DE69917943D1 - Halbleiter-drucksensor - Google Patents
Halbleiter-drucksensorInfo
- Publication number
- DE69917943D1 DE69917943D1 DE69917943T DE69917943T DE69917943D1 DE 69917943 D1 DE69917943 D1 DE 69917943D1 DE 69917943 T DE69917943 T DE 69917943T DE 69917943 T DE69917943 T DE 69917943T DE 69917943 D1 DE69917943 D1 DE 69917943D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- semiconductor pressure
- semiconductor
- sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Aerials With Secondary Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1999/000643 WO2000047969A1 (en) | 1999-02-15 | 1999-02-15 | Semiconductor pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69917943D1 true DE69917943D1 (de) | 2004-07-15 |
DE69917943T2 DE69917943T2 (de) | 2005-06-23 |
Family
ID=14234928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69917943T Expired - Lifetime DE69917943T2 (de) | 1999-02-15 | 1999-02-15 | Halbleiter-drucksensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US6789430B1 (de) |
EP (1) | EP1152232B1 (de) |
JP (1) | JP3455235B2 (de) |
CN (1) | CN1334979A (de) |
DE (1) | DE69917943T2 (de) |
WO (1) | WO2000047969A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10206464A1 (de) * | 2002-02-16 | 2003-08-28 | Micronas Gmbh | Verfahren zur Herstellung einer Sensor- oder Aktuatoranordnung sowie Sensor- oder Aktuatoranordnung |
US6790699B2 (en) | 2002-07-10 | 2004-09-14 | Robert Bosch Gmbh | Method for manufacturing a semiconductor device |
US7210362B2 (en) * | 2002-11-05 | 2007-05-01 | Tanita Corporation | Diaphragm type load detection sensor, load detection unit and electronic scale using same |
US7211873B2 (en) * | 2003-09-24 | 2007-05-01 | Denso Corporation | Sensor device having thin membrane and method of manufacturing the same |
US20060030062A1 (en) * | 2004-08-05 | 2006-02-09 | Jun He | Micromachined wafer strain gauge |
JP5670005B2 (ja) * | 2006-03-06 | 2015-02-18 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | 半導体装置及びその製造方法 |
TWI416739B (zh) * | 2006-05-01 | 2013-11-21 | Tanita Seisakusho Kk | 半導體型應變檢測器及其製造方法 |
WO2011010381A1 (ja) * | 2009-07-23 | 2011-01-27 | イビデン株式会社 | 半導体圧力センサ及びその製造方法 |
US8215177B2 (en) * | 2009-11-16 | 2012-07-10 | Freescale Semiconductor, Inc. | Apparatus and methods for applying stress-induced offset compensation in sensor devices |
EP2485028B1 (de) | 2011-02-07 | 2015-04-01 | ELMOS Semiconductor AG | Druckempfindliche Verstärkerstufe |
US8813580B2 (en) * | 2012-03-05 | 2014-08-26 | Honeywell International Inc. | Apparatus and processes for silicon on insulator MEMS pressure sensors |
JP2013229356A (ja) | 2012-04-24 | 2013-11-07 | Mitsubishi Electric Corp | Soiウェハおよびその製造方法、並びにmemsデバイス |
JP5845201B2 (ja) * | 2013-03-21 | 2016-01-20 | 株式会社東芝 | 半導体装置および歪監視装置 |
EP3056865B1 (de) * | 2015-02-13 | 2019-09-04 | Sensirion AG | Sensorenanordnung |
CN116235022A (zh) * | 2020-09-29 | 2023-06-06 | 森萨塔科技公司 | 结隔离半导体应变计 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4975390A (en) * | 1986-12-18 | 1990-12-04 | Nippondenso Co. Ltd. | Method of fabricating a semiconductor pressure sensor |
JPH03200335A (ja) * | 1989-12-27 | 1991-09-02 | Mitsubishi Electric Corp | 半導体装置 |
JPH03238875A (ja) * | 1990-02-15 | 1991-10-24 | Mitsubishi Electric Corp | 半導体圧力センサ |
EP0567075B1 (de) * | 1992-04-22 | 2001-10-24 | Denso Corporation | Verfahren zur Herstellung einer Halbleiteranordnung |
JPH06216137A (ja) * | 1993-01-20 | 1994-08-05 | Matsushita Electron Corp | 半導体装置およびその製造方法 |
US5445975A (en) | 1994-03-07 | 1995-08-29 | Advanced Micro Devices, Inc. | Semiconductor wafer with enhanced pre-process denudation and process-induced gettering |
JP3489309B2 (ja) * | 1995-12-27 | 2004-01-19 | 株式会社デンソー | 半導体力学量センサの製造方法および異方性エッチングマスク |
DE19903380B4 (de) * | 1998-02-02 | 2007-10-18 | Denso Corp., Kariya | Halbleitersensoren für eine physikalische Grösse und ihre Herstellungsverfahren |
-
1999
- 1999-02-15 WO PCT/JP1999/000643 patent/WO2000047969A1/ja active IP Right Grant
- 1999-02-15 JP JP55393099A patent/JP3455235B2/ja not_active Expired - Fee Related
- 1999-02-15 DE DE69917943T patent/DE69917943T2/de not_active Expired - Lifetime
- 1999-02-15 EP EP99902908A patent/EP1152232B1/de not_active Expired - Lifetime
- 1999-02-15 US US09/913,779 patent/US6789430B1/en not_active Expired - Fee Related
- 1999-12-15 CN CN99816188.8A patent/CN1334979A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2000047969A1 (en) | 2000-08-17 |
EP1152232B1 (de) | 2004-06-09 |
EP1152232A4 (de) | 2002-03-27 |
EP1152232A1 (de) | 2001-11-07 |
US6789430B1 (en) | 2004-09-14 |
CN1334979A (zh) | 2002-02-06 |
DE69917943T2 (de) | 2005-06-23 |
JP3455235B2 (ja) | 2003-10-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |