verlaufsrichtung des Durchgangs (141) angeordnet sind, wobei das teilchenförmige Kälteelement zwischen den gasdurchlässigen Membranen untergebracht ist,
       eine Einrichtung zum Hin- und Herverschieben des Verdrängers (119) im Zylinder (111) und
       eine Einrichtung zum Wiederholen des Vorgangs des Einführens des Kältemittelgases in den Zylinder (111) über den Einlaß und seines Austragens aus dem Zylinder (111) über den Auslaß (135) in einer Beziehung zu dem sich hin- und herbewegenden Verdränger.
  6. Kryokälteanlage nach Anspruch 5, dadurch gekennzeichnet, daß die gasdurchlässigen Membranen (147) Maschengitterelemente sind.
EP19900305632 1989-05-23 1990-05-23 Kryokälteanlage Expired - Lifetime EP0399813B1 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP1127771A JPH0668417B2 (ja) 1989-05-23 1989-05-23 極低温冷凍機
JP1127772A JPH0668418B2 (ja) 1989-05-23 1989-05-23 蓄冷材の製造方法及び極低温冷凍機
JP127772/89 1989-05-23
JP127771/89 1989-05-23
JP265158/89 1989-10-13
JP1265158A JP2766341B2 (ja) 1989-10-13 1989-10-13 極低温冷凍機
JP26515989A JPH03129258A (ja) 1989-10-13 1989-10-13 極低温冷凍機
JP265159/89 1989-10-13
JP297578/89 1989-11-17
JP29757889A JP2732686B2 (ja) 1989-11-17 1989-11-17 冷凍機

Publications (3)

Publication Number Publication Date
EP0399813A2 EP0399813A2 (de) 1990-11-28
EP0399813A3 EP0399813A3 (de) 1991-03-06
EP0399813B1 true EP0399813B1 (de) 1993-10-06

Family

ID=27527153

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19900305632 Expired - Lifetime EP0399813B1 (de) 1989-05-23 1990-05-23 Kryokälteanlage

Country Status (2)

Country Link
EP (1) EP0399813B1 (de)
DE (1) DE69003738T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5447034A (en) * 1991-04-11 1995-09-05 Kabushiki Kaisha Toshiba Cryogenic refrigerator and regenerative heat exchange material
EP0508830B1 (de) * 1991-04-11 1996-01-24 Kabushiki Kaisha Toshiba Tiefsttemperaturkälteanlage
CN1143104C (zh) * 1994-08-23 2004-03-24 株式会社东芝 超低温用蓄冷材料及采用该蓄冷材料的超低温用蓄冷器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6514626A (de) * 1965-11-11 1967-05-12
CA1040025A (en) * 1968-01-24 1978-10-10 Raytheon Company Heat transfer structure
US4366676A (en) * 1980-12-22 1983-01-04 The Regents Of The University Of California Cryogenic cooler apparatus
JPS62201358U (de) * 1986-06-11 1987-12-22

Also Published As

Publication number Publication date
DE69003738D1 (de) 1993-11-11
DE69003738T2 (de) 1994-03-10
EP0399813A3 (de) 1991-03-06
EP0399813A2 (de) 1990-11-28

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