EP0166807B1 - Pompe à vide rotative à palettes - Google Patents

Pompe à vide rotative à palettes Download PDF

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Publication number
EP0166807B1
EP0166807B1 EP84111178A EP84111178A EP0166807B1 EP 0166807 B1 EP0166807 B1 EP 0166807B1 EP 84111178 A EP84111178 A EP 84111178A EP 84111178 A EP84111178 A EP 84111178A EP 0166807 B1 EP0166807 B1 EP 0166807B1
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EP
European Patent Office
Prior art keywords
housing
pumping stage
pump
rotary vane
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP84111178A
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German (de)
English (en)
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EP0166807A3 (en
EP0166807A2 (fr
Inventor
Werner Rietschle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Werner Rietschle Maschinen und Apparatebau GmbH
Original Assignee
Werner Rietschle Maschinen und Apparatebau GmbH
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Application filed by Werner Rietschle Maschinen und Apparatebau GmbH filed Critical Werner Rietschle Maschinen und Apparatebau GmbH
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Publication of EP0166807A3 publication Critical patent/EP0166807A3/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum

Definitions

  • the invention relates to a rotary vane vacuum pump according to the preamble of claim 1.
  • a rotary vane vacuum pump of this type is known from DE-A-2 350 828.
  • Conventional rotary vane vacuum pumps, the z. B. are known from GB-A-335 735, have a water jacket, which is formed between the outside of a cylindrical sleeve which receives the pump rotor, and an outer housing which is spaced from and surrounds the sleeve.
  • the sleeve and outer housing are generally molded in one piece.
  • Rotary vane vacuum pumps are widely used and used in the chemical and pharmaceutical industries for purposes such as distillation, drying and fractionation, and they also serve a wide variety of purposes in the plastics, ceramics and packaging industries. These pumps are often exposed to aggressive and corrosive media, which lead to a deterioration in pump performance after long periods of operation. For example, in chemical processes, the performance of a pump may become insufficient after a year of continuous operation or less, requiring the pump to be serviced or replaced. Replacing the pump is the easiest way to restore the operability of the system to which the pump belongs, but it is also the most expensive. Conventional rotary vane vacuum pumps are in fact relatively expensive because they require a complicatedly structured and shaped pump housing in order to be able to accommodate a cooling water jacket.
  • the pump stage is attached to a flange surface of an intermediate housing, which enables a form-fitting coupling for releasably connecting the rotor to a rotary drive.
  • the housing of the pump stage is arranged in a chamber which is delimited by the intermediate housing on one side and an outer housing on the other hand, which is detachably attached to the flange surface of the intermediate housing.
  • This outer housing is filled with a lubricating oil supply.
  • the invention has for its object to improve a rotary vane vacuum pump of the type specified in such a way that the defective or worn out units can be replaced in a particularly cost-effective manner and with little downtime even if a cooling system and a separate outlet are present.
  • the rotary vane vacuum pump therefore contains at least one pump stage, preferably two pump stages, each of which has a rotor which is accommodated in a generally cylindrical bore in a housing and carries rotary vane which cooperate with the cylindrical bore.
  • the housing of each pump stage is exposed to a cooling liquid that flows in a cooling system.
  • Each pump stage is designed as an interchangeable unit and detachably attached via its housing to a surface of a flange-like intermediate housing, which is referred to as a gear and connection unit.
  • a cooler housing is detachably attached to the same surface of the intermediate housing, and the chamber formed between the cooler housing, the intermediate housing and the housing or the housings of the pump stage or stages is filled with a cooling liquid such as water.
  • the cooling liquid is in direct contact with the outside of this housing in order to dissipate the heat generated during the operation of the pump stages.
  • the cooler housing can be provided with openings for connection to a heat exchanger, through which the cooling system of the pump is completed.
  • each pump stage as an easily interchangeable unit that is reduced to the essential active parts of a rotary vane pump, which are subject to wear and can then deteriorate the operating data of the pump, especially under harsh operating conditions, as is the case in many chemical processes are encountered.
  • Numerous components that are required for a complete rotary vane vacuum pump are therefore located outside each pump stage, namely within the gear unit and connection unit.
  • the transmission and connection unit is provided with channels and passages which are required for the connection of two separate pump stages in series with one another to form a two-stage rotary vane vacuum pump.
  • the transmission and connection unit in the intermediate housing contains a transmission mechanism which is provided between a single drive motor and the two pump stages.
  • the transmission mechanism preferably includes two meshing gears, one of which is driven directly by the motor and drives the rotor of one pump stage, while the other gear drives the rotor of the other pump stage.
  • At least one compartment for receiving an oil reservoir is formed in the intermediate housing, from which oil is to be conveyed to certain zones of the pump stage which require lubrication.
  • lubrication for the bearings of the pump rotor and / or the delivery chamber can be provided, which is formed between the rotary valves of the rotor and the inside of the cylindrical bore in which the rotor is received eccentrically.
  • Separate oil supply chambers can be provided for different types of oil for lubricating different zones of the pump stage.
  • the rotary vane vacuum pump shown in Figures 1 to 5 of the drawing comprises a base plate 10 which carries an electric drive motor 12 and a two-stage rotary vane pump, which is generally designated 14.
  • This pump 14 has a cooler housing 16 and an intermediate housing 18, which is arranged between the cooler housing 16 and the electric motor 12 and is intended for receiving a transmission and connection unit.
  • the cooler housing 16 carries a heat exchanger 20 with an associated fan 22, the heat exchanger 20 being connected to the chamber formed in the interior of the cooler housing 16 via upper pipes 24 and lower pipes 26.
  • Input and output connections 28, 30 are located on one side surface of the narrow intermediate housing 18, as can be seen in FIG. 2.
  • a generally cylindrical oil separator 32 is shown schematically and in broken lines in FIGS. 1 and 2; it is connected to the outlet connection 30 of the pump. Such an oil separator is optionally provided.
  • the pump contains two pump stages 34, 36, which are flanged onto the same side of the intermediate housing 18 as the cooler housing 16.
  • the cooler housing 16 and the two pump stages 34, 36 are detachably attached, for. B. screwed to the intermediate housing 18.
  • the chamber 38 which is delimited between the cooler housing 16 and the intermediate housing 18, is filled with water, so that the housings 40 and 42 of the pump stages 34 and 36 are surrounded by water.
  • the two pump stages 34 and 36 are arranged one above the other and at a distance from one another.
  • the lower pump stage 36 operating as a high pressure stage is dimensioned smaller than the upper low pressure stage 34.
  • the intermediate housing 18 for receiving the transmission and connection unit is composed of a middle housing part 18a and two outer covers, a transmission housing cover 18b and a connection cover 18c.
  • the intermediate housing 18 is hollow and is formed with cavities, compartments and passages.
  • a compartment 44 is shown for receiving an oil supply.
  • the compartment 44 is connected to zones of the pump stages 34, 36, which require lubrication, in a manner described in more detail later.
  • the intermediate housing 18 also has two cavities 46, 48 which extend axially through all three housing parts to permit the passage of positive coupling mechanisms 50, through which the rotors 35, 37 are coupled to a transmission mechanism or a gearbox which or which is contained in a separate compartment 52 of the transmission housing cover 18b.
  • the transmission mechanism comprises two meshing gears 54, 56, of which the gear 56 is coupled directly to the rotor 37 of the lower pump stage 36 and to the rotor of the electric motor 12 via a coupling mechanism 58, while the upper gear 54 to the rotor 35 of the upper Pump stage 34 is coupled on the one hand and to an oil lubrication pump 60 on the other hand.
  • the connections of the oil lubrication pump 60 are not shown for the sake of simplicity.
  • the oil lubrication pump 60 may be in communication with the compartment 44 to draw from this oil and supply a predetermined fresh oil flow rate to the delivery chambers formed between the rotor and the cylindrical bore of each pump stage.
  • the lower portion of compartment 52 is filled with oil to lubricate the transmission mechanism to which the two gears 54, 56 belong.
  • Two further oil compartments 62, 64 are one above the other within the intermediate housing 18 and adjacent to one side surface thereof arranged.
  • the oil compartment 62 is connected to the bearings of the rotor 35 of the upper pump stage 34 in order to supply oil to it only under the action of gravity.
  • the compartment 64 is connected to the bearings of the rotor 37 of the lower pump stage 36 in order to supply oil to it only under the action of gravity.
  • the stage 34 bezel opening 66 communicates with the input port 28 via a channel 68 formed in the interior of the intermediate housing 18.
  • the outlet opening 70 of the stage 34 communicates with the inlet opening 72 of the stage 36 via a channel 74, which is also formed in the interior of the intermediate housing 18.
  • the outlet opening 76 of the stage 36 communicates with the outlet connection 30 via a channel 78, which is likewise formed in the interior of the intermediate housing 18.
  • An overflow valve 80 is also formed between the channel 74 and a side opening 82 of the channel 78; the overflow valve 80 is closed at a standstill.
  • each pump stage 34, 36 is reduced to the basic active parts of a rotary vane pump, namely a cylindrical sleeve or bush and the rotor eccentrically mounted therein. Furthermore, each pump stage is connected to its drive and to its input and output connections and to its oil feeds through only one side surface of its housing, and all these connections are made simultaneously by the housing of the pump stage being connected only to one surface of the gear and connection unit receiving intermediate housing 18 is flanged.
  • the channel 74 forms a straight, vertically extending connection between the two pump stages 34, 36 arranged vertically one above the other. Neither in the pump stages themselves nor on this connecting path are there any zones in which there are at standstill the pump could collect condensate. Rather, this flows out directly via the lower pump stage 36 and the channel 78.
  • the housing parts 18a, 18c of the transmission and connection unit and the two pump stages 34, 36 are shown in an exploded view.
  • a seal 90 is provided between the middle housing part 18a and the connection cover 18c.
  • the hollow interior of the housing part 18a is divided into cavities and compartments by partition walls.
  • the oil compartments 64, 62 are separated by a partition wall 92.
  • the oil level in the interior of the oil compartments 62, 64 can be checked through oil eyes 96 in bores 94. Oil can be refilled through the filler openings 98, which are closed by a removable oil filler button 100.
  • connection cover 18c has two cylindrical cavities 102, 104 through which the two pin couplings can extend.
  • each clutch mechanism 50 comprises a circular flange 106 or 108 which is wedged onto the corresponding end of the associated rotor shaft and is provided with axially projecting pins 110 which are evenly spaced along the circumference of the respective flange .
  • the pins 110 can be received by suitable bores of a similarly shaped circular flange which is coupled to the associated gear 54 or 56, as shown in FIG. 3.
  • the flange surface 112 On its surface facing the pump stages, flat flange surfaces 112, 114 are formed on the connection cover 18c, through which various passages extend.
  • the flange surface 112 has an opening 116 which communicates with the inlet duct 68 (FIG. 4) and an opening 118 which communicates with the duct 74 and, via this, with an opening 120 of the flange surface 114.
  • the flange surface 114 has a further opening 122 which is connected to the outlet channel 78 (FIG. 4).
  • Oil compartments 44, 62 and 64 communicate with various openings formed in flange surfaces 112, 114.
  • the chamber 62 communicates with an arcuate groove 124 of the flange surface 112, and an opening 126 of the flange surface 112 communicates with an outlet of the oil lubrication pump 60.
  • the upper pump stage 34 has a housing 40 which is closed at one end by a housing cover 130 which is designed to match the flange surface 112 and is provided with corresponding openings and passages which extend through it. Between the flange surface 112 and the housing cover 130, a seal 132 is provided which is provided with openings through it which correspond to the different openings which extend through the flange surface 112.
  • the housing cover 130 is detachably fastened to the flange surface 112, in particular by screws 134 which are screwed into threaded holes 136 which are formed in the flange surface 112.
  • Another seal 138 is provided between the housing cover 130 and the corresponding end of the housing 40.
  • the opposite end of the housing 40 is closed by a further housing cover 140 with the interposition of a seal 142.
  • the rotor 35 carries a plurality of rotary vane 33, which are slidably received in slots 31, as in a conventional rotary vane pump.
  • the housing 40 has an inlet channel 41 and an outlet channel 43 which extend generally axially along the outside of the cylindrical sleeve of the housing 40, in which the rotor 35 is received.
  • Each channel 41, 43 is connected to the delivery chamber in via openings which extend radially through the cylindrical sleeve of the housing 40 Connection which is formed between the inside of the sleeve and the rotor 35.
  • the channels 41, 43 are closed by this.
  • these channels are connected to corresponding openings, which extend through this housing cover and are aligned with the openings 116, 118 of the flange surface 112.
  • the bearings (not shown) of rotor 35 are received in cavities of housing covers 130 and 140, respectively, and each of these cavities communicates with oil groove 124, which is formed in flange surface 112. While the connection between the oil groove 124 and the bearing cavity of the housing cover 130 is a direct connection, which takes place through the seal 132, the connection to the bearing cavity of the housing cover 140 is established via two outer connecting lines 160, 162, which are located between the housing covers 130 and 140 extend and there are connected to openings 142 and 146, respectively. The lower connecting line 162 ensures the inflow of the oil, while the upper connecting line 160 vents the storage space in the housing cover 140.
  • the second or lower pump stage and the flange surface 114 assigned to it are fundamentally similar and are therefore not described in further detail.
  • the rotors 35 and 37 are driven in opposite directions by the electric motor 12 and by the meshing gears 54, 56.
  • the speeds of the rotors 35 and 37 can be the same or different, depending on the particular conditions under which the pump is to be operated. Since the lower pump stage 36 is smaller than the upper pump stage 34 and therefore has a lower pumping speed, it is expediently bridged in the initial phase of the suction by the overflow valve 80, which responds to a pressure difference between the channels 74 and 78, which corresponds to the normal pressure drop is opposite at this pump stage
  • the heat generated by the continuous operation of the pump is removed from the housings 40, 42 of the two pump stages by the water that surrounds them and is contained in the chamber 38.
  • the two pump stages are arranged one above the other and at a distance from one another, the smaller stage 36 being located below the larger stage 34.
  • an uninhibited convection flow of water can automatically form inside the chamber 38 along the outer surfaces of the housings 42 and 40 to the upper conduits 24, the flow then through the heat exchanger 20, through the conduits 27 and back to the bottom area of the Chamber 38 is performed.
  • a forced circulation of the cooling water is not necessary, which considerably simplifies the cooling system.
  • the operating data of the pump can become unsatisfactory due to corrosion and wear of the active pump parts.
  • one or both pump stages 34, 36 are easily removed and replaced by simply draining the water from the chamber 38 and removing the radiator housing 16 from the connection cover 18c, loosening the screws 134 and removing the housing 40 and 42 with its associated housing cover is removed from the connection cover 18c, then the defective stage is replaced by a new one and finally the radiator housing 16 is fastened again to the connection cover 18c. After filling the chamber 38 with water, the pump is then ready for operation again. These operations can be carried out within a short time and do not require any particularly qualified maintenance personnel.
  • each pump stage has a very simple shape and structure, so that it is easy to manufacture as a casting.
  • Each pump stage therefore forms a relatively inexpensive unit, so that a pump can be supplied with a set of reserve pump units without incurring high additional costs.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (9)

1. Pompe à vide rotative à palettes, comportant au moins un étage de pompe (34, 36) dont le rotor (35, 37) est logé dans un alésage, de forme générale cylindrique, d'un carter (40, 42) et porte des palettes (33) qui coopèrent avec l'alésage cylindrique, un mécanisme d'entraînement en rotation (12, 54, 56) pour le rotor (35, 37) et un système d'huile de graissage pour l'étage de pompe (34, 36), étant précisé que l'étage de pompe (34, 36) est conçu sous forme d'un ensemble remplaçable ; que le carter (40, 42) est fixé, de façon, amovible, par l'intermédiaire d'un couvercle de carter (130) qui s'étend en direction radiale, à une surface de bridage (112, 114) d'un carter intermédiaire (18), logeant un groupe de raccordement, qui loge un dispositif d'accouplement de par la forme (50) pour raccorder, de façon amovible, le rotor (35, 37) au mécanisme d'entraînement en rotation (12, 54, 56) ; et que le carter (40, 42) est disposé dans une chambre (38) qui est limitée d'une part par le carter intermédiaire (18) et d'autre part par un carter extérieur (16) qui est monté sur le carter intermédiaire, du côté de la surface de bridage (112, 114) de ce carter intermédiaire, caractérisée en ce que la chambre (38) est au moins partiellement remplie d'un fluide de refroidissement tel que de l'eau qui entoure au moins une partie notable du carter (40, 42) de l'étage de pompe (34, 36) et se trouve en contact avec ce carter et circule dans un système de refroidissement accroché au carter extérieur ; en ce qu'aussi bien l'ouverture d'admission (66, 72) que l'ouverture de refoulement (70, 76) de l'étage de pompe (34, 36) traversent le couvercle de carter et sont en liaison avec des canaux correspondants (68, 74, 78) prévus à l'intérieur du carter intermédiaire (18) ; et en ce que le carter intermédiaire (18) présente au moins un compartiment (44, 62, 64) qui est destiné à contenir une réserve d'huile de graissage, qui est reliée à une zone à graisser de l'étage de pompe (34, 36) par l'intermédiaire d'un canal d'huile (124) qui s'étend à travers la surface de bridage (112, 114) du carter intermédiaire (18) et à travers la surface, qui lui est adjacente, du carter (40, 42) de l'étage de pompe (34, 36).
2. Pompe à vide rotative à palettes selon la revendication 1, caractérisée en ce que l'étroit carter intermédiaire (18) présente deux faces principales opposées l'une a l'autre; et en ce que le carter (40, 42) de l'étage de pompe (34, 36) est monté sur l'une de ces faces, tandis que le mécanisme d'entraînement en rotation (12, 54, 56) est monté sur l'autre face, le dispositif d'accouplement (50) s'étendant à travers le carter intermédiaire (18).
3. Pompe à vide rotative à palettes selon la revendication 1 ou 2, caractérisée en ce que le carter intermédiaire (18) présente deux compartiments séparés (44 ; 62, 64) destinés à contenir une réserve d'huile de graissage et reliés à différentes zones à graisser de l'étage de pompe, l'une de ces zones comprenant les paliers du rotor (35, 37) dans le carter (40, 42) de l'étage de pompe (34, 36) et l'autre de ces zones étant la chambre de pompage de l'étage de pompe (34, 36).
4. Pompe à vide rotative à palettes selon l'une des revendications précédentes, caractérisée en ce qu'elle comprend deux étages de pompe (34, 36) montés en série, qui comportent chacun leur propre carter (40, 42) et rotor (35, 37) et sont prévus chacun sous forme d'un ensemble remplaçable, montés du même côté du carter intermédiaire (18) ; et en ce que les étages de pompe (34, 36) sont disposés l'un au-dessus de l'autre et à distance l'un de l'autre et possèdent des carters (40, 42) de dimensions différentes dont le plus petit (42) est disposé au-dessous du plus grand (40).
5. Pompe à vide rotative à palettes selon la revendication 4, caractérisée en ce qu'une transmission constituée de deux roues dentées (54, 56) engrenant ensemble est disposée entre le moteur du mécanisme d'entraînement en rotation (12) et les rotors (35, 37) des étages de pompe (34, 36) ; et en ce que les roues dentées (54, 56) tourillonnent l'une au-dessus de l'autre à l'intérieur d'un compartiment (52) du carter intermédiaire (18), étant précisé que l'une (56) des deux roues dentées est accouplée directement au mécanisme d'entraînement en rotation (12) et à l'un (37) des deux rotors et que l'autre roue dentée (54) entraîne l'autre rotor (35).
6. Pompe à vide rotative à palettes selon la revendication 4 ou 5, caractérisée en ce que chaque étage de pompe (34, 36) présente sa propre ouverture d'admission (66, 72) et sa propre ouverture de refoulement (70, 76) dans son carter (40, 42) qui, pour le montage du carter (40, 42) sur le carter intermédiaire (18), comporte un couvercle de carter (130) pouvant se monter par bride ; en ce que les ouvertures d'admission (66, 72) et les ouvertures de refoulement (70, 76) traversent ce couvercle de carter (130) et sont reliées à des canaux correspondants (68, 74, 78) qui s'étendent à travers le carter intermédiaire (18) ; en ce que l'un de ces canaux (74) relie l'ouverture de refoulement (70) du premier (34) des deux étages de pompe à l'ouverture d'admission (72) du second (36) des deux étages de pompe et en ce qu'il est prévu deux autres canaux (68, 78) dont l'un (68) relie un raccord d'admission (28) de la pompe à vide à l'ouverture d'admission (66) du premier étage de pompe (34) et dont l'autre (78) relie un raccord de refoulement (30) de la pompe à vide à l'ouverture de refoulement (76) du second étage de pompe (36).
7. Pompe à vide rotative à palettes selon la revendication 6, caractérisée en ce que le raccord d'admission (28) est disposé au-dessus du raccord de refoulement (30), sur une surface latérale du carter intermédiaire (18) ; et en ce que le trajet de liaison entre le raccord d'admission (28) et le raccord de refoulement (30) est dépourvu de zones dans lesquelles du condensat peut s'accumuler à l'arrêt.
8. Pompe à vide rotative à palettes selon l'une des revendications précédentes, caractérisée en ce que le dispositif d'accouplement (50) comporte, entre le rotor (35, 37) et le mécanisme d'entraînement en rotation (12, 54, 56), des éléments d'accouplement qui peuvent être amenés en prise mutuelle, de par la forme, à la façon d'un accouplement à broches.
9. Pompe à vide rotative à palettes selon l'une des revendications 4 à 8, caractérisée en ce que l'ouverture d'admission (72) et l'ouverture de refoulement (76) du second étage de pompe (36) sont pontées par une soupape de surdébit (80) qui peut réaliser une liaison directe entre ces ouvertures en réponse à une différence de pression entre les ouvertures opposée à la différence de pression normale provoquée par le fonctionnement du second étage de la pompe (36).
EP84111178A 1984-07-02 1984-09-19 Pompe à vide rotative à palettes Expired EP0166807B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/627,193 US4588358A (en) 1984-07-02 1984-07-02 Rotary vane evacuating pump
US627193 2000-07-27

Publications (3)

Publication Number Publication Date
EP0166807A2 EP0166807A2 (fr) 1986-01-08
EP0166807A3 EP0166807A3 (en) 1987-01-14
EP0166807B1 true EP0166807B1 (fr) 1989-12-13

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EP84111178A Expired EP0166807B1 (fr) 1984-07-02 1984-09-19 Pompe à vide rotative à palettes

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US (1) US4588358A (fr)
EP (1) EP0166807B1 (fr)
DE (2) DE3480727D1 (fr)

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DE102006058843A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
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Also Published As

Publication number Publication date
EP0166807A3 (en) 1987-01-14
DE8427615U1 (de) 1985-01-17
DE3480727D1 (de) 1990-01-18
EP0166807A2 (fr) 1986-01-08
US4588358A (en) 1986-05-13

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