EP0276731B1 - Verfahren zur Elektronenstrahl-Führung mit Energieselektion und Elektronenspektrometer - Google Patents

Verfahren zur Elektronenstrahl-Führung mit Energieselektion und Elektronenspektrometer Download PDF

Info

Publication number: EP0276731B1
Authority: EP; European Patent Office
Prior art keywords: energy; dispersive; lens; focusing; specimen
Prior art date: 1987-01-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

EP88100724A

Other languages

German (de)

English (en)

French (fr)

Other versions

EP0276731A3 (en

EP0276731A2 (de

Inventor

Harald Ibach

Heinz-Dieter Bruchmann

Sieghart Lehwald

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Forschungszentrum Juelich GmbH

Original Assignee

Forschungszentrum Juelich GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-01-30

Filing date

1988-01-20

Publication date

1993-03-10

1988-01-20 Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH

1988-08-03 Publication of EP0276731A2 publication Critical patent/EP0276731A2/de

1990-01-24 Publication of EP0276731A3 publication Critical patent/EP0276731A3/de

1993-03-10 Application granted granted Critical

1993-03-10 Publication of EP0276731B1 publication Critical patent/EP0276731B1/de

2008-01-20 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

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Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements

Definitions

the invention relates to a method for electron beam guidance with focussing energy selection in an energy-dispersive system with different focussing in two mutually perpendicular directions (especially in the energy selection direction and perpendicular to it with systems focusing only in one plane), and to electron spectrometers with at least one energy-dispersive system with such a beam guidance.
Bundled electrons with a certain energy are used for the treatment and investigation of surfaces and gases.
energy-dispersive systems are known which are used either individually as analyzers or as monochromators or in combination of analyzer and monochromator as so-called electron impact spectrometers.
Energy-dispersive systems as analyzers are used, for example, in UV or X-ray photoelectron spectroscopy (also known under the name ESCA) and in Auger spectroscopy.
ESCA UV or X-ray photoelectron spectroscopy
Auger spectroscopy electrons emitted by the sample are transmitted through analyzes the analyzer for its kinetic energy.
a lens system located between the sample and the analyzer takes care of the beam transport, the adaptation of the electron energy to the transmission energy of the analyzer and the necessary enlargement or reduction of the image of the imaged area of the sample to adapt to the input slot of the analyzer.
Energy dispersive systems are also used to produce monochromatic electron beams, such as in inverse photoemission spectroscopy. Similar to the analyzer described above, lens systems are used between the monochromator and the sample for beam transport, for adjusting the energy and the image size.
the electrons emitted by a cathode are monochromatized in one or more monochromators and directed onto a sample through a lens system, the energy of the electrons on the sample usually being different from the energy in the monochromators.
the electrons hitting the sample are scattered by the sample and suffer characteristic energy losses, for example through excitation of oscillation quanta.
the scattered electrons are directed through a lens system onto the entrance slit of one or more energy-dispersive elements conducted, which analyze the scattered electrons with regard to their energy distribution, and detected in a detector.
Electron spectrometers of this type are used in particular for vibration spectroscopy and for the investigation of electronic losses on solid surfaces and are manufactured by a number of companies.
the invention is therefore based on the object of providing such a beam guide with focusing energy selection or an electron spectrometer, by means of which a high energy resolution with a high electron current is achieved on the sample or on the detector.
the inventive method of the type mentioned is characterized in that the different focusing of the electrons in the two mutually perpendicular directions is corrected by a non-circularly symmetrical lens system connected downstream or upstream of the energy-dispersive system in such a way that either the virtual or the real one Input aperture of the energy dispersive system on a given image level outside of the energy dispersive System or a sample outside the energy-dispersive system on the virtual or real output aperture of the same is mapped.
the lens systems to be used for this purpose described with different focusing in two mutually perpendicular directions are designed or dimensioned in consideration of the focus specification and the electron trajectories in the energy-dispersive system.
rectangular lens cross-sectional profiles can be used, in which the height and width are matched to one another in such a way that the described image occurs in cooperation with the different focusing of the electrons in the two mutually perpendicular directions within the energy-dispersive system.
the symmetry axes of the rectangular profile must then be parallel or perpendicular to the radial plane.
the required height and width of the lens cross-sectional profiles are calculated by solving the Laplace equation in three dimensions and calculating the electron orbits in three dimensions in the manner known to the person skilled in the art.
Devices with beam guidance include electron monochromators with a subsequent corrective lens system between the monochromator and sample, analyzers with an upstream corrective lens system between the sample and analyzer, and electron impact spectrometers with such a lens system between the monochromator and sample and / or between the sample and analyzer.
electron monochromators with a subsequent corrective lens system between the monochromator and sample analyzers with an upstream corrective lens system between the sample and analyzer
electron impact spectrometers with such a lens system between the monochromator and sample and / or between the sample and analyzer.
an electron impact spectrometer as described, consists of a monochromator part with a downstream lens system and an analyzer part with a preceding lens system
the invention can, however, also be used separately for the monochromator with a downstream lens system and the analyzer with an upstream lens system for the various applications.
plate capacitors can also be used, which also focus only in one plane. It is also possible to use energy-dispersive systems which have a different, in each case non-zero, focusing in two mutually perpendicular directions, in which case the lens system must be suitably adapted (selection of the height and width of the lens profiles) in such a way that the desired focusing occurs .
the electron impact spectrometer shown in Figure 1 comprises a cathode system 1, two monochromators 2 and 3, each a lens system consisting of three elements 4, 5 and 6 or 8, 9 and 10 between the monochromators and the sample 7 and between the sample 7 and the Analyzers 11 and 12, two analyzers 11 and 12 and a detector 13.
the two lens systems between the monochromator and the sample and between the sample and the analyzer are symmetrical to one another, so that the lens elements 4 and 10, 5 and 9 and 6 and 8 are identical to one another.
FIGS. 2 and 3 The cross-sectional profiles of these lens elements 4 to 6 (or 8 to 10) are shown in FIGS. 2 and 3: Of these, the lens element 4 is tapered in a trapezoidal or stepped manner and the elements 5 and 6 are designed in a rectangular shape.
the height and width of the profiles of the lens elements 8, 9 and 10 are coordinated so that in the radial plane the sample is imaged on the inlet slit of the first analyzer, perpendicularly the sample is imaged on the outlet slit of the last analyzer, so that a total of one image the sample is created at the exit slit of the second analyzer.
the monochromatic current achieved using the lens system according to the invention, measured on the detector, as a function of the resolution is shown in FIG. 5, curve a.
curve b shows analog values for a spectrometer which does not have the lens system according to the invention, but is otherwise identical in terms of monochromators and analyzers.
the results refer to one Electron energy on the sample of 100 eV, while the energy of the electrons in the monochromators and analyzers (depending on the resolution) is less than 1 eV.

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Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Electron Tubes For Measurement (AREA)

EP88100724A 1987-01-30 1988-01-20 Verfahren zur Elektronenstrahl-Führung mit Energieselektion und Elektronenspektrometer Expired - Lifetime EP0276731B1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE3702696		1987-01-30
DE19873702696 DE3702696A1 (de)	1987-01-30	1987-01-30	Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer

Publications (3)

Publication Number	Publication Date
EP0276731A2 EP0276731A2 (de)	1988-08-03
EP0276731A3 EP0276731A3 (en)	1990-01-24
EP0276731B1 true EP0276731B1 (de)	1993-03-10

Family

ID=6319818

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP88100724A Expired - Lifetime EP0276731B1 (de)	1987-01-30	1988-01-20	Verfahren zur Elektronenstrahl-Führung mit Energieselektion und Elektronenspektrometer

Country Status (4)

Country	Link
US (1)	US4845361A (ja)
EP (1)	EP0276731B1 (ja)
JP (1)	JP2529712B2 (ja)
DE (2)	DE3702696A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE69027602T2 (de) *	1990-08-08	1997-01-23	Philips Electronics Nv	Energiefilter für Ladungsträgervorrichtung
JP2636113B2 (ja) *	1992-03-26	1997-07-30	広島大学長	帯域フィルター型逆光電子分光検出装置
US5466933A (en) *	1992-11-23	1995-11-14	Surface Interface, Inc.	Dual electron analyzer
DE19633496B4 (de) *	1996-08-20	2006-06-08	Ceos Corrected Electron Optical Systems Gmbh	Monchromator für die Elektronenoptik, insbesondere Elketronenmikroskopie
DE50015720D1 (de) *	2000-03-27	2009-10-01	Ellcie Maintenance Gmbh	Elektronenspektrometer mit Ablenkeinheit
KR20060088272A (ko) *	2005-02-01	2006-08-04	삼성전자주식회사	Ｘ-선 광전자 분광분석장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2856244A1 (de) *	1978-12-27	1980-07-03	Kernforschungsanlage Juelich	Elektronenstosspektrometer
US4742223A (en) *	1984-05-23	1988-05-03	Indiana University Foundation	High resolution particle spectrometer
US4559449A (en) *	1984-05-23	1985-12-17	Indiana University Foundation	High resolution particle spectrometer

1987
- 1987-01-30 DE DE19873702696 patent/DE3702696A1/de not_active Withdrawn
1988
- 1988-01-20 EP EP88100724A patent/EP0276731B1/de not_active Expired - Lifetime
- 1988-01-20 DE DE8888100724T patent/DE3878939D1/de not_active Expired - Lifetime
- 1988-01-27 JP JP63014812A patent/JP2529712B2/ja not_active Expired - Lifetime
- 1988-01-28 US US07/149,596 patent/US4845361A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE3878939D1 (de)	1993-04-15
DE3702696A1 (de)	1988-08-11
EP0276731A3 (en)	1990-01-24
US4845361A (en)	1989-07-04
JPS63276861A (ja)	1988-11-15
JP2529712B2 (ja)	1996-09-04
EP0276731A2 (de)	1988-08-03

Legal Events

Date	Code	Title	Description
1988-06-18	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1988-08-03	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): CH DE FR GB IT LI NL
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1990-01-24	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): CH DE FR GB IT LI NL
1990-03-21	RAP3	Party data changed (applicant data changed or rights of an application transferred)	Owner name: FORSCHUNGSZENTRUM JUELICH GMBH
1990-04-18	17P	Request for examination filed	Effective date: 19900219
1992-05-20	17Q	First examination report despatched	Effective date: 19920407
1992-11-25	RBV	Designated contracting states (corrected)	Designated state(s): CH DE FR GB IT LI
1993-01-22	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
1993-03-10	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): CH DE FR GB IT LI
1993-04-15	REF	Corresponds to:	Ref document number: 3878939 Country of ref document: DE Date of ref document: 19930415
1993-05-05	GBT	Gb: translation of ep patent filed (gb section 77(6)(a)/1977)	Effective date: 19930405
1993-06-04	ET	Fr: translation filed
1993-06-08	ITF	It: translation for a ep patent filed	Owner name: STUDIO JAUMANN
1994-01-13	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
1994-01-13	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
1994-03-02	26N	No opposition filed
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