EP0340527A2 - Packungsstrukturen für Halbleiteranordnungen - Google Patents

Packungsstrukturen für Halbleiteranordnungen Download PDF

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Publication number
EP0340527A2
EP0340527A2 EP89106979A EP89106979A EP0340527A2 EP 0340527 A2 EP0340527 A2 EP 0340527A2 EP 89106979 A EP89106979 A EP 89106979A EP 89106979 A EP89106979 A EP 89106979A EP 0340527 A2 EP0340527 A2 EP 0340527A2
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EP
European Patent Office
Prior art keywords
chip
devices
substrate
chips
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP89106979A
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English (en)
French (fr)
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EP0340527A3 (de
Inventor
Harry Randall Bickford
Mark Fielding Bregman
Paul Andrew Moskowitz
Caroline Ann Kovac
Michael Jon Palmer
Paige Adams Poore
Timothy Clark Reiley
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International Business Machines Corp
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International Business Machines Corp
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Publication date
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Publication of EP0340527A2 publication Critical patent/EP0340527A2/de
Publication of EP0340527A3 publication Critical patent/EP0340527A3/de
Withdrawn legal-status Critical Current

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    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
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Definitions

  • the present invention generally relates to integrated circuit assemblies and, more particularly, is concerned with increasing semiconductor chip packaging density within the assembly and substantially reducing the cost of manufacture of the assembly by the fabrication of double-chip structures.
  • Integrated circuit chips, or electronic devices are generally packaged as discrete devices as one chip per package; or as part of a multi-chip hybrid circuit, or hybrid package, where a plurality of integrated circuit chips are mounted in one such package.
  • Each hybrid package may be treated as a building block for complex electronic circuits and systems as a general purpose digital data processing systems.
  • an integrated circuit chip has a back face and an active face with an array of input/­ output (I/O) terminals on the active face.
  • the terminals are electrically connected to the circuits within the integrated circuit chip.
  • a commonly used arrangement for increasing chip packaging density is the mounting of a number of chips side by side on a packaging substrate with either the active or back face placed facing the substrate.
  • the packaging substrate is typically a ceramic con­taining conductor patterns therein or a polymeric printed circuit board.
  • the packaging substrate contains conductor patterns to interconnect the chips electrically. Fabrication constraints place a limit on the minimum distance between chips. Therefore, the minimum chip-to-chip space determines the minimum conductor path inter­connecting the chips and, to a major extent, the minimum propagation delay between the chips.
  • Another structure to increase the chip packaging density is formed by mounting or stacking one chip on top of another chip rather than placing chips side by side.
  • TAB tape automated bonding
  • thermocompression bonding apparatus schematically shown in FIG. 5 is exemplary only and not limiting.
  • This apparatus can be incorporated in an automated process of simultaneously thermocompression bonding two chips to a set of beam leads on a tape having a series of sets of beam leads or lead frames by substituting the apparatus of FIG. 5 for the bonding fixtures contained within region 72 of FIG. 3. Since the two chips can be simultaneously bonded to the beam leads simply by providing heat to the back face of the chips, the additional complexity referred to above to solder bond the ILB ends of the beam leads to contact pads on the chip can be avoided.
  • the decoupling capacitor shown in FIG. 7 is an example only and is not limiting. Any other decoupling capacitor structure which can be formed on or in the substrate 150 can be used.
  • the capacitor can be formed from a PN junction or from a MOS structure both of which are commonly known in the art.
  • the chips can be designed so that when the active faces are place facing each other, contact pads to be electrically interconnected are properly aligned.
  • two identical chips, in particular memory chips are used to form a double chip structure when the chip active faces are placed facing each other, in general, all terminals which are to be electrically interconnected will not be aligned and terminal which are not to be electrically connected can be aligned. This situation will arise when a double dense memory is formed from a double chip structure composed of two identical memory chips.
  • FIG. 1, 4 and 6 show embodiments of a double substrate structure each using a different means to electrically interconnect a pad on one substrate which is aligned with a pad on the other substrate.
  • a contact pad on one face which is aligned with a contact pad on the second face may not be aligned to contact pads which are intended to be electrically interconnected by the solder bonds of FIG. 1 or the solderless bond structures of FIG. 4 and 6.
  • FIG. 9 shows a schematic diagram of typical semiconductor memory chip 262 having a number of regions 264 each of which contains a number of memory cells, three of which are schematically shown as 266.
  • Regions on the chip external to regions 264 contain word lines and bit lines which generally are straight conducting lines, the bit lines running in a direction perpendicular to word lines.
  • the bit lines and word lines are generally on different layers of conducting patterns, the layers being separated by insulating material.
  • Contact pads electrically connected to the circuitry within the chip are along periphery 268 and 270 of the chip 262 and run along a line A-B which is equidistant from edges 272 and 274 of chip 262.
  • a semiconductor chip has at least one ground pad. Two ground pads 276 and 278 are shown in FIG. 13.
  • a semiconductor chip has power input terminals. Two power input terminals 280 and 282 are shown in FIG. 9.
  • a memory chip must have contact pads through which data is read from or written into the cells 266.
  • the contact pads along axis A-B can be the data input/output contact pads.
  • One of these pads is designated as 276.
  • the layout described for chip 262 of FIG. 13 is exemplary only and not limiting.
  • a double-chip structure can be formed from two identical chips shown as 262 in FIG. 9.
  • a simplified drawing of a chip such as shown in FIG. 9 is designated as 262 and its constituent elements which correspond to those in FIG. 9 as the same numbers.
  • a second identical chip is designated as 262A.
  • the constituent elements of chip 262A are designated by the same numbers as for chip 262 but with a suffix A.
  • FIG. 10 shows chips 262 and 262A aligned with active faces 284 and 284A respectively placed facing each other. Contact pads on chip 262A are shown in dotted outline since they are on the active face of the chip which is not visible in the perspective of the drawing. No beam leads are shown.
  • FIG. 10 shows how the contact pads on the chips align.
  • a double-chip structure can be formed from chips 262 and 262A by starting with active face 284 of chip 262 and active face 284A of chip 262A facing in the same direction.
  • Chip 262A is rotated 180 degrees about axis AA-BB and placed over chip 262 so that axis A-B is aligned with axis AA-BB and chip 262 edge 268 is aligned with chip 262 edge 268A.
  • an electrical interconnection means such as shown in FIG. 1, FIG. 4, or FIG.
  • a single part number chip can be used to fabricate a double-chip structure by adding to the top surface of the active chip face a modified contact pad structure which is described with reference to FIG. 11, 12, 13 and 14.
  • FIG. 12 shows two chips aligned with active faces facing each other without beam leads.
  • a double-chip structure can be formed from two identical chips 262B and 262C each having the modified contact metallurgy indicated by the numbers with the suffix B and C.
  • the double-chip structure of FIG. 12 can be formed from chips 262B and 262C by starting with active face 286C of chip 262C and active face 284B of chip 262B facing the same direction.
  • Chip 262C is rotated about axis AC-BC and aligning the axis AB-BB of the first chip 262B with the axis AC-BC of the second chip 262C and aligning chip edge 268B of the first chip with edge 268C of the second chip, contact pad 276C end 292C which is on the axis of rotation AC-BC of chip 262C is aligned with contact pad end 292B of contact pad 276B of the chip 262B.
  • the ground pad 276B of the first chip can be electrically interconnected to the ground pad 276C of the second chip.
  • contact pad end 294B of extended contact pad 280B of the first chip 102B can be electrically interconnected to contact pad 294C of extended contact pad 280C of second chip 262C.
  • power pad 280B of the chip 262B can be electrically interconnected to the power pad 280C of chip 262C by placing an interconnection means between the pattern extension ends 294B and 294C on the two chips.
  • FIG. 13 is an expanded view of the region of chip 262B in FIG. 11 surrounding contact pad 280B and 276B.
  • the locations of pads 280 and 276 of chip 262 of FIG. 9 is shown in dotted outline. Neither pad 280 or 276 is on the rotation axis A-B in FIG. 9.
  • Extended pad 280B and 276B of chip 262B of FIG. 13 is shown having ends 294B and 292B respectively on the rotation axis AB-BB.
  • the contact pad metallurgy forming pads contact on chips 262, 262A, 262B and 262C can be a metallurgy appropriate for the double-chip structures shown in FIG. 1 with solder mounds as electrical interconnection means, shown in FIG. 4 for solderless bonding and shown in FIG. 6 for solderless bonding to beam leads with spherical protuberances at the ends thereof.
  • Contact pad 286 of FIG. 9 which rests on axis of rotation A-B is replaced in FIG. 11 by contact pad 286B which is extended in a direction perpendicular to the axis AB-BB to provide contact pad end 290B which is not on the axis of rotation AB-BB.
  • FIG. 14 shows active face 302 of chip 304 mounted in double-chip structure 306 facing active face 308 of chip 310.
  • Chip 304 has contact metallurgy 314 and chip 310 has contact metallurgy 316.
  • Contact metallurgy 314 and 316 of FIG. 14 correspond to contact metallurgy 290C and 290B respectively of FIG. 12.
  • Pad 314 is electrically interconnected to elements within chip 304 through chip conductor extension 318.
  • Pad 316 is electrically interconnected to elements within chip 310 through chip conductor extension 320.
  • Chip 304 and chip 310 have insulating layers 322 and 324 respectively on the chip active faces.
  • Contact metallurgy 314 is electrically connected to extension 318 through hole 328 in layer 324.
  • ILB end 338 of beam lead 339 is solderlessly bonded between pad 316 extension 340 and pad 332.
  • dummy pad 330 provides a structure for compressing ILB end of beam lead 336 against the extension 334 of contact pad 314.
  • bonding beam lead ends between active and dummy pads adds structural stability to the double-chip structure. The same applies with respect to dummy contact pad 332, ILB end 333 of beam lead 339 and contact pad 316 extension 340.
  • This structure permits separate beam lead connections to chip I/O 318 and 320 each of which is aligned and facing each other and which would be as electrically interconnected if an ILB end of a beam lead were placed between the inner end 342 of contact pad 316 and the inner end 344 of contact pad 314.
  • the term conducting pattern on an active device surface can refer to a unitary pattern of conducting material at the active device face.
  • the pattern can be electrically connected to one or more terminals or to no terminal at the active device face.
  • the term conducting pattern can also refer to a plurality of distinct conducting elements at the active device face. Each element can be electrically connected to one or more terminals or to no terminal at the active device face.
  • a beam lead ILB site is bonded between parts of the conducting pattern, on the first and second devices, which are aligned when the active faces of each device are placed facing each other.
  • Terminals on the first and second devices are electrically interconnected by the ILB site bonded between the conducting patterns only if the conducting patterns, to which the ILB site is bonded, are electrically connected to terminals on the first and second devices.
  • a beam lead ILB site can be bonded between conducting patterns which are not electrically connected to a terminal on either the first or second device.
  • a beam lead ILB site can be bonded between conducting patterns which are electrically connected to a terminal on one device but not on the other device.
  • the means for dissipating heat is thermally connected to the back 86 of chip 78.
  • the means for dissipating heat 218 is shown in FIG. 15 as a heat radiator 218 containing fins 220 attached to a base of the radiator 222. Heat radiators of this configuration are commonly formed from molded aluminum or copper.
  • the base 222 of radiator 218 is thermally attached to the back 86 of substrate 78 with thermal grease or by solder bonding the base 222 to a metal pad on the back 86 of substrate 78 or by other die attach techniques including ad­hesives.
  • a plurality of fins 220 are attached to base 222.
  • a fluid such as air or water can pass over the fins 220 to remove heat from radiator 218.
  • the double substrate assembly 76 in FIG. 15 can be replaced by the double substrate assembly 2 of FIG. 1, by the double substrate assembly 144 of FIG. 6 by the double sub­strate assembly 179 of FIG. 7, and by the double substrate assembly 210 of FIG. 8.
  • FIG. 16 shows an alternate embodiment for the removal of heat generated in a double substrate structure.
  • thermally conductive path 223 is thermally mounted to the back 86 of substrate 78.
  • the conductive path can be thermally mounted to substrate 78 by means such as, for example, thermal grease, soldering to a metal pad on back 86 of substrate 78 or other die attach techniques including adhesives.
  • the thermally conductive path 223 is thermally connected at 224 to thermal bus 226.
  • the thermal connection at 224 can be made by means commonly known in the art.
  • the structure of thermally conductive path 223 can be formed from molded conductive material such as aluminum or copper.
  • thermal bus 16 can be a solid conducting material such as, for example, a sheet of aluminum or copper.
  • the thermal bus can be thermally connected to commonly used cooling systems for extraction of heat from the thermal bus and the double substrate assemblies.
  • the thermal bus 226 can be a hollow member through which a coolant such as, for example, water, air or other suitable fluid is passed to extract heat from the double substrate assemblies such as 76.
  • a coolant such as, for example, water, air or other suitable fluid
  • the double substrate assembly 76 in FIG. 9 can be replaced by the double substrate assembly 2 of FIG. 1, by the double substrate assembly 144 of FIG. 6, by the double substrate assembly 179 of FIG. 7 and by the double substrate assembly 210 of FIG. 8.
  • FIG. 17 shows two double substrate structures mounted within a module 230.
  • the back face 232 of the bottom substrate 234 is disposed on a packaging substrate 236 which is typically formed of a ceramic, glass ceramic, polymeric material or the like.
  • Packaging substrate 236 typically contains multi-levels of electrically inter­connected metal patterns not shown which electrically interconnect assemblies 76 to each other and contact pads 240 to pins 242.
  • a cap 238 typically made of aluminum or ceramic material is placed over the top of the packaging substrate 236 to enclose the dual substrate assemblies 76.
  • the cap 238 is hermetically sealed by commonly known means to the packaging substrate 236 at the substrate periphery 248.
  • the space enclosed 244 by the cap is typically filled with an inert atmosphere such as nitrogen to prevent corrosion of conducting patterns on or near the surface of the packaging substrate 245 and on or near the active faces of the substrates of the double substrate structures 76.
  • the chip and packaging substrate conducting patterns are typically made of metals such as aluminum, copper and alloys thereof. These conducting materials are exemplary and not limiting. Conducting patterns formed from such materials corrode on exposure to atmospheric oxygen and water vapor.
  • the top layer of conducting patterns on a semiconductor chip are covered with a dielectric material such as silicon dioxide and the top layer of conductors on a packaging substrate is covered with a dielectric material such as a polymer or ceramic. Electrical connection is made to the patterns through conductor filled via hole in the dielectric.
  • the dielectric surface may not provide adequate environmental isolation of the conducting patterns due to pin holes and microcracks in the dielectric and due to spaces between dielectric and the conductor filling the via holes. Corrosion such as oxidation can increase resistance and cause electrical opens in conducting lines forming the patterns. Also such corrosion can occur in the region of the inter­connection of the ILB ends 248 of the beam lead 246 and the contact pads 250 and 252 of FIG. 17 causing in­creased contact resistance and opens.
  • FIG. 17 shows a double substrate assembly 76 which is shown in and described with reference to FIG. 4.
  • the double substrate assembly in FIG. 19 can be replaced by the double substrate assembly 2 of FIG. 1, by the double substrate assembly 144 of FIG. 6, by the double substrate assembly 179 of FIG. 7 and by the double substrate assembly 210 of FIG. 8.
  • a DIP typically has a semiconductor chip 253 enclosed by a molded plastic 255 which serves to isolate the chip from corrosive environments and mechanical damage.
  • Beam leads 257 are electrically connected to chip contact pads typically by wires 259. The beam leads project outwardly from the molded plastic to provide a means for electrical connection to the DIP package.
  • a number of modules of the type shown in FIG. 17 or DIP packages of FIG. 18 generally are mounted onto printed circuit boards.
  • Pins 242 of FIG. 17 or beam lead ends 261 of a DIP package of FIG. 18 are electrically connected to the printed circuit boards either by inserting the pins or beam lead ends into a socket on the circuit board or soldering to contact pads on the circuit board.
  • the need for housings such as those shown in Figs. 17 and 18 to isolate the enclosed structures can be avoided by providing a means to provide isolation from corrosive environments and mechanical damages only in the regions where it is required.
  • the region between chips in a double-chip structure contains structures which are subject to corrosion when exposed to atmospheric oxygen, water vapor etc.
  • FIG. 19 there is shown a structure 346 which is the same as structure 2 of FIG. 1 with the addition of a material 348 between substrate 350 and substrate 352.
  • the material 348 substantially fills the space between substrates 350 and 352.
  • Material 348 provides mechanical support to the beam leads 354 which project outwardly from between substrates 350 and 352 where ILB end 356 of beam lead 354 is bonded between both solder wettable contact pads 358 and 360 through solder mounds 362 and 364 respectively.
  • Material 348 also provides sufficient isolation from the external environment to prevent corrosion described above. Material 348 must also adhere to active faces 366 of substrate 350, to active face 368 of substrate 352 and to the beam leads 354 to substantially prevent the external atmosphere from entering the region between the substrates. It is the preferred embodiment of the present invention to provide material 348 to a double substrate structure such as shown in FIG. 19 after the first and second substrate are mounted together and electrically interconnected. To achieve this, a liquid polymer is allowed to flow by capillary action into the space between substrates 350 and 352. In a double substrate structure as shown in FIG. 1, FIG. 4 and FIG. 6, the substrate to substrate spacing is typically of the order of 1 to 5 milli-inches. Therefore, the liquid polymer must have sufficiently low viscosite and be sufficiently wetting to flow within this narrow space.
  • compositions referred to herein as cycloaliphatic epoxide compositions which contain a cycloaliphatic epoxide; an anhydride of an organic dicarboxylic acid; and an akylene oxide adduct of an imidazole.
  • the anhydride of the organic carboxylic acid is present in amount sufficient to harden the cycloaliphatic epoxide.
  • the alkylene oxide adduct of the imidazole is present in an amount sufficient to promote the hardening of the cycloaliphatic epoxide.
  • the encapsulating liquid polymeric material can be applied to the double electronic device structure along the edge of the devices with a beveled tipped stainless steel needle until a fillet of material is observed surrounding the edge of the devices of the structure.
  • the structures are preheated to the specified temperature prior to deposition of the liquid polymer.
  • the liquid polymer is thereafter cured.
  • the preferred liquid polymeric materials to form an interplanar encapsulation material substantially filling the space between a double-chip structure should have the following characteristics: 1) be 100 percent solid, i.e., solvent free; 2) be unfilled or filled with particles of mesh size less than about the minimum of the chip to substrate space or the minimum space between the means electrically interconnecting chip and substrate; 3) have ionic purity less than about 50 ppm extractable ionics such as Cl, Fl, Na and K; 4) have good wettability of surface to be coated and low viscosity so that it can readily flow within narrow spaces; 5) have good adhesion to the wetted surfaces after curing; 6) have low stress after curing so as not to press the two chips of the double-chip structure away from each other thereby placing the means electric­ally interconnecting the two chips in tension which could result in electrically disconnecting the chips.
  • a filler is added to the polymeric material.
  • Fillers are fine particles of material such as silicon dioxide (SiO2), aluminum oxide (Al2O3), tantalum pentoxide (Ta2O5), silicon carbide (SiC), boron carbide (B4C), tungsten carbide (WC), silicon nitride (Si3N4) and lithium aluminum silicate compounds. It has been found that unfilled undercoat compositions are preferable to practice the present invention.
  • the polymeric materials of the Buchwalter et al. and of the examples above exhibit relatively low viscosity. Moreover, these compositions avoid ionic contamination due to ions such as chlorine, sodium, fluorine and other halide ions.
  • This material when deposited between the double substrate structures of FIG. 1, FIG. 4, FIG. 6 and FIG. 7 excludes the ambient atmosphere surrounding the structure; furthermore, since the liquid polymer is solvent free, the polymeric material after curing is substantially void free.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Wire Bonding (AREA)
  • Lead Frames For Integrated Circuits (AREA)
EP89106979A 1988-05-02 1989-04-19 Packungsstrukturen für Halbleiteranordnungen Withdrawn EP0340527A3 (de)

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US188805 1988-05-02
US07/188,805 US4862322A (en) 1988-05-02 1988-05-02 Double electronic device structure having beam leads solderlessly bonded between contact locations on each device and projecting outwardly from therebetween

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EP0340527A3 EP0340527A3 (de) 1990-04-25

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US4862322A (en) 1989-08-29
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