DE69936249D1 - Beförderung von in einer Vakuumpumpe oder in Leitungen gepumpten Gasen - Google Patents
Beförderung von in einer Vakuumpumpe oder in Leitungen gepumpten GasenInfo
- Publication number
- DE69936249D1 DE69936249D1 DE69936249T DE69936249T DE69936249D1 DE 69936249 D1 DE69936249 D1 DE 69936249D1 DE 69936249 T DE69936249 T DE 69936249T DE 69936249 T DE69936249 T DE 69936249T DE 69936249 D1 DE69936249 D1 DE 69936249D1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pump
- transport
- lines
- gases pumped
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/02—Energy absorbers; Noise absorbers
- F16L55/033—Noise absorbers
- F16L55/0331—Noise absorbers by inserting an elongated element in the pipe
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9813727 | 1998-11-02 | ||
FR9813727A FR2785361B1 (fr) | 1998-11-02 | 1998-11-02 | Transport de gaz pompes dans une pompe a vide ou des canalisations |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69936249D1 true DE69936249D1 (de) | 2007-07-19 |
DE69936249T2 DE69936249T2 (de) | 2008-01-31 |
Family
ID=9532255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69936249T Expired - Fee Related DE69936249T2 (de) | 1998-11-02 | 1999-10-21 | Beförderung von in einer Vakuumpumpe oder in Leitungen gepumpten Gasen |
Country Status (6)
Country | Link |
---|---|
US (1) | US6371737B1 (de) |
EP (1) | EP0999292B1 (de) |
JP (1) | JP2000140610A (de) |
AT (1) | ATE364099T1 (de) |
DE (1) | DE69936249T2 (de) |
FR (1) | FR2785361B1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2785361B1 (fr) * | 1998-11-02 | 2000-12-01 | Cit Alcatel | Transport de gaz pompes dans une pompe a vide ou des canalisations |
KR100479935B1 (ko) * | 2002-06-11 | 2005-03-30 | 주식회사 지에스티 | 이중 진공배관 및 그 제조방법 |
US20070020115A1 (en) * | 2005-07-01 | 2007-01-25 | The Boc Group, Inc. | Integrated pump apparatus for semiconductor processing |
CN101458017B (zh) * | 2007-12-11 | 2011-04-27 | Ls美创有限公司 | 降低噪声用连接管体及具有该连接管体的冷冻装置 |
JP4677041B1 (ja) * | 2009-12-24 | 2011-04-27 | 住友精化株式会社 | 二連型真空ポンプ装置、ガス精製システム、真空ポンプ排ガス振動抑制装置、および真空ポンプ排ガス振動抑制方法 |
KR101213780B1 (ko) * | 2011-01-04 | 2012-12-18 | 아딕센진공코리아 유한회사 | 에너지 절약형 사일런서 어셈블리와 이를 구비한 반도체 제조용 진공펌프 및 질소가스의 가열방법 |
FR3124235B1 (fr) * | 2021-07-20 | 2023-06-09 | Pfeiffer Vacuum | Pompe à vide |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3846574A (en) * | 1970-06-17 | 1974-11-05 | H Rordorf | Method of heating objects and device for the performance of the method |
FR2351064A1 (fr) * | 1976-05-12 | 1977-12-09 | France Etat | Procede et equipement d'elaboration de preformes pour fibres optiques |
US5063651A (en) * | 1978-02-21 | 1991-11-12 | Varian Associates, Inc. | Method of manufacturing a low emissivity liquid nitrogen dewar |
GB2040011A (en) * | 1979-01-08 | 1980-08-20 | Berry A | Thermally insulated piping systems |
DE3003798A1 (de) * | 1980-02-02 | 1981-08-13 | Wülfing und Hauck GmbH + Co KG, 3504 Kaufungen | Waermedaemm- und/oder schallschluckmatte |
JPS56156626A (en) * | 1980-05-06 | 1981-12-03 | Meidensha Electric Mfg Co Ltd | Vacuum breaker |
US4548257A (en) * | 1982-02-23 | 1985-10-22 | Williamson William R | Bayonet tube heat exchanger |
US4565157A (en) * | 1983-03-29 | 1986-01-21 | Genus, Inc. | Method and apparatus for deposition of tungsten silicides |
EP0409287B1 (de) * | 1987-05-15 | 1994-04-06 | Leybold Aktiengesellschaft | Vakuumpumpe mit Schöpfraum |
SE464126B (sv) * | 1988-09-05 | 1991-03-11 | Profor Ab | Fyllroer vid foerpackningsmaskin |
US6068784A (en) * | 1989-10-03 | 2000-05-30 | Applied Materials, Inc. | Process used in an RF coupled plasma reactor |
JPH0712291A (ja) * | 1993-06-23 | 1995-01-17 | Matsushita Electric Ind Co Ltd | 防音断熱材及びその製造方法 |
DE69630927T2 (de) * | 1995-09-07 | 2004-05-19 | The Perkin-Elmer Corp., Norwalk | Wärmedämmung für Flüssiggasbehälter |
US5556473A (en) * | 1995-10-27 | 1996-09-17 | Specialty Coating Systems, Inc. | Parylene deposition apparatus including dry vacuum pump system and downstream cold trap |
US5817575A (en) * | 1996-01-30 | 1998-10-06 | Advanced Micro Devices, Inc. | Prevention of clogging in CVD apparatus |
US5674574A (en) * | 1996-05-20 | 1997-10-07 | Micron Technology, Inc. | Vapor delivery system for solid precursors and method regarding same |
FR2785361B1 (fr) * | 1998-11-02 | 2000-12-01 | Cit Alcatel | Transport de gaz pompes dans une pompe a vide ou des canalisations |
-
1998
- 1998-11-02 FR FR9813727A patent/FR2785361B1/fr not_active Expired - Fee Related
-
1999
- 1999-10-21 EP EP99402603A patent/EP0999292B1/de not_active Expired - Lifetime
- 1999-10-21 DE DE69936249T patent/DE69936249T2/de not_active Expired - Fee Related
- 1999-10-21 AT AT99402603T patent/ATE364099T1/de not_active IP Right Cessation
- 1999-10-26 JP JP11303274A patent/JP2000140610A/ja active Pending
- 1999-11-01 US US09/431,212 patent/US6371737B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2785361A1 (fr) | 2000-05-05 |
FR2785361B1 (fr) | 2000-12-01 |
DE69936249T2 (de) | 2008-01-31 |
EP0999292A1 (de) | 2000-05-10 |
ATE364099T1 (de) | 2007-06-15 |
US6371737B1 (en) | 2002-04-16 |
JP2000140610A (ja) | 2000-05-23 |
EP0999292B1 (de) | 2007-06-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |