EP0292994A3 - Apparatus for transferring small amount of fluid apparatus for transferring small amount of fluid - Google Patents

Apparatus for transferring small amount of fluid apparatus for transferring small amount of fluid Download PDF

Info

Publication number
EP0292994A3
EP0292994A3 EP88108514A EP88108514A EP0292994A3 EP 0292994 A3 EP0292994 A3 EP 0292994A3 EP 88108514 A EP88108514 A EP 88108514A EP 88108514 A EP88108514 A EP 88108514A EP 0292994 A3 EP0292994 A3 EP 0292994A3
Authority
EP
European Patent Office
Prior art keywords
fluid
small amount
transferring small
transferring
fluid apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88108514A
Other versions
EP0292994B1 (en
EP0292994A2 (en
Inventor
Kuniyoshi Tsubouchi
Shohei Narusawa Apartment 714 Yoshida
Kiyoshi Namura
Tsutomu Okusawa
Akira Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of EP0292994A2 publication Critical patent/EP0292994A2/en
Publication of EP0292994A3 publication Critical patent/EP0292994A3/en
Application granted granted Critical
Publication of EP0292994B1 publication Critical patent/EP0292994B1/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/08Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09Pumps having electric drive
    • F04B43/095Piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP19880108514 1987-05-29 1988-05-27 Apparatus for transferring small amount of fluid Expired EP0292994B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP131406/87 1987-05-29
JP13140687A JPS63297779A (en) 1987-05-29 1987-05-29 Transfer device for trace quantity of fluid

Publications (3)

Publication Number Publication Date
EP0292994A2 EP0292994A2 (en) 1988-11-30
EP0292994A3 true EP0292994A3 (en) 1989-10-25
EP0292994B1 EP0292994B1 (en) 1992-01-02

Family

ID=15057228

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19880108514 Expired EP0292994B1 (en) 1987-05-29 1988-05-27 Apparatus for transferring small amount of fluid

Country Status (3)

Country Link
EP (1) EP0292994B1 (en)
JP (1) JPS63297779A (en)
DE (1) DE3867317D1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3844059A1 (en) * 1988-12-28 1990-08-30 Allweiler Ag DEVICE AND METHOD FOR MOVING FLUID MEDIA
WO2011065356A1 (en) * 2009-11-25 2011-06-03 学校法人 東海大学 Functional capillary device and drive method for same
DE102010039943A1 (en) * 2010-08-30 2012-03-01 Robert Bosch Gmbh Method for controlling a pressure supply unit for a fluid aggregate and corresponding fluid aggregate
US10354763B2 (en) 2015-12-07 2019-07-16 Ge-Hitachi Nuclear Energy Americas Llc Piping enhancement for backflow prevention in a multiple loop, metal cooled nuclear reactor system
JP7219722B2 (en) * 2017-12-26 2023-02-08 株式会社村田製作所 pumping equipment
DE112020000997B4 (en) 2019-04-25 2024-01-11 Murata Manufacturing Co., Ltd. Pumping device with a first and second piezoelectric pump with different input powers

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107630A (en) * 1955-01-31 1963-10-22 Textron Inc Non-magnetic electro-hydraulic pump
US3289594A (en) * 1963-07-11 1966-12-06 Thiele Ernst Valveless pump for liquids
US3657930A (en) * 1969-06-24 1972-04-25 Bendix Corp Piezoelectric crystal operated pump to supply fluid pressure to hydrostatically support inner bearings of a gyroscope
FR2343140A1 (en) * 1976-03-01 1977-09-30 Philips Nv PUMP FOR NON-PULSATORY PUMPING OF A LIQUID
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5142539B2 (en) * 1971-09-14 1976-11-16
JPS57137671A (en) * 1981-02-19 1982-08-25 Natl Aerospace Lab Laminated bimolf vibrator pump
JPH0783064B2 (en) * 1985-01-18 1995-09-06 株式会社日立製作所 Semiconductor memory device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107630A (en) * 1955-01-31 1963-10-22 Textron Inc Non-magnetic electro-hydraulic pump
US3289594A (en) * 1963-07-11 1966-12-06 Thiele Ernst Valveless pump for liquids
US3657930A (en) * 1969-06-24 1972-04-25 Bendix Corp Piezoelectric crystal operated pump to supply fluid pressure to hydrostatically support inner bearings of a gyroscope
FR2343140A1 (en) * 1976-03-01 1977-09-30 Philips Nv PUMP FOR NON-PULSATORY PUMPING OF A LIQUID
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor

Also Published As

Publication number Publication date
JPS63297779A (en) 1988-12-05
DE3867317D1 (en) 1992-02-13
EP0292994B1 (en) 1992-01-02
EP0292994A2 (en) 1988-11-30

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