DK469976A - Katodeforstovningsapparat - Google Patents

Katodeforstovningsapparat

Info

Publication number: DK469976A
Authority: DK; Denmark
Prior art keywords: spray appliance; cathode spray; cathode; appliance; spray
Prior art date: 1975-12-17

Application number

DK469976A

Other languages

English (en)

Other versions

DK149926C (da

DK149926B (da

Inventor

M R Kuehnle

Original Assignee

Coulter Inf Systems Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-12-17

Filing date

1976-10-19

Publication date

1977-06-18

1975-12-17 Priority claimed from US05/641,481 external-priority patent/US4014779A/en

1976-10-19 Application filed by Coulter Inf Systems Inc filed Critical Coulter Inf Systems Inc

1977-06-18 Publication of DK469976A publication Critical patent/DK469976A/da

1986-10-27 Publication of DK149926B publication Critical patent/DK149926B/da

1987-09-28 Application granted granted Critical

1987-09-28 Publication of DK149926C publication Critical patent/DK149926C/da

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3438—Electrodes other than cathode

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Materials Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Physical Or Chemical Processes And Apparatus (AREA)
Electrostatic Spraying Apparatus (AREA)

DK469976A 1975-12-17 1976-10-19 Katodeforstoevningsapparat DK149926C (da)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US05/641,481 US4014779A (en)	1974-11-01	1975-12-17	Sputtering apparatus
US64148175		1975-12-17

Publications (3)

Publication Number	Publication Date
DK469976A true DK469976A (da)	1977-06-18
DK149926B DK149926B (da)	1986-10-27
DK149926C DK149926C (da)	1987-09-28

Family

ID=24572585

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK469976A DK149926C (da)	1975-12-17	1976-10-19	Katodeforstoevningsapparat

Country Status (17)

Country	Link
JP (1)	JPS6035429B2 (da)
AT (1)	AT344501B (da)
AU (1)	AU511961B2 (da)
BE (1)	BE847413A (da)
CA (1)	CA1077437A (da)
CH (1)	CH617965A5 (da)
DD (1)	DD127637A5 (da)
DE (1)	DE2647149C2 (da)
DK (1)	DK149926C (da)
FR (1)	FR2335615A1 (da)
GB (1)	GB1503301A (da)
IL (1)	IL50722A (da)
IT (1)	IT1066543B (da)
LU (1)	LU76026A1 (da)
MX (1)	MX145314A (da)
NL (1)	NL7611563A (da)
SE (1)	SE429108B (da)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4151059A (en) *	1977-12-27	1979-04-24	Coulter Stork U.S.A., Inc.	Method and apparatus for sputtering multiple cylinders simultaneously
FR2527233A1 (fr) *	1982-05-24	1983-11-25	Asu Composants Sa	Installation pour le depot d'un revetement sur des substrats
US4417968A (en) *	1983-03-21	1983-11-29	Shatterproof Glass Corporation	Magnetron cathode sputtering apparatus
FR2548589B1 (fr) *	1983-07-07	1987-02-20	Aerospatiale	Procede et dispositif d'impregnation metallique d'un substrat se presentant sous la forme d'une nappe de fibres conductrices du courant electrique
US4443318A (en) *	1983-08-17	1984-04-17	Shatterproof Glass Corporation	Cathodic sputtering apparatus
EP0157991A1 (fr) *	1984-04-10	1985-10-16	INTERPATENT ANSTALT (INDELEC Abteilung)	Dispositif pour effectuer en continu la métallisation sélective de pièces industrielles, notamment en électronique
JPS6162117A (ja) *	1984-09-03	1986-03-31	Brother Ind Ltd	キーボードの製造方法
FR2940321B1 (fr) *	2008-12-19	2011-12-23	Carewave Shielding Technologies	Machine de depot sous vide,sur un substrat,de materiaux en couches minces,par pulverisation cathodique.
JP5969953B2 (ja) *	2013-05-31	2016-08-17	株式会社神戸製鋼所	成膜装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL136984C (da) *	1964-06-04
DE2115590A1 (en) *	1971-03-31	1972-10-05	Leybold Heraeus Gmbh & Co Kg	Cathode sputtering device - has cathode with projecting rim
US3905887A (en) *	1973-01-12	1975-09-16	Coulter Information Systems	Thin film deposition method using segmented plasma
US3829373A (en) *	1973-01-12	1974-08-13	Coulter Information Systems	Thin film deposition apparatus using segmented target means

1976
- 1976-10-18 MX MX166694A patent/MX145314A/es unknown
- 1976-10-19 CA CA263,664A patent/CA1077437A/en not_active Expired
- 1976-10-19 DE DE2647149A patent/DE2647149C2/de not_active Expired
- 1976-10-19 IL IL50722A patent/IL50722A/xx unknown
- 1976-10-19 FR FR7631399A patent/FR2335615A1/fr active Granted
- 1976-10-19 BE BE171612A patent/BE847413A/xx not_active IP Right Cessation
- 1976-10-19 GB GB43369/76A patent/GB1503301A/en not_active Expired
- 1976-10-19 AT AT776076A patent/AT344501B/de not_active IP Right Cessation
- 1976-10-19 JP JP51125438A patent/JPS6035429B2/ja not_active Expired
- 1976-10-19 IT IT51804/76A patent/IT1066543B/it active
- 1976-10-19 DK DK469976A patent/DK149926C/da not_active IP Right Cessation
- 1976-10-19 CH CH1321176A patent/CH617965A5/fr not_active IP Right Cessation
- 1976-10-19 LU LU76026A patent/LU76026A1/xx unknown
- 1976-10-19 NL NL7611563A patent/NL7611563A/xx not_active Application Discontinuation
- 1976-10-19 SE SE7611581A patent/SE429108B/xx unknown
- 1976-10-22 DD DD195409A patent/DD127637A5/xx unknown
- 1976-12-16 AU AU20598/76A patent/AU511961B2/en not_active Expired

Also Published As

Publication number	Publication date
DK149926C (da)	1987-09-28
FR2335615A1 (fr)	1977-07-15
AT344501B (de)	1978-07-25
JPS6035429B2 (ja)	1985-08-14
NL7611563A (nl)	1977-06-21
IT1066543B (it)	1985-03-12
AU2059876A (en)	1978-06-22
SE7611581L (sv)	1977-06-18
MX145314A (es)	1982-01-27
JPS5275669A (en)	1977-06-24
IL50722A0 (en)	1976-12-31
SE429108B (sv)	1983-08-15
LU76026A1 (da)	1978-05-16
DE2647149A1 (de)	1977-06-30
DE2647149C2 (de)	1983-08-25
ATA776076A (de)	1977-11-15
DD127637A5 (da)	1977-10-05
FR2335615B1 (da)	1981-12-04
GB1503301A (en)	1978-03-08
BE847413A (nl)	1977-04-19
AU511961B2 (en)	1980-09-18
CA1077437A (en)	1980-05-13
IL50722A (en)	1979-05-31
DK149926B (da)	1986-10-27
CH617965A5 (en)	1980-06-30

Legal Events

Date	Code	Title	Description
1988-07-04	PBP	Patent lapsed

Publication	Publication Date	Title
NL7610214A (nl)	1978-03-16	Spuitinrichting.
BR7605677A (pt)	1977-09-06	Aparelho de eletrolise
SE7602337L (sv)	1976-11-20	Sprutpistol
SE422282B (sv)	1982-03-01	Sprutpistol
JPS5289811A (en)	1977-07-28	Sprayers
IT1106851B (it)	1985-11-18	Catodo attivato
SE406851B (sv)	1979-02-26	Isokron cyklotron
IT1058750B (it)	1982-05-10	Catodo termoionico
BR7600770A (pt)	1976-08-31	Aparelho aperfeicoado de pulverizacao
JPS51133813A (en)	1976-11-19	Sprayers
SE7902678L (sv)	1979-03-26	Formapparat for plastror
BE844720A (fr)	1977-01-31	Pulverisateur
DK12176A (da)	1976-07-15	Elektrolyseapparat
AR210127A1 (es)	1977-06-30	Aparato de rociado aire-liquido
DK427576A (da)	1977-03-25	Opvaskemaskine
DK469976A (da)	1977-06-18	Katodeforstovningsapparat
NL7602620A (nl)	1976-09-15	Toestel.
AT376149B (de)	1984-10-10	Spritzaggregat
TR19024A (tr)	1978-03-01	Boyama usulue
BR7604094A (pt)	1977-07-26	Aparelho de percussao
AT352232B (de)	1979-09-10	Spritzpistole
SE7602071L (sv)	1976-08-23	Beleggningsforfarande
SE7606041L (sv)	1976-11-29	Beleggningsforfarande
DK43276A (da)	1976-08-04	Elektrolyseapparat
AT343969B (de)	1978-06-26	Anodenkorb