DE69939540D1 - Integrierter soi-schaltkreis mit entkopplungskondensator und dessen herstellungsverfahren - Google Patents
Integrierter soi-schaltkreis mit entkopplungskondensator und dessen herstellungsverfahrenInfo
- Publication number
- DE69939540D1 DE69939540D1 DE69939540T DE69939540T DE69939540D1 DE 69939540 D1 DE69939540 D1 DE 69939540D1 DE 69939540 T DE69939540 T DE 69939540T DE 69939540 T DE69939540 T DE 69939540T DE 69939540 D1 DE69939540 D1 DE 69939540D1
- Authority
- DE
- Germany
- Prior art keywords
- coping
- condenser
- manufacturing
- soi circuit
- integrated soi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
- Element Separation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9807495A FR2779869B1 (fr) | 1998-06-15 | 1998-06-15 | Circuit integre de type soi a capacite de decouplage, et procede de realisation d'un tel circuit |
PCT/FR1999/001403 WO1999066559A1 (fr) | 1998-06-15 | 1999-06-14 | Circuit integre de type soi a capacite de decouplage, et procede de realisation d'un tel circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69939540D1 true DE69939540D1 (de) | 2008-10-23 |
Family
ID=9527377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69939540T Expired - Lifetime DE69939540D1 (de) | 1998-06-15 | 1999-06-14 | Integrierter soi-schaltkreis mit entkopplungskondensator und dessen herstellungsverfahren |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1095407B1 (de) |
JP (1) | JP4417559B2 (de) |
DE (1) | DE69939540D1 (de) |
FR (1) | FR2779869B1 (de) |
WO (1) | WO1999066559A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10041748A1 (de) * | 2000-08-27 | 2002-03-14 | Infineon Technologies Ag | SOI-Substrat sowie darin ausgebildete Halbleiterschaltung und dazugehörige Herstellungsverfahren |
US7045878B2 (en) | 2001-05-18 | 2006-05-16 | Reveo, Inc. | Selectively bonded thin film layer and substrate layer for processing of useful devices |
US6956268B2 (en) | 2001-05-18 | 2005-10-18 | Reveo, Inc. | MEMS and method of manufacturing MEMS |
US7163826B2 (en) | 2001-09-12 | 2007-01-16 | Reveo, Inc | Method of fabricating multi layer devices on buried oxide layer substrates |
US6875671B2 (en) | 2001-09-12 | 2005-04-05 | Reveo, Inc. | Method of fabricating vertical integrated circuits |
DE10151132A1 (de) * | 2001-10-17 | 2003-05-08 | Infineon Technologies Ag | Halbleiterstruktur mit einem von dem Substrat kapazitiv entkoppelten Bauelementen |
DE10151203A1 (de) * | 2001-10-17 | 2003-08-07 | Infineon Technologies Ag | Halbleiterstruktur mit verringerter kapazitiver Kopplung zwischen Bauelementen |
JP4682645B2 (ja) * | 2005-02-28 | 2011-05-11 | セイコーエプソン株式会社 | 半導体装置の製造方法及び電子機器 |
JP4835082B2 (ja) * | 2005-09-28 | 2011-12-14 | 株式会社デンソー | 半導体装置及びその製造方法 |
US8508289B2 (en) | 2009-12-08 | 2013-08-13 | Soitec | Data-path cell on an SeOI substrate with a back control gate beneath the insulating layer |
FR2953641B1 (fr) | 2009-12-08 | 2012-02-10 | S O I Tec Silicon On Insulator Tech | Circuit de transistors homogenes sur seoi avec grille de controle arriere enterree sous la couche isolante |
FR2953643B1 (fr) | 2009-12-08 | 2012-07-27 | Soitec Silicon On Insulator | Cellule memoire flash sur seoi disposant d'une seconde grille de controle enterree sous la couche isolante |
FR2957193B1 (fr) | 2010-03-03 | 2012-04-20 | Soitec Silicon On Insulator | Cellule a chemin de donnees sur substrat seoi avec grille de controle arriere enterree sous la couche isolante |
FR2955204B1 (fr) | 2010-01-14 | 2012-07-20 | Soitec Silicon On Insulator | Cellule memoire dram disposant d'un injecteur bipolaire vertical |
FR2955200B1 (fr) | 2010-01-14 | 2012-07-20 | Soitec Silicon On Insulator | Dispositif, et son procede de fabrication, disposant d'un contact entre regions semi-conductrices a travers une couche isolante enterree |
FR2955195B1 (fr) | 2010-01-14 | 2012-03-09 | Soitec Silicon On Insulator | Dispositif de comparaison de donnees dans une memoire adressable par contenu sur seoi |
FR2955203B1 (fr) | 2010-01-14 | 2012-03-23 | Soitec Silicon On Insulator | Cellule memoire dont le canal traverse une couche dielectrique enterree |
FR2957186B1 (fr) | 2010-03-08 | 2012-09-28 | Soitec Silicon On Insulator | Cellule memoire de type sram |
FR2957449B1 (fr) | 2010-03-11 | 2022-07-15 | S O I Tec Silicon On Insulator Tech | Micro-amplificateur de lecture pour memoire |
FR2958441B1 (fr) | 2010-04-02 | 2012-07-13 | Soitec Silicon On Insulator | Circuit pseudo-inverseur sur seoi |
EP2375442A1 (de) * | 2010-04-06 | 2011-10-12 | S.O.I.Tec Silicon on Insulator Technologies | Verfahren zur Herstellung eines Halbleitersubstrats |
EP2381470B1 (de) | 2010-04-22 | 2012-08-22 | Soitec | Halbleiterbauelement mit einem Feldeffekttransistor in einer Silizium-auf-Isolator-Struktur |
FR2999018B1 (fr) | 2012-11-30 | 2016-01-22 | Commissariat Energie Atomique | Ecran d'affichage a diodes electroluminescentes organiques |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3019430B2 (ja) * | 1991-01-21 | 2000-03-13 | ソニー株式会社 | 半導体集積回路装置 |
JPH0832040A (ja) * | 1994-07-14 | 1996-02-02 | Nec Corp | 半導体装置 |
JPH0888323A (ja) * | 1994-09-19 | 1996-04-02 | Nippondenso Co Ltd | 半導体集積回路装置 |
DE4441724A1 (de) * | 1994-11-23 | 1996-05-30 | Siemens Ag | SOI-Substrat |
-
1998
- 1998-06-15 FR FR9807495A patent/FR2779869B1/fr not_active Expired - Lifetime
-
1999
- 1999-06-14 DE DE69939540T patent/DE69939540D1/de not_active Expired - Lifetime
- 1999-06-14 EP EP99925075A patent/EP1095407B1/de not_active Expired - Lifetime
- 1999-06-14 JP JP2000555298A patent/JP4417559B2/ja not_active Expired - Fee Related
- 1999-06-14 WO PCT/FR1999/001403 patent/WO1999066559A1/fr active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
WO1999066559A1 (fr) | 1999-12-23 |
EP1095407A1 (de) | 2001-05-02 |
JP2002518849A (ja) | 2002-06-25 |
FR2779869B1 (fr) | 2003-05-16 |
FR2779869A1 (fr) | 1999-12-17 |
EP1095407B1 (de) | 2008-09-10 |
JP4417559B2 (ja) | 2010-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |