DK1577961T3 - Accelerations- og decelerationsfremgangsmåde, der anvender en piezoelektrisk motor - Google Patents
Accelerations- og decelerationsfremgangsmåde, der anvender en piezoelektrisk motorInfo
- Publication number
- DK1577961T3 DK1577961T3 DK05075767T DK05075767T DK1577961T3 DK 1577961 T3 DK1577961 T3 DK 1577961T3 DK 05075767 T DK05075767 T DK 05075767T DK 05075767 T DK05075767 T DK 05075767T DK 1577961 T3 DK1577961 T3 DK 1577961T3
- Authority
- DK
- Denmark
- Prior art keywords
- acceleration
- piezoelectric motor
- deceleration method
- deceleration
- piezoelectric
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
- H02N2/004—Rectangular vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IL1999/000288 WO2000074153A1 (en) | 1999-05-31 | 1999-05-31 | Multilayer piezoelectric motor |
Publications (1)
Publication Number | Publication Date |
---|---|
DK1577961T3 true DK1577961T3 (da) | 2009-11-30 |
Family
ID=11062720
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK99923840T DK1186063T3 (da) | 1999-05-31 | 1999-05-31 | Piezoelektrisk flerlagsmotor |
DK05075767T DK1577961T3 (da) | 1999-05-31 | 1999-05-31 | Accelerations- og decelerationsfremgangsmåde, der anvender en piezoelektrisk motor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK99923840T DK1186063T3 (da) | 1999-05-31 | 1999-05-31 | Piezoelektrisk flerlagsmotor |
Country Status (7)
Country | Link |
---|---|
US (2) | US7075211B1 (da) |
EP (2) | EP1186063B1 (da) |
JP (1) | JP4813708B2 (da) |
AU (1) | AU4056799A (da) |
DE (2) | DE69941195D1 (da) |
DK (2) | DK1186063T3 (da) |
WO (1) | WO2000074153A1 (da) |
Families Citing this family (57)
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CN1235329C (zh) * | 1998-12-21 | 2006-01-04 | 精工爱普生株式会社 | 压电驱动装置、钟表和携带装置 |
IL137206A0 (en) | 1999-10-31 | 2001-07-24 | Nanomotion Ltd | Piezoelectric motors and motor driving configurations |
AU2000228235A1 (en) | 2000-02-24 | 2001-09-03 | Nanomotion Ltd. | Resonance shifting |
JP2004520733A (ja) | 2000-11-27 | 2004-07-08 | サランドン (2003) リミテッド | 自己整合性光学機械式クロスバースイッチ |
US7061158B2 (en) | 2002-07-25 | 2006-06-13 | Nanomotion Ltd. | High resolution piezoelectric motor |
JP2011061220A (ja) * | 2003-05-22 | 2011-03-24 | Seiko Instruments Inc | 積層圧電素子、超音波モータ、電子機器、ステージ、及び積層圧電素子の製造方法 |
WO2004107971A2 (en) | 2003-06-09 | 2004-12-16 | Glucon Inc. | Wearable glucometer |
WO2004112158A1 (en) * | 2003-06-13 | 2004-12-23 | Koninklijke Philips Electronics N.V. | Piezoelectric actuator and excitation method |
GB0323920D0 (en) | 2003-10-11 | 2003-11-12 | Johnson Electric Sa | Electric motor |
CN101040393A (zh) * | 2004-02-25 | 2007-09-19 | 微动力有限公司 | 多向压电马达结构 |
US7826734B2 (en) | 2004-09-29 | 2010-11-02 | Kyocera Corporation | Camera module and portable terminal using the same |
KR101229207B1 (ko) | 2004-09-29 | 2013-02-01 | 교세라 가부시키가이샤 | 카메라 모듈 및 이 카메라 모듈을 이용한 휴대 단말기 |
DE102005039358B4 (de) * | 2005-08-19 | 2016-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelektrischer Aktor für einen Ultraschallmotor |
KR100691280B1 (ko) | 2005-09-05 | 2007-03-12 | 삼성전기주식회사 | 압전 진동자, 그 제조방법 및 압전 진동자를 구비하는 선형액추에이터 |
JP2007117668A (ja) * | 2005-10-31 | 2007-05-17 | Toshiba Corp | 超音波プローブおよび超音波診断装置 |
WO2007083752A1 (ja) | 2006-01-23 | 2007-07-26 | Matsushita Electric Industrial Co., Ltd. | 圧電素子及び超音波アクチュエータ |
CN101213734B (zh) | 2006-02-07 | 2011-01-12 | 松下电器产业株式会社 | 压电元件与超声波执行机构 |
CN101454917B (zh) | 2006-03-30 | 2011-05-18 | 纳诺动力有限公司 | 压电传动*** |
KR100759521B1 (ko) | 2006-04-06 | 2007-09-18 | 삼성전기주식회사 | 압전 진동자 |
JP4795162B2 (ja) * | 2006-08-09 | 2011-10-19 | オリンパス株式会社 | 超音波モータ及び超音波モータの振動検出方法 |
KR100818482B1 (ko) * | 2006-10-16 | 2008-04-01 | 삼성전기주식회사 | 압전 모터 |
KR100817470B1 (ko) * | 2006-10-24 | 2008-03-31 | 한국과학기술연구원 | 압전 선형 모터 |
WO2008052541A1 (en) * | 2006-11-03 | 2008-05-08 | Danfoss A/S | A capacitive transducer with cutting areas |
GB2446428B (en) * | 2006-12-02 | 2010-08-04 | Nanomotion Ltd | Controllable coupling force |
DE102007003280A1 (de) * | 2007-01-23 | 2008-07-24 | Epcos Ag | Piezoelektrisches Bauelement |
JP5144097B2 (ja) * | 2007-03-23 | 2013-02-13 | 太平洋セメント株式会社 | 超音波モータ装置 |
US7646136B2 (en) | 2007-05-07 | 2010-01-12 | Panasonic Corporation | Piezoelectric element, vibratory actuator and drive unit |
JP5127293B2 (ja) * | 2007-05-07 | 2013-01-23 | パナソニック株式会社 | 駆動装置 |
WO2008141048A1 (en) * | 2007-05-09 | 2008-11-20 | Nanoink, Inc. | Compact nanofabrication apparatus |
WO2009072302A1 (ja) | 2007-12-06 | 2009-06-11 | Panasonic Corporation | 超音波アクチュエータ |
WO2009072301A1 (ja) * | 2007-12-07 | 2009-06-11 | Panasonic Corporation | 駆動装置 |
GB2458146B (en) * | 2008-03-06 | 2013-02-13 | Nanomotion Ltd | Ball-mounted mirror moved by piezoelectric motor |
DE102008012992A1 (de) * | 2008-03-07 | 2009-09-10 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
US7932661B2 (en) * | 2008-09-23 | 2011-04-26 | Nikko Company | Piezoelectric vibrator for ultrasonic motor |
US8299684B2 (en) | 2008-12-18 | 2012-10-30 | Discovery Technology International, Inc. | Piezoelectric quasi-resonance linear motors based on acoustic standing waves with combined resonator |
JP5277010B2 (ja) * | 2009-02-09 | 2013-08-28 | パナソニック株式会社 | 駆動装置 |
JP5382320B2 (ja) * | 2009-03-26 | 2014-01-08 | セイコーエプソン株式会社 | 圧電モーター、液体噴射装置及び時計 |
JP2010233339A (ja) * | 2009-03-26 | 2010-10-14 | Seiko Epson Corp | 圧電モーター、液体噴射装置及び時計 |
JP2011015552A (ja) * | 2009-07-02 | 2011-01-20 | Panasonic Corp | 駆動装置 |
JP4830165B2 (ja) * | 2010-01-27 | 2011-12-07 | 石川県 | 超音波モータ用振動子 |
JP5506552B2 (ja) * | 2010-06-07 | 2014-05-28 | キヤノン株式会社 | 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法 |
JP2012029478A (ja) * | 2010-07-23 | 2012-02-09 | Olympus Corp | 振動体及び超音波モータ |
JP5852822B2 (ja) * | 2011-01-07 | 2016-02-03 | 学校法人 関西大学 | アクチュエータ及びアクチュエータの駆動方法 |
EP2682995A4 (en) * | 2011-03-01 | 2014-10-22 | Murata Manufacturing Co | PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC DEVICE THEREWITH |
CN102185096B (zh) * | 2011-04-02 | 2013-11-06 | 北京大学 | 压电驱动器及直线压电马达 |
JP6019545B2 (ja) * | 2011-06-20 | 2016-11-02 | セイコーエプソン株式会社 | 圧電アクチュエーター、駆動ユニット、及び、圧電アクチュエーターの駆動方法 |
JP5760748B2 (ja) * | 2011-06-29 | 2015-08-12 | セイコーエプソン株式会社 | 圧電アクチュエーターの駆動方法、及び、駆動ユニット |
US9705425B2 (en) * | 2012-07-03 | 2017-07-11 | Discovery Technology International, Inc. | Piezoelectric linear motor |
EP3172826B1 (de) * | 2014-07-23 | 2019-04-17 | Physik Instrumente (PI) GmbH & Co. Kg | Ultraschallmotor |
DE102014225154B3 (de) * | 2014-12-08 | 2016-03-03 | Physik Instrumente (Pi) Gmbh & Co. Kg | Verfahren und Vorrichtung zur Ansteuerung eines piezoelektrischen Motors |
RU2720478C2 (ru) * | 2015-06-03 | 2020-04-30 | Конинклейке Филипс Н.В. | Устройство с исполнительным механизмом на основе электроактивного полимера |
JP2017184297A (ja) * | 2016-03-28 | 2017-10-05 | セイコーエプソン株式会社 | 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ |
DE102017107275A1 (de) * | 2017-04-05 | 2018-10-11 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
DE102018104928B3 (de) * | 2018-03-05 | 2019-05-29 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
FR3095910A1 (fr) | 2019-05-06 | 2020-11-13 | Telemaq | Moteur piézoélectrique à onde progressive à résolution micrométrique |
JP7092182B2 (ja) * | 2020-12-25 | 2022-06-28 | Tdk株式会社 | 圧電アクチュエータ |
JP2022178836A (ja) | 2021-05-21 | 2022-12-02 | セイコーエプソン株式会社 | 圧電振動子および駆動装置 |
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JPS55114015A (en) | 1979-02-23 | 1980-09-03 | Tohoku Metal Ind Ltd | Adjusting method for resonance frequency of piezoelectric ceramic resonator in square plate shape |
US4447753A (en) | 1981-03-25 | 1984-05-08 | Seiko Instruments & Electronics Ltd. | Miniature GT-cut quartz resonator |
JPH0671188B2 (ja) | 1985-04-01 | 1994-09-07 | 株式会社村田製作所 | 圧電共振子 |
EP0313072B1 (en) | 1987-10-23 | 1993-05-05 | Hitachi, Ltd. | Method of and apparatus for conveying object by utilizing vibration |
US5039899A (en) | 1989-02-28 | 1991-08-13 | Brother Kogyo Kabushiki Kaisha | Piezoelectric transducer |
US5136200A (en) | 1989-07-27 | 1992-08-04 | Olympus Optical Co., Ltd. | Ultransonic motor |
JP3118252B2 (ja) | 1990-02-27 | 2000-12-18 | ニスカ株式会社 | 超音波振動装置及びその方法並びにこれらを用いた駆動装置及びその方法 |
US5345137A (en) | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
DE4133108A1 (de) | 1991-10-05 | 1993-04-08 | Philips Patentverwaltung | Elektrischer rotations- oder linearmotor, dessen laeufer mittels ultraschallschwingungen angetrieben wird |
US5616980A (en) | 1993-07-09 | 1997-04-01 | Nanomotion Ltd. | Ceramic motor |
DE69429744T2 (de) * | 1993-07-09 | 2002-08-14 | Nanomotion Ltd., Haifa | Keramischer Motor |
IL114656A0 (en) | 1995-07-18 | 1995-11-27 | Nanomotion Ltd | Ceramic motor |
US5646339A (en) | 1994-02-14 | 1997-07-08 | International Business Machines Corporation | Force microscope and method for measuring atomic forces in multiple directions |
DE69517232T2 (de) * | 1994-03-23 | 2000-10-26 | Nikon Corp., Tokio/Tokyo | Ultraschallmotor |
JPH07297661A (ja) | 1994-04-27 | 1995-11-10 | Murata Mfg Co Ltd | 圧電共振子及び圧電共振子の共振周波数調整方法 |
IL113291A0 (en) * | 1995-04-06 | 1995-07-31 | Nanomotion Ltd | A multi-axis rotation device |
JPH0937574A (ja) | 1995-05-12 | 1997-02-07 | Nikon Corp | 振動アクチュエータ及びその制御方法 |
JPH0965672A (ja) * | 1995-08-28 | 1997-03-07 | Nikon Corp | 振動アクチュエータ |
JP3079970B2 (ja) | 1995-09-18 | 2000-08-21 | 株式会社村田製作所 | 圧電トランス |
JPH10233538A (ja) * | 1997-02-21 | 1998-09-02 | Matsushita Electric Ind Co Ltd | 積層圧電素子 |
JPH1132491A (ja) * | 1997-05-16 | 1999-02-02 | Seiko Instr Inc | 超音波モータ及び超音波モータ付電子機器 |
JP3792864B2 (ja) * | 1997-10-23 | 2006-07-05 | セイコーインスツル株式会社 | 超音波モータおよび超音波モータ付電子機器 |
DE19757139A1 (de) * | 1997-12-20 | 1999-06-24 | Philips Patentverwaltung | Antriebsvorrichtung für wenigstens zwei Rotationselemente mit wenigstens einem piezoelektrischen Antriebselement |
US5949177A (en) * | 1998-01-07 | 1999-09-07 | Eastman Kodak Company | Linear piezoelectric motor employing internal feedback |
JP4510179B2 (ja) * | 1998-08-07 | 2010-07-21 | セイコーインスツル株式会社 | 超音波モータおよび超音波モータ付電子機器 |
US6747391B1 (en) * | 1998-10-25 | 2004-06-08 | Nanomotion Ltd. | Driver for piezoelectric motors |
DE19938954A1 (de) * | 1999-08-17 | 2001-03-08 | Pi Ceramic Gmbh Keramische Tec | Piezoelektrischer Antrieb, insbesondere zur Erzeugung von Rotations- oder Translationsbewegungen, die stetig oder schrittweise erfolgen können |
DE10154526B4 (de) * | 2001-06-12 | 2007-02-08 | Physik Instrumente (Pi) Gmbh & Co | Piezoelektrisches Stellelement |
JP4305623B2 (ja) | 2002-03-13 | 2009-07-29 | セイコーエプソン株式会社 | 振動子および振動型ジャイロスコープ |
US6707234B1 (en) | 2002-09-19 | 2004-03-16 | Piedek Technical Laboratory | Quartz crystal unit, its manufacturing method and quartz crystal oscillator |
-
1999
- 1999-05-31 EP EP99923840A patent/EP1186063B1/en not_active Expired - Lifetime
- 1999-05-31 EP EP05075767A patent/EP1577961B1/en not_active Expired - Lifetime
- 1999-05-31 US US09/980,375 patent/US7075211B1/en not_active Expired - Fee Related
- 1999-05-31 WO PCT/IL1999/000288 patent/WO2000074153A1/en active IP Right Grant
- 1999-05-31 JP JP2001500350A patent/JP4813708B2/ja not_active Expired - Fee Related
- 1999-05-31 DK DK99923840T patent/DK1186063T3/da active
- 1999-05-31 DE DE69941195T patent/DE69941195D1/de not_active Expired - Lifetime
- 1999-05-31 DK DK05075767T patent/DK1577961T3/da active
- 1999-05-31 AU AU40567/99A patent/AU4056799A/en not_active Abandoned
- 1999-05-31 DE DE69932359T patent/DE69932359T2/de not_active Expired - Lifetime
-
2006
- 2006-04-04 US US11/397,371 patent/US7211929B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
AU4056799A (en) | 2000-12-18 |
DE69941195D1 (de) | 2009-09-10 |
US7211929B2 (en) | 2007-05-01 |
JP4813708B2 (ja) | 2011-11-09 |
EP1577961A1 (en) | 2005-09-21 |
DE69932359D1 (de) | 2006-08-24 |
EP1577961B1 (en) | 2009-07-29 |
US7075211B1 (en) | 2006-07-11 |
WO2000074153A1 (en) | 2000-12-07 |
EP1186063A1 (en) | 2002-03-13 |
DK1186063T3 (da) | 2006-11-13 |
US20060175930A1 (en) | 2006-08-10 |
EP1186063B1 (en) | 2006-07-12 |
JP2003501988A (ja) | 2003-01-14 |
DE69932359T2 (de) | 2007-07-19 |
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