EA201101293A1 - METHOD OF FORMING MASSIVES OF CARBON NANOTUBES - Google Patents
METHOD OF FORMING MASSIVES OF CARBON NANOTUBESInfo
- Publication number
- EA201101293A1 EA201101293A1 EA201101293A EA201101293A EA201101293A1 EA 201101293 A1 EA201101293 A1 EA 201101293A1 EA 201101293 A EA201101293 A EA 201101293A EA 201101293 A EA201101293 A EA 201101293A EA 201101293 A1 EA201101293 A1 EA 201101293A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- forming
- cnts
- carbon
- functional layer
- cnt
- Prior art date
Links
Abstract
Изобретение относится к области технологии изготовления углеродных наноструктур и может быть использовано в вакуумной микроэлектронике в качестве базовой технологии изготовления полевых катодов. Способ формирования массивов углеродных нанорубок (УНТ) с заданной плотностью УНТ в массиве включает следующие операции: формирование на поверхности подложки буферного слоя, над ним формирование функционального слоя, содержащего катализатор роста УНТ или активатор распада металлорганического соединения, формирование литографией топологического рисунка, затем проведение ионной и/или радикальной обработки поверхности функционального слоя, введение подложки в реактор, подачу газа-носителя, подачу углеродсодержащего газа и/или раствора металлорганического соединения путем инжекции, распыления или атомизации. Технический результат заключается в обеспечении возможности формирования массивов УНТ с заданной плотностью с высокой воспроизводимостью результатов.The invention relates to the field of manufacturing technology of carbon nanostructures and can be used in vacuum microelectronics as the basic technology for manufacturing field cathodes. The method of forming carbon nanotube arrays (CNTs) with a given CNT density in the array includes the following operations: forming a buffer layer on the substrate surface, above it forming a functional layer containing a catalyst for the growth of CNT or an organometallic decomposition activator, forming a topological pattern by lithography, then carrying out / or radical treatment of the surface of the functional layer, the introduction of the substrate into the reactor, the flow of carrier gas, the supply of carbon-containing gas and / or solution and organometallic compounds by injection, spraying or atomization. The technical result is to provide the possibility of forming arrays of CNTs with a given density with high reproducibility of results.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EA201101293A EA019141B1 (en) | 2011-09-07 | 2011-09-07 | Process for forming bulks of carbon nanotubes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EA201101293A EA019141B1 (en) | 2011-09-07 | 2011-09-07 | Process for forming bulks of carbon nanotubes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EA201101293A1 true EA201101293A1 (en) | 2013-03-29 |
| EA019141B1 EA019141B1 (en) | 2014-01-30 |
Family
ID=47988419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EA201101293A EA019141B1 (en) | 2011-09-07 | 2011-09-07 | Process for forming bulks of carbon nanotubes |
Country Status (1)
| Country | Link |
|---|---|
| EA (1) | EA019141B1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002518280A (en) * | 1998-06-19 | 2002-06-25 | ザ・リサーチ・ファウンデーション・オブ・ステイト・ユニバーシティ・オブ・ニューヨーク | Aligned free-standing carbon nanotubes and their synthesis |
| US6232706B1 (en) * | 1998-11-12 | 2001-05-15 | The Board Of Trustees Of The Leland Stanford Junior University | Self-oriented bundles of carbon nanotubes and method of making same |
| US7465494B2 (en) * | 2002-04-29 | 2008-12-16 | The Trustees Of Boston College | Density controlled carbon nanotube array electrodes |
| US8080289B2 (en) * | 2004-09-30 | 2011-12-20 | National Cheng Kung University | Method for making an aligned carbon nanotube |
| RU2294892C1 (en) * | 2005-07-11 | 2007-03-10 | Московский инженерно-физический институт (государственный университет) | Method of production of carbon nano-tubes |
| CN101205059B (en) * | 2006-12-20 | 2010-09-29 | 清华大学 | Preparation of nano-carbon tube array |
| JP2011068513A (en) * | 2009-09-25 | 2011-04-07 | Tokyo Electron Ltd | Film formation method of carbon nanotube film |
-
2011
- 2011-09-07 EA EA201101293A patent/EA019141B1/en active IP Right Revival
Also Published As
| Publication number | Publication date |
|---|---|
| EA019141B1 (en) | 2014-01-30 |
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Legal Events
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| MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): AM AZ KZ KG MD TJ TM |
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| MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): BY RU |
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| NF4A | Restoration of lapsed right to a eurasian patent |
Designated state(s): BY RU |